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61. 发明授权

US12125678B2 Filter unit, substrate treating apparatus including the same, and substrate treating method 有权
公开(公告)号：US12125678B2
公开(公告)日：2024-10-22
申请号：US16880221
申请日：2020-05-21
申请人： SEMES CO., LTD.
发明人： Ogsen Galstyan , Hyo Seong Seong , Byeung Geon Jeon , Jong Hwan An
IPC分类号： H01J3/32 , H01J37/32 , H01L21/683 , H03H7/01 , H01L21/67
CPC分类号： H01J37/32174 , H01J37/32724 , H01L21/6833 , H03H7/0115 , H03H7/0153 , H01J2237/334 , H01L21/67069
摘要： A substrate treating apparatus is disclosed. The substrate treating apparatus may include a chamber having a treating space defined therein, a support unit for supporting the substrate in the treating space, a heater power source for applying electric power to a heater in the support unit, a high-frequency power source for applying high-frequency power to a lower electrode in the support unit, and a filter unit installed at a line for connecting the heater power source with the heater to prevent high-frequency inflow. The filter unit may include a housing, one or more coils in the housing, and an adjustment member disposed between the housing and the coil. The adjustment member may be made of a non-magnetic material. The adjustment member may be spaced from the coil at a predefined spacing, and spaced apart from an inner wall of the housing or in contact with the housing inner wall.

62. 发明授权

US11515122B2 System and methods for VHF plasma processing 有权
公开(公告)号：US11515122B2
公开(公告)日：2022-11-29
申请号：US16357731
申请日：2019-03-19
申请人： Tokyo Electron Limited
发明人： Barton Lane
IPC分类号： H01J3/32 , H01L21/67 , H01J37/32
摘要： This disclosure relates to a plasma processing system for VHF plasma processing using a transmission antenna designed to enable a resonant VHF standing wave inside a plasma process chamber used to manufacture semiconductor devices. The system includes a transmission element capable of being electromagnetically coupled to incoming power lines connected to a power source. The transmission element, power transmission lines, and power source form a resonant circuit capable of enabling a VHF standing wave on the transmission element. The transmission element is folded back on itself to reduce the footprint of the antenna, such that the transmission element(s) can be located inside the plasma process chamber. The transmission antenna has three portions, with the first being electromagnetically coupled to the power transmission line, the second being coupled to plasma, and the third being a folded portion that reduces the transmission element's footprint.

63. 发明授权

US09550280B1 Tool for installing and removing threaded camera lenses 有权
标题翻译：安装和拆卸螺纹相机镜头的工具
公开(公告)号：US09550280B1
公开(公告)日：2017-01-24
申请号：US13431475
申请日：2012-03-27
申请人： Robert Mishler , Robert Gainer , Laurens Nunnink
发明人： Robert Mishler , Robert Gainer , Laurens Nunnink
IPC分类号： B25B9/02 , B25B13/50 , H01J3/32 , G03B17/56
CPC分类号： B25B9/02 , B25B13/06 , B25B13/48 , B25B13/50 , B25B13/5008 , G03B17/56 , H01J3/32
摘要： This invention provides a tool for tightening and loosening lenses with respect to camera bodies. The tool includes a body that defines a cavity that is slightly larger in diameter than the sidewalls of the lens adjacent the lens face. Within the cavity is a thin, high-friction, elastomeric material that resides between the edges of the lens when the cavity is pressurably engaged over the lens face. The material frictionally couples the tool body to the lens face and adjacent side walls, thereby allowing a predetermined level of torque to be applied to tighten or loosen the lens. The tool can be adapted for attachment to a handle, such as a torque wrench or can include a handle specifically adapted/contoured for grasping by a user's hand.
摘要翻译：本发明提供了一种用于相对于照相机体收紧和松开透镜的工具。该工具包括一个主体，该主体限定了一个直径略大于邻近透镜面的透镜侧壁的空腔。在空腔内部是薄的，高摩擦的弹性体材料，当空腔被加压地接合在透镜面上时，它们位于透镜的边缘之间。该材料将工具主体摩擦地连接到透镜面和相邻的侧壁上，从而允许施加预定水平的扭矩以拧紧或松开透镜。工具可以适于附接到手柄，例如扭矩扳手，或者可以包括特别适于/轮廓以由用户抓住的手柄的手柄。

64. 发明授权

US08896191B2 Mercury-free discharge lamp 有权
标题翻译：无汞放电灯
公开(公告)号：US08896191B2
公开(公告)日：2014-11-25
申请号：US13179596
申请日：2011-07-11
申请人： Philip E. Moskowitz
发明人： Philip E. Moskowitz
IPC分类号： H01J1/02 , H01J7/24 , H01J61/52 , H01K1/58 , H01J1/50 , H01J3/20 , H01J3/32 , H01J23/10 , H01J29/76 , H01J65/04
CPC分类号： H01J65/048
摘要： The present invention provides a low pressure metal halide fluorescent lamp. The metal halide fluorescent lamp may have an oblate spheroid cavity discharge vessel filled with an ionizable metal halide surrounding an exciter housing. An exciter within the exciter housing may drive the ionizable metal halide in an inductively coupled electrode-less manner. One or more embodiments may include one or more heat spreaders and/or thermal transfer pipes for transferring heat from the exciter to a surface of the oblate discharge vessel.
摘要翻译：本发明提供一种低压金属卤化物荧光灯。金属卤化物荧光灯可以具有填充有围绕励磁机壳体的可电离金属卤化物的扁圆球体放电容器。激励器壳体内的激励器可以以电感耦合无电极的方式驱动可电离的金属卤化物。一个或多个实施例可以包括一个或多个散热器和/或热传递管，用于将热量从激励器传递到扁平放电容器的表面。

65. 发明授权

US5132544A System for irradiating a surface with atomic and molecular ions using two dimensional magnetic scanning 失效
标题翻译：用原子和分子离子进行二维磁场扫描的表面曝光系统
公开(公告)号：US5132544A
公开(公告)日：1992-07-21
申请号：US575498
申请日：1990-08-29
申请人： Hilton F. Glavish
发明人： Hilton F. Glavish
IPC分类号： C23C14/48 , G21K1/093 , H01F3/02 , H01F7/20 , H01J3/32 , H01J29/76 , H01J37/147 , H01J37/317 , H01L21/265
CPC分类号： G21K1/093 , H01F3/02 , H01F7/202 , H01J29/76 , H01J3/32 , H01J37/147 , H01J37/1475 , H01J37/3171
摘要： System for irradiating the surface of a substrate with atomic or molecular ions by rapid scanning of a beam in two dimensions over the surface of the substrate. A scanning system is shown for deflecting the beam in two dimensions relative to a reference axis and a magnetic ion beam transport system following the scanning system is arranged to receive the beam from the scanning system over the range of two dimensional deflections of the scanning system and constructed to impose magnetic field conditions along the beam path of characteristics selected to reorient the two-dimensionally deflected beam to a direction having a predetermined desired relationship with the axis in the two dimensions at the desired instantaneous two dimensional displacement of the beam from the axis, to produce the desired scan of the beam over the substrate. One scanning system includes sequential first and second time-variable-field magnetic scanners, the first scanner having a magnetic gap of volume smaller than that of the second scanner and constructed to scan the beam more rapidly than the second scanner. In another system, the scanners are superposed. The magnetic ion beam transport system presently preferred is a system producing a sequence of three or more quadrupole fields, implemented by a sequence of quadrupoles. Alternate structures are disclosed. The system is capable of depositing atomic or molecular ions with a desired angular and positional uniformity over a wide range of perveance including perveance above 0.02/M[amu].sup.1/2 (mA//keV.sup.3/2) with a constant, adjustable spot size and small beam spread.

66. 发明授权

US3506870A High power magnetically beamed vacuum tube with low hum 失效
标题翻译：高功率磁光束管真空管
公开(公告)号：US3506870A
公开(公告)日：1970-04-14
申请号：US3506870D
申请日：1968-03-27
申请人： MACHLETT LAB INC
发明人： SINGER BARRY M , JOHNSON CARL T
IPC分类号： H01J19/34 , H01J21/18 , H01J1/50 , H01J3/20 , H01J3/32 , H01J23/10 , H01J29/76
CPC分类号： H01J21/18 , H01J19/34 , H01J2893/0003

67. 发明专利

CA2152974C TOOL FOR REMOVING BROKEN LIGHT BULBS 未知
公开(公告)号：CA2152974C
公开(公告)日：2001-03-27
申请号：CA2152974
申请日：1995-06-29
申请人： SOCKET BUTLER INC
发明人： BROWN ROGER GEORGE , ZUPO ALAN
IPC分类号： H01J3/32 , H01K3/32
摘要： A tool for removing a broken incandescent light bulb has a handle with a head projecting therefrom and preferably a resilient gripping member which snugly enshrouds the head, to frictionally engage an inner wall of the base of a broken light bulb such that when the tool is rotated the base can be dislodged from a light bulb socket. In a preferred embodiment a collar with stiffening ribs surrounds the tool, positioned to protect the user's hand from falling shards of glass. In a further preferred embodiment an accessory tool having one or more heads of different sizes is adapted to fit within a hollow end of the handle.

68. 发明专利

DE69123105T2 未知
公开(公告)号：DE69123105T2
公开(公告)日：1997-03-20
申请号：DE69123105
申请日：1991-08-26
申请人： NISSIN ELECTRIC CO LTD
发明人： GLAVISH HILTON F
IPC分类号： C23C14/48 , G21K1/093 , H01F3/02 , H01F7/20 , H01J3/32 , H01J29/76 , H01J37/147 , H01J37/317 , H01L21/265
摘要： System for irradiating the surface of a substrate with atomic or molecular ions by rapid scanning of a beam in two dimensions over the surface of the substrate. A scanning system is shown for deflecting the beam in two dimensions relative to a reference axis and a magnetic ion beam transport system following the scanning system is arranged to receive the beam from the scanning system over the range of two dimensional deflections of the scanning system and constructed to impose magnetic field conditions along the beam path of characteristics selected to reorient the two-dimensionally deflected beam to a direction having a predetermined desired relationship with the axis in the two dimensions at the desired instantaneous two dimensional displacement of the beam from the axis, to produce the desired scan of the beam over the substrate. One scanning system includes sequential first and second time-variable-field magnetic scanners, the first scanner having a magnetic gap of volume smaller than that of the second scanner and constructed to scan the beam more rapidly than the second scanner. In another system, the scanners are superposed. The magnetic ion beam transport system presently preferred is a system producing a sequence of three or more quadrupole fields, implemented by a sequence of quadrupoles. Alternate structures are disclosed. The system is capable of depositing atomic or molecular ions with a desired angular and positional uniformity over a wide range of perveance including perveance above 0.02/M[amu] (mA/keV ) with a constant, adjustable spot size and small beam spread.

69. 发明专利

GB2183901B CHARGED-PARTICLE BEAM SCANNING SYSTEM 未知
公开(公告)号：GB2183901B
公开(公告)日：1989-08-23
申请号：GB8614252
申请日：1986-06-11
申请人： VARIAN ASSOCIATES
发明人： MCINTYRE RAYMOND DENZIL , BROWN KARL LESLIE
IPC分类号： G21K1/093 , G21K5/10 , H01J3/32 , H01J33/00
摘要： A system for scanning a beam of charged-particles across a target is described which compensates for energy dispersion in the beam. A time-varying magnet with circular pole pieces is used to sweep the beam left to right. Two wedge-shaped magnet dipoles, one on each side of the center line are used to bend the beam parallel to the center line and compensate for beam energy dispersion.

70. 发明专利

SU1265885A2 FOCUSING-DEFLECTING DEVICE 未知
公开(公告)号：SU1265885A2
公开(公告)日：1986-10-23
申请号：SU3873214
申请日：1985-03-27
申请人： KAUNASSK POLT INST ANTANASA
发明人： ZIMARIN OLEG I , KASHETA STASIS S
IPC分类号： H01J3/32

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