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    • 67. 发明授权
    • Active matrix-type liquid crystal display containing a horizontal MIM
device with inter-digital conductors
    • 主动矩阵型液晶显示器,包含具有数字导体的水平MIM器件
    • US5153753A
    • 1992-10-06
    • US507038
    • 1990-04-10
    • Eiichi OhtaYuji KimuraHitoshi Kondo
    • Eiichi OhtaYuji KimuraHitoshi Kondo
    • G02F1/1365H01L45/00
    • H01L45/00G02F1/1365Y10T428/30
    • The invention is directed to an active matrix-type liquid crystal display using a horizontal MIM device as a non-linear resistance device. The layers of the metal-insulator-metal elements are formed in a horizontal direction and use a hard carbon film as the insulator layer of the horizontal MIM device. The hard carbon film comprises carbon and hydrogen and a constituent element such as a group III element, group IV element, group V element, alkali metal element, alkaline earth metal element, nitrogen atoms, oxygen atoms, chalcogen atoms or halogen atoms, and has typical specific resistivities of from 10.sup.4 to 10.sup.13 ohm.cm. The claimed devices are economical to produce and substantially free from short circuits caused by pinholes or voids in the insulator layer. In a preferred embodiment, the electrodes of the MIM device are inter-digital in shape.
    • 本发明涉及使用水平MIM装置作为非线性电阻装置的有源矩阵型液晶显示器。 金属 - 绝缘体 - 金属元件的层在水平方向上形成,并且使用硬碳膜作为水平MIM器件的绝缘体层。 硬碳膜包括碳和氢以及诸如III族元素,IV族元素,V族元素,碱金属元素,碱土金属元素,氮原子,氧原子,硫属原子或卤素原子的构成元素,并且具有 典型的电阻率为104〜1013欧姆·厘米。 要求保护的装置经济地制造并且基本上没有由绝缘体层中的针孔或空隙引起的短路。 在优选实施例中,MIM器件的电极是数字形式。