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71. 发明申请

WO2012072146A1 COATED X-RAY WINDOW 审中-公开
标题翻译：涂层X射线窗口
公开(公告)号：WO2012072146A1
公开(公告)日：2012-06-07
申请号：PCT/EP2010/068843
申请日：2010-12-03
申请人： EXCILLUM AB , HEMBERG, Oscar , TUOHIMAA, Tomi
发明人： HEMBERG, Oscar , TUOHIMAA, Tomi
IPC分类号： H01J35/18
CPC分类号： H01J35/18 , H01J35/00 , H01J35/02 , H01J35/025 , H01J35/08 , H01J2235/082 , H01J2235/168 , H01J2235/183 , H05G1/08
摘要： An X-ray window comprises a primary (22) and a secondary (70) window element. In order to evaporate debris by ohmic heating, current flows through the secondary (upstream) window element. Meanwhile, electric charge originating from electron irradiation and/or depositing charged particles is to be drained off the window element. To prevent large debris particles from short-circuiting the window element and changing the desired heating pattern, the current for heating the window element flows through a layer (72) which is insulated from the charge-drain layer (76).
摘要翻译： X射线窗口包括初级（22）和次级（70）窗口元件。为了通过欧姆加热来蒸发碎片，电流流过次级（上游）窗口元件。同时，从电子照射和/或沉积带电粒子的电荷被排出窗口元件。为了防止大的碎屑颗粒使窗元件短路并改变期望的加热模式，用于加热窗口元件的电流流过与电荷 - 漏极层（76）绝缘的层（72）。

72. 发明专利

SE2050449A1 Cyclic heating of x-ray window 未知
公开(公告)号：SE2050449A1
公开(公告)日：2020-04-21
申请号：SE2050449
申请日：2020-04-21
申请人： EXCILLUM AB
发明人： TAKMAN PER
IPC分类号： H01J35/18
摘要： A method for controlling an X-ray source comprising a self-cleaning X-ray window arrangement comprising the steps of providing a target (110, M), providing an electron beam (116, e ) directed towards the target such that the electron beam interacts with the target to generate X-ray radiation (118, X), provide an X-ray transparent window (106) arranged for separating an ambient pressure region from a reduced pressure region (102, 410) wherein said X-ray transparent window comprises heating means (424), and intermittently activating said heating means.

73. 发明申请

WO2020127201A1 ELECTRON COLLECTOR WITH OBLIQUE IMPACT PORTION 审中-公开
公开(公告)号：WO2020127201A1
公开(公告)日：2020-06-25
申请号：PCT/EP2019/085559
申请日：2019-12-17
申请人： EXCILLUM AB
发明人： TUOHIMAA, Tomi , LUNDSTRÖM, Ulf , HANSSON, Björn
IPC分类号： H01J35/02 , H05G1/52
摘要： An X-ray source (100) is disclosed, comprising a liquid target source (110) configured to provide a liquid target (J) in an interaction region (I) of the X-ray source, an electron source (120) adapted to provide an electron beam (122) directed towards the interaction region, such that the electron beam interacts with the liquid target to generate X-ray radiation, and an electron collector (130) arranged at a distance downstream of the interaction region, as seen along a travel direction of the electron beam. The electron collector comprises an impact portion (132) configured to absorb electrons of the electron beam impinging thereon, and the impact portion is arranged so as to be oblique with respect to the travel direction of the electron beam at the impact portion.

74. 发明申请

WO2019234217A1 METHOD FOR CONTROLLING AN X-RAY SOURCE 审中-公开
公开(公告)号：WO2019234217A1
公开(公告)日：2019-12-12
申请号：PCT/EP2019/064938
申请日：2019-06-07
申请人： EXCILLUM AB
发明人： TAKMAN, Per , LUNDSTRÖM, Ulf
IPC分类号： H05G1/46 , H05G1/28 , H05G1/26 , H05G1/52
摘要： The present inventive concept relates to a method for controlling an X-ray source configured to emit, from an X-ray spot on a target, X-ray radiation generated by an interaction between an electron beam and the target, wherein the X-ray spot is determined by the field of view of an X-ray optical system of the X-ray source. The method comprises providing the target, providing the electron beam forming an electron spot on the target and interacting with the target to generate X-ray radiation, and adjusting a width and total power of the electron beam such that a maximum of the power density profile in the electron spot is below a predetermined limit, and such that a total power delivered to the target in the X-ray spot is increased.

75. 发明申请

WO2019106145A1 X-RAY SOURCE AND METHOD FOR GENERATING X-RAY RADIATION 审中-公开
公开(公告)号：WO2019106145A1
公开(公告)日：2019-06-06
申请号：PCT/EP2018/083138
申请日：2018-11-30
申请人： EXCILLUM AB
发明人： HANSSON, Björn , TAKMAN, Per , WANG, Yuli , TANAKA, Shiho
IPC分类号： H01J35/08 , H01J35/14
摘要： The present inventive concept relates to an X-ray source comprising: a liquid target source configured to provide a liquid target moving along a flow axis; an electron source configured to provide an electron beam; and a liquid target shaper configured to shape the liquid target to comprise a non-circular cross section with respect to the 5 flow axis, wherein the non-circular cross section has a first width along a first axis and a second width along a second axis, wherein the first width is shorter than the second width, and wherein the liquid target comprises an impact portion being intersected by the first axis; wherein the x-ray source is configured to direct the electron beam towards the impact portion such that the electron beam interacts with the liquid target within the impact portion to generate X-ray radiation.

76. 发明申请

WO2018184904A1 VAPOUR MONITORING 审中-公开
公开(公告)号：WO2018184904A1
公开(公告)日：2018-10-11
申请号：PCT/EP2018/057715
申请日：2018-03-27
申请人： EXCILLUM AB
发明人： TAKMAN, Per , TUOHIMAA, Tomi
IPC分类号： H01J35/20 , H01J35/30 , H01J35/04
摘要： A method for generating X-ray radiation is disclosed. The method comprises providing (10) a liquid target (J) in a chamber (120), directing (20) an electron beam (132) towards the liquid target such that the electron beam interacts with the liquid target to generated X-ray radiation (134), estimating (30) a number of particles produced from the interaction between the electron beam and the liquid target by measuring a number of positively charged particles in the chamber and eliminating a contribution from scattered electrons to the estimated number of particles, and controlling (40) the electron beam, and/or a temperature in a region of the liquid target in which the electron beam interacts with the target, such that the estimated number of particles is below a predetermined limit. A corresponding X-ray source is also disclosed.

77. 发明申请

WO2018109176A1 SEMICONDUCTOR X-RAY TARGET 审中-公开
公开(公告)号：WO2018109176A1
公开(公告)日：2018-06-21
申请号：PCT/EP2017/083081
申请日：2017-12-15
申请人： EXCILLUM AB
发明人： HANSSON, Björn , SOFIIENKO, Andrii , LUNDSTRÖM, Ulf
IPC分类号： H01J35/08
摘要： A solid X-ray target (100) for generating X-ray radiation is disclosed. The X-ray target comprises at least one material (101) selected from a list including trivalent elements; and at least one material (102) selected from a list including pentavalent elements, wherein a first one of said materials is capable of generating the X-ray radiation upon interaction with an electron beam, and a second one of said materials forms a compound with the first one of said materials. An X-ray source comprising such an X-ray target and an electron source (200) is also disclosed.

78. 发明申请

WO2017220455A1 X-RAY SOURCE WITH IONISATION TOOL 审中-公开
标题翻译： X射线源与离子工具
公开(公告)号：WO2017220455A1
公开(公告)日：2017-12-28
申请号：PCT/EP2017/064857
申请日：2017-06-18
申请人： EXCILLUM AB
发明人： TUOHIMAA, Tomi
IPC分类号： H01J35/20
摘要： An X-ray source (1) and a corresponding method for generating X-ray radiation are disclosed. The X-ray source comprises a chamber (110) comprising an interaction region (I), and a first electron source (130) operable to emit a first electron beam, comprising electrons of a first energy, towards the interaction region such that the first electron beam interacts with a target (120) to generate X-ray radiation (150). The X-ray source further comprises a second electron source (160) adapted to be independently operated to emit a second electron beam comprising electrons of a second energy for ionising particles in the chamber, and an ion collection tool (170) that is adapted to remove the ionised particles from the chamber by means of an electromagnetic field (E). By ionising particles and preventing them from moving freely in the chamber, problems related to contamination of the chamber may be mitigated.
摘要翻译：公开了用于产生X射线辐射的X射线源（1）和相应的方法。该X射线源包括包含相互作用区域（I）的腔室（110）以及可操作以朝向相互作用区域发射包括第一能量的电子的第一电子束的第一电子源（130），使得第一电子电子束与目标（120）相互作用以产生X射线辐射（150）。该X射线源还包括第二电子源（160）和离子收集工具（170），该第二电子源适于独立地操作以发射包括第二能量的电子的第二电子束以用于离子化腔室中的粒子，该离子收集工具适于通过电磁场（E）从腔室中去除电离的颗粒。通过电离粒子并防止它们在腔室内自由移动，可以减轻与腔室污染有关的问题。

79. 发明申请

WO2013185829A1 LIMITING MIGRATION OF TARGET MATERIAL 审中-公开
标题翻译：限制目标材料的移动
公开(公告)号：WO2013185829A1
公开(公告)日：2013-12-19
申请号：PCT/EP2012/061352
申请日：2012-06-14
申请人： EXCILLUM AB , HEMBERG, Oscar , TUOHIMAA, Tomi , TAKMAN, Per
发明人： HEMBERG, Oscar , TUOHIMAA, Tomi , TAKMAN, Per
IPC分类号： G21K5/04 , H01J35/04
CPC分类号： H01J29/62 , G21K1/08 , G21K5/04 , H01J35/04 , H01J35/08 , H01J35/14 , H01J2235/082 , H01J2235/16
摘要： In an electron irradiation system (1), a gas-tight housing (60) encloses a cathode region (10) and an irradiation region (20), which communicate through at least an aperture (22). In the cathode region, there is arranged a high-voltage cathode (11) for emitting an electron beam. In the irradiation region, there is an irradiation site (21) arranged to accommodate a stationary or moving object to be irradiated. The migration of cathode-degrading debris is limited by means of an electric field (E) designed to prevent positively charged particles from entering the cathode region via the aperture. The invention can be embodied with an axial electric field, which realizes an energy threshold, or a transversal field which deflects charged particles away from trajectories leading into the cathode region.
摘要翻译：在电子照射系统（1）中，气密壳体（60）包围通过至少一个孔（22）连通的阴极区域（10）和照射区域（20）。在阴极区域设置有用于发射电子束的高电压阴极（11）。在照射区域中，设有用于容纳被照射的静止或移动物体的照射部位（21）。阴极降解碎屑的迁移通过设计成防止带正电荷的颗粒经由孔径进入阴极区域的电场（E）来限制。本发明可以用实现能量阈值的轴向电场或使带电粒子偏离导入阴极区域的轨迹的横向场来实现。

80. 发明专利

AU2020269923A1 X-ray source with an electromagnetic pump 未知
公开(公告)号：AU2020269923A1
公开(公告)日：2021-12-23
申请号：AU2020269923
申请日：2020-05-07
申请人： EXCILLUM AB
发明人： HANSSON BJÖRN , TAKMAN PER , LUNDSTRÖM ULF , TUOHIMAA TOMI
IPC分类号： F04B17/04 , F04B35/04
摘要： A liquid metal jet X-ray source comprising an electromagnetic pump for pumping the liquid metal is disclosed. The electromagnetic pump comprises a core having a core diameter and an outer yoke with a thickness of at least 20% of the core diameter. Preferably, the thickness of the outer yoke is at least 20% of the core diameter plus 6% of a radial distance between an outside of the core and an inside of the yoke.

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