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    • 61. 发明公开
    • PLASMA PROCESSING APPARATUS
    • 等离子体处理设备
    • EP1055250A1
    • 2000-11-29
    • EP99958406.3
    • 1999-12-10
    • Surface Technology Systems Limited
    • BHARDWAJ, Jyoti, KironLEA, Leslie Michael
    • H01J37/32
    • H01J37/32623H01J37/3266H01J2237/3348H01L21/30655
    • A chamber (2) has a side wall (8), the upper region of which is formed as a dielectric window (9). An antenna (10) is located outside of the dielectric window (9) and is used to couple RF power inductively into the plasma of an etchant or deposition gas which is formed inside the apparatus. A series of parallel tubes (11) are mounted in a plane parallel to the surface of a platen (6) carrying a wafer (7). Each tube contains a small permanent magnet or series of magnets. Electrons from the plasma created near the antenna (10) move into the region of influence of the magnetic field, are guided by the magnetic field and then lost, for example to the wall (8). The net result is a reduction in plasma density, on transmitting the magnetic field, from the region in which the plasma is produced to the region in which the wafer is placed. The magnetic field has no effect on the radicals, and the magnet carrying tubes have only a marginal effect on the radical numbers. Use of this magnetic attenuator allows high RF powers to be applied to the plasma source, producing the high numbers of radicals needed for a high etch rate, but limits the number of ions which can reach the wafer so that the physical component is homogeneous and well controlled.
    • 62. 发明公开
    • Pilot operated control valves
    • Vorgesteuertes Steuerventil
    • EP1050703A2
    • 2000-11-08
    • EP00303408.9
    • 2000-04-20
    • Husco International, Inc.
    • Yang, Xiaolong
    • F16K31/40
    • F15B13/015F16K31/408
    • A pilot operated control valve has a body with an inlet 18 and an outlet 20. A main valve poppet 24 is movable within the body to selectively control flow of fluid between the inlet and outlet. The main valve poppet has a flexible diaphragm 29 with a pilot passage 30 therethrough which is opened and closed by movement of a pilot poppet 44. The diaphragm 29 flexes due to a pressure differential that acts on the pilot poppet, which flexing compensates for adverse effects that the pressure differential has on the operation of the pilot poppet.
    • 先导操作的控制阀具有带入口18和出口20的主体。主阀提升阀24可在主体内移动以选择性地控制入口和出口之间的流体流动。 主阀提升阀具有柔性隔膜29,其具有通过其中的先导通道30,该导向通道30通过先导提升阀44的运动而打开和关闭。隔膜29由于作用在先导提升阀上的压差而弯曲,该压力差作用在先导提升阀上,该挠曲补偿了不利影响 压差与飞行员提升阀的操作有关。
    • 69. 发明公开
    • Improvements relating to glass sheet firing
    • Methode zum Brennen von emaillierten Glasscheiben
    • EP0887317A2
    • 1998-12-30
    • EP98304954.5
    • 1998-06-24
    • Barron, Michael Sean
    • Barron, Michael Sean
    • C03B25/087C03B29/10
    • C03B25/087C03B29/10
    • Screen-printed flat glass sheets 1 to be fired are held within grooves 2 of a base channel member 3. At intervals the upper edges of the pairs of glass sheets 1 are held by jigs 5 and a plate 6 against a support strut 7. The channel member 3 is mounted on a platform 11 which can be rolled into a kiln 13. Heating elements 14 heat the glass sheets 1 in a controlled manner to a firing temperature of 530°C to 540°C over 6 hours, followed by a 1 hour slow cooling time down to 470°C as the glass anneals. The glass sheets are then allowed to cool steadily over a period of 24 hours to room temperature.
    • 将被烧制的丝网印刷的平板玻璃板1保持在基底通道部件3的槽2内。间隔地,玻璃板对1的上边缘被夹具5和板6保持抵靠支撑支柱7。 通道构件3安装在能够滚动到窑13中的平台11上。加热元件14以受控的方式将玻璃板1加热至530℃至540℃的烧制温度6小时,然后加入1 随着玻璃退火,小时缓慢冷却时间降至470℃。 然后将玻璃片在24小时内稳定地冷却至室温。