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51. 发明专利

JP5186018B2 The system and method using a two-part cover to protect the reticle 有权
公开(公告)号：JP5186018B2
公开(公告)日：2013-04-17
申请号：JP2011086217
申请日：2011-04-08
申请人：エーエスエムエルホールディングエヌ.ブイ.
发明人：デルプエルトサンティアゴ , マッサーアンドリュー , アリカンアブドゥラー , エイチ．フェロースジョナサン , アール．ループストラエリック , ピー．キッシュドゥエイン , ジェイ．オルソンウッドロウ
IPC分类号： H01L21/027 , B65G49/07 , G03B27/42 , G03B27/48 , G03B27/58 , G03F1/24 , G03F1/62 , G03F1/64 , G03F1/66 , G03F7/20 , G03F9/00
CPC分类号： B82Y10/00 , B82Y40/00 , G03F1/24 , G03F1/62 , G03F1/64 , G03F1/66 , G03F7/70741 , G03F7/70983 , G03F9/7011 , H01L21/67353 , H01L21/67359 , Y10S414/135
摘要： A system and method are used to protect a mask from being contaminated by airborne particles. They include providing a reticle secured in a two-part cover. The two part cover includes a removable protection device used to protect the reticle from contaminants. The cover can be held inside a pod or box that can be used to transport the cover through a lithography system from an atmospheric section to a vacuum section. While in the vacuum section, the removable cover can be moved during an exposure process during which a pattern on the reticle can be formed on a wafer.

52. 发明专利

JP4295983B2 Flare noise detection method of a semiconductor device 有权
公开(公告)号：JP4295983B2
公开(公告)日：2009-07-15
申请号：JP2002382380
申请日：2002-12-27
申请人：マグナチップセミコンダクター有限会社Magnachip Semiconductor Ltd
发明人：珍石楊
IPC分类号： H01L21/027 , H01L21/66 , G03B27/48 , G03F1/44 , G03F7/20
CPC分类号： G03F7/70941 , G03B27/48

53. 发明专利

JP4113418B2 Exposure device 有权
标题翻译：空值
公开(公告)号：JP4113418B2
公开(公告)日：2008-07-09
申请号：JP2002332201
申请日：2002-11-15
申请人：富士フイルム株式会社
发明人：光示和田 , 多可雄尾崎
IPC分类号： G03F9/00 , G01B11/00 , G02B26/10 , G03B27/42 , G03B27/48 , G03B27/54 , G03B27/58 , G03F7/20 , H04N1/04 , H05K1/02 , H05K3/00
CPC分类号： G03F9/00 , G03F7/2053 , H05K1/0269 , H05K3/0008 , H05K3/0082

54. 发明专利

JP3471131B2 Document reader 失效
公开(公告)号：JP3471131B2
公开(公告)日：2003-11-25
申请号：JP19572895
申请日：1995-07-10
申请人：富士写真フイルム株式会社
发明人：喜次中村 , 大橘 , 則靖石渡 , 潮穴山 , 真一設楽 , 豊高橋
IPC分类号： G03B27/32 , G03B27/465 , G03B27/48 , H04N1/00 , H04N1/12 , H04N1/193
CPC分类号： H04N1/00251 , G03B27/465 , G03B27/48 , H04N1/00127 , H04N1/0032 , H04N1/00538 , H04N1/00968 , H04N1/121 , H04N1/193 , H04N1/2034
摘要： There is provided a document reader system for reading images of a large number of document papers while continuously feeding the document papers from an auto-feeder to a scanner so that image data read by the scanner can be supplied to a computer, which can easily meet various requirements of different users, easily satisfy a user having only a scanner and planning to purchase a microfilm camera additionally, reduce space needed for installing the whole system without providing double auto-feeders and stackers for the scanner and the microfilm camera, and which allows makers to easily provide various types of systems to meet user's requirements. The system includes a turn unit removably attached to the scanner so that the document papers passing through and ejected from the scanner can be returned to a stacker provided in the scanner. Each device portion of the system is formed as a unit so that various types of document reader systems can be obtained by combining necessary units.

55. 发明专利

JP2002373839A Lighting device, and device and method for exposure 审中-公开
标题翻译：照明装置，以及用于曝光的装置和方法
公开(公告)号：JP2002373839A
公开(公告)日：2002-12-26
申请号：JP2001178438
申请日：2001-06-13
申请人： Canon Inc , キヤノン株式会社
发明人： IWANAGA TAKEHIKO
IPC分类号： G03B27/48 , G03F7/20 , H01L21/027
CPC分类号： G03F7/70066 , G03B27/48
摘要： PROBLEM TO BE SOLVED: To actualize high throughput by scanning and irradiating an object surface with high precision even when exposure is carried out during the acceleration or deceleration of movable stages.
SOLUTION: An illuminance distribution varying means is used for a scanning aligner carrying out exposure even when the movable stages 31 and 35 are accelerated or decelerated, and includes a rotatable wedgelike prism 21 and a prism driving part 101 driving the prism 21 as an optical member for varying the illuminance distribution with time. The means has a function of varying the time variation of the illuminance distribution corresponding to a driving pattern, and the illuminance pattern corresponding to the acceleration/ deceleration patterns of the stages 31 and 35 is measured. According to the measurement result, the driving pattern of the wedgelike prism 21 is determined.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：即使在可移动台的加速或减速期间进行曝光，也可以通过高精度地扫描和照射物体来实现高产量。解决方案：即使在可移动台31和35被加速或减速时，即使在可移动台31和35被加速或减速的情况下，照度分布改变装置也用于执行曝光的扫描对准器，并且包括可旋转的楔形棱镜21和驱动棱镜21作为光学构件的棱镜驱动部101 用于随时间改变照度分布。该装置具有改变对应于驱动模式的照度分布的时间变化的功能，并且测量与级31和35的加速/减速模式对应的照度模式。根据测量结果，确定楔形棱镜21的驱动模式。

56. 发明专利

JPH1070683A FILM IMAGE OBSERVATION DEVICE 失效
公开(公告)号：JPH1070683A
公开(公告)日：1998-03-10
申请号：JP22507996
申请日：1996-08-27
申请人： NIKON CORP
发明人： OKUTSU TAKASHI , HIBINO HIDEOMI , YOKONUMA NORIKAZU , KAZAMI KAZUYUKI
IPC分类号： G03B27/48 , H04N1/00 , H04N3/22 , H04N3/36 , H04N5/253
摘要： PROBLEM TO BE SOLVED: To trim a video image so that other parts than a film image cannot be displayed by revising a mask amount in response to an excess part when a moving amount by a moving means moving an image pickup section exceeds a prescribed value. SOLUTION: X, Y coordinates of an image pickup camera with respect to a film image are set to a reference position, that is, to a center of an image area, a film feeder feeds a 13-th frame up to the image area, a panorama range of the 13-th frame is displayed fully onto a lateral width of a display pattern so as to mask parts other than the outside of the panorama range at upper and lower parts of the screen. When a video image is shifted so that a zoom-up part comes to a center of a display pattern from this state (a), an inter-frame other than the film image is displayed as shown in a state (b). When the video image is shifted in excess of the reference position by a prescribed quantity, a mask with a quantity in response to the shift amount in excess of a prescribed amount is set as shown in a state (c). Then the mask for the upper and lower parts of the display screen and the mask newly set are composed and displayed on the display screen as shown in a state (d).

57. 发明专利

JPH0651408A METHOD AND APPARATUS FOR RECORDING ORIGINAL PICTURE AND IMAGE OF BLIP ON MICROFILM 失效
公开(公告)号：JPH0651408A
公开(公告)日：1994-02-25
申请号：JP16736993
申请日：1993-06-15
申请人： AGFA GEVAERT AG
发明人： KAARUUHAINTSU DEIITORITSUHI , HERUBERUTO DEYURUNITSUHI , HANSU SHIEPERUSU , RAINERU SHIYUSUTERU
IPC分类号： G03B27/32 , G03B27/465 , G03B27/48 , G03B27/52 , G03B27/70
摘要： PURPOSE: To provide a method and a device for recording the images of an original picture and a blip on a microfilm. CONSTITUTION: While the images of the continuous original pictures 1 are exposed on the continuous frames of the microfilm 10, the continuous original pictures 1 are moved along a first path and the microfilm 10 is moved along a second path. The blip 12 of selected length is exposed next to the continuous microfilm frames 11 by identical fixed objective lenses 9a and 9b used for exposing the frame 11. Besides, a fixed mask arranged on the moving path of the original picture, a flash light repeatedly illuminating makes 4a and 4b in order to form the blip and the system of mirrors 8a-8d for transmitting the images of the illuminated masks 4a and 4b to the lenses 9a and 9b are included in an assembly used for being applied to the blip. The original picture is moved so that the microimage of tone original picture projected by the lenses 9a and 9b is moved together with the microfilm 10 by being synchronized with the movement of the microfilm 10.

58. 发明专利

JPH03505638A 失效
公开(公告)号：JPH03505638A
公开(公告)日：1991-12-05
申请号：JP50684589
申请日：1989-06-01
IPC分类号： G03B27/32 , G03B27/34 , G03B27/48

59. 发明专利

JPS5832101A MEASURING DEVICE FOR EXTENT OF MOVEMENT 失效
公开(公告)号：JPS5832101A
公开(公告)日：1983-02-25
申请号：JP13129881
申请日：1981-08-20
申请人： CANON KK
发明人： MURATA SHINJI , IWATANI TOSHIO , NAGASAWA TAKESHI
IPC分类号： G03B27/50 , B65H26/00 , B65H26/06 , G01B5/04 , G03B27/48 , G03G15/00
摘要： PURPOSE:To measure the extent of large movements accurately without any speed reducing mechanism of a large reduction ratio in a measuring device for extent of movements by repeating the operation of resetting a rotating disc which rotates in accordance with movements to an initial position at the point of the time when said disc makes required rotation. CONSTITUTION:The rate of feeding a film in a rotary processor camera which photographs the image of an original 1 while moving the original and a film F is transmitted as revolutions of a capstan roller 11 via gears 30, 32-34 to a cam gear 35. When the film is fed by the 1st prescribed rate, a switch 45 is actuated by a cam 35a, by which a solenoid 37 is operated to rotate a movable arm 31. Since the gear 34 is detached from the gear 35 by said arm, the gear 35 is returned to the initial position by means of a spring 40. Then the solenoid is disabled and the gear begins to rotate again. Further when the film is transferred by the 2nd required rate, the 2nd cam 35b actuates a switch 46, and the similar operations are accomplished.

60. 发明专利

JPS5739409B2 失效
公开(公告)号：JPS5739409B2
公开(公告)日：1982-08-21
申请号：JP8342778
申请日：1978-07-08
IPC分类号： G03B27/32 , G03B27/48 , G03B27/52

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