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    • 62. 发明授权
    • Microstructure and method of manufacturing the same
    • 微结构及其制造方法
    • US08842353B2
    • 2014-09-23
    • US13047670
    • 2011-03-14
    • Takahisa Kato
    • Takahisa Kato
    • G02B26/08B81B3/00
    • G02B26/0841B81B3/0037B81B2201/038B81B2203/0163B81B2203/053G02B26/085Y10S359/904
    • A microstructure includes a substrate, a fixed supporting portion fixed to the substrate, a first movable portion, a second movable portion enhancing the rigidity of the first movable portion, and an elastic supporting portion elastically interconnecting the first movable portion and the fixed supporting portion. The second movable portion is secured to the first movable portion with a gap interposed therebetween and in such a manner as to cover the elastic supporting portion and the fixed supporting portion. The first movable portion and the second movable portion are elastically supported by the elastic supporting portion in such a manner as to be displaceable together relative to the fixed supporting portion.
    • 微结构包括基板,固定在基板上的固定支撑部分,第一可移动部分,增强第一可动部分的刚性的第二可移动部分和弹性地互连第一可移动部分和固定支撑部分的弹性支撑部分。 第二可移动部分以间隙插入第一可移动部分,并且以覆盖弹性支撑部分和固定支撑部分的方式固定。 第一可动部和第二可动部由弹性支撑部弹性地支撑,以能够相对于固定支撑部一起移位。
    • 66. 发明授权
    • Oscillating device, optical deflector and optical instrument using the same
    • 摆动装置,光学偏转器和使用其的光学仪器
    • US07474165B2
    • 2009-01-06
    • US11603058
    • 2006-11-22
    • Takahisa KatoYukio Furukawa
    • Takahisa KatoYukio Furukawa
    • G02B26/08
    • G02B26/0866G02B26/085
    • Disclosed is an oscillating device that includes an oscillating system having a plurality of oscillation movable elements, a plurality of elastically supporting portions connected to the oscillation movable elements, and a supporting member for supporting a predetermined portion of the plurality of resiliently supporting portions so that predetermined oscillation movable element or elements are resiliently supported for oscillation about a predetermined oscillation axis, the device further including a driving circuit for driving the oscillating system and a temperature adjusting element for adjusting temperature of the resiliently supporting portions, wherein the oscillating system has a plurality of natural oscillation modes of different frequencies, and wherein the driving circuit functions to oscillate the predetermined movable element about the predetermined oscillation axis, in different natural oscillation modes simultaneously.
    • 公开了一种振荡装置,其包括具有多个振动可动元件的振荡系统,连接到振动可动元件的多个弹性支撑部分,以及用于支撑多个弹性支撑部分的预定部分的支撑部件, 振动可移动元件被弹性地支撑以围绕预定的摆动轴线振荡,该装置还包括用于驱动振荡系统的驱动电路和用于调节弹性支撑部分的温度的温度调节元件,其中振荡系统具有多个 不同频率的自然振荡模式,并且其中驱动电路用于以不同的自然振荡模式同时摆动围绕预定振荡轴的预定可移动元件。
    • 67. 发明授权
    • Oscillating device, optical deflector and method of controlling the same
    • 摆动装置,光学偏转器及其控制方法
    • US07436566B2
    • 2008-10-14
    • US11603060
    • 2006-11-22
    • Takahisa KatoYukio Furukawa
    • Takahisa KatoYukio Furukawa
    • G02B26/08
    • G02B26/105G02B26/127
    • An oscillating device such as an optical deflector, by which a resonance frequency of an oscillating system can be adjusted and controlled. In one preferred embodiment, the oscillating device includes an oscillating system, a stationary member for holding the oscillating system, and a driving system having a coil, for driving the oscillating system. The oscillating system includes a movable element, a supporting member and a resiliently supporting portion, wherein the movable element is resiliently supported relative to the supporting member by the resiliently supporting portion for oscillating motion about an oscillation axis. The supporting member is fixed to the stationary member. The amount of heat generation of the coil can be controlled by applying, to the coil, a heating electric current of a frequency different from the natural oscillation mode frequency of the oscillating system, whereby the temperature of the oscillating system can be controlled.
    • 诸如光偏转器的振荡装置,可以调节和控制振荡系统的共振频率。 在一个优选实施例中,振荡装置包括振荡系统,用于保持振荡系统的固定构件和具有用于驱动振荡系统的线圈的驱动系统。 振荡系统包括可移动元件,支撑构件和弹性支撑部分,其中可动元件通过弹性支撑部分相对于支撑构件弹性支撑,以围绕振荡轴线摆动。 支撑部件固定在固定部件上。 可以通过向线圈施加与振荡系统的固有振荡模式频率不同的频率的加热电流来控制线圈的发热量,从而可以控制振荡系统的温度。
    • 69. 发明申请
    • Oscillating device, optical deflector and optical instrument using the same
    • 摆动装置,光学偏转器和使用其的光学仪器
    • US20070115072A1
    • 2007-05-24
    • US11603058
    • 2006-11-22
    • Takahisa KatoYukio Furukawa
    • Takahisa KatoYukio Furukawa
    • H03L1/00
    • G02B26/0866G02B26/085
    • Disclosed is an oscillating device that includes an oscillating system having a plurality of oscillation movable elements, a plurality of elastically supporting portions connected to the oscillation movable elements, and a supporting member for supporting a predetermined portion of the plurality of resiliently supporting portions so that predetermined oscillation movable element or elements are resiliently supported for oscillation about a predetermined oscillation axis,. the device further including a driving circuit for driving the oscillating system and a temperature adjusting element for adjusting temperature of the resiliently supporting portions, wherein the oscillating system has a plurality of natural oscillation modes of different frequencies, and wherein the driving circuit functions to oscillate the predetermined movable element about the predetermined oscillation axis, in different natural oscillation modes simultaneously.
    • 公开了一种振荡装置,其包括具有多个振动可动元件的振荡系统,连接到振动可动元件的多个弹性支撑部分,以及用于支撑多个弹性支撑部分的预定部分的支撑部件, 振动可移动元件被弹性支撑以围绕预定的摆动轴线振荡。 该装置还包括用于驱动振荡系统的驱动电路和用于调节弹性支撑部分的温度的温度调节元件,其中振荡系统具有多个不同频率的固有振荡模式,并且其中驱动电路用于使 预定的可动元件围绕预定的摆动轴线,以不同的自然振荡模式同时进行。