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    • 52. 发明公开
    • Integrated circuits and processes of manufacture
    • Integrierte Schaltung und Verfahren zu deren Herstellung。
    • EP0478368A1
    • 1992-04-01
    • EP91308860.5
    • 1991-09-27
    • TEXAS INSTRUMENTS INCORPORATED
    • Sauerbrey, Roland, Rice UniversitySmayling, Michael C.
    • H01L21/768H01L23/485H01L23/498H01L23/525
    • H01L23/5328H01B1/12H01B1/128H01L21/485H01L23/5254H01L2924/0002H01L2924/09701H01L2924/12044H05K3/105H05K3/4038H05K2201/0329H05K2203/107H05K2203/1136H01L2924/00
    • An integrated circuit includes conductive elements (415.i, 417.j) and a radiation sensitive material (511) interposed between the conductive elements and dosed to different conductivities in different portions (e.g. 447) thereof. Another aspect is a process of integrated circuit fabrication including steps (163, 615) of depositing a radiation sensitive material as a layer and variably dosing it with radiation to establish areas of higher and lower resistivity in the layer. A printed wiring board (241) includes radiation sensitive material (251) and the board further has a conductor layer (245, 247, 249) affixed to the base. A transistor (1401) has a radiation sensitive material (1413) dosed to have two conductive regions (1431, 1433) separated by a gap (1435) of a lower conductivity in the radiation sensitive material, and a conductive substance (1415) deposited over the gap. These elements are useful in smart power devices, digital computers, controllers and electronic applications generally. Other devices, systems and processes are disclosed.
    • 集成电路包括介于导电元件之间的导电元件(415.i,417.j)和辐射敏感材料(511),并且在不同部分(例如447)中被赋予不同的电导率。 另一方面是集成电路制造的过程,包括将辐射敏感材料沉积为层并且用辐射可变地配量辐射的步骤(163,615),以在层中建立更高和更低电阻率的区域。 印刷电路板(241)包括辐射敏感材料(251),并且该板还具有固定到基底的导体层(245,247,249)。 晶体管(1401)具有辐射敏感材料(1413),辐射敏感材料(1413)被配置为具有由辐射敏感材料中较低导电性的间隙(1435)分隔开的两个导电区域(1431,1433),以及沉积在 差距。 这些元件通常用于智能功率器件,数字计算机,控制器和电子应用中。 公开了其他设备,系统和过程。