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61. 发明授权

US07064512B2 Positioning apparatus, exposure apparatus, and semiconductor device manufacturing method 失效
标题翻译：定位装置，曝光装置和半导体装置的制造方法
公开(公告)号：US07064512B2
公开(公告)日：2006-06-20
申请号：US11105403
申请日：2005-04-14
申请人： Atsushi Kimura
发明人： Atsushi Kimura
IPC分类号： B64C17/06
CPC分类号： G03F7/70725 , Y10S414/135 , Y10S414/14 , Y10S414/141
摘要： A positioning apparatus includes an X stage, a linear motor (X-axis) which drives the X stage along the X-axis, a linear motor (Y-axis) which drives a Y stage along the Y-axis, a laser interferometer which detects position information of the stages along the X and Y directions, and a controller which controls the linear motor (X-axis) and linear motor (Y-axis) based on a detection result of the laser interferometer. The controller controls the linear motor (Y-axis) based on the position information of the stages along the X direction detected by the laser interferometer, so as to cancel a force generated along the Y-axis by the linear motor (X-axis) when the linear motor (X-axis) is to drive the stage in the X direction.
摘要翻译：定位装置包括X台，沿着X轴驱动X台的线性电动机（X轴），沿着Y轴驱动Y档的线性电动机（Y轴），激光干涉仪根据激光干涉仪的检测结果，检测沿X方向和Y方向的台的位置信息，以及控制线性电动机（X轴）和线性电动机（Y轴）的控制器。控制器基于由激光干涉仪检测的沿着X方向的级的位置信息来控制线性电动机（Y轴），以消除由线性电动机（X轴）沿Y轴产生的力，当线性电动机（X轴）在X方向上驱动平台时。

62. 发明申请

US20060103833A1 Aligning apparatus and its control method, and exposure apparatus 审中-公开
标题翻译：对准装置及其控制方法和曝光装置
公开(公告)号：US20060103833A1
公开(公告)日：2006-05-18
申请号：US11330182
申请日：2006-01-12
申请人： Atsushi Kimura
发明人： Atsushi Kimura
IPC分类号： G03B27/58
CPC分类号： G03F7/70716 , G03F7/70725
摘要： An aligning apparatus having a stage movable on a stage base, a table, which is provided on the stage and which is movable while holding an object to be aligned, an actuator to perform alignment of the stage, an actuator to perform alignment of the table, an electromagnetic coupling, which is provided between the stage and the table and which generates a thrust force to be supplied to the table, a controller to perform servo control on the table, and a magnetic flux control system to perform magnetic flux control on the electromagnetic coupling. A time function of a table acceleration command value is a differential continuous value, and the square root of the time function is also a differential continuous value.
摘要翻译：一种对准装置，具有可在舞台底座上移动的舞台，桌子设置在舞台上并且在保持要对准的对象物的同时可移动的致动器，以执行舞台对准，致动器执行桌子的对准，设置在台架与工作台之间并产生提供给工作台的推力的电磁联轴器，对工作台执行伺服控制的控制器和对磁通量控制系统进行磁通量控制的磁通量控制系统电磁耦合。表加速度指令值的时间函数是差分连续值，时间函数的平方根也是差分连续值。

63. 发明申请

US20050084187A1 Hydrodynamic bearing apparatus and stage apparatus using the same 有权
标题翻译：流体动力轴承装置和使用其的平台装置
公开(公告)号：US20050084187A1
公开(公告)日：2005-04-21
申请号：US10957837
申请日：2004-10-05
申请人： Atsushi Kimura
发明人： Atsushi Kimura
IPC分类号： F16C29/02 , F16C32/06 , F16C39/06 , G03F7/20 , H01L21/027 , G11B21/20
CPC分类号： F16C39/063 , F16C29/025 , F16C29/12 , F16C32/06 , F16C32/0674 , G03F7/70716 , G03F7/70816
摘要： A plurality of preload magnet units are arranged on each side of a hydrodynamic bearing symmetrically. Preload magnet units are arranged inside a labyrinth partition to surround the hydrodynamic bearing in a non-air atmosphere.
摘要翻译：在流体动力轴承的每一侧对称地布置有多个预载磁体单元。预加载磁体单元布置在迷宫分隔件内，以在非空气气氛中围绕流体动力轴承。

64. 发明授权

US06768864B1 Recording and reproducing apparatus compressing reproduced information 失效
标题翻译：记录和再现装置压缩再现的信息
公开(公告)号：US06768864B1
公开(公告)日：2004-07-27
申请号：US09384982
申请日：1999-08-30
申请人： Atsushi Kimura , Wataru Morita , Megumi Hashiotani , Eriko Shimizu
发明人： Atsushi Kimura , Wataru Morita , Megumi Hashiotani , Eriko Shimizu
IPC分类号： H04N576
CPC分类号： G11B20/00007 , G11B20/10527 , G11B2020/00072 , G11B2020/10537
摘要： An information recording and reproducing apparatus (S) is provided with: a reproducing device (8) for reproducing information, which is recorded on a record medium (9) in advance; a compressing device (5, 6) for compressing the reproduced information to reduce an information amount of the reproduced information and generating a compression information; and a recording device (8) for re-recording the generated compression information onto the record medium.
摘要翻译：信息记录和再现装置（S）具有：再现信息的再现装置（8），其被预先记录在记录介质（9）上; 压缩装置（5,6），用于压缩再现信息以减少再现信息的信息量并产生压缩信息; 以及用于将生成的压缩信息重新记录到记录介质上的记录装置（8）。

65. 发明授权

US6159419A ALN dispersed powder aluminum alloy and method of preparing the same 失效
标题翻译： ALN分散粉末铝合金及其制备方法
公开(公告)号：US6159419A
公开(公告)日：2000-12-12
申请号：US337075
申请日：1999-06-21
申请人： Katsuyoshi Kondoh , Atsushi Kimura , Yoshishige Takano
发明人： Katsuyoshi Kondoh , Atsushi Kimura , Yoshishige Takano
IPC分类号： C22C1/04 , B22F1/00 , C22C1/10 , C22C21/00 , C22C32/00 , C23C8/02 , B22F3/12
CPC分类号： C23C8/02 , B22F1/0003 , C22C32/0068 , B22F2999/00
摘要： An AlN dispersed powder aluminum alloy with a particular composition and structure has excellent wear resistance, seizure resistance, heat resistance, toughness and machinability. In the structure of the alloy, AlN layers are discontinuously dispersed along some of the grain boundaries of former aluminum alloy particles in the matrix of an aluminum alloy sintered body. Diffusion and sintering progresses between non-nitrided grains at areas of grain boundaries not having AlN layers, to attain strong bonding between the grains. A nitriding accelerative element such as Mg, Ca or Li is provided in some of the grains to promote the discontinuous formation of the AlN layers. Additionally, layers of a nitriding suppressive element such as Sn, Pb, Sb, Bi or S may be discontinuously dispersed at regions along some of the grain boundaries, and bonding between grains is achieved at these regions as well. The alloy is prepared by sintering a green powder compact of prescribed composition under prescribed sintering conditions.
摘要翻译：具有特定组成和结构的AlN分散粉末铝合金具有优异的耐磨性，耐咬合性，耐热性，韧性和机械加工性。在合金的结构中，AlN层在铝合金烧结体的基体中的前铝合金粒子的一些晶界处不连续地分散。在不具有AlN层的晶粒边界处的非氮化晶粒之间的扩散和烧结进行，以获得晶粒之间的牢固结合。在一些晶粒中提供了诸如Mg，Ca或Li之类的氮化促进元素以促进AlN层的不连续形成。此外，诸如Sn，Pb，Sb，Bi或S的氮化抑制元素的层可以在沿着一些晶界的区域处不连续地分散，并且在这些区域也实现了晶粒之间的结合。该合金通过在规定的烧结条件下烧结规定组成的绿色粉末成形体而制备。

66. 发明授权

US6042631A ALN dispersed powder aluminum alloy and method of preparing the same 失效
公开(公告)号：US6042631A
公开(公告)日：2000-03-28
申请号：US19654
申请日：1998-02-06
申请人： Katsuyoshi Kondoh , Atsushi Kimura , Yoshishige Takano
发明人： Katsuyoshi Kondoh , Atsushi Kimura , Yoshishige Takano
IPC分类号： C22C1/04 , B22F1/00 , C22C1/10 , C22C21/00 , C22C32/00 , C23C8/02 , B22F3/16 , B22F3/24
CPC分类号： C23C8/02 , B22F1/0003 , C22C32/0068 , B22F2999/00
摘要： An AlN dispersed powder aluminum alloy with a particular composition and structure has excellent wear resistance, seizure resistance, heat resistance, toughness and machinability. In the structure of the alloy, AlN layers are discontinuously dispersed along some of the grain boundaries of former aluminum alloy particles in the matrix of an aluminum alloy sintered body. Diffusion and sintering progresses between non-nitrided grains at areas of grain boundaries not having AlN layers, to attain strong bonding between the grains. A nitriding accelerative element such as Mg, Ca or Li is provided in some of the grains to promote the discontinuous formation of the AlN layers. Additionally, layers of a nitriding suppressive element such as Sn, Pb, Sb, Bi or S may be discontinuously dispersed at regions along some of the grain boundaries, and bonding between grains is achieved at these regions as well. The alloy is prepared by sintering a green powder compact of prescribed composition under prescribed sintering conditions.

67. 发明授权

US5763889A Electron beam-generating apparatus 失效
标题翻译：电子束发生装置
公开(公告)号：US5763889A
公开(公告)日：1998-06-09
申请号：US821986
申请日：1997-03-21
申请人： Takeshi Tomita , Shoji Kato , Atsushi Kimura
发明人： Takeshi Tomita , Shoji Kato , Atsushi Kimura
IPC分类号： H01J37/065 , H01J37/09 , H01J37/26
CPC分类号： H01J37/065
摘要： There is disclosed an apparatus for generating an electron beam in an electron microscope comprising an electron gun, a second anode located under the gun, an aperture plate having an aperture for limiting the electron beam, and a scattered electron-blocking member for limiting passage of the beam. The aperture plate is mounted in the beam passage formed in the second anode. The scattered electron-blocking member is located under the aperture plate. Electrons scattered at the edges of the aperture are blocked by the scattered electron-blocking member from colliding against the accelerator tube.
摘要翻译：公开了一种在电子显微镜中产生电子束的装置，包括电子枪，位于枪下方的第二阳极，具有用于限制电子束的孔的孔板和用于限制电子束通过的散射电子阻挡构件梁。孔板安装在形成在第二阳极中的梁通道中。散射电子阻挡构件位于孔板下方。在孔的边缘处散射的电子被散射的电子阻挡构件阻挡以与加速管碰撞。

68. 发明授权

US5270989A Disk player 失效
标题翻译：磁盘播放器
公开(公告)号：US5270989A
公开(公告)日：1993-12-14
申请号：US865496
申请日：1992-04-09
申请人： Atsushi Kimura
发明人： Atsushi Kimura
IPC分类号： G11B17/24 , G11B17/04 , G11B17/22
CPC分类号： G11B17/0565 , G11B17/226
摘要： A disk player capable of playing one of a plurality of disks arranged on a tray, comprises a housing, and a tray having a center and a plurality of disk rests aligned radially around the center of the tray, the tray movable between a disk loading position outside of the housing and an operating position located inside the housing the center of the tray corresponding to a disk playing position when the tray is in the operating position. A disk selecting device includes a rotatable-arm member rotatable about the disk playing position and a disk holder slidably attached to the rotatable-arm member, the disk holder reciprocatively movable between the disk playing position and one of the plurality of disk rests for moving a selected disk to be played from its associated disk rest to the disk playing position. A disk detecting device is attached to the disk holder and detects whether the selected disk is attached to the disk holder. The tray is ejected from inside the disk player housing when the disk detecting device determines that the selected disk has become detached from the disk holder during movement of the selected disk from the disk rest to the disk playing position.
摘要翻译：一种能够播放布置在托盘上的多个盘中的一个盘的盘播放器，包括壳体和具有中心的托盘和多个圆盘托架，托盘径向地对准托盘的中心，托盘可在盘装载位置在托盘处于操作位置时，位于壳体内部的操作位置和托盘的中心位于托盘的中心对应于盘播放位置。盘选择装置包括可围绕盘播放位置旋转的可旋转臂构件和可滑动地附接到可旋转臂构件的盘保持器，盘保持器可在盘播放位置与多个盘托中的一个之间往复运动，以便移动要从其相关联的盘放置要播放的所选磁盘到盘播放位置。磁盘检测装置安装在磁盘保持架上，并检测所选磁盘是否安装在磁盘架上。当磁盘检测装置确定所选择的磁盘在从所述磁盘托架移动到盘播放位置期间已经从所述磁盘保持架脱离时，所述托盘从所述磁盘播放器外壳内部弹出。

69. 发明授权

US4683754A Capacitive displacement transducer 失效
标题翻译：电容位移传感器
公开(公告)号：US4683754A
公开(公告)日：1987-08-04
申请号：US857045
申请日：1986-04-29
申请人： Terutaka Hirata , Tadashi Azegami , Atsushi Kimura , Megumi Katayama
发明人： Terutaka Hirata , Tadashi Azegami , Atsushi Kimura , Megumi Katayama
IPC分类号： G01D5/24 , G01L9/00 , G01L9/12 , G01L19/04
CPC分类号： G01L9/0072 , G01L9/125
摘要： A capacitive displacement type transducer, wherein the oscillation frequency of a self-excited oscillator circuit including a pair of differential capacitors formed with a movable electrode disposed between two outer electrodes is counted by a counter, the output level of the counter is reversed each time a certain count is attained to cause the differential capacitances to be switched alternatively, and to make identical the respective reversal periods, and application voltage to be applied to the differential capacitors being controlled by an integrator, and a voltage relating to the output of the integrator being applied through a fixed impedance to the movable electrode, thereby eliminating fixed capacitances formed across the difference capacitors. Also, a voltage generated by dividing and averaging the output level of the counter by use of a certain pulse duration of a monostable circuit operating in synchronism with a counter, is used to compensate for static pressure changes. Also, a temperature sensing element is included in a converting section to perform temperature correction. The circuit may be used in a two wire transmission system. The circuit improves upon the prior art by eliminating heretofore used complex circuits, thereby increasing reliability, efficiency and reducing size.
摘要翻译：一种电容式位移式换能器，其中包括由设置在两个外部电极之间的可动电极形成的一对差动电容器的自激振荡器电路的振荡频率由计数器计数，每次计数器的输出电平反转达到某些计数以使差分电容被交替切换，并使各个反转周期相同，并且施加到由积分器控制的差分电容器的施加电压，并且与积分器的输出相关的电压为通过固定阻抗施加到可动电极，从而消除形成在差分电容器两端的固定电容。而且，使用通过使用与计数器同步运行的单稳态电路的特定脉冲持续时间对计数器的输出电平进行分频和平均而产生的电压来补偿静态压力变化。此外，温度感测元件包括在转换部分中以执行温度校正。该电路可用于双线传输系统中。该电路通过消除以前使用的复杂电路来改进现有技术，从而提高可靠性，效率和减小尺寸。

70. 发明授权

US4357834A Displacement converter 失效
标题翻译：位移转换器
公开(公告)号：US4357834A
公开(公告)日：1982-11-09
申请号：US183631
申请日：1980-09-03
申请人： Atsushi Kimura
发明人： Atsushi Kimura
IPC分类号： G01L9/00 , G01L9/12 , G01L19/04
CPC分类号： G01L9/12 , G01L9/0072
摘要： A displacement converter useful for pressure gauges and similar instruments, the converter including a displacement detector provided with a variable capacitor responsive to the displacement to be metered and a fixed capacitor insensitive thereto. Also included is an amplitude-controllable oscillator whose AC output is applied to both capacitors, means being coupled to the capacitors to derive therefrom electrical signals which are a function of their capacitance values. These electrical signals are fed to a control circuit to produce a control signal corresponding to the difference therebetween, the control signal being applied to the oscillator to govern the output amplitude thereof in a manner maintaining the control signal at a constant value.
摘要翻译：一种用于压力计和类似仪器的位移转换器，该转换器包括位移检测器，该位移检测器响应于待计量的位移和对其不敏感的固定电容器而具有可变电容器。还包括幅度可控振荡器，其AC输出被施加到两个电容器，装置耦合到电容器以从其中导出作为它们的电容值的函数的电信号。这些电信号被馈送到控制电路以产生对应于它们之间的差的控制信号，控制信号被施加到振荡器以以将控制信号保持在恒定值的方式来控制其输出幅度。

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