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61. 发明授权

US09202731B2 Liquid processing apparatus, liquid processing method, and recording medium having program for executing liquid processing method recorded therein 有权
标题翻译：液体处理装置，液体处理方法和具有记录在其中的用于执行液体处理方法的程序的记录介质
公开(公告)号：US09202731B2
公开(公告)日：2015-12-01
申请号：US13334406
申请日：2011-12-22
申请人： Shigeru Kasai , Ayuta Suzuki , Ikuo Sawada , Naoki Shindo , Masatake Yoneda , Kazuhiro Ooya
发明人： Shigeru Kasai , Ayuta Suzuki , Ikuo Sawada , Naoki Shindo , Masatake Yoneda , Kazuhiro Ooya
IPC分类号： H01L21/00 , H01L21/67 , H01L21/02
CPC分类号： H01L21/67115 , H01L21/02052 , H01L21/02057 , H01L21/67028 , H01L21/67051
摘要： Disclosed is a liquid processing apparatus that processes a substrate with a processing liquid. The processing apparatus includes: a substrate holder configured to hold the substrate; a processing liquid supply unit configured to supply the processing liquid to the substrate held by the substrate holder; a rinsing liquid supply unit configured to supply a rinsing liquid to the substrate; and a light emitting element configured to emit light of a wavelength range, which is absorbed only by the substrate, and irradiate the emitted light to the substrate.
摘要翻译：公开了一种用处理液处理基板的液体处理装置。所述处理装置包括：基板保持器，其构造成保持所述基板; 处理液供给部，其将处理液供给到由所述基板保持体保持的基板; 冲洗液体供给单元，其配置为向所述基板供给冲洗液; 以及发光元件，被配置为发射仅被衬底吸收的波长范围的光，并将发射的光照射到衬底。

62. 发明申请

US20140219071A1 FAILURE PREDICTION METHOD AND FAILURE PREDICTION SYSTEM 有权
标题翻译：故障预测方法和故障预测系统
公开(公告)号：US20140219071A1
公开(公告)日：2014-08-07
申请号：US14240016
申请日：2012-08-15
申请人： Soichiro Takata , Shigeki Shinoda , Shigeru Kasai , Nobuhiro Mikami , Yasuhiro Sasaki
发明人： Soichiro Takata , Shigeki Shinoda , Shigeru Kasai , Nobuhiro Mikami , Yasuhiro Sasaki
IPC分类号： G11B20/18
CPC分类号： G11B20/18 , G11B19/048 , G11B27/36
摘要： A failure prediction system for performing failure prediction to a monitoring target device by detecting a state, comprising: a state detection unit for detecting state signals of no smaller than two different kinds, and outputting a detection signal corresponding to each of the state signals; a phase processing part for synchronizing a plurality of the detection signals; a signal analysis part for calculating a feature value indicating a feature of the state for each of the detection signals from the phase processing part; and a failure prediction part for performing failure prediction of the monitoring target device for each of the feature values by comparing the feature value in question and a reference value set in advance.
摘要翻译：一种故障预测系统，用于通过检测状态对监视目标设备执行故障预测，包括：状态检测单元，用于检测不少于两种不同类型的状态信号，并输出与每个状态信号对应的检测信号; 相位处理部，其使多个所述检测信号同步; 信号分析部分，用于从相位处理部分计算指示每个检测信号的状态特征的特征值; 以及故障预测部，用于通过比较所述特征值和预先设定的参考值来对每个特征值执行所述监视对象装置的故障预测。

63. 发明申请

US20130199095A1 CRIME PREVENTION DEVICE, CRIME PREVENTION SYSTEM AND METHOD FOR DETERMINING STATE OF OPENING/CLOSING BODY 审中-公开
标题翻译：犯罪预防手段，犯罪预防系统及确定开放/关闭状态的方法
公开(公告)号：US20130199095A1
公开(公告)日：2013-08-08
申请号：US13821575
申请日：2011-09-20
申请人： Shigeki Shinoda , Shigeru Kasai , Yasuhiro Sasaki
发明人： Shigeki Shinoda , Shigeru Kasai , Yasuhiro Sasaki
IPC分类号： G01N29/04
CPC分类号： G01N29/045 , E06B7/28 , G08B13/04 , G08B13/08 , G08B21/24
摘要： [Problem]It is difficult to determine a state of an opening/closing body for opening/closing an opening section of a building.[Solution]A crime prevention device according to an exemplary aspect of the invention an excitation means for applying vibration to an opening/closing body for opening/closing an opening section of a building; a detection means for detecting the vibration of the opening/closing body to which the vibration has been applied by the excitation means; and a determination means for determining the state of the opening/closing body on the basis of the feature of the detected vibration of the opening/closing body.
摘要翻译： [问题]难以确定用于打开/关闭建筑物的开口部的打开/关闭体的状态。解决方案根据本发明的示例性方面的防犯罪装置，用于向打开/关闭建筑物的开口部分的打开/关闭主体施加振动的激励装置; 用于检测由激励装置施加了振动的开闭体的振动的检测装置; 以及确定装置，用于基于开/闭体的检测到的振动的特征来确定打开/关闭体的状态。

64. 发明授权

US08299671B2 Processing apparatus 有权
标题翻译：处理装置
公开(公告)号：US08299671B2
公开(公告)日：2012-10-30
申请号：US12663134
申请日：2008-05-29
申请人： Masamichi Nomura , Kenjiro Koizumi , Shigeru Kasai
发明人： Masamichi Nomura , Kenjiro Koizumi , Shigeru Kasai
IPC分类号： H02K7/09 , H01L21/00
CPC分类号： H01L21/68792 , C23C14/505 , H01J37/32761
摘要： A rotary floater (30) for supporting an object to be processed (W) is floated by the magnetic attraction of a floating electromagnet assembly (F), and the rotary floater (30) is rotated by the magnetic attraction of a rotary electromagnet assembly (R) while its horizontal position being controlled by the magnetic attraction of a positioning electromagnet assembly (H). The floating electromagnet assembly (F) causes the magnetic attraction to act vertically upwardly, so that the rotary floater (30) is floated and suspended without contact with the inner wall of a processing container (2).
摘要翻译：用于支撑待加工物体（W）的旋转浮子（30）通过浮动电磁体组件（F）的磁吸引而浮起，旋转浮子（30）通过旋转电磁体组件 R），而其水平位置由定位电磁铁组件（H）的磁吸引力控制。浮动电磁体组件（F）使得磁吸引力垂直向上作用，使得旋转浮子（30）浮动并悬挂而不与处理容器（2）的内壁接触。

65. 发明申请

US20120222816A1 SURFACE WAVE PLASMA GENERATING ANTENNA AND SURFACE WAVE PLASMA PROCESSING APPARATUS 有权
标题翻译：表面波等离子体生成天线和表面波等离子体处理装置
公开(公告)号：US20120222816A1
公开(公告)日：2012-09-06
申请号：US13410957
申请日：2012-03-02
申请人： Taro IKEDA , Shigeru Kasai , Yuki Osada
发明人： Taro IKEDA , Shigeru Kasai , Yuki Osada
IPC分类号： H01L21/3065 , H01J1/02
CPC分类号： H01J37/3222 , C23C16/274
摘要： A surface wave plasma generating antenna serves to generate a surface wave plasma in a chamber by radiating into the chamber a microwave transmitted from a microwave output section through a coaxial waveguide including an outer conductor and an inner conductor. The surface wave plasma generating antenna is formed in a planar shape and has a plurality of slots arranged in a circumferential direction, and each joint portion between two adjacent slots in the circumferential direction is overlapped with at least one of the slots in a diametrical direction.
摘要翻译：表面波等离子体产生天线用于通过将包括外部导体和内部导体的同轴波导从微波输出部分发射的微波辐射到室中，从而在室内产生表面波等离子体。表面波等离子体发生天线形成为平面形状，并且具有沿圆周方向排列的多个狭槽，并且沿圆周方向的两个相邻狭槽之间的每个接合部分沿直径方向与至少一个狭槽重叠。

66. 发明授权

US08128751B2 Film-forming apparatus 有权
标题翻译：成膜装置
公开(公告)号：US08128751B2
公开(公告)日：2012-03-06
申请号：US12404878
申请日：2009-03-16
申请人： Shigeru Kasai , Takashi Kakegawa
发明人： Shigeru Kasai , Takashi Kakegawa
IPC分类号： C23C16/455 , C23C15/52 , C23F1/00 , H01L21/306 , C23C16/06 , C23C16/22
CPC分类号： C23C16/4557 , C23C16/45565 , C23C16/45572 , H01J37/3244 , H01L21/28556
摘要： A film-forming apparatus of the invention is a film-forming apparatus that includes: a processing container that defines a chamber, a pedestal arranged in the chamber, on which a substrate to be processed can be placed, a showerhead provided opposite to the pedestal, which has a large number of gas-discharging holes, a gas-supplying mechanism that supplies a process gas into the chamber through the showerhead, and a showerhead-temperature controlling unit that controls a temperature of the showerhead.
摘要翻译：本发明的成膜装置是一种成膜装置，它包括：一个限定腔室的处理容器，布置在该腔室中的基座，待处理的基底可以放置在其上;一个与基座相对设置的喷头具有大量排气孔的气体供给机构，其通过喷头将处理气体供给到室内;以及喷头温度控制单元，其控制喷头的温度。

67. 发明授权

US08107801B2 Heat treatment apparatus, computer program, and storage medium 有权
标题翻译：热处理装置，计算机程序和存储介质
公开(公告)号：US08107801B2
公开(公告)日：2012-01-31
申请号：US12053336
申请日：2008-03-21
申请人： Masahiro Shimizu , Shigeru Kasai , Masatake Yoneda
发明人： Masahiro Shimizu , Shigeru Kasai , Masatake Yoneda
IPC分类号： F26B19/00
CPC分类号： H01L21/67115 , H01L21/324 , H01L21/67109
摘要： A heat treatment apparatus for performing prescribed heat treatment to a subject (W) to be treated is provided with a processing chamber in which air can be exhausted; a mounting table arranged in the processing chamber, for placing on an upper plane the subject to be treated; a plurality of thermoelectric conversion elements arranged on an upper part of the mounting table; a light transmitting window for covering a ceiling portion of the processing chamber airtight; and a gas introduction unit for introducing a required gas into the processing chamber. A heating unit which includes a plurality of heating light sources including a semiconductor light emitting element for emitting heating light to the subject to be treated, is provided above the light transmitting window. Thus, heating efficiency is improved and temperature can be increased and reduced at a higher speed for the subject to be treated.
摘要翻译：对待处理对象（W）进行规定的热处理的热处理装置设置有能够排出空气的处理室; 布置在处理室中的安装台，用于将待处理的物体放置在上平面上; 多个热电转换元件，布置在所述安装台的上部; 用于将处理室的顶部部分密封的透光窗口; 以及用于将所需气体引入处理室的气体引入单元。包括多个加热光源的加热单元设置在透光窗的上方，该多个加热光源包括用于向被处理物体发出加热光的半导体发光元件。因此，提高加热效率并且可以以更高的速度提高和降低待处理对象的温度。

68. 发明申请

US20110174790A1 ANNEALING APPARATUS 审中-公开
标题翻译：退火装置
公开(公告)号：US20110174790A1
公开(公告)日：2011-07-21
申请号：US13001357
申请日：2009-06-24
申请人： Tomohiro Suzuki , Masatake Yoneda , Shigeru Kasai , Kazuhiro Ooya
发明人： Tomohiro Suzuki , Masatake Yoneda , Shigeru Kasai , Kazuhiro Ooya
IPC分类号： B23K26/12 , B23K26/00
CPC分类号： H01L21/67115
摘要： The present invention is an annealing apparatus configured to perform an annealing process to an object to be processed, the annealing apparatus comprising: a processing vessel in which the object to be processed can be accommodated; a support unit configured to support the object to be processed in the processing vessel; a gas supply unit configured to supply a process gas into the processing vessel; an exhaust unit configured to discharge an atmosphere in the processing vessel; and a rear-side heating unit including a plurality of laser elements configured to irradiate heating light beams toward an overall rear surface of the object to be processed.
摘要翻译：本发明是一种对被处理物进行退火处理的退火装置，该退火装置包括：处理容器，其中可容纳待加工物体; 支撑单元，其构造成在处理容器中支撑要处理的物体; 气体供给单元，其构造成将处理气体供给到处理容器中; 排气单元，其构造成排出处理容器中的气氛; 以及后侧加热单元，其包括多个激光元件，所述多个激光元件被配置为朝向待处理物体的整个后表面照射加热光束。

69. 发明申请

US20110018651A1 POWER COMBINER AND MICROWAVE INTRODUCTION MECHANISM 审中-公开
标题翻译：电力综合与微波介绍机制
公开(公告)号：US20110018651A1
公开(公告)日：2011-01-27
申请号：US12922702
申请日：2009-03-09
申请人： Taro Ikeda , Shigeru Kasai
发明人： Taro Ikeda , Shigeru Kasai
IPC分类号： H01P5/18
CPC分类号： H01P5/12 , H01J37/32192 , H01J37/3222 , H05H1/46
摘要： A power combiner 100 comprises a tubular main container 1, a plurality of power introduction ports 2 provided on the lateral surface of the main container 1 and introducing power as electromagnetic waves, a plurality of feeding antennas 6 provided, respectively, on plurality of power introduction ports 2, a combiner part 10 performing spatial combining of electromagnetic waves radiated from the plurality of feeding antennas 6 into main container 1, and an output port 11 for outputting electromagnetic waves combined at combiner part 10. Each feeding antenna 6 consists of an antenna main body 23 having a first pole 21 to which electromagnetic waves are supplied from a power introduction port 2 and a second pole 22 for radiating the electromagnetic waves thus supplied, and a reflection part 24 so provided as to project sideways from antenna main body 23 and reflecting electromagnetic waves.
摘要翻译：功率组合器100包括管状主容器1，设置在主容器1的侧表面上并且作为电磁波引入电力的多个电力引入口2，分别设置在多个电力引入件上的多个馈电天线6 端口2，将从多个馈电天线6辐射的电磁波空间组合到主容器1中的组合器部分10和用于输出组合在一起的电磁波的输出端口11.每个馈电天线6由天线主体主体23具有从功率引入口2供给电磁波的第一极21和用于照射如此供给的电磁波的第二极22，以及设置成从天线主体23侧向突出并反射的反射部24 电磁波。

70. 发明授权

US07661386B2 Film forming device 有权
标题翻译：成膜装置
公开(公告)号：US07661386B2
公开(公告)日：2010-02-16
申请号：US10467293
申请日：2002-02-08
申请人： Shigeru Kasai , Takashi Kakegawa
发明人： Shigeru Kasai , Takashi Kakegawa
IPC分类号： C23C16/52 , C23C16/44 , H01L21/306 , C23F1/00 , C23C16/06 , C23C16/22
CPC分类号： C23C16/4557 , C23C16/45565 , C23C16/45572 , H01J37/3244 , H01L21/28556
摘要： A film-forming apparatus of the invention is a film-forming apparatus that includes: a processing container that defines a chamber, a pedestal arranged in the chamber, on which a substrate to be processed can be placed, a showerhead provided opposite to the pedestal, which has a large number of gas-discharging holes, a gas-supplying mechanism that supplies a process gas into the chamber through the showerhead, and a showerhead-temperature controlling unit that controls a temperature of the showerhead.
摘要翻译：本发明的成膜装置是一种成膜装置，它包括：一个限定腔室的处理容器，布置在该腔室中的基座，待处理的基底可以放置在其上;一个与基座相对设置的喷头具有大量排气孔的气体供给机构，其通过喷头将处理气体供给到室内;以及喷头温度控制单元，其控制喷头的温度。

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