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    • 68. 发明申请
    • FLUID DISTRIBUTION MANIFOLD OPERATING STATE MANAGEMENT SYSTEM
    • 流体分配管理操作状态管理系统
    • US20110097492A1
    • 2011-04-28
    • US12606238
    • 2009-10-27
    • Roger S. KerrJames E. SuttonDavid H. Levy
    • Roger S. KerrJames E. SuttonDavid H. Levy
    • C23C16/44C23C16/52
    • C23C16/4401C23C16/4412C23C16/45551C23C16/45574C23C16/52C23C16/545Y10T137/8593
    • A fluid conveyance system for thin film material deposition is provided. A first fluid distribution manifold includes an output face that includes a plurality of elongated slots. The plurality of elongated slots include a source slot and an exhaust slot. A gas source is in fluid communication with the source slot. The gas source is configured to provide a gas to the output face of the distribution manifold. A gas receiving chamber is in fluid communication with the exhaust slot. The gas receiving chamber is configured to collect the gas provided to the output face of the distribution manifold through the exhaust slot. A sensor positioned to sense a parameter of the gas traveling from the gas source to the gas receiving chamber. A controller is connected in electrical communication with the sensor. The controller is configured to modify an operating parameter of the conveyance system based on data received from the sensor.
    • 提供了用于薄膜材料沉积的流体输送系统。 第一流体分配歧管包括包括多个细长槽的输出面。 多个细长槽包括源槽和排气槽。 气源与源槽流体连通。 气源被配置为向分配歧管的输出面提供气体。 气体接收室与排气槽流体连通。 气体接收室构造成通过排气槽收集设置在分配歧管的输出面上的气体。 定位成感测从气体源传播到气体接收室的气体的参数的传感器。 控制器与传感器电连接。 控制器被配置为基于从传感器接收的数据来修改传送系统的操作参数。
    • 70. 发明申请
    • DELIVERY DEVICE FOR DEPOSITION
    • 递送装置用于沉积
    • US20090081366A1
    • 2009-03-26
    • US11861402
    • 2007-09-26
    • Roger S. KerrDavid H. LevyJames T. Murray
    • Roger S. KerrDavid H. LevyJames T. Murray
    • C23C16/00B21D51/38F17D1/02
    • B05B1/005C23C16/45551C23C16/45574Y10T29/494Y10T29/49432Y10T29/49826Y10T137/0318Y10T137/87249
    • A delivery device for thin-film material deposition has at least first, second, and third inlet ports for receiving a common supply for a first, a second and a third gaseous material, respectively. Each of the first, second, and third elongated emissive channels allow gaseous fluid communication with one of corresponding first, second, and third inlet ports. The delivery device can be formed from apertured plates, superposed to define a network of interconnecting supply chambers and directing channels for routing each of the gaseous materials from its corresponding inlet port to a corresponding plurality of elongated emissive channels. The delivery device comprises a diffusing channel formed by a relief pattern between facing plates. Also disclosed is a process for thin film deposition. Finally, more generally, a flow diffuser and a corresponding method of diffusing flow is disclosed.
    • 用于薄膜材料沉积的递送装置具有至少第一,第二和第三入口端口,用于分别接收用于第一,第二和第三气态材料的共同供应。 第一,第二和第三细长发射通道中的每一个允许与对应的第一,第二和第三入口端口之一的气态流体连通。 输送装置可以由孔板形成,叠加以形成互连供应室的网络,并且引导通道用于将每个气态材料从其相应的入口端口路由到相应的多个细长的发射通道。 输送装置包括由相对板之间的浮雕图案形成的扩散通道。 还公开了一种用于薄膜沉积的方法。 最后,更一般地,公开了一种流扩散器和相应的扩散流的方法。