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    • 70. 发明专利
    • Clustering multi-modal data
    • 聚集多模态数据
    • JP2013019900A
    • 2013-01-31
    • JP2012155780
    • 2012-07-11
    • Fei Coエフ イー アイ カンパニFei Company
    • CORNELIS SANDER KOOIJMANSANDER RICHARD MARIE STOKS
    • G01N23/225
    • G01N23/203G01N23/2206G01N23/2252G01N2223/402G01N2223/418G01N2223/616H01J37/28H01J2237/221H01J2237/2445H01J2237/24475H01J2237/2611
    • PROBLEM TO BE SOLVED: To provide a method and apparatus for more promptly acquiring information relating to a sample.SOLUTION: Information from multiple detectors acquiring different types of information is combined to determine one or more properties of a sample more efficiently than the properties could be determined using a single type of information from a single type of detector. In some embodiments, information is collected simultaneously from the different detectors which can greatly reduce data acquisition time. In some embodiments, information from different points on the sample are grouped based on information from a first type detector, and information from a second type detector related to these points is combined, for example, to create a single spectrum from the second type detector of a region of common composition as determined by the first type detector. In some embodiments, the data collection is adaptive, that is, the data are analyzed during collection to determine whether sufficient data have been collected to determine a desired property with the desired confidence.
    • 要解决的问题:提供用于更快速地获取与样本有关的信息的方法和装置。 解决方案:来自多个检测器获取不同类型信息的信息被组合以比可以使用来自单一类型的检测器的单一类型的信息确定属性更有效地确定样本的一个或多个属性。 在一些实施例中,从不同的检测器同时收集信息,这可以大大减少数据采集时间。 在一些实施例中,来自样本上不同点的信息基于来自第一类型检测器的信息分组,并且来自与这些点相关的第二类型检测器的信息被组合,例如,从第二类型检测器的第二类型检测器中产生单个频谱 由第一类型检测器确定的共同组成区域。 在一些实施例中,数据收集是自适应的,即,在收集期间分析数据以确定是否已经收集了足够的数据以确定具有期望置信度的所需属性。 版权所有(C)2013,JPO&INPIT