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    • 61. 发明申请
    • PATTERN INSPECTION APPARATUS AND METHOD
    • 图案检查装置及方法
    • US20090129664A1
    • 2009-05-21
    • US12274034
    • 2008-11-19
    • Hideo TsuchiyaTakayuki Abe
    • Hideo TsuchiyaTakayuki Abe
    • G06K9/00
    • G06T7/001G06T2207/30148
    • A pattern inspection apparatus includes a stage configured to mount thereon a target workpiece to be inspected where patterns are formed, at least one sensor configured to move relatively to the stage and capture optical images of the target workpiece to be inspected, a first comparing unit configured to compare first pixel data of an optical image captured by one of the at least one sensor with first reference data at a position corresponding to a position of the first pixel data, and a second comparing unit configured to compare second pixel data of an optical image captured by one of the at least one sensor at a position shifted by a sub-pixel unit from the position where the optical image of the first pixel data is captured, with second reference data at a position corresponding to the position of the second pixel data.
    • 图案检查装置包括:被配置为在其上安装待检查的目标工件的台阶,其中形成图案;至少一个传感器,被配置为相对于所述台移动并捕获待检查的目标工件的光学图像;第一比较单元, 将由所述至少一个传感器中的一个传感器捕获的光学图像的第一像素数据与对应于所述第一像素数据的位置的位置处的第一参考数据进行比较;以及第二比较单元,被配置为比较光学图像的第二像素数据 在与从第一像素数据的光学图像被捕获的位置移位的位置处的至少一个传感器中的一个被捕获的第二参考数据在与第二像素数据的位置相对应的位置处 。
    • 63. 发明申请
    • Rotation detecting method and apparatus and photo film retention detecting method and apparatus
    • 旋转检测方法及装置及相片保留检测方法及装置
    • US20070063087A1
    • 2007-03-22
    • US11495783
    • 2006-07-31
    • Akio SutoIkuhisa SatoYukio NakanoTakayuki Abe
    • Akio SutoIkuhisa SatoYukio NakanoTakayuki Abe
    • G03C3/00B65H18/10
    • G03B17/30B65H20/02B65H26/06
    • A rotation detecting apparatus for use in producing a photo film cassette has an opaque detecting dog device secured in a manner rotatable together with a rotatable inserter. A light source device applies collimated light flux to the detecting dog device. A detection hole is formed through the detecting dog device, for receiving application of the collimated light flux, and passing light through the detection hole when openings at ends thereof are aligned with one another in a direction of the collimated light flux. A photo receptor receives the passed light passed through the detection hole, and outputs a detection signal according to an amount of the received passed light. In the retention, a trailer of photo film is picked up by the inserter. The inserter is rotationally inserted through a passageway of the photo film cassette. The trailer is fastened on a trailer fastener of a spool.
    • 用于制作摄影胶片盒的旋转检测装置具有以可旋转的插入件可转动的方式固定的不透明检测狗装置。 光源装置将准直光束施加到检测狗装置。 通过检测爪装置形成检测孔,用于接收准直光束的施加,并且当其端部的开口在准直光束的方向上彼此对准时,使光通过检测孔。 光接收器接收通过检测孔的通过的光,并根据接收到的光的量输出检测信号。 在保留期间,插入器拾取照片胶片的拖车。 插入器被旋转地插入通过照相胶片暗盒的通道。 拖车被固定在卷轴的拖车紧固件上。
    • 66. 发明授权
    • Magnetic resonance imaging device
    • 磁共振成像装置
    • US06611144B2
    • 2003-08-26
    • US10203260
    • 2002-08-07
    • Takayuki Abe
    • Takayuki Abe
    • G01V300
    • G01R33/563G01R33/281
    • In a contrast MRA measurement, sampling order of k-space is controlled considering the distance from the origin such that sampling the low-frequency data is performed a time when the contrast concentration reaches it peak. First, the sampling points of k-space are divided into two groups. Then, a measurement of the first group is started a time when the contrast concentration of a blood vessel of interest becomes high and is controlled from the high-frequency component to the low-frequency component such that the distance of a sampling point from the origin progressively decreases. A measurement of the other group, which is performed successively, is controlled from the low-frequency component to the high-frequency component such that the distance of a sampling point from the origin progressively increases. According to this ordering, influence of measurement time error in the contrast MRA measurement can be reduced and the whole blood vessel can be imaged with high contrast. In addition, an artery can be selectively imaged.
    • 在对比MRA测量中,考虑到与原点的距离来控制k空间的采样顺序,使得当对比度浓度达到峰值时执行低频数据的采样。 首先,将k空间的采样点分为两组。 然后,当感兴趣的血管的对比度浓度变高并且从高频分量控制到低频分量时,开始测量第一组,使得采样点与原点的距离 逐渐减少 连续执行的另一组的测量从低频分量控制到高频分量,使得采样点与原点的距离逐渐增加。 根据该顺序,可以减少对比度MRA测量中的测量时间误差的影响,并且可以以高对比度对整个血管进行成像。 此外,可以选择性地成像动脉。
    • 68. 发明授权
    • Electron beam lithography method and apparatus
    • 电子束光刻方法及装置
    • US5008553A
    • 1991-04-16
    • US341977
    • 1989-04-24
    • Takayuki Abe
    • Takayuki Abe
    • H01J37/302
    • H01J37/3023H01J2237/31769
    • A charged beam lithography writes a pattern with charged beams on a sample. The pattern involves various shapes. For every position in the shapes in the pattern, degree of exposure due to a proximity effect caused by backward scattering charged from the shapes surrounding the position is calculated. A charged beam emission quantity corresponding to the calculated degree of exposure is subtracted from a set emission quantity to compensate the proximity effect and obtain an optimum charged beam emission quantity for the position. With charged beams of the optimum emission quantities thus obtained, the pattern is written with high dimensional accuracy.
    • 带电光束光刻将带有带电束的图案写在样品上。 该图案涉及各种形状。 对于图案中的形状中的每个位置,计算由于从位置周围的形状进行的向后散射引起的邻近效应引起的曝光程度。 从设定的排放量中减去与计算出的曝光量相对应的带电束光发射量,以补偿邻近效应,并获得该位置的最佳带电束发射量。 利用如此获得的最佳发射量的带电束,以高尺寸精度写入图案。