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    • 61. 发明授权
    • Plasma processing apparatus
    • 等离子体处理装置
    • US08747608B2
    • 2014-06-10
    • US13338722
    • 2011-12-28
    • Tatehito UsuiKazuhiro JooTakashi Fujii
    • Tatehito UsuiKazuhiro JooTakashi Fujii
    • C23C16/52C23C16/50C23C16/06C23C16/22
    • G01B11/0625H01J37/32935H01J37/32972
    • A plasma processing apparatus includes a detector for detecting interference light of multiple wavelengths from a surface of a sample during processing, a pattern comparator for comparing actual deviation pattern data on the interference light obtained at a given time during processing and a plurality of standard deviation patterns corresponding to two or more thicknesses of the film, and calculating a deviation, the standard deviation patterns corresponding to interference light data of multiple wavelengths obtained, before the processing of the sample, for processing of another sample, a deviation comparator for comparing the deviation between the data and a predetermined deviation and outputting data on a thickness of the film of the sample at that time, a recorder for recording, as time series data, the data on the thickness of the film, and an endpoint decision unit.
    • 等离子体处理装置包括:检测器,用于在处理期间检测来自样品表面的多个波长的干涉光;图案比较器,用于比较在处理期间获得的干涉光上的实际偏差图案数据与多个标准偏差图案 对应于膜的两个或更多个厚度,并且计算偏差,对应于在样品处理之前获得的多个波长的干涉光数据的标准偏差图案,用于处理另一个样品,偏差比较器,用于比较 数据和预定的偏差,并输出当时的样品的胶片的厚度,作为时间序列数据记录的胶片的厚度数据和端点判定单元的数据。
    • 65. 发明申请
    • IMAGE PICKUP LENS UNIT MANUFACTURING METHOD AND IMAGE PICKUP LENS UNIT
    • 图像拾取镜头单元制造方法和图像拾取镜头单元
    • US20130271859A1
    • 2013-10-17
    • US13825288
    • 2011-09-09
    • Hajime MoriTakashi FujiiTakemi Miyazaki
    • Hajime MoriTakashi FujiiTakemi Miyazaki
    • G02B7/02
    • G02B7/02B29C45/14065B29C2045/14122G02B19/0076
    • An object is to provide a method for manufacturing an image pickup lens unit which can form a holder member with a small number of components, and can avoid generation or a ghost or flare caused by a positioning shape, an appearance problem, deterioration of dimension accuracy. In an installing step, since a lens 10 is positioned by one pressing member (protrusion) 61d of protrusions 61d and 62d which are a pair of pressing members disposed in a position corresponding to a pair of openings OP1 and OP2 by molds 51 and 52, it is possible to reliably fix the lens 10 in the molds 51 and 52 in a state of not affecting to a shape of a holder member 40 without interrupting the molding of the holder member 40. Thus, it is possible to avoid deterioration of the dimension accuracy due to the remaining large positioning shape on the holder member 40. In addition, since the holder member 40 is integrally molded, it is possible to avoid an increase of the number of components used for the assembling the holder or complicated component shapes of a connecting portion.
    • 本发明的目的是提供一种用于制造能够形成具有少量部件的保持器构件的图像拾取透镜单元的方法,并且可以避免由于定位形状,外观问题,尺寸精度的劣化而产生或重影或闪光 。 在安装步骤中,由于透镜10由通过模具51和52设置在与一对开口OP1和OP2相对应的位置的一对按压构件的一个按压构件(突出部)61d定位, 可以在不影响保持构件40的模制的状态下,以不影响保持构件40的形状的状态将透镜10可靠地固定在模具51和52中。因此,可以避免尺寸变小 由于保持器构件40上的剩余的大的定位形状,由于保持构件40一体成型,因此能够避免用于组装保持器的部件数量的增加或复杂的部件形状 连接部分。
    • 70. 发明申请
    • METHOD FOR DETECTING CONCENTRATION OF PARTICLES AND DEVICE THEREFOR
    • 检测颗粒浓度及其装置的方法
    • US20120242328A1
    • 2012-09-27
    • US13514095
    • 2010-06-15
    • Hidemi UkaiTakashi Fujii
    • Hidemi UkaiTakashi Fujii
    • G01R33/00
    • G01N15/0656G01N33/2835G01N2015/0681
    • A magnetic particle producing part including magnetic and counterpart members in a path of a particle-includable liquid, at least one of the members being moved to press the other member in the liquid, the magnetic member being worn by particles in the liquid to produce magnetic particles; a magnetic particle measuring part positioned in the path same as in the producing part to measure the magnetic particle concentration in the liquid; and a control part converting the concentration of the magnetic particles detected by the measuring part into a concentration of particles in the liquid on the basis of a calibration line representing a correlation preliminarily measured between the concentrations of the magnetic particles and of the particles in the liquid to detect the concentration in the liquid.
    • 一种磁性颗粒产生部件,包括在可颗粒包含的液体的路径中的磁性和对应部件,至少一个部件被移动以挤压液体中的另一个部件,磁性部件被颗粒在液体中磨损以产生磁性 粒子; 位于与生产部分相同的路径中的磁性粒子测量部分,以测量液体中的磁性颗粒浓度; 以及控制部,其基于表示在所述液体中的所述磁性粒子的浓度与所述粒子的浓度之间预先测定的相关性的校准线,将由所述测定部检测出的所述磁性粒子的浓度变换为所述液体中的粒子浓度 以检测液体中的浓度。