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61. 发明申请

US20090255911A1 LASER SCRIBING PLATFORM AND HYBRID WRITING STRATEGY 审中-公开
标题翻译：激光扫描平台和混合写字策略
公开(公告)号：US20090255911A1
公开(公告)日：2009-10-15
申请号：US12422189
申请日：2009-04-10
申请人： Sriram Krishnaswami , Shinichi Kurita , Bassam Shamoun , Benjamin M. Johnston , John M. White , Jiafa Fan , Inchen Huang , Antoine P. Manens , Wei-Sheng Lei , Wei-Yung Hsu
发明人： Sriram Krishnaswami , Shinichi Kurita , Bassam Shamoun , Benjamin M. Johnston , John M. White , Jiafa Fan , Inchen Huang , Antoine P. Manens , Wei-Sheng Lei , Wei-Yung Hsu
IPC分类号： B23K26/38 , B23K26/02 , B23K26/067 , B23K26/08
CPC分类号： B23K26/067 , B23K26/0676 , B23K26/082 , B23K26/083 , B23K26/16 , B23K26/361 , B23K26/364 , B23K26/40 , B23K2101/34 , B23K2101/36 , B23K2103/16 , B23K2103/172
摘要： Laser scribing can be performed on a workpiece (104) such as substrates with layers formed thereon for use in a solar panel without need to rotate the workpiece (104) during the scribing process. A series of lasers (602, 622) can be used to concurrently remove material from multiple positions on the workpiece (104). Each laser (602, 622) can have at least one scanning device (614, 630, 632) positioned along a beam path thereof in order to adjust a position of the laser output relative to the workpiece (104). By adjusting the beam or pulse positions using the scanning devices (614, 630, 632) while translating the workpiece (104), substantially any pattern can be scribed into at least one layer of the workpiece (104) without the need for any rotation of the workpiece (104).
摘要翻译：可以对工件（104）进行激光划线，例如在其上形成有层的基板，用于太阳能电池板，而不需要在划线过程中旋转工件（104）。可以使用一系列激光器（602,622）来同时从工件（104）上的多个位置去除材料。每个激光器（602,622）可以具有沿其光束路径定位的至少一个扫描装置（614,630,632），以便调节激光输出相对于工件（104）的位置。通过在平移工件（104）的同时通过使用扫描装置（614,630,632）调节光束或脉冲位置，基本上任何图案都可以划分成工件（104）的至少一层，而不需要任何旋转工件（104）。

62. 发明申请

US20090122099A1 METHODS AND SYSTEMS FOR CALIBRATION OF INKJET DROP POSITIONING 审中-公开
标题翻译：用于校准喷墨定位的方法和系统
公开(公告)号：US20090122099A1
公开(公告)日：2009-05-14
申请号：US12354759
申请日：2009-01-15
申请人： John M. White , Emanuel Beer , Hongbin Ji , Chang-Tsung Lin , Shinichi Kurita
发明人： John M. White , Emanuel Beer , Hongbin Ji , Chang-Tsung Lin , Shinichi Kurita
IPC分类号： B41J29/393
CPC分类号： B41J29/393
摘要： Methods and apparatus for inkjet drop positioning are provided. A first method includes determining an intended deposition location of an ink drop on a substrate, depositing the ink drop on the substrate using an inkjet printing system, detecting a deposited location of the deposited ink drop on the substrate, comparing the deposited location to the intended location, determining a difference between the deposited location and the intended location, and compensating for the difference between the deposited location and the intended location by adjusting a parameter of an inkjet printing system. Numerous other aspects are provided.
摘要翻译：提供了用于喷墨滴定位的方法和装置。第一种方法包括确定墨滴在基底上的预期沉积位置，使用喷墨印刷系统将墨滴沉积在基底上，检测沉积的墨滴在基底上的沉积位置，将沉积位置与预期的位置进行比较确定存放位置与预期位置之间的差异，以及通过调整喷墨打印系统的参数来补偿存放位置与预期位置之间的差异。提供了许多其他方面。

63. 发明申请

US20090090883A1 CHAMBER ISOLATION VALVE RF GROUNDING 有权
标题翻译：室隔离阀射频接地
公开(公告)号：US20090090883A1
公开(公告)日：2009-04-09
申请号：US12333043
申请日：2008-12-11
申请人： Ke Ling Lee , Shinichi Kurita , Emanuel Beer
发明人： Ke Ling Lee , Shinichi Kurita , Emanuel Beer
IPC分类号： F16K25/00
CPC分类号： F16K3/0227 , F16K51/02 , H01J37/32844 , H01J2237/166 , H01L21/67126 , Y02C20/30 , Y02P70/605 , Y10S277/919 , Y10S277/92 , Y10T137/8242
摘要： Embodiments described herein provide a method and apparatus for grounding a chamber isolation valve. In one embodiment, a grounded chamber isolation valve for a plasma processing system is described. The chamber isolation valve includes a door and a bracing member movably attached to and opposing the door, and at least one electrically conductive member in electrical communication with the door, the at least one electrically conductive member comprising one or more reaction bumpers disposed on the bracing member that are adapted to contact at least one grounded component of the plasma processing system when the door is in the closed position.
摘要翻译：本文描述的实施例提供了用于使腔室隔离阀接地的方法和装置。在一个实施例中，描述了用于等离子体处理系统的接地室隔离阀。室隔离阀包括门和可移动地附接到门并与其相对的支撑构件，以及至少一个与门电连通的导电构件，所述至少一个导电构件包括设置在支撑上的一个或多个反应缓冲器当门处于关闭位置时，适于接触等离子体处理系统的至少一个接地部件的构件。

64. 发明申请

US20090058941A1 METHODS AND APPARATUS FOR MODULAR PRINT HEAD AND ADAPTER AND ROTATION THEREOF WITH INKJET PRINTER SYSTEMS 审中-公开
标题翻译：使用喷墨打印机系统的模块化打印头和适配器及其旋转的方法和装置
公开(公告)号：US20090058941A1
公开(公告)日：2009-03-05
申请号：US12202190
申请日：2008-08-29
申请人： Shinichi Kurita , Benjamin Johnston
发明人： Shinichi Kurita , Benjamin Johnston
IPC分类号： B41J2/14
CPC分类号： B41J2/14201 , B41J2202/09 , B41J2202/14
摘要： Methods, systems and apparatus are provided for use with an inkjet printing system. In some embodiments, an apparatus is provided, comprising an adapter including one or more supply lines, wherein the one or more supply lines are adapted to transmit at least one of ink and solvent to a print head. Numerous other aspects are provided.
摘要翻译：提供了与喷墨打印系统一起使用的方法，系统和装置。在一些实施例中，提供了一种装置，其包括适配器，其包括一个或多个供应管线，其中所述一个或多个供应管线适于将油墨和溶剂中的至少一个传送到打印头。提供了许多其他方面。

65. 发明申请

US20080309715A1 METHODS AND APPARATUS FOR DEPOSITING INK ONTO SUBSTRATES 失效
标题翻译：用于沉积在基材上的方法和装置
公开(公告)号：US20080309715A1
公开(公告)日：2008-12-18
申请号：US11761832
申请日：2007-06-12
申请人： Bassam Shamoun , John M. White , Quanyuan Shang , Shinichi Kurita
发明人： Bassam Shamoun , John M. White , Quanyuan Shang , Shinichi Kurita
IPC分类号： B41J2/21
CPC分类号： B41J2/2132
摘要： Embodiments of an ink jet printing system include a motion stage adapted to move a substrate having a display object in a printing direction and a first printing assembly mounted over the motion stage including a set of print heads aligned and arranged consecutively in the printing direction such that the display object moves under the print heads sequentially. Embodiments of a method of ink jet printing include moving a substrate under the print heads of printing assembly sequentially in a printing direction, activating alternate ink jetting channels within each print head of the first printing assembly, activating corresponding channels within adjacent print heads in the first printing assembly alternately, and depositing ink in alternating sub-pixels within one or more pixels on the substrate.
摘要翻译：喷墨打印系统的实施例包括适于在打印方向上移动具有显示对象的基板的运动台和安装在运动台上的第一印刷组件，该第一印刷组件包括在打印方向上连续排列和排列的一组打印头，使得显示对象顺序地在打印头下移动。喷墨打印方法的实施例包括在打印方向上顺序地移动印刷组件的打印头下的基板，激活第一印刷组件的每个打印头内的交替喷墨通道，在第一印刷组件的相邻打印头内激活相应的通道交替地印刷组件，并且在基板上的一个或多个像素内的交替子像素中沉积墨。

66. 发明申请

US20080118236A1 LOAD LOCK CHAMBER WITH HEATER IN TUBE 有权
标题翻译：带加热器的管路箱
公开(公告)号：US20080118236A1
公开(公告)日：2008-05-22
申请号：US11782290
申请日：2007-07-24
申请人： Suhail Anwar , Jae-Chull Lee , Shinichi Kurita
发明人： Suhail Anwar , Jae-Chull Lee , Shinichi Kurita
IPC分类号： H01L21/00 , H05B3/14 , H05B31/08
CPC分类号： H01L21/67115 , C23C16/54 , H01L21/67201
摘要： Embodiments of the invention include a heated load lock chamber. In one embodiment, a heated load lock chamber includes a chamber body having a plurality of lamp assembles disposed at least partially therein. Each lamp assembly includes a transmissive tube housing a lamp. The transmissive tube extends into the chamber body and provides a pressure barrier isolating the lamp from the interior volume of the load lock chamber. In another embodiment, an open end of the transmissive tube extends through a sidewall of the chamber body. A closed end of the transmissive tube is surrounded by the interior volume of the chamber body and is supported below a top of the chamber body in a spaced apart relation. The open end of the tube is sealed to the sidewall of the chamber body such that the interior of the tube is open to atmosphere.
摘要翻译：本发明的实施例包括加热的负载锁定室。在一个实施例中，加热的负载锁定室包括具有至少部分地设置在其中的多个灯组件的室主体。每个灯组件包括容纳灯的透射管。透射管延伸到室主体中并提供将灯隔离到负载锁定室的内部空间的压力屏障。在另一个实施例中，透射管的开口端延伸穿过腔体的侧壁。透射管的封闭端被室主体的内部空间包围，并以间隔的关系支撑在腔室主体的顶部下方。管的开口端被密封到腔体的侧壁，使得管的内部对大气敞开。

67. 发明授权

US07330021B2 Integrated substrate transfer module 有权
标题翻译：集成基板传输模块
公开(公告)号：US07330021B2
公开(公告)日：2008-02-12
申请号：US11018236
申请日：2004-12-21
申请人： Shinichi Kurita , Emanuel Beer , Hung T. Nguyen , Benjamin Johnston , Fayez E. Abboud
发明人： Shinichi Kurita , Emanuel Beer , Hung T. Nguyen , Benjamin Johnston , Fayez E. Abboud
IPC分类号： G01R13/04
CPC分类号： G09G3/006 , G01R31/2893 , G01R31/305
摘要： A substrate table and method for supporting and transferring a substrate are provided. The substrate table includes a segmented stage having an upper surface for supporting a substrate, and an end effector. The end effector includes two or more spaced apart fingers and an upper surface for supporting a substrate. The end effector is at least partially disposed and moveable within the segmented stage such that the fingers of the end effector and the segmented stage interdigitate to occupy the same horizontal plane. The segmented stage is adapted to raise and lower about the end effector.
摘要翻译：提供了用于支撑和转移衬底的衬底台和方法。衬底台包括具有用于支撑衬底的上表面的分段段和端部执行器。末端执行器包括两个或更多间隔开的指状物和用于支撑基底的上表面。末端执行器至少部分地设置并在分段台内移动，使得末端执行器和分段台阶的指状物相互指向以占据相同的水平面。分段段适于围绕末端执行器升高和降低。

68. 发明申请

US20070281090A1 SYSTEM ARCHITECTURE AND METHOD FOR SOLAR PANEL FORMATION 审中-公开
标题翻译：太阳能电池板的系统结构与方法
公开(公告)号：US20070281090A1
公开(公告)日：2007-12-06
申请号：US11733906
申请日：2007-04-11
申请人： Shinichi Kurita , Takako Takehara , Suhail Anwar
发明人： Shinichi Kurita , Takako Takehara , Suhail Anwar
IPC分类号： C23C16/24 , C23C16/54
CPC分类号： H01L31/206 , H01L21/67155 , H01L21/67161 , H01L21/67167 , H01L21/67184 , H01L21/67207 , H01L21/67236 , Y02E10/50 , Y02P70/521
摘要： A method and apparatus for forming solar panels from n-doped silicon, p-doped silicon, intrinsic amorphous silicon, and intrinsic microcrystalline silicon using a cluster tool is disclosed. The cluster tool comprises at least one load lock chamber and at least one transfer chamber. When multiple clusters are used, at least one buffer chamber may be present between the clusters. A plurality of processing chambers are attached to the transfer chamber. As few as five and as many as thirteen processing chambers can be present.
摘要翻译：公开了一种使用簇工具从n掺杂硅，p掺杂硅，本征非晶硅和本征微晶硅形成太阳能电池板的方法和装置。集群工具包括至少一个装载锁定室和至少一个传送室。当使用多个簇时，可以在簇之间存在至少一个缓冲室。多个处理室附接到传送室。只有五个和多达十三个处理室可以存在。

69. 发明申请

US20070182775A1 METHODS AND APPARATUS FOR REDUCING IRREGULARITIES IN COLOR FILTERS 失效
标题翻译：减少彩色滤光片不正常的方法和装置
公开(公告)号：US20070182775A1
公开(公告)日：2007-08-09
申请号：US11671781
申请日：2007-02-06
申请人： Shinichi Kurita , Bassam Shamoun
发明人： Shinichi Kurita , Bassam Shamoun
IPC分类号： B41J2/205 , B41J2/21
CPC分类号： G02B5/201 , G02B5/223 , G02F1/133516
摘要： Methods, apparatus and systems are disclosed for printing color filters for flat panel displays and avoiding mura effects by depositing a plurality of ink drops on a substrate within a column of pixel wells and intentionally varying the size and/or the relative lateral position of the ink drops deposited in the pixel wells. Numerous other aspects are disclosed.
摘要翻译：公开了用于印刷平板显示器的滤色器的方法，装置和系统，并且通过在像素孔的列内的基板上沉积多个墨滴并有意改变墨水的尺寸和/或相对横向位置来避免墨镜效应液滴沉积在像素孔中。公开了许多其他方面。

70. 发明申请

US20070086881A1 DUAL SUBSTRATE LOADLOCK PROCESS EQUIPMENT 审中-公开
标题翻译：双基板负载工艺设备
公开(公告)号：US20070086881A1
公开(公告)日：2007-04-19
申请号：US11613556
申请日：2006-12-20
申请人： Shinichi Kurita , Wendell Blonigan , Akihiro Hosokawa
发明人： Shinichi Kurita , Wendell Blonigan , Akihiro Hosokawa
IPC分类号： H01L21/677 , H01L21/306 , C23C16/00 , B65H1/00
CPC分类号： H01L21/68742 , B65G49/068 , B65G2249/02 , B65G2249/04 , C23C14/566 , C23C14/568 , C23C16/54 , H01L21/67103 , H01L21/67109 , H01L21/67167 , H01L21/67201 , H01L21/67739 , H01L21/67745 , H01L21/67748
摘要： One embodiment relates to a loadlock having a first support structure therein to support one unprocessed substrate and a second support structure therein to support one processed substrate. The first support structure is located above the second support structure. The loadlock includes an elevator to control the vertical position of the support structures. The loadlock also includes a first aperture to permit insertion of an unprocessed substrate into the loadlock and removal of a processed substrate from the loadlock, as well as a second aperture to permit removal of an unprocessed substrate from the loadlock and insertion of a processed substrate into the loadlock. A cooling plate is also located in the loadlock. The cooling plate includes a surface adapted to support a processed substrate thereon. A heating device may be located in the loadlock above the first support structure.
摘要翻译：一个实施例涉及一种其中具有第一支撑结构的负载锁，用于支撑一个未处理的基板和其中的第二支撑结构以支撑一个处理的基板。第一支撑结构位于第二支撑结构的上方。负载锁包括用于控制支撑结构的垂直位置的电梯。负载锁还包括第一孔，以允许将未处理的衬底插入到装载锁中并从加载锁中移除经处理的衬底，以及第二孔，以允许将未处理的衬底从负载锁上移除并将经处理的衬底插入负载锁。一个冷却板也位于负载锁中。冷却板包括适于在其上支撑经处理的基板的表面。加热装置可以位于第一支撑结构上方的装载锁中。

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