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61. 发明申请

US20090038143A1 Method of manufacturing magneto-resistive device, magnetic head, head suspension assembly and magnetic disk apparatus 有权
标题翻译：制造磁阻元件，磁头，磁头悬挂组件和磁盘装置的方法
公开(公告)号：US20090038143A1
公开(公告)日：2009-02-12
申请号：US12232785
申请日：2008-09-24
申请人： Takeo Kagami , Tetsuya Kuwashima , Norio Takahashi
发明人： Takeo Kagami , Tetsuya Kuwashima , Norio Takahashi
IPC分类号： G11B5/127
CPC分类号： G11B5/3906 , G11B5/3909 , G11B2005/3996 , Y10T29/49021 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method is provided for manufacturing a magneto-resistive device. The magneto-resistive device is for reducing the deterioration in the characteristics of the device due to annealing. The magneto-resistive device has a magneto-resistive layer formed on one surface side of a base, and an insulating layer formed of two layers and deposited around the magneto-resistive layer. The layer of the insulating layer closest to the base is made of a metal or semiconductor oxide. This layer extends over end faces of a plurality of layers made of different materials from one another, which make up the magneto-resistive device, and is in contact with the end faces of the plurality of layers with the same materials.
摘要翻译：提供了一种用于制造磁阻装置的方法。该磁阻装置用于减少由退火引起的器件特性的劣化。磁阻装置具有形成在基底的一个表面侧上的磁阻层和由两层形成并且沉积在磁阻层周围的绝缘层。最靠近基底的绝缘层的层由金属或半导体氧化物制成。该层在由不同材料制成的多个层的端面上延伸，其构成磁阻装置，并且与相同材料的多个层的端面接触。

62. 发明申请

US20060067010A1 Manufacturing method of thin-film magnetic head and thin-film magnetic head 有权
标题翻译：薄膜磁头和薄膜磁头的制造方法
公开(公告)号：US20060067010A1
公开(公告)日：2006-03-30
申请号：US10971113
申请日：2004-10-25
申请人： Takeo Kagami , Takayasu Kanaya , Noriaki Kasahara , Kazuki Sato
发明人： Takeo Kagami , Takayasu Kanaya , Noriaki Kasahara , Kazuki Sato
IPC分类号： G11B5/33 , G11B5/127
CPC分类号： G11B5/332 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A manufacturing method of a thin-film magnetic head includes a step of depositing an MR multi-layered film on a lower electrode layer, a step of patterning the deposited MR multi-layered film to define a track width, a step of forming a layer containing at least first insulation layer at both track-width direction sides of the patterned MR multi-layered film, a step of depositing a first additional upper metal layer on the patterned MR multi-layered film and on the layer containing at least first insulation layer, a step of patterning the first additional upper metal layer and the MR multi-layered film to define a length in a direction perpendicular to the track-width direction so as to obtain an MR multi-layered structure, a step of forming a second insulation layer to surround the first additional upper metal layer and the MR multi-layered structure, a step of removing by etching the second insulation layer on the first additional upper metal layer formed on the MR multi-layered structure, a step of thereafter, forming a second additional upper metal layer on the first additional upper metal layer and on the second insulation layer, and a step of forming an upper electrode layer on the second additional upper metal layer.
摘要翻译：薄膜磁头的制造方法包括在下电极层上沉积MR多层膜的步骤，对沉积的MR多层膜进行图案化以限定磁道宽度的步骤，形成层的步骤在图案化MR多层膜的两个轨道宽度方向侧上至少含有第一绝缘层，在图案化MR多层膜上沉积第一附加上金属层和在至少包含第一绝缘层的层上沉积步骤图案化第一附加上金属层和MR多层膜以在垂直于轨道宽度方向的方向上限定长度以获得MR多层结构的步骤，形成第二绝缘体的步骤层以围绕第一附加上金属层和MR多层结构，通过蚀刻在形成在MR多层结构上的第一附加上金属层上的第二绝缘层去除步骤其次，在第一附加上金属层和第二绝缘层上形成第二另外的上金属层，以及在第二另外的上金属层上形成上电极层的步骤。

63. 发明申请

US20050195536A1 Thin-film magnetic head comprising bias layers having a large length in track width direction 失效
标题翻译：薄膜磁头包括在磁道宽度方向上具有大长度的偏置层
公开(公告)号：US20050195536A1
公开(公告)日：2005-09-08
申请号：US11066763
申请日：2005-02-28
申请人： Takeo Kagami , Noriaki Kasahara , Kazuki Sato , Takayasu Kanaya
发明人： Takeo Kagami , Noriaki Kasahara , Kazuki Sato , Takayasu Kanaya
IPC分类号： G11B5/39 , G11B5/127 , G11B5/33
CPC分类号： G11B5/398 , B82Y25/00 , G01R33/093 , G01R33/098 , G11B5/3932 , G11B2005/0008
摘要： The thin-film magnetic head of the present invention comprises an MR sensor wherein a first ferromagnetic layer in which a magnetization direction is fixed with respect to external magnetic fields, a non-magnetic intermediate layer, and a second ferromagnetic layer in which a magnetization direction changes with respect to the external magnetic fields are stacked, and wherein a sense current flows substantially parallel to the stacked layer surface. The thin-film magnetic head comprises a pair of bias layers for exerting a bias magnetic field upon the MR sensor; the bias layers extending substantially symmetrically from two sides of the MR sensor in a direction of track width of a recording medium, each bias layer being connected with the MR sensor over a length which is substantially the same as the MR sensor in a direction perpendicular to the air bearing surface; and each bias layer having a shape which is contained within an imaginary rectangle which has its long sides along the air bearing surface in the direction of the track width of the recording medium and its short sides in the direction perpendicular to the air bearing surface and which contacts the short side of the imaginary rectangle which is opposite the short side which contacts the MR sensor. The thin-film magnetic head further comprises a pair of lead layers for supplying the sense current to the MR sensor each extending from the air bearing surface to cover at least a portion of each of the bias layers.
摘要翻译：本发明的薄膜磁头包括MR传感器，其中磁化方向相对于外部磁场固定的第一铁磁层，非磁性中间层和第二铁磁层，其中磁化方向相对于外部磁场的变化被堆叠，并且其中感测电流基本上平行于堆叠的层表面流动。薄膜磁头包括用于在MR传感器上施加偏置磁场的一对偏置层; 偏置层在MR传感器的两侧沿着记录介质的磁道宽度的方向基本上对称地延伸，每个偏置层在与MR传感器垂直的方向上与MR传感器基本相同的长度上与MR传感器连接空气轴承表面; 并且每个偏置层具有包含在假想矩形内的形状，该假想矩形具有沿着记录介质的轨道宽度的空气轴承表面的长边，并且在垂直于空气轴承表面的方向上具有短边，接触与MR传感器接触的短边相反的假想矩形的短边。薄膜磁头还包括一对引导层，用于向MR传感器提供感测电流，每个引导层从空气支承表面延伸以覆盖每个偏置层的至少一部分。

64. 发明授权

US06839205B2 Magneto-resistive device, and magnetic head and head suspension assembly using same 有权
标题翻译：磁阻元件，以及使用其的磁头和磁头悬挂组件
公开(公告)号：US06839205B2
公开(公告)日：2005-01-04
申请号：US10211366
申请日：2002-08-05
申请人： Takeo Kagami , Norio Takahashi , Takumi Uesugi
发明人： Takeo Kagami , Norio Takahashi , Takumi Uesugi
IPC分类号： G01R33/09 , G11B5/39 , G11B5/596 , H01L43/08 , G11B5/127
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3903 , G11B5/59683 , G11B2005/3996 , H01L43/08
摘要： A magneto-resistive device has a magneto-resistive layer laminated between electrodes. The magneto-resistive layer has a non-magnetic layer, a pinned layer and a free layer sandwiching the non-magnetic layer, and a pin layer formed on the pinned layer on the opposite side to the free layer. The pin layer is formed in a region which substantially overlaps with an effective region in a film plane direction in which a current flows in a direction substantially perpendicular to the film plane between the electrodes in a predetermined thickness, and is formed in a region which does not substantially overlap with the effective region substantially in the same thickness as the predetermined thickness or in a thickness smaller than the predetermined thickness, continuous from the region which substantially overlaps with the effective region.

65. 发明授权

US06669983B2 Manufacturing method of thin-film magnetic head with magnetoresistive effect element 失效
公开(公告)号：US06669983B2
公开(公告)日：2003-12-30
申请号：US10279125
申请日：2002-10-24
申请人： Takeo Kagami , Naoki Ohta , Tetsuya Kuwashima
发明人： Takeo Kagami , Naoki Ohta , Tetsuya Kuwashima
IPC分类号： B05D512
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3116 , G11B5/3163 , G11B5/3903 , G11B5/3909 , G11B2005/3996
摘要： A manufacturing method of a thin-film magnetic head provided with an MR element includes a step of forming an MR multi-layered structure in which a current flows in a direction perpendicular to surfaces of layers of the MR multi-layered structure, on a lower electrode film, a step of depositing an insulation film on the formed MR multi-layered structure and the lower electrode film, a step of flattening the deposited insulation film until at least upper surface of the MR multi-layered structure is exposed, and a step of forming an upper electrode film on the flattened insulation film and the MR multi-layered structure.

66. 发明申请

US20110262632A1 Magnetoresistive Effect Element, Thin-Film Magnetic Head, Method for Manufacturing Magnetoresistive Effect Element, and Method for Manufacturing Thin-Film Magnetic Head 审中-公开
标题翻译：磁阻效应元件，薄膜磁头，制造磁阻效应元件的方法和制造薄膜磁头的方法
公开(公告)号：US20110262632A1
公开(公告)日：2011-10-27
申请号：US13042264
申请日：2011-03-07
申请人： Takeo Kagami , Kosuke Tanaka , Shinji Hara , Takayasu Kanaya , Nobuyoshi Morizumi
发明人： Takeo Kagami , Kosuke Tanaka , Shinji Hara , Takayasu Kanaya , Nobuyoshi Morizumi
IPC分类号： B05D5/12 , B05D1/36
CPC分类号： G11B5/3909 , B82Y10/00 , B82Y25/00 , G11B5/3906 , G11B5/3932 , G11B2005/3996
摘要： A magnetoresistive effect (MR) element, a thin-film magnetic head having the MR element, a method for manufacturing the MR element, and a method for manufacturing the thin-film magnetic head are disclosed. The MR element, which uses electric current in a direction perpendicular to layer planes, includes a lower electrode layer, a MR multilayered structure formed on the lower electrode layer, a magnetic domain controlling bias layer that is disposed on both sides of the MR multilayered structure along the track-width direction and is made of a material at least partially including an hcp structure, a metal layer made of a material having a bcc structure formed on the magnetic domain controlling bias layer and the MR multilayered structure to cover the magnetic domain controlling bias layer and the MR multilayered structure, and an upper electrode layer formed on the metal layer.
摘要翻译：公开了磁阻效应（MR）元件，具有MR元件的薄膜磁头，MR元件的制造方法和制造薄膜磁头的方法。在垂直于层平面的方向上使用电流的MR元件包括下电极层，形成在下电极层上的MR多层结构，设置在MR多层结构的两侧的磁畴控制偏置层沿着轨道宽度方向并且由至少部分地包括hcp结构的材料制成，由在磁畴控制偏置层上形成的具有bcc结构的材料制成的金属层和MR多层结构以覆盖磁畴控制偏置层和MR多层结构，以及形成在金属层上的上电极层。

67. 发明授权

US07784170B2 Method for forming a resist pattern of magnetic device by etching with a gas cluster ion beam 有权
标题翻译：通过用气体簇离子束蚀刻形成磁性器件的抗蚀剂图案的方法
公开(公告)号：US07784170B2
公开(公告)日：2010-08-31
申请号：US11798260
申请日：2007-05-11
申请人： Takeo Kagami , Kazuki Sato
发明人： Takeo Kagami , Kazuki Sato
IPC分类号： G11B5/127 , G11B5/33 , C03C15/00
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/012 , G11B5/3116 , G11B5/3163 , G11B5/3903 , G11B5/3909 , G11B2005/3996 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49052 , Y10T29/4906
摘要： A resist pattern for lift-off is formed on a first film composed of one or more layers deposited on a substrate. The first film is patterned by dry-etching using the resist pattern as a mask. Subsequently, a second film is deposited with presence of the resist pattern on the first film. Then, the resist pattern for lift-off is removed for conducting lift-off. Subsequently, the resulting substrate is etched. In the etching, the substrate is dry-etched using etching particles which are oriented at an incident angle set in a range of 60 ° to 90 ° relative to the normal direction of the substrate.
摘要翻译：用于剥离的抗蚀剂图案形成在由沉积在基板上的一个或多个层组成的第一膜上。通过使用抗蚀剂图案作为掩模的干蚀刻将第一膜图案化。随后，在第一膜上沉积存在抗蚀剂图案的第二膜。然后，去除用于剥离的抗蚀剂图案以进行剥离。随后，对所得衬底进行蚀刻。在蚀刻中，使用相对于基板的法线方向以60°〜90°的范围的入射角取向的蚀刻粒子对基板进行干蚀刻。

68. 发明申请

US20100146774A1 Method and Apparatus for Lapping Magnetic Head Slider, and Manufacturing Method of Thin-Film Magnetic Head 有权
标题翻译：用于研磨磁头滑块的方法和装置，以及薄膜磁头的制造方法
公开(公告)号：US20100146774A1
公开(公告)日：2010-06-17
申请号：US12332581
申请日：2008-12-11
申请人： Naoki Ohta , Takeo Kagami
发明人： Naoki Ohta , Takeo Kagami
IPC分类号： G11B5/127 , B24B49/04 , B24B49/10 , H04R31/00
CPC分类号： B24B49/04 , B24B37/00 , B24B49/10 , G11B5/102 , G11B5/3166 , G11B5/3169 , G11B5/3173 , G11B5/3903 , Y10T29/49036 , Y10T29/49037 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49048 , Y10T29/49052
摘要： A method of lapping a magnetic head slider includes a step of lapping a lapping surface of a row bar provided with a plurality of MR read head elements arranged along at least one line, a step of obtaining at least one output signal from at least one of the plurality of MR read head elements of the row bar during lapping, the at least one output signal corresponding to element resistance, a step of detecting at least one peak value of the obtained at least one output signal, and a step of controlling an amount of lapping of the row bar depending upon the detected at least one peak value.
摘要翻译：一种研磨磁头滑动器的方法包括：研磨设置有沿着至少一条线布置的多个MR读取头元件的行杆的研磨表面的步骤，从至少一个方向获得至少一个输出信号的步骤在研磨期间行列的多个MR读取头元件，对应于元件电阻的至少一个输出信号，检测所获得的至少一个输出信号的至少一个峰值的步骤，以及控制量的步骤根据检测到的至少一个峰值来研磨行条。

69. 发明授权

US07715155B2 Thin-film magnetic head and manufacturing method thereof 有权
标题翻译：薄膜磁头及其制造方法
公开(公告)号：US07715155B2
公开(公告)日：2010-05-11
申请号：US11734047
申请日：2007-04-11
申请人： Takeo Kagami , Kazuki Sato , Kosuke Tanaka , Takayasu Kanaya , Naoki Ohta
发明人： Takeo Kagami , Kazuki Sato , Kosuke Tanaka , Takayasu Kanaya , Naoki Ohta
IPC分类号： G11B5/33
CPC分类号： G11B5/3912 , B82Y25/00 , G01R33/093 , G11B5/3163 , G11B5/3906 , G11B5/398
摘要： A thin-film magnetic head includes a lower magnetic shield layer, an MR multi-layered structure formed on the lower magnetic shield layer so that current flows in a direction perpendicular to surfaces of laminated layers, an insulation layer formed to surround the MR multi-layered structure, an additional metal layer laminated on at least the MR multi-layered structure, an upper electrode layer made of a soft magnetic material laminated on the additional metal layer and the insulation layer, and an upper magnetic shield layer laminated on the upper electrode layer. The additional metal layer has a multi-layered structure including a nonmagnetic metal layer and a soft magnetic layer laminated on the nonmagnetic metal layer, and has a length along a track-width direction of the MR multi-layered structure larger than a width of a magnetization-free layer in the MR effect multi-layered structure.
摘要翻译：薄膜磁头包括下磁屏蔽层，形成在下磁屏蔽层上的MR多层结构，使得电流沿垂直于层压层表面的方向流动，形成为围绕MR多层结构的绝缘层，至少层叠在MR多层结构上的附加金属层，层叠在附加金属层上的软磁性材料构成的上部电极层和绝缘层，以及层叠在上部电极上的上部磁屏蔽层层。附加金属层具有层叠在非磁性金属层上的非磁性金属层和软磁性层的多层结构，并且沿着MR多层结构的轨道宽度方向的长度大于无磁化层的MR效应多层结构。

70. 发明授权

US07548400B2 Thin-film magnetic head comprising bias layers having a large length in track width direction 失效
标题翻译：薄膜磁头包括在磁道宽度方向上具有大长度的偏置层
公开(公告)号：US07548400B2
公开(公告)日：2009-06-16
申请号：US11066763
申请日：2005-02-28
申请人： Takeo Kagami , Noriaki Kasahara , Kazuki Sato , Takayasu Kanaya
发明人： Takeo Kagami , Noriaki Kasahara , Kazuki Sato , Takayasu Kanaya
IPC分类号： G11B5/33
CPC分类号： G11B5/398 , B82Y25/00 , G01R33/093 , G01R33/098 , G11B5/3932 , G11B2005/0008
摘要： The thin-film magnetic head of the present invention comprises an MR sensor wherein a first ferromagnetic layer in which a magnetization direction is fixed with respect to external magnetic fields, a non-magnetic intermediate layer, and a second ferromagnetic layer in which a magnetization direction changes with respect to the external magnetic fields are stacked, and wherein a sense current flows substantially parallel to the stacked layer surface. The thin-film magnetic head comprises a pair of bias layers for exerting a bias magnetic field upon the MR sensor; the bias layers extending substantially symmetrically from two sides of the MR sensor in a direction of track width of a recording medium, each bias layer being connected with the MR sensor over a length which is substantially the same as the MR sensor in a direction perpendicular to the air bearing surface; and each bias layer having a shape which is contained within an imaginary rectangle which has its long sides along the air bearing surface in the direction of the track width of the recording medium and its short sides in the direction perpendicular to the air bearing surface and which contacts the short side of the imaginary rectangle which is opposite the short side which contacts the MR sensor. The thin-film magnetic head further comprises a pair of lead layers for supplying the sense current to the MR sensor each extending from the air bearing surface to cover at least a portion of each of the bias layers.
摘要翻译：本发明的薄膜磁头包括MR传感器，其中磁化方向相对于外部磁场固定的第一铁磁层，非磁性中间层和第二铁磁层，其中磁化方向相对于外部磁场的变化被堆叠，并且其中感测电流基本上平行于堆叠的层表面流动。薄膜磁头包括用于在MR传感器上施加偏置磁场的一对偏置层; 偏置层在MR传感器的两侧沿着记录介质的磁道宽度的方向基本上对称地延伸，每个偏置层在与MR传感器垂直的方向上与MR传感器基本相同的长度上与MR传感器连接空气轴承表面; 并且每个偏置层具有包含在假想矩形内的形状，该假想矩形具有沿着记录介质的轨道宽度的空气轴承表面的长边，并且在垂直于空气轴承表面的方向上具有短边，接触与MR传感器接触的短边相反的假想矩形的短边。薄膜磁头还包括一对引导层，用于向MR传感器提供感测电流，每个引导层从空气支承表面延伸以覆盖每个偏置层的至少一部分。

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