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    • 69. 发明申请
    • Treating solution supply nozzle, a substrate treating apparatus having this nozzle, and a method of manufacturing a treating solution supply nozzle
    • 处理溶液供给喷嘴,具有该喷嘴的基板处理装置以及处理液供给喷嘴的制造方法
    • US20060236928A1
    • 2006-10-26
    • US11472612
    • 2006-06-22
    • Shigehiro GotoHiroshi Kobayashi
    • Shigehiro GotoHiroshi Kobayashi
    • B05B7/16
    • H01L21/6715B05C11/08B05C11/1042
    • A resin block has a treating solution channel extending between and opening at front and back surfaces thereof. Heat conductive members are face-bonded to the front and back surfaces of the resin block, respectively, for closing the channel. Consequently, no air is present between the resin block and heat conduction members, thereby improving the efficiency of heat exchange. A nozzle of simple construction is realized only by face-bonding the two heat conductive members to the open front and rear surfaces of the resin block. Temperature control plates hold the heat conductive m embers along with the resin block to effect a temperature control, whereby the temperature of a treating solution in the treating solution channel is controlled effectively through the heat conductive members. The treating solution adjusted to a desired temperature is delivered from a discharge opening to a substrate for performing substrate treatment with high accuracy.
    • 树脂块具有在其前表面和后表面之间延伸并在其前后开口的处理溶液通道。 导热构件分别面对粘合到树脂块的前表面和后表面,用于封闭通道。 因此,树脂块和导热构件之间不存在空气,从而提高热交换的效率。 仅通过将两个导热构件面对粘合到树脂块的敞开的前表面和后表面上来实现简单结构的喷嘴。 温度控制板与树脂块一起保持导热填料以进行温度控制,由此通过导热构件有效地控制处理溶液通道中的处理溶液的温度。 调节到期望温度的处理溶液从排出口输送到基板,以高精度进行基板处理。