专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

61. 发明授权

US09378921B2 Integrated optical and charged particle inspection apparatus 有权
标题翻译：集成光学和带电粒子检测仪器
公开(公告)号：US09378921B2
公开(公告)日：2016-06-28
申请号：US14428163
申请日：2013-09-16
申请人： DELMIC B.V.
发明人： Jacob Pieter Hoogenboom , Aernout Christiaan Zonnevylle , Pieter Kruit , Angela Carolina Narváez-González
IPC分类号： H01J37/28 , H01J37/21 , H01J37/02 , H01J37/22
CPC分类号： H01J37/023 , H01J37/222 , H01J37/228 , H01J37/28 , H01J2237/221 , H01J2237/2482 , H01J2237/2801 , H01J2237/2808
摘要： The present invention relates to a method for mutually aligning a scanning electron microscope SEM and a light microscope LM by creating a change (61) in the detected light signal of the light microscope LM by illuminating a substrate with an electron beam, correlating the position of the electron beam in the coordinate system of the scanning electron microscope SEM to the position of the observed change in the detected light signal in the coordinate system of the light microscope LM, and relatively shifting the scanning electron microscope SEM and the light microscope LM with respect to one another to a desired relative position of the coordinate systems (60, 62).
摘要翻译：本发明涉及通过用电子束照射基板来在光显微镜LM的检测光信号中产生变化（61）来相互对准扫描电子显微镜SEM和光学显微镜LM的方法，扫描电子显微镜SEM的坐标系中的电子束到光显微镜LM的坐标系中检测到的光信号的观察位置的位置，并相对移动扫描电子显微镜SEM和光学显微镜LM，相对于彼此相对于坐标系（60,62）的期望的相对位置。

62. 发明申请

US20150262784A1 INTEGRATED OPTICAL AND CHARGED PARTICLE INSPECTION APPARATUS 有权
标题翻译：集成光学和充电颗粒检测装置
公开(公告)号：US20150262784A1
公开(公告)日：2015-09-17
申请号：US14428163
申请日：2013-09-16
申请人： DELMIC B.V.
发明人： Jacob Pieter Hoogenboom , Aernout Christiaan Zonnevylle , Pieter Kruit , Angela Carolina Narváez-González
IPC分类号： H01J37/02 , H01J37/28 , H01J37/22
CPC分类号： H01J37/023 , H01J37/222 , H01J37/228 , H01J37/28 , H01J2237/221 , H01J2237/2482 , H01J2237/2801 , H01J2237/2808
摘要： The present invention relates to a method for mutually aligning a scanning electron microscope SEM and a light microscope LM by creating a change (61) in the detected light signal of the light microscope LM by illuminating a substrate with an electron beam, correlating the position of the electron beam in the coordinate system of the scanning electron microscope SEM to the position of the observed change in the detected light signal in the coordinate system of the light microscope LM, and relatively shifting the scanning electron microscope SEM and the light microscope LM with respect to one another to a desired relative position of the coordinate systems (60, 62).
摘要翻译：本发明涉及通过用电子束照射基板来在光显微镜LM的检测光信号中产生变化（61）来相互对准扫描电子显微镜SEM和光学显微镜LM的方法，扫描电子显微镜SEM的坐标系中的电子束到光显微镜LM的坐标系中检测到的光信号的观察位置的位置，并相对移动扫描电子显微镜SEM和光学显微镜LM，相对于彼此相对于坐标系（60,62）的期望的相对位置。

63. 发明申请

US20130141803A1 APPARATUS FOR COLLECTION OF CATHODOLUMINESCENCE SIGNALS 审中-公开
标题翻译：用于收集阴离子荧光信号的装置
公开(公告)号：US20130141803A1
公开(公告)日：2013-06-06
申请号：US13309026
申请日：2011-12-01
申请人： Simon Galloway , David J. Stowe , Richard Vince , Levi Beeching , John Blackwell
发明人： Simon Galloway , David J. Stowe , Richard Vince , Levi Beeching , John Blackwell
IPC分类号： G02B17/08 , G02B5/10
CPC分类号： H01J37/228 , H01J37/26 , H01J2237/20 , H01J2237/2445 , H01J2237/24495 , H01J2237/2808
摘要： A side entry TEM holder incorporates a miniature tilted off axis elliptical mirror to collect cathodoluminescence from the specimen and couple it efficiently into a tilted fiber optic integrated into the holder. The design is compatible with the cryogenic operation of the holder. TEM specimens are partially transparent to the electron beam, and so light can be emitted above and below the specimen. The same principle of off-axis mirror and tilted fiber can be utilized to collect light from above and below the specimen yet fit into the very confined space required by insertion through the goniometer and for operation between narrow gap pole pieces. With a dual system, the emission of light from above the specimen can be compared to that from below thereby enhancing the versatility of the analytical technique.
摘要翻译：侧入TEM持有器包含微型倾斜离轴椭圆镜以从样品中收集阴极发光并将其有效地耦合到集成到保持器中的倾斜光纤中。该设计与支架的低温操作兼容。 TEM样品对电子束部分透明，因此可以在样品上方和下方发射光。离轴反射镜和倾斜光纤的相同原理可以用于从样品上方和下方收集光线，但是它们被安装到通过测角器插入所需的非常狭窄的空间中，并在狭窄的间隙极片之间进行操作。使用双重系统，可以将来自样品上方的光的发射与下面的光进行比较，从而提高分析技术的通用性。

64. 发明授权

US08421007B2 X-ray detection system 有权
标题翻译： X射线检测系统
公开(公告)号：US08421007B2
公开(公告)日：2013-04-16
申请号：US13110214
申请日：2011-05-18
申请人： Masami Terauchi , Takanori Murano , Nobuo Handa , Hideyuki Takahashi
发明人： Masami Terauchi , Takanori Murano , Nobuo Handa , Hideyuki Takahashi
IPC分类号： H01J40/00
CPC分类号： G01N23/2252 , H01J37/244 , H01J2237/24425 , H01J2237/28 , H01J2237/2807 , H01J2237/2808
摘要： An X-ray detection system has an electron beam irradiation portion, a diffraction grating, a splitter for distributing the direction of propagation of the diffracted X-rays such that an imaging plane for the diffracted X-rays is assigned to plural positions spaced apart in a direction perpendicular to the direction of energy dispersion of the diffracted X-rays, and image sensors different in energy sensitivity disposed respectively at the positions to which the imaging plane is assigned.
摘要翻译： X射线检测系统具有电子束照射部分，衍射光栅，用于分散衍射X射线的传播方向的分离器，使得衍射X射线的成像面被分配到多个间隔开的位置垂直于衍射X射线的能量分散方向的方向以及能量敏感度不同的图像传感器分别设置在分配成像平面的位置。

65. 发明申请

US20120292508A1 X-Ray Detection System 有权
标题翻译： X射线检测系统
公开(公告)号：US20120292508A1
公开(公告)日：2012-11-22
申请号：US13110214
申请日：2011-05-18
申请人： Masami Terauchi , Takanori Murano , Nobuo Handa , Hideyuki Takahashi
发明人： Masami Terauchi , Takanori Murano , Nobuo Handa , Hideyuki Takahashi
IPC分类号： G01N23/00
CPC分类号： G01N23/2252 , H01J37/244 , H01J2237/24425 , H01J2237/28 , H01J2237/2807 , H01J2237/2808
摘要： An X-ray detection system has an electron beam irradiation portion, a diffraction grating, a splitter for distributing the direction of propagation of the diffracted X-rays such that an imaging plane for the diffracted X-rays is assigned to plural positions spaced apart in a direction perpendicular to the direction of energy dispersion of the diffracted X-rays, and image sensors different in energy sensitivity disposed respectively at the positions to which the imaging plane is assigned.
摘要翻译： X射线检测系统具有电子束照射部分，衍射光栅，用于分散衍射X射线的传播方向的分离器，使得衍射X射线的成像面被分配到多个间隔开的位置垂直于衍射X射线的能量分散方向的方向以及能量敏感度不同的图像传感器分别设置在分配成像平面的位置。

66. 发明申请

US20110220793A1 Detection device and particle beam device having a detection device 有权
标题翻译：具有检测装置的检测装置和粒子束装置
公开(公告)号：US20110220793A1
公开(公告)日：2011-09-15
申请号：US12925704
申请日：2010-10-27
申请人： Christian Thomas , Lucian Stefan
发明人： Christian Thomas , Lucian Stefan
IPC分类号： H01J37/26
CPC分类号： H01J37/244 , G01N23/2254 , G01N2223/612 , H01J37/20 , H01J37/226 , H01J37/228 , H01J2237/2445 , H01J2237/2808
摘要： A detection device and a particle beam device having a detection device ensure a good efficiency in detecting interaction particles and electromagnetic radiation. The detection device has a detector for detecting electromagnetic radiation and/or interaction particles and a filter element through which the electromagnetic radiation is transmitted. The filter element prevents the interaction particles from striking the detector such that the filter element is situated to move between a first position and a second position, the filter element in the first position being situated in relation to the detector in such a way that the filter element prevents the interaction particles from striking the detector. The filter element in the second position is situated in relation to the detector in such a way that the filter element allows the interaction particles to strike the detector. As an alternative, the filter element may be an object holder.
摘要翻译：具有检测装置的检测装置和粒子束装置确保检测相互作用粒子和电磁辐射的良好效率。检测装置具有用于检测电磁辐射和/或相互作用颗粒的检测器和通过其传送电磁辐射的过滤元件。过滤器元件防止相互作用的颗粒撞击检测器，使得过滤元件位于第一位置和第二位置之间，第一位置中的过滤元件相对于检测器位于与检测器相关的位置，使得过滤器元件防止相互作用的颗粒撞击检测器。处于第二位置的过滤元件以与检测器相关的方式定位，使得过滤元件允许相互作用的颗粒撞击检测器。作为替代，过滤元件可以是物体保持器。

67. 发明授权

US07923700B2 Sample inspection apparatus, sample inspection method and sample inspection system 有权
标题翻译：样品检验仪器，样品检验方法和样品检测系统
公开(公告)号：US07923700B2
公开(公告)日：2011-04-12
申请号：US11960267
申请日：2007-12-19
申请人： Hidetoshi Nishiyama
发明人： Hidetoshi Nishiyama
IPC分类号： H01J37/20
CPC分类号： G01N23/2251 , H01J37/20 , H01J37/228 , H01J37/256 , H01J37/28 , H01J2237/206 , H01J2237/208 , H01J2237/2608 , H01J2237/2808
摘要： Sample inspection apparatus, sample inspection method, and sample inspection system are offered which can give a stimulus to a sample held on a film when the sample is inspected by irradiating it with a primary beam (e.g., an electron beam or other charged-particle beam) via the film. The apparatus has the film, a vacuum chamber, primary beam irradiation column, signal detector, and a controller for controlling the operations of the beam irradiation column and signal detector. The sample is held on a first surface of the film opened to permit access to the film. The vacuum chamber reduces the pressure of the ambient in contact with a second surface of the film. The irradiation column irradiates the sample with the primary beam via the film from the second surface side. The detector detects a secondary signal produced from the sample in response to the irradiation.
摘要翻译：提供样品检查装置，样品检查方法和样品检查系统，其可以通过用初级束（例如电子束或其他带电粒子束）照射样品来检查样品时对保持在膜上的样品的刺激）通过电影。该装置具有膜，真空室，主光束照射柱，信号检测器和用于控制光束照射柱和信号检测器的操作的控制器。样品被保持在薄膜的第一表面上，以允许接近薄膜。真空室减小与膜的第二表面接触的环境的压力。照射列从第二表面侧通过膜从主光束照射样品。检测器响应于照射而检测从样品产生的二次信号。

68. 发明授权

US07718979B2 Particle-optical apparatus for simultaneous observing a sample with particles and photons 有权
标题翻译：用于同时观察具有颗粒和光子的样品的粒子光学装置
公开(公告)号：US07718979B2
公开(公告)日：2010-05-18
申请号：US12027245
申请日：2008-02-06
申请人： William Ralph Knowles
发明人： William Ralph Knowles
IPC分类号： A61N5/00
CPC分类号： H01J37/228 , H01J37/244 , H01J37/256 , H01J37/28 , H01J2237/188 , H01J2237/2608 , H01J2237/2808
摘要： A particle-optical apparatus, such as an ESEM®, for simultaneous observing a sample with particles and photons. A pressure limiting aperture (PLA) is placed in a diaphragm between the objective lens of the ESEM® and the sample position. The distance between the sample position and the aperture is sufficiently small to allow a large collection angle of the photons through this aperture. A mirror is placed between the diaphragm and the objective lens. Due to the large collection angle for photons a large NA is achieved. The small distance between sample position and aperture also result in less scattering of electrons than occurs in ESEM's where a mirror is placed between aperture and sample position, as the electrons have to travel through only a limited length in a high pressure area. Embodiments describe combinations where e.g. an immersion lens is used.
摘要翻译：用于同时观察具有颗粒和光子的样品的颗粒光学装置，例如ESEM。压力限制孔（PLA）放置在ESEM®的物镜和样品位置之间的隔膜中。样品位置和孔径之间的距离足够小，以允许光子通过该孔的大的收集角。镜片放置在隔膜和物镜之间。由于光子的收集角度大，所以实现了大的NA。样品位置和孔径之间的小距离也导致电子散射比在孔径和样品位置之间放置镜子的ESEM中发生的少，因为电子必须在高压区域中仅通过有限的长度行进。实施例描述了例如使用浸没透镜。

69. 发明申请

US20060060189A1 Optical reflector and optical collection system 审中-公开
标题翻译：光反射器和光学收集系统
公开(公告)号：US20060060189A1
公开(公告)日：2006-03-23
申请号：US11215032
申请日：2005-08-30
申请人： Yong Liu , S.H. Chan , C.H. Phang
发明人： Yong Liu , S.H. Chan , C.H. Phang
IPC分类号： F24J2/10
CPC分类号： G02B5/10 , G02B19/0023 , G02B19/0033 , G02B19/0076 , H01J2237/2808
摘要： An optical reflector comprising a rotationally symmetric reflecting surface disposed around a rotational axis of the reflector and having a radial profile; wherein the radial profile follows a portion of an ellipse profile, the ellipse profile being off-axis with respect to the rotational axis.
摘要翻译：一种光学反射器，包括围绕反射器的旋转轴线设置并具有径向轮廓的旋转对称反射表面; 其中所述径向轮廓遵循椭圆轮廓的一部分，所述椭圆轮廓相对于所述旋转轴线偏离轴线。

70. 发明授权

US06885445B2 Electron microscope and spectroscopy system 失效
标题翻译：电子显微镜和光谱系统
公开(公告)号：US06885445B2
公开(公告)日：2005-04-26
申请号：US10211558
申请日：2002-08-05
申请人： Robert Bennett , Andrew Mark Woolfrey , John Charles Clifford Day , Angus Bewick
发明人： Robert Bennett , Andrew Mark Woolfrey , John Charles Clifford Day , Angus Bewick
IPC分类号： G01J3/02 , G01J3/44 , G01Q20/02 , G01Q60/00 , H01J37/22 , H01J37/256 , G01J3/28 , H01J37/30
CPC分类号： H01J37/228 , G01J3/02 , G01J3/0202 , G01J3/0208 , G01J3/0216 , G01J3/0243 , G01J3/44 , H01J37/256 , H01J2237/2445 , H01J2237/2808
摘要： An electron microscope 10 is adapted to enable spectroscopic analysis of a sample 16. A parabolic mirror 18 has a central aperture 20 through which the electron beam can pass. The mirror 18 focuses laser illumination from a transverse optical path 24 onto the sample, and collects Raman and/or other scattered light, passing it back to an optical system 30. The mirror 18 is retractable (within the vacuum of the electron microscope) by a sliding arm assembly 22.
摘要翻译：电子显微镜10适于使得能够对样品16进行光谱分析。抛物面反射镜18具有中心孔20，电子束可以穿过中心孔20。反射镜18将来自横向光路24的激光照明聚焦到样品上，并收集拉曼和/或其他散射光，将其返回到光学系统30。镜子18可以通过滑动臂组件22缩回（在电子显微镜的真空中）。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式