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61. 发明授权

US07161730B2 System and method for providing thermal compensation for an interferometric modulator display 有权
标题翻译：用于为干涉式调制器显示器提供热补偿的系统和方法
公开(公告)号：US07161730B2
公开(公告)日：2007-01-09
申请号：US11188130
申请日：2005-07-22
申请人： Philip D. Floyd
发明人： Philip D. Floyd
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , G02B7/008
摘要： Various embodiments of the invention relate to methods and systems for thermal compensation of a MEMS device. In certain embodiments, an interferometric modulator includes a first electrode and a flexible second electrode situated on a substrate. The flexible second electrode is a movable layer that can comprise aluminum or an aluminum-containing material, while the substrate can comprise glass. When the interferometric modulator undergoes a temperature change, the difference in thermal expansion rates results in a decrease in the tensile strain on the movable layer. Embodiments of the present invention provide a film configured to compensate for the thermal expansion. The film has a thermal expansion coefficient less than the substrate so as to compensate for expansion of the movable layer with respect to the substrate when the MEMS is exposed to thermal energy. The film compensates for mismatch in thermal expansion between the materials of the substrate and movable layer so as to inhibit undesirable optical characteristics.
摘要翻译：本发明的各种实施例涉及用于MEMS装置的热补偿的方法和系统。在某些实施例中，干涉式调制器包括位于衬底上的第一电极和柔性第二电极。柔性第二电极是可以包括铝或含铝材料的可移动层，而基底可以包括玻璃。当干涉式调制器经历温度变化时，热膨胀率差导致可移动层上的拉伸应变减小。本发明的实施例提供了构造成补偿热膨胀的膜。该膜的热膨胀系数小于衬底，以便当MEMS暴露于热能时补偿可移动层相对于衬底的膨胀。该膜补偿基板和可移动层的材料之间的热膨胀失配，从而抑制不期望的光学特性。

62. 发明授权

US06282220B1 Red, infrared, and blue stacked laser diode array by water fusion 有权
标题翻译：红色，红外和蓝色堆叠激光二极管阵列通过水融合
公开(公告)号：US06282220B1
公开(公告)日：2001-08-28
申请号：US09604457
申请日：2000-06-27
申请人： Philip D. Floyd
发明人： Philip D. Floyd
IPC分类号： H01S500
CPC分类号： B82Y20/00 , H01S5/0215 , H01S5/34326 , H01S5/34333 , H01S5/4043 , H01S5/4087
摘要： An infrared laser structure is stacked on top of a red laser structure with both having an inverted or p-side down orientation. The red/infrared stack laser structure is inverted and wafer fused to a blue laser structure to form a red/infrared/blue monolithic laser structure. The top semiconductor layer of the inverted red/infrared stack laser structure is a GaInP fusion bonding layer which will be wafer fused to the top semiconductor layer of the blue laser structure which is a GaN cladding/contact layer.
摘要翻译：红外激光结构堆叠在红色激光器结构的顶部上，具有倒置或p侧向下取向。红色/红外线堆叠激光器结构被反转并且晶片与蓝色激光器结构融合以形成红/红/蓝单片激光器结构。反向红/红外线堆叠激光器结构的顶部半导体层是GaInP熔接层，其将晶片熔合到作为GaN包层/接触层的蓝色激光结构的顶部半导体层。

63. 发明授权

US6160833A Blue vertical cavity surface emitting laser 失效
标题翻译：蓝色垂直腔表面发射激光
公开(公告)号：US6160833A
公开(公告)日：2000-12-12
申请号：US73707
申请日：1998-05-06
申请人： Philip D. Floyd , Daniel Hofstetter
发明人： Philip D. Floyd , Daniel Hofstetter
IPC分类号： H01L33/00 , H01S5/00 , H01S5/02 , H01S5/183 , H01S5/22 , H01S5/323 , H01S5/343 , H01S3/08
CPC分类号： H01S5/34333 , B82Y20/00 , H01S5/0207 , H01S5/0213 , H01S5/0425 , H01S5/18341 , H01S5/18369 , H01S2304/00 , H01S2304/04
摘要： The present invention provides an independently addressable, vertical cavity surface emitting laser ("VCSEL") in the blue wavelength range of 390 to 430 nanometers. The gallium nitride-based laser structure is grown by selective area epitaxy and lateral mask overgrowth. By appropriate patterning of a dielectric mask on the gallium nitride layer on a sapphire substrate, areas in a second gallium nitride layer can have a low defect density upon which the remainder of the laser structure can be formed.
摘要翻译：本发明提供了在390至430纳米的蓝色波长范围内的可独立寻址的垂直腔表面发射激光器（“VCSEL”）。通过选择性面积外延和侧面掩模过度生长来生长氮化镓基激光器结构。通过在蓝宝石衬底上的氮化镓层上适当地构图介质掩模，第二氮化镓层中的区域可以具有低的缺陷密度，可以形成激光结构的其余部分。

64. 发明授权

US08340615B2 Selectable capacitance circuit 失效
标题翻译：可选电容电路
公开(公告)号：US08340615B2
公开(公告)日：2012-12-25
申请号：US12692487
申请日：2010-01-22
申请人： Philip D. Floyd
发明人： Philip D. Floyd
IPC分类号： H04B1/06
CPC分类号： G02B26/001 , Y10T29/49124
摘要： A voltage-controlled capacitor and methods for forming the same are described. A mechanical conductor membrane of the voltage-controlled capacitor is movable to and from a first position and a second position. An amount of capacitance can vary with the movement of the mechanical conductor membrane. A microelectromechanical systems (MEMS) voltage-controlled capacitor can be used in a variety of applications, such as, but not limited to, RF switches and RF attenuators.
摘要翻译：描述了压控电容器及其形成方法。压控电容器的机械导体膜可移动到第一位置和第二位置。电容量可随着机械导体膜的移动而变化。微机电系统（MEMS）压控电容器可用于各种应用中，例如但不限于RF开关和RF衰减器。

65. 发明申请

US20120127556A1 METHOD AND SYSTEM FOR PACKAGING A DISPLAY 审中-公开
标题翻译：用于包装显示器的方法和系统
公开(公告)号：US20120127556A1
公开(公告)日：2012-05-24
申请号：US13353132
申请日：2012-01-18
申请人： Brian J. Gally , William J. Cummings , Lauren Palmateer , Philip D. Floyd , Clarence Chui
发明人： Brian J. Gally , William J. Cummings , Lauren Palmateer , Philip D. Floyd , Clarence Chui
IPC分类号： G02B26/00 , B32B38/16
CPC分类号： B81B7/0067 , B81B2201/045 , B81C2203/0109 , B81C2203/0145 , B81C2203/019 , G02B26/001
摘要： A package structure and method of packaging for an interferometric modulator. A transparent substrate having an interferometric modulator formed thereon is provided. A backplane is joined to the transparent substrate with a seal where the interferometric modulator is exposed to the surrounding environment through an opening in either the backplane or the seal. The opening is sealed after the transparent substrate and backplane are joined and after any desired desiccant, release material, and/or self-aligning monolayer is introduced into the package structure.
摘要翻译：用于干涉式调制器的封装结构和封装方法。提供了其上形成有干涉式调制器的透明基板。背板通过密封件连接到透明基板上，其中干涉式调制器通过背板或密封件中的开口暴露于周围环境。在透明基板和背板接合之后，并且在任何期望的干燥剂，剥离材料和/或自对准单层被引入到包装结构中之后，将开口密封。

66. 发明申请

US20110261037A1 ACTIVE MATRIX PIXELS WITH INTEGRAL PROCESSOR AND MEMORY UNITS 审中-公开
标题翻译：具有集成处理器和存储单元的主动矩阵像素
公开(公告)号：US20110261037A1
公开(公告)日：2011-10-27
申请号：US13092087
申请日：2011-04-21
申请人： Alok Govil , Tsongming Kao , Marc M. Mignard , SuryaPrakash Ganti , Philip D. Floyd , Manish Kothari
发明人： Alok Govil , Tsongming Kao , Marc M. Mignard , SuryaPrakash Ganti , Philip D. Floyd , Manish Kothari
IPC分类号： G06F3/038
CPC分类号： G09G3/3466 , G09G5/395 , G09G2300/0809 , G09G2300/0842 , G09G2340/12
摘要： This disclosure provides methods, systems and apparatus for storing and processing image data at the pixel using augmented active matrix pixels. Some implementations of a display device may include a substrate, an array of display elements associated with the substrate and configured to display an image, an array of processor units associated with the substrate, wherein each processor unit is configured to process image data for a respective portion of the display elements and an array of memory units associated with the array of processor units, wherein each memory unit is configured to store data for a respective portion of the display elements. Some implementations may enable color processing image data at the pixel, layering of image data at the pixel or temporal modulation of image data at the pixel. Further, in some implementations, the display element may be an interferometric modulator (IMOD). Some other implementations may additionally include a display, a processor configured to communicate with the display and a memory device that is configured to communicate with the processor.
摘要翻译：本公开提供了使用增强的有源矩阵像素在像素处存储和处理图像数据的方法，系统和装置。显示设备的一些实施方式可以包括衬底，与衬底相关联并被配置为显示图像的显示元件的阵列，与衬底相关联的处理器单元的阵列，其中每个处理器单元被配置为处理相应的图像数据显示元件的一部分和与处理器单元阵列相关联的存储器单元的阵列，其中每个存储器单元被配置为存储用于显示元件的相应部分的数据。一些实施方式可以实现在像素处的图像数据的颜色处理，像素处的图像数据的分层或像素处的图像数据的时间调制。此外，在一些实现中，显示元件可以是干涉式调制器（IMOD）。一些其它实现可以另外包括显示器，被配置为与显示器通信的处理器和被配置为与处理器通信的存储器设备。

67. 发明授权

US07881686B2 Selectable Capacitance Circuit 有权
标题翻译：可选电容电路
公开(公告)号：US07881686B2
公开(公告)日：2011-02-01
申请号：US12698907
申请日：2010-02-02
申请人： Philip D. Floyd
发明人： Philip D. Floyd
IPC分类号： H04B1/06
CPC分类号： G02B26/001 , G09G3/346 , G09G3/3466 , G09G3/3473 , G09G2300/06 , H01G5/18 , H01G5/40
摘要： A voltage-controlled capacitor and methods for forming the same are described. A mechanical conductor membrane of the voltage-controlled capacitor is movable to and from a first position and a second position. An amount of capacitance can vary with the movement of the mechanical conductor membrane. A microelectromechanical systems (MEMS) voltage-controlled capacitor can be used in a variety of applications, such as, but not limited to, RF switches and RF attenuators.
摘要翻译：描述了压控电容器及其形成方法。压控电容器的机械导体膜可移动到第一位置和第二位置。电容量可随着机械导体膜的移动而变化。微机电系统（MEMS）压控电容器可用于各种应用中，例如但不限于RF开关和RF衰减器。

68. 发明授权

US07701631B2 Device having patterned spacers for backplates and method of making the same 失效
标题翻译：具有用于背板的图案化间隔件的装置及其制造方法
公开(公告)号：US07701631B2
公开(公告)日：2010-04-20
申请号：US11074253
申请日：2005-03-07
申请人： Philip D. Floyd , Brian W. Arbuckle
发明人： Philip D. Floyd , Brian W. Arbuckle
IPC分类号： G02B26/00
CPC分类号： B81C1/00269 , B81B2201/042 , B81C2203/019 , B81C2203/032 , G02B26/001
摘要： Described herein are systems, devices, and methods relating to packaging electronic devices, for example, microelectromechanical systems (MEMS) devices, including optical modulators such as interferometric optical modulators. The packaging system disclosed herein comprises a patterned spacer that, in some embodiments, is fabricated using thin-film methods. In some embodiments, the spacer together with a substrate and backplate package an electronic device.
摘要翻译：这里描述了与包装电子设备有关的系统，设备和方法，例如包括光学调制器（例如干涉式光学调制器）的微机电系统（MEMS）设备。本文公开的包装系统包括在一些实施例中使用薄膜方法制造的图案化间隔物。在一些实施例中，间隔件与基板和背板一起包装电子装置。

69. 发明申请

US20100080890A1 APPARATUS AND METHOD FOR REDUCING SLIPPAGE BETWEEN STRUCTURES IN AN INTERFEROMETRIC MODULATOR 有权
公开(公告)号：US20100080890A1
公开(公告)日：2010-04-01
申请号：US12631194
申请日：2009-12-04
申请人： Ming-Hau Tung , Brian W. Arbuckle , Philip D. Floyd , Williams J. Cummings
发明人： Ming-Hau Tung , Brian W. Arbuckle , Philip D. Floyd , Williams J. Cummings
IPC分类号： B05D5/12 , B05D5/06 , G02B26/00
CPC分类号： G02B26/001
摘要： A support structure within an interferometric modulator device may contact various other structures within the device. Increased bond strengths between the support structure and the other structures may be achieved in various ways, such as by providing roughened surfaces and/or adhesive materials at the interfaces between the support structures and the other structures. In an embodiment, increased adhesion is achieved between a support structure and a substrate layer. In another embodiment, increased adhesion is achieved between a support structure and a moveable layer. Increased adhesion may reduce undesirable slippage between the support structures and the other structures to which they are attached within the interferometric modulator.

70. 发明申请

US20090218312A1 METHOD AND SYSTEM FOR XENON FLUORIDE ETCHING WITH ENHANCED EFFICIENCY 审中-公开
标题翻译：用于提高氙气氟化物蚀刻的方法和系统
公开(公告)号：US20090218312A1
公开(公告)日：2009-09-03
申请号：US12467942
申请日：2009-05-18
申请人： Philip D. Floyd , William J. Cummings
发明人： Philip D. Floyd , William J. Cummings
IPC分类号： B44C1/22
CPC分类号： H01L21/3065 , B81B2201/047 , B81C1/00531 , B81C2201/0142 , B81C2201/056 , G02B26/001 , H01L21/32135 , H01L21/67069
摘要： Provided herein is an apparatus and a method useful for manufacturing MEMS devices. An aspect of the disclosed apparatus provides a substrate comprising an etchable material exposed to a solid-state etchant, wherein the substrate and the solid-state etchant are disposed in an etching chamber. In some embodiments, the solid state etchant is moved into close proximity to the substrate. In other embodiments, a configurable partition is between the substrate and the solid-state etchant is opened. The solid-state etchant forms a gas-phase etchant suitable for etching the etchable material. In some preferred embodiments, the solid-state etchant is solid xenon difluoride. The apparatus and method are advantageously used in performing a release etch in the fabrication of optical modulators.
摘要翻译：本文提供了一种用于制造MEMS装置的装置和方法。所公开的装置的一个方面提供了一种包括暴露于固态蚀刻剂的可蚀刻材料的衬底，其中衬底和固态蚀刻剂设置在蚀刻室中。在一些实施例中，固态蚀刻剂移动到靠近基板的位置。在其它实施例中，可配置的分隔件在基板之间并且打开固态蚀刻剂。固态蚀刻剂形成适于蚀刻可蚀刻材料的气相蚀刻剂。在一些优选的实施方案中，固态蚀刻剂是固体氙二氟化物。该装置和方法有利地用于在光学调制器的制造中执行释放蚀刻。

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