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    • 60. 发明公开
    • WORKPIECE TRANSPORT AND POSITIONING APPARATUS
    • 工件运输和定位设备
    • EP3069367A1
    • 2016-09-21
    • EP14859522.6
    • 2014-11-11
    • Howard Hughes Medical Institute
    • PRICE, John, H.BOCK, Dravida
    • H01J37/20
    • H01J37/20G01N1/32G01N35/00732H01J37/023H01J37/185H01J37/261H01J2237/2007H01J2237/201H01J2237/20278H01J2237/20285H01J2237/20292H01J2237/204H01J2237/26H01J2237/2602
    • An automated workpiece processing apparatus including a processing section including a processing module configured for processing a workpiece at a process location, a transport module including a first shuttle stage, a second shuttle stage independent of the first stage, and an end effector connected to at least one of the first and second stages, the end effector being configured to hold and transport the workpiece into and out of the processing module, and having a range of motion, defined by a combination of the first and second stage, extending from a workpiece holding station outside the processing module to the processing location inside the processing module so the end effector defines a processing stage of the processing module, and an automated loading and transport section including a load port module through which workpieces are loaded into the automated loading and transport section, and being communicably connected to the transport module.
    • 一种自动化工件处理设备,包括:处理部分,其包括处理模块,该处理模块被配置用于在处理位置处处理工件;运送模块,其包括第一梭步骤,独立于第一步骤的第二梭步骤,以及末端执行器, 第一和第二阶段中的一个,末端执行器构造成保持和运输工件进出处理模块,并且具有由第一和第二阶段的组合限定的运动范围,该运动范围从工件保持件 将处理模块外部的工作站移动到处理模块内部的处理位置,使得末端执行器限定处理模块的处理阶段,以及包括装载端口模块的自动装载和运输部分,工件通过所述装载端口模块被装载到自动装载和运输部分中 并且可通信地连接到运输模块。