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    • 61. 发明授权
    • Method for the heat treatment of II-VI semiconductors
    • II-VI半导体热处理方法
    • US5933751A
    • 1999-08-03
    • US12545
    • 1998-01-23
    • Ryu Hirota
    • Ryu Hirota
    • C30B29/48C30B31/02H01L21/22H01L21/385H01S5/00H01L21/00
    • H01L21/385Y10S438/909Y10S438/971
    • An object of the invention is to provide a method for the heat treatment of II-VI semiconductors such as ZnS, ZnS.sub.x Se.sub.1-x, Zn.sub.y Cd.sub.1-y Se, etc. to dope with Group III elements as a donor impurity to reduce its resistivity. This object can be attained by a method for the heat treatment of II-VI semiconductors in a closed vessel, which comprises forming a film of a Group III element as a donor impurity or a Group III element-containing compound on a surface of single crystal of II-VI semiconductors, then charging the single crystal and a Group II element for constituting the single crystal in the closed vessel and heating them in such a manner that the both are not contacted with each other.
    • 本发明的目的是提供一种用于热处理诸如ZnS,ZnSxSe1-x,ZnyCd1-ySe等的II-VI半导体的方法,以掺杂作为施主杂质的III族元素以降低其电阻率。 该目的可以通过在密闭容器中热处理II-VI半导体的方法来实现,该方法包括在单晶表面上形成作为施主杂质的III族元素的膜或含有III族元素的化合物 的II-VI半导体,然后将单晶和用于构成单晶的第II族元素装入密闭容器中,并以不使它们彼此接触的方式加热它们。