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    • 64. 发明授权
    • Method for manufacturing semiconductor devices
    • 制造半导体器件的方法
    • US06350685B1
    • 2002-02-26
    • US09412200
    • 1999-10-05
    • Michio AsahinaEiji SuzukiKazuki MatsumotoNaohiro Moriya
    • Michio AsahinaEiji SuzukiKazuki MatsumotoNaohiro Moriya
    • H01L2144
    • H01L21/76846H01L21/76843H01L21/76856H01L21/76864H01L21/76888
    • A semiconductor device is manufactured by a method including the steps of forming a through hole in an interlayer dielectric layer (silicon oxide layer, BPSG layer, etc.) formed on a semiconductor substrate having a device element. A barrier layer is formed on surfaces of the interlayer dielectric layer and the through hole. A wiring layer is formed on the barrier layer. The barrier layer is formed by a method including the following steps. A titanium layer that forms at least a part of the barrier layer is formed. A heat treatment is conducted in a nitrogen atmosphere to form a titanium nitride layer at least on a surface of the titanium layer. The titanium nitride layer is contacted with oxygen in an atmosphere including oxygen. A heat treatment is conducted in a nitrogen atmosphere to form titanium oxide layers and to densify the titanium nitride layer.
    • 通过包括在形成有具有器件元件的半导体衬底上的层间电介质层(氧化硅层,BPSG层等)中形成通孔的方法制造半导体器件。 在层间电介质层和通孔的表面上形成阻挡层。 在阻挡层上形成布线层。 通过包括以下步骤的方法形成阻挡层。 形成形成阻挡层的至少一部分的钛层。 在氮气气氛中进行热处理,至少在钛层的表面上形成氮化钛层。 氮化钛层在包含氧的气​​氛中与氧接触。 在氮气气氛中进行热处理以形成氧化钛层并致密化氮化钛层。
    • 69. 发明授权
    • Composite operation type actuator
    • 复合式操作型执行器
    • US07146900B1
    • 2006-12-12
    • US11143713
    • 2005-06-03
    • Kazuki MatsumotoKazushi NomuraRyuzo Yagishita
    • Kazuki MatsumotoKazushi NomuraRyuzo Yagishita
    • F15B15/04
    • F15B15/063
    • A cylinder chamber 17 at the front of a direct-acting type actuator section 10 is connected to a cylinder chamber 37 at the front of an oscillating type actuator section 30 through a sequence valve with check valve 40. Further, a cylinder chamber 18 in the rear of the direct-acting type actuator section 10 is connected to a cylinder chamber 38 in the rear of the oscillating type actuator 30 through a stop valve 50. Ports 61 and 62 are provided for connecting passages between the cylinder chamber 37 and the sequence valve with check valve 40 and between the cylinder chamber 18 and the stop valve 50, respectively, for distribution control of a working fluid. According to the setting conditions of the respective valves 40 and 50, the piston rod 11 can perform an ordinary reciprocating motion and a motion that combines rotation and advancement.
    • 在直动式致动器部分10的前部的气缸室17通过具有止回阀40的顺序阀连接到振荡型致动器部分30的前部的气缸室37。 此外,直动式致动器部分10的后部的气缸室18通过截止阀50连接到摆动式致动器30的后部的气缸室38。 端口61和62分别设置用于连接通过止回阀40的缸室37和顺序阀之间的通道,并分别用于工作流体的分配控制。 根据各阀40,50的设定条件,活塞杆11能够进行常规的往复运动和结合旋转和前进的运动。
    • 70. 发明申请
    • COMPOSITE OPERATION TYPE ACTUATOR
    • 复合操作类型执行器
    • US20060272492A1
    • 2006-12-07
    • US11143713
    • 2005-06-03
    • Kazuki MatsumotoKazushi NomuraRyuzo Yagishita
    • Kazuki MatsumotoKazushi NomuraRyuzo Yagishita
    • F01B7/00
    • F15B15/063
    • A cylinder chamber 17 at the front of a direct-acting type actuator section 10 is connected to a cylinder chamber 37 at the front of an oscillating type actuator section 30 through a sequence valve with check valve 40. Further, a cylinder chamber 18 in the rear of the direct-acting type actuator section 10 is connected to a cylinder chamber 38 in the rear of the oscillating type actuator 30 through a stop valve 50. Ports 61 and 62 are provided for connecting passages between the cylinder chamber 37 and the sequence valve with check valve 40 and between the cylinder chamber 18 and the stop valve 50, respectively, for distribution control of a working fluid. According to the setting conditions of the respective valves 40 and 50, the piston rod 11 can perform an ordinary reciprocating motion and a motion that combines rotation and advancement.
    • 直动式致动器部分10的前部的气缸室17通过具有止回阀40的顺序阀连接到摆动式致动器部分30的前部的气缸室37.此外, 直动式致动器部分10的后部通过截止阀50连接到摆动式致动器30后部的气缸室38.端口61和62设置用于连接气缸室37和顺序阀之间的通道 分别具有止回阀40和缸室18和止回阀50之间,用于工作流体的分配控制。 根据各阀40,50的设定条件,活塞杆11能够进行常规的往复运动和结合旋转和前进的运动。