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61. 发明申请

US20090067468A1 Laser system 有权
标题翻译：激光系统
公开(公告)号：US20090067468A1
公开(公告)日：2009-03-12
申请号：US11980172
申请日：2007-10-30
申请人： Daniel J.W. Brown , William N. Partlo , Richard L. Sandstrom
发明人： Daniel J.W. Brown , William N. Partlo , Richard L. Sandstrom
IPC分类号： H01S3/22
CPC分类号： H01S3/2383 , G03F7/70583 , H01S3/0057 , H01S3/08036 , H01S3/08059 , H01S3/10092 , H01S3/225 , H01S3/2325
摘要： A method/apparatus may comprise a laser light source which may comprise a solid state seed laser system producing a seed laser output having a nominal center wavelength at a pulse repetition rate; a first and a second gas discharge laser amplifier gain medium each operating at a pulse repetition rate less than that of the seed laser system; a beam divider providing each of the respective first and second amplifier gain mediums with seed laser output pulses; a frequency converter modifying the nominal center wavelength of the output of the seed laser to essentially the nominal center wavelength of the amplifier gain medium; a beam combiner combining the outputs of the respective amplifier gain mediums to provide a light source output having the pulse repetition rate of the seed laser; a coherence buster operating on either or both of the output of the seed laser or amplifier gain mediums.
摘要翻译：方法/装置可以包括激光光源，其可以包括固态种子激光器系统，其产生具有脉冲重复率的标称中心波长的种子激光器输出; 第一和第二气体放电激光放大器增益介质，每个以比种子激光器系统的脉冲重复频率工作; 一个分束器，为每个相应的第一和第二放大器增益介质提供种子激光输出脉冲; 变频器将种子激光器的输出的标称中心波长修改为基本上放大器增益介质的标称中心波长; 组合各个放大器增益介质的输出以提供具有种子激光器的脉冲重复率的光源输出的光束组合器; 在种子激光器或放大器增益介质的输出中的任一个或两者上工作的相干致动器。

62. 发明申请

US20080151944A1 Line narrowing module 有权
标题翻译：线窄模块
公开(公告)号：US20080151944A1
公开(公告)日：2008-06-26
申请号：US12074079
申请日：2008-02-28
申请人： J. Martin Algots , Robert A. Bergstedt , Walter D. Gillespie , Vladimir A. Kulgeyko , William N. Partlo , German E. Rylov , Richard L. Sandstrom , Brian Strate , Timothy S. Dyer
发明人： J. Martin Algots , Robert A. Bergstedt , Walter D. Gillespie , Vladimir A. Kulgeyko , William N. Partlo , German E. Rylov , Richard L. Sandstrom , Brian Strate , Timothy S. Dyer
IPC分类号： H01S3/10
CPC分类号： H01S3/1055 , G03F7/70025 , G03F7/70041 , H01S3/005 , H01S3/036 , H01S3/08 , H01S3/08004 , H01S3/08059 , H01S3/097 , H01S3/106 , H01S3/2251
摘要： A line narrowing method and module for a narrow band DUV high power high repetition rate gas discharge laser producing output laser light pulse beam pulses in bursts of pulses, the module having a nominal optical path are disclosed which may comprise: a dispersive center wavelength selection optic moveably mounted within an optical path of the line narrowing module, selecting at least one center wavelength for each pulse determined at least in part by the angle of incidence of the laser light pulse beam containing the respective pulse on the dispersive wavelength selection optic; a first tuning mechanism operative in part to select the angle of incidence of the laser light pulse beam containing the respective pulse upon the dispersive center wavelength selection optic, by selecting an angle of transmission of the laser light pulse beam containing the pulse toward the dispersive center wavelength selection optic.
摘要翻译：一种用于窄带DUV大功率高重复率气体放电激光器的线窄化方法和模块，其产生具有标称光路的脉冲串中的输出激光束脉冲束脉冲，其可以包括：分散中心波长选择光学器件可移动地安装在线路窄化模块的光路内，为至少部分地由分散波长选择光学器件上包含相应脉冲的激光束的入射角确定的每个脉冲选择至少一个中心波长; 第一调谐机构部分地通过选择包含脉冲朝向分散中心的激光束的透射角度来选择包含分散中心波长选择光学器件上的各个脉冲的激光束的入射角波长选择光学元件。

63. 发明申请

US20180184509A9 EUV LIGHT SOURCE WITH SUBSYSTEM(S) FOR MAINTAINING LPP DRIVE LASER OUTPUT DURING EUV NON-OUTPUT PERIODS 审中-公开
公开(公告)号：US20180184509A9
公开(公告)日：2018-06-28
申请号：US15208548
申请日：2016-07-12
申请人： William N. Partlo , Richard L. Sandstrom , Daniel J.W. Brown , Igor V. Fomenkov
发明人： William N. Partlo , Richard L. Sandstrom , Daniel J.W. Brown , Igor V. Fomenkov
IPC分类号： H05G2/00
CPC分类号： H05G2/008 , H05G2/006
摘要： A device is disclosed herein which may comprise a droplet generator producing droplets of target material; a sensor providing an intercept time signal when a droplet reaches a preselected location; a delay circuit coupled with said sensor, the delay circuit generating a trigger signal delayed from the intercept time signal; a laser source responsive to a trigger signal to produce a laser pulse; and a system controlling said delay circuit to provide a trigger signal delayed from the intercept time by a first delay time to generate a light pulse that is focused on a droplet and a trigger signal delayed from the intercept time by a second delay time to generate a light pulse which is not focused on a droplet.

64. 发明授权

US08654438B2 Master oscillator-power amplifier drive laser with pre-pulse for EUV light source 有权
标题翻译：主振荡器 - 功率放大器驱动具有用于EUV光源的预脉冲的激光器
公开(公告)号：US08654438B2
公开(公告)日：2014-02-18
申请号：US13077236
申请日：2011-03-31
申请人： Kai-Chung Hou , Richard L. Sandstrom , William N. Partlo , Daniel J. W. Brown , Igor V. Fomenkov
发明人： Kai-Chung Hou , Richard L. Sandstrom , William N. Partlo , Daniel J. W. Brown , Igor V. Fomenkov
IPC分类号： H01S3/03
CPC分类号： H01S3/0078 , G03F7/70033 , G03F7/70175 , G03F7/70908 , G03F7/70933 , H01S3/076 , H01S3/1055 , H01S3/117 , H01S3/2232 , H05G2/008
摘要： A device is described herein which may comprise an optical amplifier having a gain band including wavelengths λ1 and λ2, with λ1≠λ2; a pre-pulse seed laser having a tuning module for tuning a pre-pulse output to wavelength λ1; a main pulse seed laser generating a laser output having wavelength, λ2; and a beam combiner for directing the pre-pulse output and the main pulse output on a common path through the optical amplifier.
摘要翻译：本文描述了可以包括具有包括λ1>λ2的波长λ1和λ2的增益带的光放大器的装置; 具有用于将预脉冲输出调谐到波长λ1的调谐模块的预脉冲种子激光器; 产生具有波长λ2的激光输出的主脉冲种子激光器; 以及用于将预脉冲输出和主脉冲输出引导到通过光放大器的公共路径上的光束组合器。

65. 发明申请

US20120080584A1 EUV LIGHT SOURCE WITH SUBSYSTEM(S) FOR MAINTAINING LPP DRIVE LASER OUTPUT DURING EUV NON-OUTPUT PERIODS 有权
标题翻译： EUV光源与用于在EUV非输出期间维护LPP驱动激光输出的子系统
公开(公告)号：US20120080584A1
公开(公告)日：2012-04-05
申请号：US13157233
申请日：2011-06-09
申请人： William N. Partlo , Richard L. Sandstrom , Daniel J.W. Brown , Igor V. Fomenkov
发明人： William N. Partlo , Richard L. Sandstrom , Daniel J.W. Brown , Igor V. Fomenkov
IPC分类号： H05G2/00 , H01L31/00 , B01J19/12
CPC分类号： G21K5/00 , G03F7/70033 , H01S3/117 , H01S3/2232 , H01S3/2308 , H05G2/008
摘要： A device is disclosed herein which may comprise a droplet generator producing droplets of target material; a sensor providing an intercept time signal when a droplet reaches a preselected location; a delay circuit coupled with said sensor, the delay circuit generating a trigger signal delayed from the intercept time signal; a laser source responsive to a trigger signal to produce a laser pulse; and a system controlling said delay circuit to provide a trigger signal delayed from the intercept time by a first delay time to generate a light pulse that is focused on a droplet and a trigger signal delayed from the intercept time by a second delay time to generate a light pulse which is not focused on a droplet.
摘要翻译：本文公开的装置可包括产生目标材料的液滴的液滴发生器; 当液滴到达预选位置时提供拦截时间信号的传感器; 与所述传感器耦合的延迟电路，所述延迟电路产生从截取时间信号延迟的触发信号; 响应于触发信号产生激光脉冲的激光源; 以及控制所述延迟电路的系统，以提供从截取时间延迟第一延迟时间的触发信号，以产生聚焦在液滴上的光脉冲和从截取时间延迟第二延迟时间的触发信号，以产生不聚焦在液滴上的光脉冲。

66. 发明申请

US20110194580A1 Line Narrowing Module 有权
标题翻译：线窄模块
公开(公告)号：US20110194580A1
公开(公告)日：2011-08-11
申请号：US13086858
申请日：2011-04-14
申请人： J. Martin Algots , Robert A. Bergstedt , William N. Partlo , German E. Rylov , Richard L. Sandstrom
发明人： J. Martin Algots , Robert A. Bergstedt , William N. Partlo , German E. Rylov , Richard L. Sandstrom
IPC分类号： H01S3/10 , G01J1/22
CPC分类号： H01S3/1055 , G03F7/70025 , G03F7/70041 , H01S3/005 , H01S3/036 , H01S3/08 , H01S3/08004 , H01S3/08059 , H01S3/097 , H01S3/106 , H01S3/2251
摘要： An apparatus is disclosed which may comprise a grating receiving light, a first prism moveable to coarsely select an angle of incidence of the light on the grating, and a second prism moveable to finely select an angle of incidence of the light on the grating. In one application, the apparatus may be used as a line narrowing module for a laser light source.
摘要翻译：公开了一种装置，其可以包括接收光的光栅，可移动以粗略地选择光栅入射角的第一棱镜，以及可精细选择光栅入射角的第二棱镜。在一个应用中，该装置可以用作激光源的线窄化模块。

67. 发明授权

US07995637B2 Gas discharge laser chamber 有权
标题翻译：气体放电激光室
公开(公告)号：US07995637B2
公开(公告)日：2011-08-09
申请号：US12603486
申请日：2009-10-21
申请人： Richard L. Sandstrom , William N. Partlo , Daniel J. W. Brown , Bryan G. Moosman , Tae H. Chung , Thomas P. Duffey , James J. Ferrell , Terance Hilsabeck
发明人： Richard L. Sandstrom , William N. Partlo , Daniel J. W. Brown , Bryan G. Moosman , Tae H. Chung , Thomas P. Duffey , James J. Ferrell , Terance Hilsabeck
IPC分类号： H01S3/22
CPC分类号： H01S3/036
摘要： One aspect of the disclosed subject matter describes a gas discharge laser chamber. The gas discharge laser chamber includes a discharge region formed between a first electrode and a second electrode, a tangential fan for circulating gas through the discharge region, wherein the fan is proximate to an input side of the discharge region, an input side acoustic baffle proximate to the input side of the discharge region. The input side acoustic baffle includes a vanishing point leading edge, a vanishing point trailing edge, a gas flow smoothing offset surface aligning a gas flow from a surface of the input side acoustic baffle to an input side of a cathode support in the discharge region, a plurality of ridges separated by a plurality of trenches, wherein the plurality of ridges and the plurality of trenches are aligned with a direction of gas flow through the discharge region and wherein the plurality of ridges have a random pitch between about 0.3 and about 0.7 inch.
摘要翻译：所公开的主题的一个方面描述了气体放电激光室。气体放电激光室包括形成在第一电极和第二电极之间的放电区域，用于使气体循环通过放电区域的切向风扇，其中风扇靠近放电区域的输入侧，输入侧隔音板接近到放电区域的输入侧。输入侧声挡板包括消失点前缘，消失点后缘，气流平滑偏移表面，使来自输入侧声挡板的表面的气流与放电区域中的阴极支撑体的输入侧对准，由多个沟槽分离的多个脊，其中所述多个脊和所述多个沟槽与通过所述放电区域的气体流动的方向对齐，并且其中所述多个脊具有约0.3和约0.7英寸之间的随机间距。

68. 发明授权

US07715459B2 Laser system 失效
标题翻译：激光系统
公开(公告)号：US07715459B2
公开(公告)日：2010-05-11
申请号：US11982152
申请日：2007-10-31
申请人： Daniel J. W. Brown , William N. Partlo , Richard L. Sandstrom
发明人： Daniel J. W. Brown , William N. Partlo , Richard L. Sandstrom
IPC分类号： H01S3/22
CPC分类号： H01S3/2308 , G03F7/70025 , G03F7/70041 , G03F7/7055 , G03F7/70575 , G03F7/70583 , H01S3/005 , H01S3/0057 , H01S3/08036 , H01S3/225 , H01S3/2325 , H01S3/2383
摘要： An apparatus/method which may comprise: a very high power line narrowed lithography laser light source which may comprise: a solid state seed laser system which may comprise: a pre-seed laser providing a pre-seed laser output; a fiber amplifier receiving the pre-seed laser output and providing an amplified seed laser pulse which may comprise: a pulse having a nominal wavelength outside of the DUV range; a frequency converter converting to essentially the wavelength of the amplifier gain medium; a first and a second gas discharge laser amplifier gain medium operating at different repetition rates from that of the seed laser output; a beam divider providing the amplifier gain mediums with output pulses from the seed laser; a beam combiner combining the outputs of each respective amplifier gain medium to provide a laser output light pulse beam having the pulse repetition rate of the solid state seed laser system.
摘要翻译：可以包括：非常高的电力线狭窄的光刻激光光源，其可以包括：固态种子激光系统，其可以包括：提供种子间激光输出的种子间激光; 接收所述种子间激光输出并提供放大的种子激光脉冲的光纤放大器，其可以包括：具有在所述DUV范围之外的标称波长的脉冲; 变换器基本上转换为放大器增益介质的波长; 第一和第二气体放电激光放大器增益介质，与种子激光输出的重复频率不同; 一个分束器，为放大器增益介质提供来自种子激光器的输出脉冲; 组合各个放大器增益介质的输出的光束组合器，以提供具有固态种子激光器系统的脉冲重复率的激光输出光脉冲光束。

69. 发明申请

US20100097704A1 Line narrowing module 审中-公开
标题翻译：线窄模块
公开(公告)号：US20100097704A1
公开(公告)日：2010-04-22
申请号：US12653584
申请日：2009-12-14
申请人： J. Martin Algots , Robert A. Bergstedt , Walter D. Gillespie , Vladimir A. Kulgeyko , William N. Partlo , German E. Rylov , Richard L. Sandstrom , Brian Strate , Timothy S. Dyer
发明人： J. Martin Algots , Robert A. Bergstedt , Walter D. Gillespie , Vladimir A. Kulgeyko , William N. Partlo , German E. Rylov , Richard L. Sandstrom , Brian Strate , Timothy S. Dyer
IPC分类号： G02B27/44
CPC分类号： H01S3/1055 , G03F7/70025 , G03F7/70041 , H01S3/005 , H01S3/036 , H01S3/08 , H01S3/08004 , H01S3/08059 , H01S3/097 , H01S3/106 , H01S3/2251
摘要： An apparatus is disclosed which may comprise a grating receiving light, a first prism moveable to coarsely select an angle of incidence of the light on the grating, and a second prism moveable to finely select an angle of incidence of the light on the grating. In one application, the apparatus may be used as a line narrowing module for a laser light source.
摘要翻译：公开了一种装置，其可以包括接收光的光栅，可移动以粗略地选择光栅入射角的第一棱镜，以及可精细选择光栅入射角的第二棱镜。在一个应用中，该装置可以用作激光源的线窄化模块。

70. 发明授权

US07643529B2 Laser system 有权
标题翻译：激光系统
公开(公告)号：US07643529B2
公开(公告)日：2010-01-05
申请号：US11982103
申请日：2007-10-31
申请人： Daniel J. W. Brown , William N. Partlo , Richard L. Sandstrom
发明人： Daniel J. W. Brown , William N. Partlo , Richard L. Sandstrom
IPC分类号： H01S3/22
CPC分类号： G03F7/70341 , G03F7/70025 , G03F7/70041 , G03F7/7055 , H01S3/005 , H01S3/0057 , H01S3/08004 , H01S3/08009 , H01S3/083 , H01S3/10092 , H01S3/225 , H01S3/2251 , H01S3/2258 , H01S3/2333 , H01S3/2383 , H01S2301/02
摘要： An apparatus/method may comprise a line narrowed pulsed lithography laser light source which may comprise: a seed pulse providing laser system which may comprise: a first pulsed seed laser producing seed pulses at a rate of X kHz; a second pulsed seed laser producing seed pulses at a rate of X kHz; an amplification system which may comprise: a first amplifier gain system which may comprise a first and a second pulsed gas discharge amplifier gain medium, each with a nominal center wavelength in the UV range, and each operating at ½ X kHz on output pulses from the first seed laser; a second amplifier gain system which may comprise a first and a second pulsed amplifier gain medium, each with a nominal center wavelength in the UV range, and each operating at ½ X kHz on output pulses from the second seed laser.
摘要翻译：一种装置/方法可以包括线窄的脉冲光刻激光光源，其可以包括：提供激光系统的种子脉冲，其可以包括：以X kHz的速率产生种子脉冲的第一脉冲种子激光器; 第二脉冲种子激光器以XkHz的速率产生种子脉冲; 放大系统，其可以包括：第一放大器增益系统，其可以包括第一和第二脉冲气体放电放大器增益介质，每个具有在UV范围内的标称中心波长，并且每个在来自第一种子激光; 第二放大器增益系统，其可以包括第一和第二脉冲放大器增益介质，每个具有在UV范围内的标称中心波长，并且每个在来自第二种子激光器的输出脉冲上以1/2 X kHz工作。

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