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    • 72. 发明专利
    • Optical encoder
    • 光学编码器
    • JP2014153360A
    • 2014-08-25
    • JP2014019238
    • 2014-02-04
    • Dr Johannes Heidenhain Gmbhドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングDr. Johannes Heidenhain Gesellschaft Mit Beschrankter Haftung
    • SANDIG KARSTEN
    • G01D5/38
    • G01B11/14G01D5/266G01D5/268G01D5/38
    • PROBLEM TO BE SOLVED: To provide an optical encoder that has a passive optical fiber scanning head enabling a position measurement with a high resolving power.SOLUTION: In an optical encoder for generating a plurality of phase difference scanning signals relating to a relative position of a reflection type linear scale 10 movable in at least one measurement direction with respect to an optical fiber scanning head 20, within the optical fiber scanning head 20, a scan plate 21 is arranged in front of an end of a reflection type linear scale 10 side of an optical fiber 30. The phase difference scanning signal is encoded according to a wavelength. One beam flux incident onto the scan plate 21 is divided into at least two partial beam fluxes, and the reflection type linear scale 10 is irradiated with these partial beam fluxes. Then, these partial beam fluxes are converged once again for generating the phase difference scanning signal, and interfere with each other. These partial beam fluxes travel on a different optical path length during the division and the re-convergence.
    • 要解决的问题:提供一种光学编码器,其具有能够以高分辨能力进行位置测量的无源光纤扫描头。解决方案:在用于产生多个相位差扫描信号的光学编码器中,所述相位差扫描信号与 相对于光纤扫描头20在至少一个测量方向可移动的反射型线性刻度10在光纤扫描头20内,扫描板21设置在反射型线性刻度10的端部的前方 相位差扫描信号根据波长进行编码。 入射到扫描板21上的一个光束被分成至少两个部分光束,并且用这些部分光束照射反射型线性标尺10。 然后,这些部分光束通量再次会聚,以产生相位差扫描信号,并且彼此干涉。 这些部分光束在分割和重新收敛期间在不同的光路长度上行进。
    • 75. 发明专利
    • Interference type interval measurement device
    • 干扰型间隔测量装置
    • JP2014002139A
    • 2014-01-09
    • JP2013111986
    • 2013-05-28
    • Dr Johannes Heidenhain Gmbhドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングDr. Johannes Heidenhain Gesellschaft Mit Beschrankter Haftung
    • HUBER WALTERRALF JERGERWOLFGANG HOLZAPFEL
    • G01B11/14G01B9/02G01D5/38
    • G01B9/02049G01B9/02018G01B9/02022G01B9/02061G01B11/026G01B2290/30
    • PROBLEM TO BE SOLVED: To provide an interference type interval measurement device that is excellent in measurement accuracy of a measured interval completely not depending on a wavelength of a light source to be used, in particular, and that does not cause a measurement error when there is a deviation between an actual wavelength and a nominal wavelength even if inclination of a measurement reflection body takes place.SOLUTION: A present device includes a measurement reflection body, a light source, a division component, a coupling component and a detector array. The division component divides a light beam emitted from the light source into at least one measurement light beam and at least one reference light beam, and the measurement light beam hits the measurement reflection body at least twice further in a light path. The measurement light beam and the reference light beam arrive at the coupling component and interfere with each other through superposition. The detector array can generate at least one interval signal relating to an interval in a measurement direction between the measurement reflection body and one or more different components of the present device from the interfered measurement light beam and reference light beam. The division component is configured as a division grating, and the light source emits a light beam in a direction of the division grating in parallel with respect to a surface of the measurement reflection body. The division grating is disposed vertically with respect to the measurement reflection body.
    • 要解决的问题:提供一种干涉型间隔测量装置,其特别是完全不依赖于所使用的光源的波长的测量间隔的测量精度优异,并且在那里不会引起测量误差 即使发生测量反射体的倾斜,实际波长和标称波长之间的偏差。本发明的装置包括测量反射体,光源,分割分量,耦合分量和检测器阵列。 分割部分将从光源发射的光束分成至少一个测量光束和至少一个参考光束,并且测量光束在光路中进一步击中测量反射体至少两次。 测量光束和参考光束到达耦合分量并通过叠加相互干扰。 检测器阵列可以产生与测量反射体与本装置的一个或多个不同部件之间的测量方向上的间隔与受干扰的测量光束和参考光束有关的至少一个间隔信号。 分割部件被配置为分割光栅,并且光源相对于测量反射体的表面平行地沿着分割光栅的方向发射光束。 分割光栅相对于测量反射体垂直设置。
    • 79. 发明专利
    • Optical position measuring apparatus
    • 光学位置测量装置
    • JP2012127939A
    • 2012-07-05
    • JP2011231342
    • 2011-10-21
    • Dr Johannes Heidenhain Gmbhドクトル・ヨハネス・ハイデンハイン・ゲーエムベーハー
    • HOLZAPFEL WOLFGANG
    • G01D5/38
    • G01D5/38G01D5/34715
    • PROBLEM TO BE SOLVED: To provide an optical position measuring apparatus which generates scan detection signals to which polarization coding is performed and whose phases are shifted, and is constituted as simply as possible.SOLUTION: The present invention relates to an optical position measuring apparatus for detecting a relative position between a reference scale and a scan detection plate which are movably arranged to be mutually relative along at lest one measuring direction. A light flux emitted from a light source is divided into at least two spectroscopic light fluxes for orienting polarization states at a right angle between each other by a first lattice. The spectroscopic light fluxes are integrated again to become one synthetic light flux, and a plurality of scan detection signals relevant to movement are generated in a detection unit from the synthetic light flux. Polarization means is arranged on light paths of the spectroscopic light fluxes, a polarization action of the polarization means to the spectroscopic light fluxes to be made incident on the light paths is periodically updated by using a polarization period along a degree of freedom of a motion of the reference scale, and the polarization period of the polarization means at the time is larger than a scale period of the first lattice.
    • 要解决的问题:提供一种光学位置测量装置,其产生执行偏振编码并且其相位偏移的扫描检测信号,并且尽可能简单地构成。 光学位置测量装置技术领域本发明涉及一种用于检测参考标尺和扫描检测板之间的相对位置的光学位置测量装置,其可移动地布置成沿着至少一个测量方向相互相对。 从光源发射的光束被分成至少两个分光光束,用于以彼此之间的直角以第一晶格取向偏振状态。 分光光束被再次积分成为一个合成光通量,并且在合成光通量的检测单元中产生与运动相关的多个扫描检测信号。 偏振装置设置在分光光束的光路上,通过使用沿着运动自由度的偏振周期来周期性地更新偏振装置对要入射到光路上的分光光束的偏振作用 参考标度和偏振装置的偏振周期大于第一格子的刻度周期。 版权所有(C)2012,JPO&INPIT
    • 80. 发明专利
    • Optical angle-measuring device
    • 光学角度测量装置
    • JP2012098287A
    • 2012-05-24
    • JP2011241359
    • 2011-11-02
    • Dr Johannes Heidenhain Gmbhドクトル・ヨハネス・ハイデンハイン・ゲーエムベーハー
    • HOLZAPFEL WOLFGANG
    • G01D5/38G01D5/347
    • G01D5/3473G01D5/38
    • PROBLEM TO BE SOLVED: To provide an optical angle-measuring device for detecting relative movement between at least one scanning detection grid and at least one scale plate that includes a measuring scale.SOLUTION: The scanning detection grid is configured as a linear scanning detection grid. A scale plate includes first and second combinatorial radial annular grids as measuring scale and has a mirror. As a result, an incident beam is divided into two spectral beams at the scanning detection grid. The spectral beams move toward the first combinatorial radial annular grid and are diffracted there. The diffracted spectral beams move toward the mirror and are reflected toward the second combinatorial radial annular grid there. The spectral beams keep moving toward the second combinatorial radial annular grid and are diffracted there. The diffracted beams move toward the scanning detection grid and are overlaid there.
    • 要解决的问题:提供一种光学角度测量装置,用于检测至少一个扫描检测网格与包括测量刻度的至少一个刻度板之间的相对运动。

      解决方案:扫描检测网格配置为线性扫描检测网格。 刻度盘包括作为测量刻度尺的第一和第二组合径向环形栅格并具有反射镜。 结果,入射光束在扫描检测网格处分成两束光束。 光谱束朝向第一组合径向环形栅格移动并在那里衍射。 衍射光束束朝向反射镜移动,并朝向第二组合径向环形栅格反射。 光束保持向第二组合径向环形栅格移动并在那里衍射。 衍射光束朝向扫描检测网格移动并被覆盖在那里。 版权所有(C)2012,JPO&INPIT