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61. 发明授权

US4030830A Process and apparatus for sensing defects on a smooth surface 失效
标题翻译：用于感测光滑表面上的缺陷的工艺和设备
公开(公告)号：US4030830A
公开(公告)日：1977-06-21
申请号：US647264
申请日：1976-01-05
申请人： Sandor Holly
发明人： Sandor Holly
IPC分类号： G01B11/30 , G01J9/04 , G01M11/00 , G01N21/88 , G01N21/89 , G01N21/956 , G01B9/02
CPC分类号： G01M11/005 , G01B11/30 , G01J9/04 , G01N21/8901
摘要： Method and apparatus for sensing the effective magnitude and/or number and/or position of individual depression and/or protrusion defects on a high-precision smooth surface of an article which may have said defects randomly distributed and relatively spatially distant each from the other, comprising continuously scanning the surface with a laterally-moving interference fringe pattern adjusted in size to have a cross-sectional area substantially smaller than the surface and no larger than an area which includes about an average predetermined spatial incidence of about one defect per pattern area; adjusting the fringe period to a size substantially larger than the effective cross-sectional dimension of a predetermined, maximum size defect; continuously sensing the AC and DC or AC signal components of the backscattered light; and substantially determining the effective magnitude and/or number and/or surface position of said defects by determining the magnitude of the AC or AC and DC signals obtained at each instantaneous relative position of the fringe pattern and the smooth surface. Said scan can thus provide information as to effective magnitude, number of defects, and topography of the defects on the surface. By the use of appropriate electronics, the information can be recorded and/or displayed.
摘要翻译：用于感测物品的高精度光滑表面上的各种凹陷和/或突出缺陷的有效大小和/或数量和/或位置的方法和装置，其可以具有随机分布并且彼此相对空间相对的缺陷，包括以尺寸调整的横向移动的干涉条纹图案连续扫描所述表面，以使得所述表面的横截面面积基本上小于所述表面，并且不大于包括围绕每个图案区域的大约一个缺陷的平均预定空间入射的区域; 将边缘周期调整到比预定的最大尺寸缺陷的有效截面尺寸大得多的尺寸; 连续感测后向散射光的交流和直流或交流信号分量; 并且通过确定在条纹图案和平滑表面的每个瞬时相对位置处获得的AC或AC和DC信号的大小来基本上确定所述缺陷的有效幅度和/或数量和/或表面位置。因此，所述扫描可以提供关于表面上的缺陷的有效大小，缺陷数量和形貌的信息。通过使用适当的电子设备，可以记录和/或显示信息。

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