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    • 62. 发明申请
    • PROBE SUPPORT AND PROCESS FOR THE EXAMINATION OF TEST SUBSTRATES UNDER USE OF PROBE SUPPORTS
    • 在使用探测支持下检测测试基板的探测支持和过程
    • US20080116917A1
    • 2008-05-22
    • US11940354
    • 2007-11-15
    • Stojan KanevHans-Jurgen FleischerStefan KreissigKarsten StollAxel SchmidtAndreas Kittlaus
    • Stojan KanevHans-Jurgen FleischerStefan KreissigKarsten StollAxel SchmidtAndreas Kittlaus
    • G01R31/02
    • G01R31/2889G01R1/07342
    • A probe support for holding probes which serve for electrical contacting of test substrates in a prober for testing purposes is specified. A process for testing test substrates in such a prober is also specified. The probe support comprises a probe card holder, a probe card, and a probe card adapter, where the probe card and probe card adapter are electrically connected to one another as well as to a shield of electrically conductive material and are disposed in such a manner that the probe card lies in a passageway of a shield. The shield is disposed between the test substrates and the probe card holder and is electrically insulated from it. For testing test substrates their positioning with respect to the probes held in this manner is done by angular alignment of the contact surfaces of the test substrates to the sensor tips and the movement of the test substrates along a path which starts from a first reference position and is composed up to the first, and each additional, contact position of an x-component and a y-component (FIG. 2).
    • 规定了用于保持探头的探针支架,用于检测探针中的测试基板的电接触用于测试目的。 还规定了用于在这种探测器中测试测试底物的方法。 探针支架包括探针卡夹,探针卡和探针卡适配器,其中探针卡和探针卡适配器彼此电连接以及导电材料的屏蔽,并以这种方式设置 探针卡位于屏蔽的通道中。 屏蔽件设置在测试基板和探针卡保持器之间并且与其电绝缘。 为了测试测试基板,它们相对于以这种方式保持的探针的定位是通过将测试基板的接触表面与传感器尖端角度对准并沿着从第一参考位置开始的路径移动测试基板来进行的, 由x分量和y分量(图2)组成直到第一个和每个附加的接触位置。
    • 65. 发明授权
    • Test apparatus for testing substrates at low temperatures
    • 用于在低温下测试基板的测试装置
    • US07046025B2
    • 2006-05-16
    • US10677178
    • 2003-10-02
    • Stefan SchneidewindClaus DietrichJorg KiesewetterFrank-Michael WernerAxel SchmidtMatthias Zieger
    • Stefan SchneidewindClaus DietrichJorg KiesewetterFrank-Michael WernerAxel SchmidtMatthias Zieger
    • G01R31/02
    • G01R31/2865G01R31/2806G01R31/2831G01R31/2887
    • A test apparatuss for testing substrates at low temperatures has a chuck, which can be displaced in the working area by means of a chuck drive, the temperature of which can be controlled using heating and cooling means. The chuck has a receiving surface for receiving a test substrate and holding means for fixing a substrate carrier which receives the test substrate. Spatially and thermally defined test conditions are maintained with minimal energy and labor costs both at room temperatures and at low temperatures. This is achieved by providing a vacuum chamber which surrounds the working area of the chuck. The chuck is on one side thermally decoupled from the uncooled chuck drive and on the other side is thermally connected in a releasable manner to the test substrate. The cooled chuck and the cooled test substrate are shielded from the thermal radiation of the surrounding uncooled assemblies by means of a directly cooled thermal radiation shield.
    • 用于在低温下测试基板的测试装置具有卡盘,该卡盘可以通过卡盘驱动器在工作区域中移动,卡盘驱动器的温度可以使用加热和冷却装置来控制。 卡盘具有用于接收测试基板的接收表面和用于固定接收测试基板的基板载体的保持装置。 空间和热定义的测试条件在室温和低温下以最小的能量和劳动成本维持。 这通过提供围绕卡盘的工作区域的真空室来实现。 卡盘在一侧与非冷却的卡盘驱动器热分离,另一侧以可释放的方式热连接到测试基板。 通过直接冷却的热辐射屏蔽将冷却的卡盘和冷却的测试基板与周围的未冷却组件的热辐射隔离。