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    • 65. 发明授权
    • Method of manufacturing light emitting device
    • 制造发光器件的方法
    • US08003419B2
    • 2011-08-23
    • US12458900
    • 2009-07-27
    • Kyoung-kook KimSu-hee ChaeYoung-soo ParkTaek KimMoon-seung YangHyung-su JeongJae-chul ParkJun-youn Kim
    • Kyoung-kook KimSu-hee ChaeYoung-soo ParkTaek KimMoon-seung YangHyung-su JeongJae-chul ParkJun-youn Kim
    • H01L21/00
    • H01L33/0079H01L2924/0002H01L2924/00
    • Provided is a method of manufacturing a light emitting device from a large-area bonding wafer by using a wafer bonding method using. The method may include forming a plurality of semiconductor layers, each having an active region for emitting light, on a plurality of growth substrates. The method may also include arranging the plurality of growth substrates on which the semiconductor layers are formed on one bonding substrate and simultaneously processing each of the semiconductor layers formed on each of the growth substrates through subsequent processes. The bonding wafer may be formed of a material that reduces or prevents bending or warping due to a difference of thermal expansion coefficients between a wafer material, such as sapphire, and a bonding wafer. According to the above method, because a plurality of wafers may be processed by one process, mass production of LEDs may be possible which may reduce manufacturing costs.
    • 提供了一种使用晶片接合方法从大面积接合晶片制造发光器件的方法。 该方法可以包括在多个生长衬底上形成多个半导体层,每个半导体层具有发射光的有源区。 该方法还可以包括在其上形成半导体层的多个生长衬底布置在一个接合衬底上,并且通过后续处理同时处理在每个生长衬底上形成的每个半导体层。 接合晶片可以由减少或防止由于晶片材料(例如蓝宝石)和接合晶片之间的热膨胀系数的差异而导致的弯曲或翘曲的材料形成。 根据上述方法,由于可以通过一个处理来处理多个晶片,因此大量生产LED可能会降低制造成本。