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    • 55. 发明授权
    • Method and apparatus for sensing and controlling the intensity of energy
in a deposition system
    • 用于感测和控制沉积系统中的能量强度的方法和装置
    • US4478173A
    • 1984-10-23
    • US486136
    • 1983-04-18
    • Joachim Doehler
    • Joachim Doehler
    • C23C16/52G01N21/62C23C13/08
    • C23C16/52G01N21/62
    • A method of and apparatus for accurately sensing and reproducibly controlling the intensity of electromagnetic energy in the decomposition region of a deposition chamber. The apparatus includes a detector adapted to (1) monitor the level of radiation emitted from the decomposition region and (2) provide an output signal indicative of said level. The invention further includes circuitry for (1) comparing the signal from the detector with a reference signal indicative of a preselected level of energy, and (2) generating a correction signal indicative of the actual level of energy in the decomposition region relative to the preselected level of energy. According to the method of this invention, the correction signal may be utilized to regulate the source of electromagnetic energy so that the preselected level of electromagnetic energy within the decomposition region is kept constant despite fluctuations in other operating parameters.
    • 一种用于在沉积室的分解区域中精确地感测和再现地控制电磁能强度的方法和装置。 该装置包括检测器,其适于(1)监测从分解区域发射的辐射水平,以及(2)提供指示所述水平的输出信号。 本发明还包括用于(1)将来自检测器的信号与指示预选能级的参考信号进行比较的电路,以及(2)产生指示分解区域中相对于预选的能量的实际电平的校正信号 能量水平。 根据本发明的方法,可以利用校正信号来调节电磁能量的来源,使得尽管其他操作参数的波动,分解区域内的预定电平的电磁能量也保持恒定。
    • 56. 发明授权
    • Metastable energy transfer for analytical luminescence
    • 用于分析发光的转移能量转移
    • US4309187A
    • 1982-01-05
    • US88122
    • 1979-10-25
    • William B. Dodge, IIIRalph O. Allen
    • William B. Dodge, IIIRalph O. Allen
    • G01N21/62G01N21/60
    • G01N21/62
    • A method and apparatus for analysis of atomic species which comprises directly forming metastable energy level nitrogen by processing a stream of nitrogen containing gas through a dielectric field wherein essentially no excited species above the 6th vibrational level of the B.sup.3 .pi..sub.g energy state nor nitrogen atoms nor ions are formed, admixing said excited nitrogen with a gas stream suspected of containing said atomic species to be analyzed whereby the energy level of said species is raised sufficiently to enable a fluorescent emission as the energy level of said excited species decays to its lower energy state, detecting and analyzing the spectrum of said flluroescent radiation to determine the identity and concentration of said element.
    • 一种用于分析原子物质的方法和装置,其包括通过介电场处理含氮气体流直接形成亚稳态能级氮,其中基本上没有高于B3能量状态的第6振动水平的激发物质或氮原子, 形成离子,将所述被激发的氮与疑似含有要分析的原子物质的气流混合,由此所述物质的能级被充分地升高,以使所述被激发物质的能级衰减到其较低能量状态的荧光发射 检测和分析所述荧光辐射的光谱以确定所述元件的特性和浓度。