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51. 发明专利

CA2281932A1 MULTI-PROBE TEST HEAD 未知
公开(公告)号：CA2281932A1
公开(公告)日：1999-08-05
申请号：CA2281932
申请日：1999-01-08
申请人： DEUTSCHE TELEKOM AG
发明人： KOOPS HANS W P
IPC分类号： G01R1/06 , G01B7/34 , G01Q30/02 , G01Q60/02 , G01Q60/16 , G01Q60/22 , G01Q60/38 , G01Q60/40 , G01Q60/48 , G01Q60/54 , G01Q70/10 , G01R1/067 , G01R1/07 , G01R31/26 , G01R31/302 , H01L21/66
摘要： According to the invention, a group of probes in a test head for a scanning probe microscope for testing integrated electronic circuits without contact is placed on a support, said probes having been manufactured by three-dimensional additive lithography. The probes are directed at a central point above the probe group. The conductive probes and the foot end of the capacitive probe are connected to conductor structures on the base for connection to a measuring circuit.

52. 发明专利

DE69403086D1 未知
公开(公告)号：DE69403086D1
公开(公告)日：1997-06-12
申请号：DE69403086
申请日：1994-09-16
申请人： STICHTING KATHOLIEKE UNIV
发明人： VAN KEMPEN HERMAN , ABRAHAM D L , PRINS MENNO , JANSEN RONALD , VAN DER WIELEN MAURICE C M M
IPC分类号： G01N27/00 , G01Q30/02 , G01Q60/02 , G01Q60/12 , G01Q60/14 , G01Q60/16 , G01Q60/22 , G01R33/032 , G11B9/00 , G11B11/00 , G11B11/105 , G11B13/04 , G02B21/00
摘要： PCT No. PCT/NL94/00227 Sec. 371 Date Oct. 15, 1996 Sec. 102(e) Date Oct. 15, 1996 PCT Filed Sep. 16, 1994 PCT Pub. No. WO95/08109 PCT Pub. Date Mar. 23, 1995A measuring device for measuring the intensity and/or polarization of electromagnetic radiation, more in particular of light. The measuring device is provided with a tunnel tip arranged facing a body at some distance, which tunnel tip at least partly consists of a semiconductor material. The measuring device further comprises a control unit for obtaining information about the intensity and/or polarization of the radiation by means of a tunnel current, generated under the influence of the radiation in the tunnel tip, between the tunnel tip and the body and/or a surface photovoltage of the tunnel tip, generated under the influence of the radiation.

53. 发明专利

JP2014071927A Method and apparatus for inspecting thermally assisted magnetic head 有权
标题翻译：用于检查热辅助磁头的方法和装置
公开(公告)号：JP2014071927A
公开(公告)日：2014-04-21
申请号：JP2012216338
申请日：2012-09-28
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： TOKUTOMI TERUAKI , SAITO NAOYA , KITANO KEISHO , CHANG KE-BONG , WATANABE MASAHIRO , HIROSE TAKESHI
IPC分类号： G11B5/455 , G01Q60/02 , G01Q60/18 , G01Q60/54 , G01Q80/00
CPC分类号： G11B20/1816 , B82Y35/00 , G01Q60/08 , G11B5/455 , G11B2005/0021
摘要： PROBLEM TO BE SOLVED: To effectively and highly accurately measure a magnetic field generated by a thermally assisted magnetic head and a near-field light generation area.SOLUTION: An apparatus for inspecting a thermally assisted magnetic head comprises: scanning type probe microscope means provided with a cantilever whose tip has a probe having its surface formed with a magnetic film; a probe unit that feeds an AC current to a terminal formed on a thermally assisted magnetic head element and makes a drive current or a drive voltage apply to a near-field light emitting unit; scattered light detection means for detecting scattered light generated from the probe in a generation area of near-field light by scanning with the probe while applying a drive current or a drive voltage to the near-field light emitting unit; image taking means for taking images of the thermally assisted magnetic head element including the near-field light emitting unit; and signal processing means for performing detection of the thermally assisted magnetic head element, by the use of an output signal output from scanning type probe microscope means by scanning with the probe while feeding a terminal with an AC current and an output signal from the scattered light detection means.
摘要翻译：要解决的问题：有效和高精度地测量由热辅助磁头和近场光产生区域产生的磁场。解决方案：用于检查热辅助磁头的装置包括：扫描型探针显微镜装置，其尖端具有其表面形成有磁性膜的探针的悬臂; 探针单元，其将AC电流馈送到形成在热辅助磁头元件上的端子，并将驱动电流或驱动电压施加到近场发光单元; 散射光检测装置，用于在向近场发光单元施加驱动电流或驱动电压的同时用探头扫描在近场光的产生区域中检测从探头产生的散射光; 摄像装置，用于拍摄包括近场光发射单元的热辅助磁头元件的图像; 以及信号处理装置，用于通过使用从扫描型探针显微镜装置输出的输出信号，通过用探针向扫描器馈送交流电流的端子和来自散射光的输出信号，来执行热辅助磁头元件的检测检测手段。

54. 发明专利

JP4327263B2 Multi-probe-type test for head 有权
标题翻译：空值
公开(公告)号：JP4327263B2
公开(公告)日：2009-09-09
申请号：JP53883799
申请日：1999-01-08
申请人：ナヴォテック・ゲーエムベーハー
发明人：クープス，ハンス，ダブリュ．，ピー．
IPC分类号： G01R1/06 , G01R31/302 , G01B7/34 , G01Q30/02 , G01Q60/02 , G01Q60/16 , G01Q60/22 , G01Q60/38 , G01Q60/40 , G01Q60/48 , G01Q60/54 , G01Q70/10 , G01R1/067 , G01R1/07 , G01R31/26 , H01L21/66
CPC分类号： G01Q30/02 , B33Y80/00 , G01Q60/02 , G01Q60/16 , G01Q60/22 , G01Q60/38 , G01Q60/48 , G01Q60/54 , G01Q70/10 , G01R1/06711 , Y10S977/849 , Y10S977/86 , Y10S977/866 , Y10S977/869 , Y10S977/874 , Y10S977/901

55. 发明专利

JP2004306197A Multi-probe and microprocessing method using it 审中-公开
公开(公告)号：JP2004306197A
公开(公告)日：2004-11-04
申请号：JP2003103605
申请日：2003-04-08
申请人： Kansai Tlo Kk , 関西ティー・エル・オー株式会社
发明人： ISONO YOSHIMASA , HASHIGUCHI GEN , MIMURA SHUSUKE , KADOSHIMA KUNIYUKI , FUJITA HIROYUKI
IPC分类号： G01B11/24 , B81B3/00 , B82B3/00 , G01Q30/02 , G01Q60/02 , G01Q80/00 , G01N13/10
摘要： PROBLEM TO BE SOLVED: To provide a multi-probe and a microprocessing method using it, able to be applied as it is to a scan type probe microscope, performing high-accuracy nano-processing for an arbitrary position in a wide range collectively, and directly measuring the surface shape of a workpiece after processing. SOLUTION: A plurality of processing probes 2 having a tip 21 for processing a sample are arranged side by side on the side of a probe 1 for measuring very fine projecting and recessed parts on the surface of the sample. In a sample stage chamber of the scan type probe microscope, the processing probes 2 having the tip 21 for processing a sample are integrally fitted to the side of the sample surface measuring probe 1, the probes 1, 2 are scanned in the directions of X, Y and Z axes to the sample, an electric current is applied to the processing probes 2 to perform microprocessing for the sample, and concurrently the processing surface is measured by the measuring probe 1. COPYRIGHT: (C)2005,JPO&NCIPI

56. 发明专利

JPH1151945A INTERATOMIC FORCE MICROSCOPE WITH SPECTRAL ANALYSIS MECHANISM 失效
公开(公告)号：JPH1151945A
公开(公告)日：1999-02-26
申请号：JP21500797
申请日：1997-08-08
申请人： TOYOTA MOTOR CORP
发明人： TAKAZAWA NOBUAKI
IPC分类号： G01B11/30 , G01B21/30 , G01N21/27 , G01N37/00 , G01Q20/02 , G01Q60/02 , G01Q60/18 , G01Q60/24 , G01Q60/38
摘要： PROBLEM TO BE SOLVED: To identify the functional group constituting the peculiar portion of a material by providing a hole formed smaller than the wavelength of the incident light on the tip of a probe, and feeding infrared rays into the hole to generate evanescent light. SOLUTION: When the opening section at the tip of a probe 2 is formed smaller than the infrared wavelength (10 μm) and infrared rays 6 are fed through the probe 2, an evanescent wave 10 is generated from the tip of the probe 2, it is radiated to a sample 3, and its reflected light is spectrally analyzed. When the evanescent wave 10 is used, the resolution (100-500 nm) of about 1/20 of the wavelength can be expected. The partial combination state in an observation area can be analyzed. When visible light is used in place of the infrared rays 6 as Raman spectrometry, the resolution of about 50 nm can be expected. A substance can be specified by the evanescent light reflected from the substance under test, and the evanescent light can be efficiently introduced.

57. 发明专利

JPH09145727A PROBE THAT GIVES SURFACE PICTURE AND PREPARATION THEREOF 失效
公开(公告)号：JPH09145727A
公开(公告)日：1997-06-06
申请号：JP31885396
申请日：1996-11-13
申请人： MOTOROLA INC
发明人： TERESA JIEI HOPUSON , RONARUDO ENU RETSUJI
IPC分类号： G01K7/02 , G01B9/04 , G01B21/30 , G01K7/04 , G01N13/00 , G01Q60/02 , G01Q60/38 , G01Q60/58 , G01R31/26 , G01R31/308 , G01R31/311 , H01L21/66 , G01N37/00
摘要： PROBLEM TO BE SOLVED: To obtain a probe formed to give the profile image and the thermal image of a semiconductor device. SOLUTION: The probe 10 comprises a first ribbon of material 11 and a second ribbon of material 12 forming a thermocouple joint 13. The probe 10 is fixed with epoxy 14, at the forward end 15 thereof, to the thermocouple joint 13. In another embodiment, a probe 20 is provided with a point region 17 by bending a part of thermocouple joint 13 and the point region 17 is coated with a thermally conductive material. An optical signal is reflected on the first ribbon of material 11, the second ribbon of material 12 or the flat part of thermocouple joint 13 and the movement of probe 10, 20 can be monitored by means of a photodetector.

58. 发明专利

JPH0477605A SCANNING TYPE TUNNEL MICROSCOPE AND PROBE USED THEREIN 失效
公开(公告)号：JPH0477605A
公开(公告)日：1992-03-11
申请号：JP19070590
申请日：1990-07-20
申请人： OLYMPUS OPTICAL CO
发明人： TAKASE TSUGIKO , OKADA TAKAO
IPC分类号： G01B7/34 , G01B11/30 , G01N37/00 , G01Q10/00 , G01Q20/02 , G01Q30/04 , G01Q60/02 , G01Q60/10 , G01Q60/16 , G01Q60/22 , G01Q70/10 , G02B21/00 , H01J37/28
摘要： PURPOSE:To measure the optical property of a sample with horizontal resolution having a specified width and to make it possible to observe the STM image at the same position by emitting the light which is introduced into a probe through a transmitting hole to be applied to the sample, and applying a voltage across the probe and the sample in the mean time. CONSTITUTION:A specified voltage is applied across a probe 22 and a sample 38. A tunnel current is made to flow across the probe 22 and the sample 38. Then the surface of the sample 38 is scanned with the probe 22 in the (x) and (y) directions. At this time, a driving circuit 48 performs feedback control for the position of the probe 22 in the direction (z) so as to keep the tunnel current constant. During the series of the operations, the STM image of the sample 38 is formed and displayed on a display device 50. The light which is entered into an optical fiber 20 is diffracted through the transmitting hole of the probe 22 and cast on the sample 38. The passed light is cast On a photoelectric conversion element 44. The NFOSM image is displayed on the device 50 based on the absorption with the sample and the light emission from the sample. Thus, the optical property of the sample can be measured with high horizontal resolution, and the STM measurement can be performed at the same time.

59. 发明申请

US20200096539A1 Numerically Controlled Rotary Probe Switching Device Based on Environment-Controllable Atomic Force Microscope 审中-公开
公开(公告)号：US20200096539A1
公开(公告)日：2020-03-26
申请号：US16347582
申请日：2019-01-11
申请人： Southwest Jiaotong University
发明人： Liang JIANG , Linmao QIAN , Bin LIN , Yushan CHEN
IPC分类号： G01Q60/02 , G01Q70/02
摘要： A numerically controlled rotary probe switching device based on an environment-controllable atomic force microscope (AFM) includes a cavity upper cover and a probe switching structure. The cavity upper cover is provided with an irregular rectangular boss, an inner groove, a rectangular optical window structure and a sealing flange structure. The irregular rectangular boss is provided with the rectangular optical window structure; a front end of the boss is provided with the sealing flange structure; and a lower portion of the boss is provided with an inner groove for accommodating the probe switching structure and a transition groove for matching with a linear movement of a sample carrier and a rotary switching of probes. The probe switching structure is configured inside the inner groove, and the probe switching structure is provided with at least one probe assembly.

60. 发明授权

US5796102A Measuring device for measuring the intensity and/or polarization of electromagnetic radiation, for determining physical properties of a preparation, and for reading information from a storage medium 失效
标题翻译：用于测量电磁辐射的强度和/或极化的测量装置，用于确定制剂的物理性质，以及用于从存储介质读取信息
公开(公告)号：US5796102A
公开(公告)日：1998-08-18
申请号：US619643
申请日：1996-10-15
申请人： Herman Van Kempen , Daniel Lee Abraham , Menno W. J. Prins , Ronald Jansen , Maurice C. M. M. van der Wielen
发明人： Herman Van Kempen , Daniel Lee Abraham , Menno W. J. Prins , Ronald Jansen , Maurice C. M. M. van der Wielen
IPC分类号： G01N27/00 , G01Q30/02 , G01Q60/02 , G01Q60/12 , G01Q60/14 , G01Q60/16 , G01Q60/22 , G01R33/032 , G11B9/00 , G11B11/00 , G11B11/105 , G11B13/04 , H01J37/00
CPC分类号： G01Q60/16 , B82Y10/00 , B82Y20/00 , B82Y35/00 , G01Q30/02 , G01Q60/02 , G01Q60/12 , G01Q60/14 , G01Q60/22 , G01R33/032 , G11B11/007 , G11B11/10515 , G11B11/10545 , G11B9/14 , G11B9/1463 , G11B13/045 , Y10S977/834 , Y10S977/852 , Y10S977/868 , Y10S977/95 , Y10S977/954 , Y10S977/96
摘要： A measuring device for measuring the intensity and/or polarization of electromagnetic radiation, more in particular of light. The measuring device is provided with a tunnel tip arranged facing a body at some distance, which tunnel tip at least partly consists of a semiconductor material. The measuring device further comprises a control unit for obtaining information about the intensity and/or polarization of the radiation by means of a tunnel current, generated under the influence of the radiation in the tunnel tip, between the tunnel tip and the body and/or a surface photovoltage of the tunnel tip, generated under the influence of the radiation.
摘要翻译： PCT No.PCT / NL94 / 00227 Sec。 371日期1996年10月15日 102（e）日期1996年10月15日PCT 1994年9月16日PCT公布。公开号WO95 / 08109 日期1995年3月23日用于测量电磁辐射的强度和/或极化的测量装置，更特别是光。测量装置设置有一定的隧道末端，隧道末端以一定的距离面向身体，该隧道尖端至少部分地由半导体材料组成。测量装置还包括一个控制单元，用于通过在隧道尖端的辐射的影响下，在隧道末端和身体之间产生的隧道电流获得关于辐射的强度和/或极化的信息和/或隧道尖端的表面光电压，在辐射的影响下产生。

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