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    • 61. 发明申请
    • MEMS VACUUM SENSOR BASED ON THE FRICTION PRINCIPLE
    • 基于摩擦原理的MEMS真空传感器
    • US20100024562A1
    • 2010-02-04
    • US12301874
    • 2007-05-09
    • Steffen KurthDirk TenholteKarla HillerChristian KaufmannThomas GessnerWolfram Doetzel
    • Steffen KurthDirk TenholteKarla HillerChristian KaufmannThomas GessnerWolfram Doetzel
    • G01L21/22
    • G01L21/22
    • The invention relates to a sensor element for pressure measurement, having a substrate (5) and at least one mass element (1), which is arranged spaced apart from the substrate (5) and is connected in an oscillating manner to the substrate (5) and/or a support body (6) fixed relative to the substrate (5), so that a gap is formed between the mass element (1) and the substrate (5), the width of which can be varied through oscillations of the mass element (1). At least one recess and/or at least one bushing (4) is located in the surface of the substrate (5) delimiting the gap, which recess is used for reducing the damping of the oscillation of the mass element through the gas or plasma surrounding the mass element (1). The sensor element is used in particular in pressure sensors for measuring pressures in the vacuum range. Through the use of the sensor element according to the invention as a pressure sensor, maximum pressures up to the range of atmospheric air pressure can be recorded. The lowest pressures to be determined are in the range of 10−6 mbar.
    • 本发明涉及一种用于压力测量的传感器元件,具有基板(5)和至少一个质量元件(1),其与基板(5)间隔开并且以振荡方式连接到基板(5) )和/或相对于基板(5)固定的支撑体(6),使得在质量元件(1)和基板(5)之间形成间隙,其宽度可以通过 质量元件(1)。 至少一个凹部和/或至少一个衬套(4)位于限定间隙的衬底(5)的表面中,该凹槽用于减少通过气体或等离子体周围的质量元件的振荡的阻尼 质量元件(1)。 传感器元件特别用于测量真空范围内的压力的压力传感器。 通过使用根据本发明的传感器元件作为压力传感器,可以记录高达大气压力范围的最大压力。 要确定的最低压力在10-6毫巴的范围内。
    • 63. 发明申请
    • Method for preparing phthalocyanines
    • 酞菁的制备方法
    • US20070155961A1
    • 2007-07-05
    • US10584631
    • 2004-12-30
    • Thomas GessnerSophia Ebert
    • Thomas GessnerSophia Ebert
    • C07D487/22
    • C07D487/22
    • The present invention relates to a process for the preparation of metal-free phthalocyanines of the formula I by conversion of an ortho-phthalodinitrile of the formula Ia in an inert solvent with a boiling point of at least 120° C. (at standard pressure) in the presence of ammonia, in which, in formula I or Ia, the variable n can adopt values of 1, 2, 3 or 4 and the R radicals denote a five- or six-membered saturated nitrogen-comprising heterocyclic ring optionally substituted by one or two C1-C8-alkyl groups which is bonded via a ring nitrogen atom to the benzene ring and which can still comprise one or two additional nitrogen atoms or an additional oxygen or sulfur atom, which comprises carrying out the conversion in the presence of an alkali metal hydroxide or alkali metal carbonate.
    • 本发明涉及通过在沸点至少为120℃的惰性溶剂中(在标准压力下)转化式Ia的邻苯二甲腈,制备式I的无金属酞菁的方法, 在氨的存在下,其中在式I或Ia中,变量n可以采用1,2,3或4的值,并且R基团表示五或六元饱和含氮杂环,任选地被 一个或两个通过环氮原子与苯环键合并且还可以包含一个或两个另外的氮原子的C 1 -C 8 - 烷基或 另外的氧或硫原子,其包括在碱金属氢氧化物或碱金属碳酸盐的存在下进行转化。