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61. 发明授权

US06900888B2 Method and apparatus for inspecting a pattern formed on a substrate 失效
标题翻译：用于检查在基板上形成的图案的方法和装置
公开(公告)号：US06900888B2
公开(公告)日：2005-05-31
申请号：US10650756
申请日：2003-08-29
申请人： Minoru Yoshida , Shunji Maeda , Atsushi Shimoda , Kaoru Sakai , Takafumi Okabe , Masahiro Watanabe
发明人： Minoru Yoshida , Shunji Maeda , Atsushi Shimoda , Kaoru Sakai , Takafumi Okabe , Masahiro Watanabe
IPC分类号： G01N21/956 , G03F7/20 , G03F9/00 , G01N21/88
CPC分类号： G03F7/7065 , G01N21/95684
摘要： The inventive method and apparatus for detecting defects of a microscopic circuit pattern by imaging the pattern at high resolution comprises an objective lens for imaging the subject pattern, a laser illumination means for illuminating the pupil of the objective lens, means of diminishing the coherency of the laser illumination, an accumulative detector, and means of processing the signal detected by the detector. The method and apparatus are capable of imaging the subject pattern at high sensitivity and high speed based on the illumination by a short wavelength, which is indispensable for the enhancement of resolution, particularly based on a laser light source which is advantageous for practicing, with a resulting image being the same or better in quality as compared with an image resulting from the ordinary discharge tube illumination, whereby it is possible to detect microscopic defects at high sensitivity.
摘要翻译：用于通过以高分辨率对图案进行成像来检测微观电路图案的缺陷的本发明的方法和装置包括用于对被摄体图案进行成像的物镜，用于照射物镜的瞳孔的激光照明装置，降低该物镜的相干性的手段激光照明，累积检测器，以及处理由检测器检测到的信号的装置。该方法和装置能够以高灵敏度和高速度基于短波长的照明来对被摄体图案进行成像，这对于提高分辨率是不可或缺的，特别是基于有利于实践的激光光源与普通放电管照明产生的图像相比，所得到的图像的质量相同或更好，从而可以以高灵敏度检测微观缺陷。

62. 发明授权

US06879392B2 Method and apparatus for inspecting defects 有权
标题翻译：检查缺陷的方法和装置
公开(公告)号：US06879392B2
公开(公告)日：2005-04-12
申请号：US10115880
申请日：2002-04-02
申请人： Kaoru Sakai , Shunji Maeda , Takafumi Okabe , Masahiro Watanabe
发明人： Kaoru Sakai , Shunji Maeda , Takafumi Okabe , Masahiro Watanabe
IPC分类号： G01B11/30 , G01B21/30 , G01N21/94 , G01N21/95 , G01N21/956 , G01N23/04 , G01N23/06 , G01N23/225 , G01N23/227 , G06T1/00 , H01L21/66 , G01N21/88
CPC分类号： G01N23/227 , G01N21/94 , G01N21/9501
摘要： In a defect inspecting apparatus, having contrast, brightness and appearance of a target for inspection and detection sensitivity of a defect changed depending on optical system conditions, and adapted to perform inspection by selecting an optimal test condition, even an unskilled user can easily select an optimal optical condition by quantitatively displaying evaluation values side by side when optical system conditions are changed. Moreover, by selecting an evaluation item having highest satisfaction based on a result of a series of test inspection, an optimal test condition can be automatically selected.
摘要翻译：在缺陷检查装置中，根据光学系统条件具有对象的检查目标的检查和检测灵敏度的对比度，亮度和外观变化，并且适于通过选择最佳测试条件进行检查，即使是非熟练的用户也可以容易地选择当光学系统条件改变时，通过定量地显示评估值来获得最佳光学条件。此外，通过基于一系列检查结果的结果选择具有最高满意度的评价项目，可以自动选择最佳检测条件。

63. 发明授权

US06831995B1 Method for detecting a defect in a pixel of an electrical display unit and a method for manufacturing an electrical display unit 失效
标题翻译：用于检测电气显示单元的像素中的缺陷的方法和用于制造电显示单元的方法
公开(公告)号：US06831995B1
公开(公告)日：2004-12-14
申请号：US09520842
申请日：2000-03-08
申请人： Toshio Asano , Kaoru Sakai , Jun Mochizuki , Tatsuo Horiuchi , Hirofumi Nakatoyodome , Tadashi Furukawa , Atsuo Ohsawa
发明人： Toshio Asano , Kaoru Sakai , Jun Mochizuki , Tatsuo Horiuchi , Hirofumi Nakatoyodome , Tadashi Furukawa , Atsuo Ohsawa
IPC分类号： G06K900
CPC分类号： G09G3/006 , G06T7/0004
摘要： In image-capture inspection of electronic displays, the object of the present invention is to reduce moire generation, improve inspection precision by making pixel defects easier to discover, and allowing quantitative evaluation of these pixel defects. The relative positioning of the electronic display and an imaging element is changed by very small amounts of 1/n of the pixel pitch. The n images are arranged by pixel and the images are combined by taking the moving average of the image data values to reduce the image-capture moires generated during the image capture operations. The composite image is used to inspect pixel defects in the electronic display.
摘要翻译：在电子显示器的图像捕获检查中，本发明的目的是通过使像素缺陷更容易发现，并且允许对这些像素缺陷的定量评估来减少波纹产生，提高检查精度。电子显示器和成像元件以非常少量的像素间距的1 / n改变。 n个图像由像素排列，并且通过拍摄图像数据值的移动平均来组合图像，以减少在图像捕获操作期间产生的图像捕获摩尔。复合图像用于检查电子显示器中的像素缺陷。

64. 发明授权

US5502885A Method of manfacturing a chip-type composite electronic part 失效
标题翻译：制造芯片型复合电子部件的方法
公开(公告)号：US5502885A
公开(公告)日：1996-04-02
申请号：US284805
申请日：1994-08-02
申请人： Toshihiro Hanamura , Kaoru Sakai
发明人： Toshihiro Hanamura , Kaoru Sakai
IPC分类号： H01C7/00 , H01C1/16 , H01C13/02 , H01C17/00 , H01C17/24 , H01C17/242 , H01C17/28
CPC分类号： H01C1/16 , Y10T29/49082 , Y10T29/49101 , Y10T29/49155 , Y10T29/49156 , Y10T29/49789
摘要： When resistor elements, common electrodes and individual electrodes are formed on a substrate, a disconnected portion, i.e., open portion is formed in one of the common electrodes. After the respective resistor elements are trimmed, the disconnected portion of the one common electrode is bridged by a conductor.
摘要翻译：当在基板上形成电阻元件，公共电极和单独电极时，在一个公共电极中形成断开部分，即开放部分。在各个电阻元件被修整之后，一个公共电极的断开部分由导体桥接。

65. 发明授权

US08639019B2 Method and apparatus for inspecting pattern defects 有权
标题翻译：检查图案缺陷的方法和装置
公开(公告)号：US08639019B2
公开(公告)日：2014-01-28
申请号：US13611664
申请日：2012-09-12
申请人： Kaoru Sakai , Shunji Maeda , Takafumi Okabe
发明人： Kaoru Sakai , Shunji Maeda , Takafumi Okabe
IPC分类号： G06K9/00
CPC分类号： G06T7/001 , G01N21/9501 , G01N21/95607 , G06T2207/30148
摘要： A method of detecting a defect, including the steps of: illuminating step for illuminating a sample with a light; detecting step for detecting light from the specimen which is illuminated by the light and forming an image by processing the detected light; processing step for extracting a defect candidate by processing the image of the sample formed in the detecting step and determining an inspection condition by using images including the image of the sample acquired in the detecting step, a partial image including the extracted defect candidate and a reference image which corresponds to the partial image including the defect candidate.
摘要翻译：一种检测缺陷的方法，包括以下步骤：用光照射样品的照明步骤; 检测步骤，用于检测由光照射的样本的光并通过处理检测到的光来形成图像; 处理步骤，用于通过处理在检测步骤中形成的样本的图像来提取缺陷候选，并且通过使用包括在检测步骤中获取的样本的图像的图像来确定检查条件，包括提取的缺陷候选的部分图像和参考对应于包括缺陷候选的部分图像的图像。

66. 发明授权

US08582864B2 Fault inspection method 有权
标题翻译：故障检查方法
公开(公告)号：US08582864B2
公开(公告)日：2013-11-12
申请号：US13354041
申请日：2012-01-19
申请人： Shunji Maeda , Kaoru Sakai
发明人： Shunji Maeda , Kaoru Sakai
IPC分类号： G06K9/00
CPC分类号： G06K9/00557 , G06T7/001
摘要： A fault inspection method and apparatus in which the scattergram is separated or objects of comparison are combined in such a manner as to reduce the difference between an inspection object image and a reference image. As a result, the difference between images caused by the thickness difference in the wafer can be tolerated and the false information generation prevented without adversely affecting the sensitivity.
摘要翻译：将分散图分离的故障检查方法和装置或比较对象组合起来，以减少检查对象图像与参考图像之间的差异。结果，可以容忍由晶片的厚度差导致的图像之间的差异，并且可以防止错误的信息产生而不会不利地影响灵敏度。

67. 发明授权

US08253934B2 Method and apparatus for inspecting a pattern formed on a substrate 有权
标题翻译：用于检查在基板上形成的图案的方法和装置
公开(公告)号：US08253934B2
公开(公告)日：2012-08-28
申请号：US12649898
申请日：2009-12-30
申请人： Minoru Yoshida , Shunji Maeda , Atsushi Shimoda , Kaoru Sakai , Takafumi Okabe , Masahiro Watanabe
发明人： Minoru Yoshida , Shunji Maeda , Atsushi Shimoda , Kaoru Sakai , Takafumi Okabe , Masahiro Watanabe
IPC分类号： G01N21/00
CPC分类号： G03F7/7065 , G01N21/95684
摘要： A pattern inspection method and apparatus in which a deep ultraviolet light or an ultraviolet light is irradiated onto a specimen on which a pattern is formed, an image of the specimen which is irradiated with the deep ultraviolet light or the ultraviolet light is formed and the formed image is detected with a rear-surface irradiation type image sensor, which is sensitive to wavelengths of no greater than 400 nmm. A signal outputted from the image sensor is processed so as to detect a defect of the specimen by converting an analog image signal outputted from the image sensor to a digital image signal with an A/D converter, and a display displays information of the defect detected.
摘要翻译：将深紫外光或紫外线照射到形成有图案的试样上的图案检查方法和装置形成了被深紫外线或紫外线照射的样本的图像，形成使用对不大于400nm的波长敏感的背面照射型图像传感器来检测图像。处理从图像传感器输出的信号，以便通过用A / D转换器将从图像传感器输出的模拟图像信号转换为数字图像信号来检测样本的缺陷，并且显示器显示检测到的缺陷的信息。

68. 发明授权

US08103087B2 Fault inspection method 有权
标题翻译：故障检查方法
公开(公告)号：US08103087B2
公开(公告)日：2012-01-24
申请号：US11655226
申请日：2007-01-19
申请人： Shunji Maeda , Kaoru Sakai
发明人： Shunji Maeda , Kaoru Sakai
IPC分类号： G06K9/00 , H04N7/18
CPC分类号： G06K9/00557 , G06T7/001
摘要： A fault inspection method and apparatus in which the scattergram is separated or objects of comparison are combined in such a manner as to reduce the difference between an inspection object image and a reference image. As a result, the difference between images caused by the thickness difference in the wafer can be tolerated and the false information generation prevented without adversely affecting the sensitivity.
摘要翻译：将分散图分离的故障检查方法和装置或比较对象组合起来，以减少检查对象图像与参考图像之间的差异。结果，可以容忍由晶片的厚度差导致的图像之间的差异，并且可以防止错误的信息产生而不会不利地影响灵敏度。

69. 发明申请

US20110274342A1 DEFECT INSPECTION METHOD AND DEVICE THEREOF 有权
标题翻译：缺陷检查方法及其设备
公开(公告)号：US20110274342A1
公开(公告)日：2011-11-10
申请号：US13141375
申请日：2009-10-22
申请人： Shunji Maeda , Kaoru Sakai , Hidetoshi Nishiyama
发明人： Shunji Maeda , Kaoru Sakai , Hidetoshi Nishiyama
IPC分类号： G06K9/00
CPC分类号： H01L22/20 , G01N21/95623 , G06T7/001 , G06T2207/30148 , H01L22/12
摘要： The invention provides a defect inspection method and a defect inspection device which enable a defect to be inspected regardless of optical conditions. The invention comprises the steps of setting a target local region and a plurality of corresponding local regions in the image signals, the target local region including a target pixel and an area surrounding the target pixel, the corresponding local regions including pixels corresponding to the target pixel and areas surrounding the corresponding pixels; searching similarities between the image signal of the target local region and the image signals of the plurality of corresponding local regions; determining a plurality of image signals that represent corresponding local regions and are similar to the image signal of the target local region; and comparing the image signal of the target local region with the image signals that represent the corresponding local regions.
摘要翻译：本发明提供一种缺陷检查方法和缺陷检查装置，其能够在不考虑光学条件的情况下检查缺陷。本发明包括以下步骤：在图像信号中设置目标局部区域和多个对应的局部区域，目标局部区域包括目标像素和围绕目标像素的区域，对应的局部区域包括与目标像素对应的像素和相应像素周围的区域; 搜索所述目标局部区域的图像信号与所述多个对应的局部区域的图像信号之间的相似度; 确定表示对应的局部区域并且与目标局部区域的图像信号相似的多个图像信号; 并将目标局部区域的图像信号与表示对应的局部区域的图像信号进行比较。

70. 发明授权

US07949178B2 Pattern inspection method and its apparatus 有权
标题翻译：图案检验方法及其装置
公开(公告)号：US07949178B2
公开(公告)日：2011-05-24
申请号：US12230362
申请日：2008-08-28
申请人： Kaoru Sakai , Shunji Maeda , Takafumi Okabe
发明人： Kaoru Sakai , Shunji Maeda , Takafumi Okabe
IPC分类号： G06K9/00
CPC分类号： G06T7/001 , G06T2207/30148
摘要： In a pattern inspection apparatus for comparing images of corresponding areas of two patterns, which are formed so as to be identical, so as to judge that a non-coincident part of the images is a defect, the influence of unevenness in brightness of patterns caused by a difference of thickness or the like is reduced, whereby highly sensitive pattern inspection is realized. In addition, high-speed pattern inspection can be carried out without changing the image comparison algorithm. For this purpose, the pattern inspection apparatus operates to perform comparison processing of images in parallel in plural areas. Further, the pattern inspection apparatus operates to convert gradation of an image signal among compared images using different plural processing units such that, even in the case in which a difference of brightness occurs in an identical pattern among images, a defect can be detected correctly.
摘要翻译：在用于比较形成为相同的两个图案的相应区域的图像的图形检查装置中，以判断图像的不重合的部分是缺陷，导致图案的亮度不均匀性的影响通过减小厚度差等，从而实现高灵敏度图案检查。此外，可以进行高速图案检查，而不改变图像比较算法。为此，图案检查装置在多个区域中并行地执行图像的比较处理。此外，图案检查装置进行操作以使用不同的多个处理单元来转换比较图像中的图像信号的灰度，使得即使在图像中以相同图案发生亮度差异的情况下，也可以正确检测缺陷。

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