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    • 62. 发明申请
    • SCANNING ELECTRON MICROSCOPE
    • 扫描电子显微镜
    • US20120145899A1
    • 2012-06-14
    • US13313606
    • 2011-12-07
    • Kenji Matsumoto
    • Kenji Matsumoto
    • H01J37/28
    • H01J37/18H01J37/16H01J2237/162H01J2237/2006
    • A seal member to be contacted with an observation object is provided at an open end of a lens barrel so that the observation object can be attracted to the lens barrel via the seal member and fixed in direct and close contact with the lens barrel when a vacuum is created in the lens barrel by a vacuum pump. In other words, instead of providing a sample chamber, the observation object is fixed in close contact with the lens barrel to prevent relative movement therebetween by a suction force even without a sample chamber. In this configuration, the interior of the lens barrel can be maintained in a vacuum state despite the absence of a sample chamber and no adverse effect occurs during observation because the lens barrel and the observation object are not moved relative to each other by vibration.
    • 与观察对象接触的密封构件设置在镜筒的开口端,使得观察对象可以经由密封构件被吸引到镜筒并且当真空直接和紧密接触时被固定在镜筒上 通过真空泵在镜筒中产生。 换句话说,代替提供样品室,观察对象被固定成与透镜筒紧密接触,以防止即使没有样品室也可以通过吸力而相对移动。 在这种构造中,尽管没有样品室,镜筒的内部可以保持在真空状态,并且在观察期间不会发生不利影响,因为透镜镜筒和观察对象不通过振动相对于彼此移动。
    • 64. 发明申请
    • EXHAUST SYSTEM STRUCTURE OF FILM FORMATION APPARATUS, FILM FORMATION APPARATUS, AND EXHAUST GAS PROCESSING METHOD
    • 膜形成装置,膜形成装置和排气处理方法的排气系统结构
    • US20110020544A1
    • 2011-01-27
    • US12677417
    • 2008-09-01
    • Kenji Matsumoto
    • Kenji Matsumoto
    • C23C16/00
    • C23C16/4412H01L21/28556H01L21/76873Y02C20/30Y02P70/605
    • An exhaust system structure of a film formation apparatus includes an exhaust line (51) configured to discharge exhaust gas from inside a process container (11); an automatic pressure controller (52) disposed on the exhaust line (51) near the process container (11); a vacuum pump (54) disposed on the exhaust line (51) downstream from the automatic pressure controller (52); an oxidizing agent supply section (57) configured to supply an oxidizing agent into the exhaust line (51) at a position downstream from the automatic pressure controller (52); a trap mechanism (53) disposed on the exhaust line (51) downstream from the position at which the oxidizing agent is supplied and configured to collect a product generated by a reaction of the oxidizing agent with an organic metal source gas component and a by-product contained in the exhaust gas; and a detoxification unit (55) disposed on the exhaust line (51) downstream from the trap mechanism (53).
    • 成膜装置的排气系统结构包括:排气管(51),其构造成从处理容器(11)的内部排出废气; 设置在处理容器(11)附近的排气管线(51)上的自动压力控制器(52); 设置在排气管线(51)上的自动压力控制器(52)下游的真空泵(54); 构造成在所述自动压力控制器(52)的下游位置向所述排气管线(51)供给氧化剂的氧化剂供给部(57)。 捕集机构(53),其设置在所述排出管线(51)的供给所述氧化剂的位置的下游,并且构成为收集由所述氧化剂与有机金属源气体成分反应生成的物质, 废气中所含的产品; 以及设置在所述排出管线(51)上的所述收集机构(53)下游的解毒单元(55)。
    • 65. 发明申请
    • Metalannular Gasket
    • 金属垫片
    • US20100143076A1
    • 2010-06-10
    • US12312668
    • 2007-11-05
    • Kenji MatsumotoKazuhiro Takahashi
    • Kenji MatsumotoKazuhiro Takahashi
    • F16B43/00F16J15/12
    • F16B43/001F16B41/002F16J15/104Y10S277/937
    • A metal annular gasket comprising an annular metal base plate; a compound layer integrally laminated on both surfaces of the annular metal base plate, the compound layer being made of synthetic resin or a rubber material mixed with a fiber material; and an annular seal layer having a circumferential covering portion which covers the inner circumferential edge of the annular metal plate and the inner circumferential edge of both compound layers, the compound layer being made of synthetic resin or a rubber material. The annular seal layer is formed such that the surface of the annular seal layer is so connected to the surfaces of the compound layer as to provide smooth transition in its thickness direction.
    • 一种金属环形垫片,包括环形金属基板; 在环状金属基板的两面一体层叠的复合层,由合成树脂制成的复合层或与纤维材料混合的橡胶材料; 以及环状密封层,其具有覆盖环状金属板的内周缘和两个复合层的内周边缘的周向覆盖部分,复合层由合成树脂或橡胶材料制成。 环形密封层形成为使得环形密封层的表面与化合物层的表面连接,以在其厚度方向上提供平滑的过渡。
    • 67. 发明申请
    • Cylinder head gasket and combustion state detector using the same
    • 气缸盖垫片和燃烧状态检测器使用相同
    • US20090139308A1
    • 2009-06-04
    • US12285116
    • 2008-09-29
    • Kenji MatsumotoEiji TomitaSadami Yoshiyama
    • Kenji MatsumotoEiji TomitaSadami Yoshiyama
    • G01L23/22
    • F02B77/085F02F11/002F02P11/06F02P17/12F02P2017/128F16J15/064F16J15/0818F16J15/122F16J2015/0856G01L23/221
    • A cylinder head gasket, interposed between a cylinder head and a cylinder block in an engine, comprises a thin metal plate having a thickness between 0.1 and 2.0 mm, and elastic insulating sheets placed on both surfaces of the thin metal plate and each having a thickness between 0.01 and 0.5 mm, in which: created is a portion at which the thin metal plate is exposed at an inner edge side extending from an inner side of the cylinder block; and also created is an extension portion extending from the cylinder block at an outer edge side extending from an outer side of the cylinder block. Also created is a combustion state detector for detecting a combustion state of an engine, wherein the cylinder head gasket is interposed between the cylinder head and the cylinder block in the engine, the portion at which the thin metal plate is exposed is at the extension portion of the cylinder head gasket, and a signal detecting device is connected thereto.
    • 插入在发动机中的气缸盖和气缸体之间的气缸盖衬垫包括厚度在0.1和2.0mm之间的薄金属板,以及放置在薄金属板的两个表面上的弹性绝缘片,每个具有厚度 在0.01至0.5mm之间,其中:产生的是在从气缸体的内侧延伸的内边缘处薄金属板暴露的部分; 并且还形成有从气缸体在从气缸体的外侧延伸的外边缘侧延伸的延伸部。 还制造了用于检测发动机的燃烧状态的燃烧状态检测器,其中气缸盖衬垫插入在发动机中的气缸盖和气缸体之间,薄金属板暴露的部分在延伸部分 和信号检测装置连接。