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61. 发明授权

US06361645B1 Method and device for compensating wafer bias in a plasma processing chamber 有权
标题翻译：用于补偿等离子体处理室中的晶片偏置的方法和装置
公开(公告)号：US06361645B1
公开(公告)日：2002-03-26
申请号：US09169017
申请日：1998-10-08
申请人： Alan M. Schoepp , Robert E. Knop , Christopher H. Olson , Michael S. Barnes , Tuan M. Ngo
发明人： Alan M. Schoepp , Robert E. Knop , Christopher H. Olson , Michael S. Barnes , Tuan M. Ngo
IPC分类号： H02N1300
CPC分类号： H01J37/32706 , H01J37/3299 , H01L21/6833
摘要： Disclosed is a method and device for compensating a bias voltage on a wafer disposed over an electrostatic chuck in a processing chamber of a plasma processing system. The plasma processing system includes an electrostatic and RF power supplies that are coupled to the electrostatic chuck. The bias compensation device includes a voltage converter, a storage unit, and a voltage adjusting circuitry. The voltage converter is coupled to the electrostatic chuck for detecting a voltage Vpp of the electrostatic chuck. The voltage converter converts the detected voltage to a lower voltage Vref. The storage unit stores a predetermined slope and a predetermined offset of a calibration curve, which is derived by fitting a plurality of wafer bias voltages as a function of electrostatic chuck voltages.
摘要翻译：公开了一种用于补偿在等离子体处理系统的处理室中设置在静电卡盘上的晶片上的偏置电压的方法和装置。等离子体处理系统包括耦合到静电卡盘的静电和RF电源。偏置补偿装置包括电压转换器，存储单元和电压调节电路。电压转换器耦合到静电卡盘，用于检测静电卡盘的电压Vpp。电压转换器将检测到的电压转换成较低的电压Vref。存储单元存储通过拟合作为静电卡盘电压的函数的多个晶片偏置电压导出的校准曲线的预定斜率和预定偏移。

62. 发明授权

US5803107A Method and apparatus for pressure control in vacuum processors 失效
标题翻译：真空处理器中压力控制的方法和装置
公开(公告)号：US5803107A
公开(公告)日：1998-09-08
申请号：US627711
申请日：1996-03-29
申请人： Farro Frank Kaveh , Michael S. Barnes , Brett C. Richardson , Christopher H. Olson
发明人： Farro Frank Kaveh , Michael S. Barnes , Brett C. Richardson , Christopher H. Olson
IPC分类号： H01L21/302 , B01J3/02 , F16K31/12 , F16K31/36 , G05D16/20 , H01L21/3065 , F17D1/16 , F16K17/34 , F17D1/18
CPC分类号： G05D16/202 , Y10S438/909 , Y10T137/0396 , Y10T137/2572 , Y10T137/7761
摘要： A method and apparatus is disclosed for controlling the pressure of reaction chamber in wafer processing equipment. The disclosed apparatus and method uses a ballast port for inserting gas into the evacuation system, thereby controlling the pressure in the reaction chamber. The disclosed apparatus and method further uses estimation curves to estimate the desired position of a controlled gate valve which is located between the reaction chamber and turbo pump. The disclosed apparatus and method further introduces process gases at higher rate than set point levels to reduce the transition time or stabilization time required when raising the pressure in the reaction chamber.
摘要翻译：公开了一种用于控制晶片加工设备中的反应室的压力的方法和装置。所公开的装置和方法使用用于将气体插入抽空系统中的压载端口，从而控制反应室中的压力。所公开的装置和方法还使用估计曲线来估计位于反应室和涡轮泵之间的受控闸阀的期望位置。所公开的装置和方法进一步介绍了比设定点水平更高的处理气体，以减少在提高反应室中的压力时所需的过渡时间或稳定时间。

63. 发明授权

US5689215A Method of and apparatus for controlling reactive impedances of a matching network connected between an RF source and an RF plasma processor 失效
标题翻译：用于控制连接在RF源和RF等离子体处理器之间的匹配网络的无功阻抗的方法和装置
公开(公告)号：US5689215A
公开(公告)日：1997-11-18
申请号：US652037
申请日：1996-05-23
申请人： Brett Richardson , Tuan Ngo , Michael S. Barnes
发明人： Brett Richardson , Tuan Ngo , Michael S. Barnes
IPC分类号： H05H1/46 , H01J37/32 , H01L21/302 , H01L21/3065 , H03H7/40
CPC分类号： H01J37/32174 , H01J37/32082 , H03H7/40
摘要： An r.f. field is supplied by a reactive impedance element to a plasma in a vacuum plasma processing chamber. The element and source are connected via a matching network including first and second variable reactances that control loading of the source and tuning a load, including the reactive impedance element and the plasma, to the source. The values of the first and second variable reactances are changed to determine the amount the first variable reactance is to change for each unit change of the second variable reactance to attain the best match between the impedances seen looking into and out of output terminals of the r.f. source. Then the values of the first and second variable reactances are varied simultaneously based on the determination until the best impedance match between the impedances seen looking into and out of output terminals of the r.f. source is attained.
摘要翻译：一个r.f. 场由无功阻抗元件提供给真空等离子体处理室中的等离子体。元件和源通过匹配网络连接，该匹配网络包括控制源的负载并将负载（包括无功阻抗元件和等离子体）调谐到源的第一和第二可变电抗。改变第一和第二可变电抗的值，以确定第二可变电抗的每个单位变化的第一可变电抗量的变化量，以获得看见和看出r.f的输出端之间的阻抗之间的最佳匹配。资源。然后，基于确定，第一和第二可变电抗的值同时变化，直到看到的进入和退出r.f的输出端之间的阻抗之间的最佳阻抗匹配。来源达到。

64. 发明授权

US5561585A Electrostatic chuck with reference electrode 失效
公开(公告)号：US5561585A
公开(公告)日：1996-10-01
申请号：US470612
申请日：1995-06-06
申请人： Michael S. Barnes , John H. Keller , Joseph S. Logan , Robert E. Tompkins , Robert P. Westerfield, Jr.
发明人： Michael S. Barnes , John H. Keller , Joseph S. Logan , Robert E. Tompkins , Robert P. Westerfield, Jr.
IPC分类号： B23Q3/15 , H01L21/683 , H02N13/00
CPC分类号： H02N13/00 , H01L21/6831 , Y10T279/23
摘要： An electrostatic chuck has its electrodes biased with respect to the self-bias potential induced by the plasma on the wafer, thereby providing improved resistance to breakdown in spite of variation of the wafer potential during processing. An alternate embodiment further suppresses the formation of vacuum arcs between the back of the wafer being processed and the body of the chuck by the interposition of a conductive guard ring at the self-bias potential, thereby defining an equipotential area between the closest electrode and the wafer.

65. 发明授权

US5467249A Electrostatic chuck with reference electrode 失效
标题翻译：带参考电极的静电吸盘
公开(公告)号：US5467249A
公开(公告)日：1995-11-14
申请号：US169903
申请日：1993-12-20
申请人： Michael S. Barnes , John H. Keller , Joseph S. Logan , Robert E. Tompkins , Robert P. Westerfield, Jr.
发明人： Michael S. Barnes , John H. Keller , Joseph S. Logan , Robert E. Tompkins , Robert P. Westerfield, Jr.
IPC分类号： B23Q3/15 , H01L21/683 , H02N13/00
CPC分类号： H02N13/00 , H01L21/6831 , Y10T279/23
摘要： An electrostatic chuck has its electrodes biased with respect to the self-bias potential induced by the plasma on the wafer, thereby providing improved resistance to breakdown in spite of variation of the wafer potential during processing, further suppressing the formation of vacuum arcs between the back of the wafer being processed and the body of the chuck by the interposition of a conductive guard ring at the self-bias potential, thereby defining an equipotential area between the closest electrode and the wafer.
摘要翻译：静电卡盘的电极相对于由晶片上的等离子体引起的自偏置电位偏置，从而提供改进的击穿耐性，尽管在处理期间晶片电位发生变化，进一步抑制了背面之间的真空电弧的形成通过插入导电保护环处于自偏压电位，从而在最近的电极和晶片之间限定等电位区域来处理正在处理的晶片和卡盘的主体。

66. 发明授权

US5390719A Canopy assembly pivotable by over-height vehicle 失效
标题翻译：机架组件可由超高度车辆转动
公开(公告)号：US5390719A
公开(公告)日：1995-02-21
申请号：US103691
申请日：1993-08-10
申请人： Michael S. Barnes
发明人： Michael S. Barnes
IPC分类号： E04H14/00 , G08B13/08
CPC分类号： E04H14/00
摘要： A canopy assembly for use at fast food restaurants or the like and beneath which vehicles normally drive. An over-height impact bar is carried by a frame of the canopy assembly and when struck, first energizes an alarm and then travels over a first lost motion distance enabling a driver to react to the alarm and stop the vehicle before it strikes the canopy. Should the driver not stop, the impact bar travels a second lost motion distance to cause a latch to be unlatched and permit the assembly to be swung by the oncoming vehicle clear of its path of movement.
摘要翻译：用于快餐店等的车顶组件，以及车辆正常驾驶的下盖。一个超高度的撞击杆由机架组件的框架承载，并且当被撞击时，首先给报警器通电，然后行驶在第一个丢失的运动距离上，使得驾驶员能够对报警器作出反应并在车辆撞到机盖之前停止。如果驾驶员不停止，撞击杆行驶第二个失去的运动距离，以使闩锁解锁，并允许组装由对方车辆摆脱其移动路径。

67. 发明申请

US20180090036A1 Drive-Through Order Point 审中-公开
公开(公告)号：US20180090036A1
公开(公告)日：2018-03-29
申请号：US15274563
申请日：2016-09-23
申请人： Michael S. Barnes
发明人： Michael S. Barnes
IPC分类号： G09F7/18 , G09F13/22
摘要： An order point can be employed in a drive-through or similar setting. The order point can have one or more rotatable menu cases. Each rotatable menu case can include two opposing sides that are equally configured to display a menu. The menu case can be mounted to the order point in a manner that allows either side of the menu case to be rotated into a forward facing position. The menu case can also include angle stops which limit the range of rotation of the menu case and retain the menu case in the forward facing positions. The order point may also include a pivoting canopy which functions to shade the menu cases as well as to prevent damage when a vehicle is too tall.

68. 发明授权

US09857618B2 Display enclosure with passive cooling system 有权
公开(公告)号：US09857618B2
公开(公告)日：2018-01-02
申请号：US14715265
申请日：2015-05-18
申请人： Michael S. Barnes
发明人： Michael S. Barnes
IPC分类号： H05K5/00 , G02F1/1333 , H05K7/20
CPC分类号： G02F1/133385 , H05K7/20972
摘要： A display enclosure can include a passive cooling system that includes an exhaust channel and a number of fans. The configuration of the exhaust channel can cause airflow to ingress through one side of the display enclosure, circulate through the display enclosure, and then egress through the same side. The exhaust channel can be positioned around the outer edges of the display enclosure to form an insulative barrier to external heat (e.g., sunlight) while at the same time removing heat generated internally.

69. 发明申请

US20160345464A1 Display Enclosure with Passive Cooling System 审中-公开
标题翻译：带被动冷却系统的显示器外壳
公开(公告)号：US20160345464A1
公开(公告)日：2016-11-24
申请号：US14715265
申请日：2015-05-18
申请人： Michael S. Barnes
发明人： Michael S. Barnes
IPC分类号： H05K7/20
CPC分类号： G02F1/133385 , H05K7/20972
摘要： A display enclosure can include a passive cooling system that includes an exhaust channel and a number of fans. The configuration of the exhaust channel can cause airflow to ingress through one side of the display enclosure, circulate through the display enclosure, and then egress through the same side. The exhaust channel can be positioned around the outer edges of the display enclosure to form an insulative barrier to external heat (e.g., sunlight) while at the same time removing heat generated internally.
摘要翻译：显示器壳体可以包括被动冷却系统，其包括排气通道和多个风扇。排气通道的配置可能导致气流进入显示器外壳的一侧，循环通过显示器外壳，然后通过同一侧排出。排气通道可以围绕显示器外壳的外边缘定位，以形成对外部热（例如太阳光）的绝缘屏障，同时去除内部产生的热量。

70. 发明申请

US20140043302A1 Manual Switch System for Outputting Multimedia Content to a Digital Sign 有权
标题翻译：用于将多媒体内容输出到数字标牌的手动切换系统
公开(公告)号：US20140043302A1
公开(公告)日：2014-02-13
申请号：US13569498
申请日：2012-08-08
申请人： Michael S. Barnes
发明人： Michael S. Barnes
IPC分类号： G09G5/00
CPC分类号： G09G5/003 , G09G2380/14
摘要： The present invention extends to a manual switch system for selecting multimedia content from one or various source inputs to be provided to a digital display. The manual switch system of the present invention provides a compact, convenient, and simple to use solution for updating a digital display in many environments. In a particular example, the manual switch can be used within a fast food restaurant to quickly and easily update the menu such as when the restaurant switches from serving breakfast to lunch or dinner.
摘要翻译：本发明延伸到用于从要提供给数字显示器的一个或多个源输入中选择多媒体内容的手动切换系统。本发明的手动开关系统提供了在许多环境中更新数字显示器的紧凑，方便且易于使用的解决方案。在一个特定的例子中，手动开关可以在快餐店内使用，以便快速方便地更新菜单，例如餐厅从供应早餐切换到午餐或晚餐时。

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