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    • 62. 发明申请
    • Thermal Type Flowmeter
    • 热式流量计
    • US20140326064A1
    • 2014-11-06
    • US14359161
    • 2012-01-18
    • Hiroshi NakanoMasahiro MatsumotoSatoshi AsanoKeiji Hanzawa
    • Hiroshi NakanoMasahiro MatsumotoSatoshi AsanoKeiji Hanzawa
    • G01F1/692
    • G01F1/692G01F1/6842G01F1/696G01F5/00G01F15/00
    • Provided is a thermal type flowmeter in which contamination of a sensor element is reduced. The flowmeter includes a sensor element including a heating resistor formed in a thin film part, the thin film part being provided on a diaphragm formed on a substrate; a support member to locate the sensor element thereon; a secondary channel that includes part of the support member and takes in part of intake air flowing through an air intake pipeline; and a guide member provided on the support member or the sensor element that lies on a line L that extends along an air flow in the secondary channel and passing over the thin film part, the guide member allowing fine particles to be guided in a direction away from the line L, the fine particles coming together with an air flow along the surface of the support member or the sensor element.
    • 提供了一种传感器元件的污染减少的热式流量计。 流量计包括:传感器元件,包括形成在薄膜部分中的加热电阻器,薄膜部分设置在形成在基板上的隔膜上; 支撑构件,用于将传感器元件定位在其上; 第二通道,其包括支撑构件的一部分并且部分地吸入通过进气管道的进气; 以及引导构件,其设置在所述支撑构件或所述传感器元件上,所述引导构件位于沿着所述次级通道中的空气流延伸并且越过所述薄膜部分的线L上,所述引导构件允许微粒沿着远离的方向被引导 来自线L的细颗粒与沿着支撑构件或传感器元件的表面的空气流一起。
    • 63. 发明授权
    • Thermal gas sensor
    • 热气传感器
    • US08689608B2
    • 2014-04-08
    • US12973376
    • 2010-12-20
    • Hiroshi NakanoMasamichi YamadaMasahiro MatsumotoKeiji Hanzawa
    • Hiroshi NakanoMasamichi YamadaMasahiro MatsumotoKeiji Hanzawa
    • G01N25/18
    • G01N25/18
    • The present invention provides a high-responsiveness and high-accuracy thermal gas sensor configured to enable gas to be analyzed based on a variation in heat conductivity. The thermal gas sensor includes a substrate 2 with a cavity portion 5, a thin-film support 6 stacked in the cavity portion and comprising a plurality of insulating layers 8a and 8b, and a first heating member 3 and a second heating member 4 both sandwiched between the insulating layers in the thin-film support. The second heating member is located around a periphery of the first heating member. The first heating member is controlled to a temperature higher than a temperature to which the second heating member is controlled. The concentration of ambient gas is measured based on power applied to the first heating member.
    • 本发明提供了一种高响应性和高精度的热气传感器,其被配置为使得能够基于导热性的变化来分析气体。 热气体传感器包括:具有空腔部分5的基板2,层叠在空腔部分中的薄膜支撑体6,其包括多个绝缘层8a和8b;以及第二加热构件3和第二加热构件4, 在薄膜载体中的绝缘层之间。 第二加热构件位于第一加热构件的周边周围。 第一加热构件被控制到比第二加热构件被控制的温度高的温度。 环境气体的浓度基于施加到第一加热构件的功率被测量。
    • 64. 发明申请
    • Thermal Type Flowmeter
    • 热式流量计
    • US20130313675A1
    • 2013-11-28
    • US13984748
    • 2011-03-02
    • Hiroshi NakanoMasahiro MatsumotoSatoshi AsanoKeiji Hanzawa
    • Hiroshi NakanoMasahiro MatsumotoSatoshi AsanoKeiji Hanzawa
    • H01L29/66
    • H01L29/66992G01F1/6842G01F1/6845G01F1/692G01F5/00
    • Provided is a compact thermal type flowmeter that can perform a partial thermal treatment on a sensor element portion without affecting other elements and can improve the reliability of a sensor element while improving the sensitivity of the sensor element.A thermal type flowmeter includes a hollow portion which is formed in a semiconductor substrate, a thin film portion which is formed by insulating films provided to cover the hollow portion and, a heating resistor body and a temperature-measuring resistor body which are formed between the insulating films. In a method for manufacturing the thermal type flowmeter, a thermal treatment is performed to grow a crystal grain size of the heating resistor body and a crystal grain size of the temperature-measuring resistor body by heating the thin film portion after forming the thin film portion.
    • 提供了一种紧凑型热式流量计,其可以在不影响其他元件的情况下对传感器元件部分进行部分热处理,并且可以在提高传感器元件的灵敏度的同时提高传感器元件的可靠性。 一种热式流量计包括形成在半导体衬底中的中空部分,由覆盖中空部分的绝缘膜形成的薄膜部分,以及加热电阻体和温度测量电阻体, 绝缘膜。 在制造热式流量计的方法中,通过在形成薄膜部分之后加热薄膜部分进行热处理,以增加加热电阻体的晶粒尺寸和温度测量电阻体的晶粒尺寸 。
    • 66. 发明申请
    • Thermal-Type Flowmeter
    • 热式流量计
    • US20100242591A1
    • 2010-09-30
    • US12708387
    • 2010-02-18
    • Hiroshi NAKANOMasahiro MatsumotoKeiji Hanzawa
    • Hiroshi NAKANOMasahiro MatsumotoKeiji Hanzawa
    • G01F1/692
    • G01F5/00G01F1/692G01F1/698
    • The present invention provides a highly-sensitive thermal-type flow-rate sensor with enhanced reliability. Provided is a thermal-type flow-rate sensor including: a passage into which a measurement-target fluid is introduced; and a sensor element which is provided in the passage and which measures the flow rate of the measurement-target fluid. The sensor element 1 includes: a semiconductor substrate; a hollow portion formed in the semiconductor substrate; and a heating resistor formed on an electric insulating film above the hollow portion. The sensor element measures the flow rate of the measurement-target fluid by radiating heat from the heating resistor to the measurement-target fluid. When Lh is the length of the heating resistor in a direction perpendicular to a flowing direction of the measurement-target fluid and Wd is the shortest distance to an upstream-side edge of the heating resistor from an edge of the hollow portion (an outer peripheral edge of a diaphragm) in the flowing direction of the measurement-target fluid, Wd≧0.4×Lh is satisfied in a relation between Lh and Wd.
    • 本发明提供了一种具有增强的可靠性的高灵敏度热式流量传感器。 本发明提供一种热式流量传感器,包括:导入测定对象流体的通道; 以及传感器元件,其设置在通道内并测量测量对象流体的流量。 传感器元件1包括:半导体衬底; 形成在半导体衬底中的中空部分; 以及形成在中空部分上方的电绝缘膜上的加热电阻器。 传感器元件通过从加热电阻器向测量目标流体辐射热量来测量测量目标流体的流量。 当Lh是与测量对象流体的流动方向垂直的方向上的加热电阻器的长度,Wd是从中空部分的边缘到加热电阻器的上游侧边缘的最短距离(外周边 在测量目标流体的流动方向上,隔膜的边缘)在Lh和Wd之间的关系中满足Wd≥0.4×Lh。
    • 67. 发明授权
    • Flowmeter and flowmeter system
    • 流量计和流量计系统
    • US07457711B2
    • 2008-11-25
    • US11442158
    • 2006-05-30
    • Atsushi KankeMasahiro MatsumotoShinya IgarashiKeiji HanzawaKei Ueyama
    • Atsushi KankeMasahiro MatsumotoShinya IgarashiKeiji HanzawaKei Ueyama
    • G01F1/00
    • G01F1/6965G01F1/6845G01F1/696G01F1/72
    • In a thermal-type airflow meter that measures an intake airflow rate in an internal combustion engine of an automobile or the like, there has been a problem that pulsation errors caused by external fluctuations under the environment including a large pulsation and reverse flow in the intake valve are difficult to be reduced. In order to solve this problem, the invention provides a flowmeter comprising a detection element that outputs a non-linear signal corresponding to a flow rate, and a regulation means that regulates an output signal of the detection element for controlling. With this construction, the regulation means executes output regulation processing that regulates irregularities of the detection element in the output signal, and inequality linearization processing that regulates an average value of the output signal after the output regulation processing by means of regulating parameters.
    • 在测量汽车等的内燃机中的进气量的热式气流计中,存在由于在进气中具有大的脉动和反向流动的环境下的外部波动引起的脉动误差的问题 阀门难以减少。 为了解决这个问题,本发明提供了一种流量计,其包括:输出对应于流量的非线性信号的检测元件;以及调节装置,用于调节用于控制的检测元件的输出信号。 利用这种结构,调节装置执行调节输出信号中的检测元件的不规则性的输出调节处理,以及通过调节参数来调节输出调节处理之后的输出信号的平均值的不等式线性化处理。
    • 69. 发明授权
    • Thermal airflow meter
    • 热气流计
    • US07269999B2
    • 2007-09-18
    • US10560896
    • 2006-03-05
    • Hiroshi NakanoMasamichi YamadaMasahiro MatsumotoIzumi WatanabeKeiji Hanzawa
    • Hiroshi NakanoMasamichi YamadaMasahiro MatsumotoIzumi WatanabeKeiji Hanzawa
    • G01F1/68
    • G01F1/6965G01F1/6842G01F1/696
    • A thermal airflow meter excellent in flow-rate measurement accuracy is provided. The airflow meter has a flow-rate measuring element comprising a heat resistor and a temperature-compensating resistor which are formed on the a first base member. A second base member of the airflow meter, provided with a drive circuit and a signal processor, is housed in a casing holding the flow-rate measuring element. The flow-rate measuring element is disposed in an air passage. Of two temperature sensors for measuring temperature at each of two points in the thermal airflow meter, respectively, a first temperature sensor is provided on the fist substrate of the flow-rate measuring element, and a second temperature sensor is provided inside the casing. The signal processor has a function of computing an airflow rate, an air temperature, and an air passage wall face temperature on the basis of an output signal of the flow-rate measuring element and respective output signals of the first and second sensors.
    • 提供流量测量精度优异的热气流计。 气流计具有流量测量元件,其包括形成在第一基底构件上的热电阻器和温度补偿电阻器。 具有驱动电路和信号处理器的气流计的第二基座容纳在保持流量测量元件的壳体中。 流量测量元件设置在空气通道中。 在用于在热气流计的两点测量温度的两个温度传感器中,分别在流量测量元件的第一基底上设置第一温度传感器,并且在壳体内部设置第二温度传感器。 信号处理器具有基于流量测量元件的输出信号和第一和第二传感器的各个输出信号来计算气流速率,空气温度和空气通道壁面温度的功能。
    • 70. 发明申请
    • IC power protection circuit
    • IC电源保护电路
    • US20070211394A1
    • 2007-09-13
    • US11656994
    • 2007-01-24
    • Masahiro MatsumotoMasamichi YamadaHiroshi NakanoKeiji HanzawaRyo Sato
    • Masahiro MatsumotoMasamichi YamadaHiroshi NakanoKeiji HanzawaRyo Sato
    • H02H7/00
    • H02H9/046H01L27/0248H02H11/002
    • An IC power protection circuit functions as a surge protection circuit and reverse connection protection circuit. The IC power protection circuit includes an error amplification circuit, positioned and integrated within an integrated circuit and a transistor, is positioned as a stand-alone element that is separate from the integrated circuit. The integrated circuit includes a sensor signal processing circuit that processes a signal of a sensor. A transistor protects the integrated circuit against a surge voltage from a battery terminal. A resistor is positioned between an output terminal of an error amplifier and a base terminal of the transistor to provide reverse connection protection. Another resistor is connected between a ground and a connection point between the above resistor and the output terminal to provide overvoltage protection for the integrated circuit. A starting resistor is connected between a collector and base of the transistor.
    • IC电源保护电路用作浪涌保护电路和反向连接保护电路。 IC电源保护电路包括位于并集成在集成电路和晶体管内的误差放大电路,被定位为与集成电路分离的独立元件。 集成电路包括处理传感器的信号的传感器信号处理电路。 晶体管保护集成电路免受来自电池端子的浪涌电压的影响。 电阻器位于误差放大器的输出端子和晶体管的基极端子之间,以提供反向连接保护。 另一个电阻连接在上述电阻和输出端之间的接地点和连接点之间,为集成电路提供过压保护。 启动电阻连接在晶体管的集电极和基极之间。