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51. 发明专利

JP2005043002A Burner for deposition, and manufacturing method of silica soot 有权
标题翻译：沉淀燃烧器及二氧化硅的制造方法
公开(公告)号：JP2005043002A
公开(公告)日：2005-02-17
申请号：JP2003279039
申请日：2003-07-24
申请人： Shin Etsu Chem Co Ltd , 信越化学工業株式会社
发明人： YOSHIKAWA HIROKI , SHIMADA TADAKATSU
IPC分类号： F23D14/58 , C03B8/04 , C03B20/00 , C03B37/014 , C03B37/018 , F23D14/22
CPC分类号： C03B37/0142 , C03B2207/02 , C03B2207/14 , C03B2207/16 , Y02P40/57
摘要： PROBLEM TO BE SOLVED: To provide a burner for deposition, and a manufacturing method of silica soot capable of synthesizing the silica soot (a deposit of silica particulates) mainly composed of silica obtained by combustion reaction of raw material gas containing a silicon compound at a high yield and deposition speed. SOLUTION: In the burner for deposition having a raw material gas blowout opening, and gas blowout openings on both sides of the raw material gas blowout opening, the raw material gas blowout opening is like a slit with an aspect ratio of 20 or more, and a gas jetting angle θ 1 of a gas blowout opening with the largest gas linear speed of the gas blowout openings provided on both sides of the raw material gas blowout opening spreads outward at an angle of 0.5-20° with respect to a jetting direction of the raw material gas. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种用于沉积的燃烧器，以及能够合成主要由通过含有硅的原料气体的燃烧反应得到的二氧化硅的二氧化硅烟灰（二氧化硅微粒的沉积物）的二氧化硅烟灰的制造方法化合物以高产率和沉积速度。解决方案：原料气体吹出口在原料气体吹出口两侧具有原料气体吹出口和气体喷出口的沉积用燃烧器中，其长宽比为20或者另外，设置在原料气体喷出口两侧的气体吹出开口的最大气体线性速度的气体吹出口的气体喷射角度θS<1> 以0.5°的角度向外扩展相对于原料气体的喷射方向为-20°。版权所有（C）2005，JPO＆NCIPI

52. 发明授权

KR100622616B1 유기실란의 분해에 의한 실리카 제조방법 有权
标题翻译：通过有机硅烷分解生产二氧化硅的方法
公开(公告)号：KR100622616B1
公开(公告)日：2006-09-11
申请号：KR1019990059314
申请日：1999-12-20
申请人： 피렐리 카비 에 시스테미 소시에떼 퍼 아찌오니
发明人： 로바,지아코모스테파노 , 아리몬디,마르코
IPC分类号： C01B33/12
CPC分类号： C03B19/1415 , C03B19/1423 , C03B37/01413 , C03B37/0142 , C03B2207/02 , C03B2207/22 , C03B2207/32 , C03B2207/36 , C03B2207/81 , C03B2207/86 , C03B2207/87 , C03C3/06
摘要： 고순도 광학실리카 프리폼의 제조방법은 (a)유기실리콘 화합물을 기화하는 단계; (b)상기 기화상태의 유기실리콘 화합물을 열분해하여 비결정성 용융 실리카입자를 제공하는 단계; (c)상기 비결정질의 용융 실리카입자를 지지물 상에 증착하는 단계로, 이때 상기 유기실리콘 화합물은 화학식(I)이며,

이때, 상기 R
1 , R
2 , R
3 , 및 R
4 는 본문에 주어진 의미를 갖는다.
광학 실리카 프리폼

53. 发明专利

JP5880532B2 ガラス微粒子堆積体の製造方法およびガラス母材の製造方法有权
公开(公告)号：JP5880532B2
公开(公告)日：2016-03-09
申请号：JP2013256825
申请日：2013-12-12
申请人：住友電気工業株式会社
发明人：石原朋浩 , 山崎卓
IPC分类号： C03B37/018 , C03B8/04
CPC分类号： C03B37/0142 , C03B2207/02 , C03B2207/06 , C03B2207/12 , C03B2207/22 , C03B2207/26 , C03B2207/32 , C03B2207/34 , Y02P40/57

54. 发明专利

JP5351141B2 Three-dimensional microfabrication burner 有权
标题翻译：空值
公开(公告)号：JP5351141B2
公开(公告)日：2013-11-27
申请号：JP2010502088
申请日：2008-03-25
申请人：コーニングインコーポレイテッド
发明人：ゲレメウ，ムルワーク , ダブリュホートフ，ダニエル , シーピーターソン，リチャード , エルロヴェルスタッド，エイミー , シートンプソン，クリストファー
IPC分类号： F23L7/00 , C03B8/04 , F23D14/22
CPC分类号： F23D14/08 , B33Y30/00 , B33Y70/00 , B33Y80/00 , C03B19/1423 , C03B2207/02 , C03B2207/42 , F23D14/56 , F23D2212/00 , F23D2213/00 , F23D2900/21007
摘要： The invention relates to a burner module having a body that is either sintered or photo-cured, and to methods of making such a burner module. The body (110) of the burner (100) is formed from one of a sintered metal, a sintered alloy, a laminated glass ceramic, and a photo-cured polymer. 1 Sintering and photo-curing may be accomplished by irradiating the body with localized heating using a focused energy source, such as a laser. The burner module is resistant to thermal shock and provides a distributed, even stream of a precursor or precursors to be reacted in a flame of the burner module to form soot, which is to deposited on a receptor surface, and may be used for vapor and liquid precursor delivery systems. A soot depostion system having an array of such burner modules and methods of making a fused silica article by depositing sopt using the burner modules are also described.
摘要翻译：本发明涉及具有烧结或光固化的主体的燃烧器模块以及制造这种燃烧器模块的方法。燃烧器（100）的主体（110）由烧结金属，烧结合金，夹层玻璃陶瓷和光固化聚合物中的一种形成。 1烧结和光固化可以通过使用聚焦能量源（例如激光）用局部加热照射身体来实现。燃烧器模块耐热冲击并且提供在燃烧器模块的火焰中反应的前体或前体的分布均匀的流，以形成沉积在受体表面上的烟灰，并且可以用于蒸气和液体前体输送系统。还描述了具有这种燃烧器模块的阵列的烟灰沉积系统和通过使用燃烧器模块沉积烟灰来制造熔融二氧化硅制品的方法。

55. 发明授权

US08857216B2 Burner modules, methods of forming glass sheets, and glass sheets formed thereby 有权
标题翻译：燃烧器模块，形成玻璃板的方法和由此形成的玻璃板
公开(公告)号：US08857216B2
公开(公告)日：2014-10-14
申请号：US13484466
申请日：2012-05-31
申请人： Muluwork Geremew , Daniel Warren Hawtof , Douglas Miles Noni, Jr.
发明人： Muluwork Geremew , Daniel Warren Hawtof , Douglas Miles Noni, Jr.
IPC分类号： C03B19/06 , C03B19/14
CPC分类号： F23D14/583 , C03B19/1423 , C03B2207/02 , C03B2207/20 , C03B2207/34 , C03B2207/42 , F23D14/00 , F23D2900/21005 , Y10T428/24355
摘要： A burner module comprising a burner gas inlet block, a lower flow plate, an upper flow plate, a burner gas flow disperser, and a burner gas discharge block. The burner gas inlet block, the burner gas flow disperser, and the burner gas discharge block each comprising a plurality of channels separated by partitions. The partitions of the burner gas flow disperser and the burner gas discharge block comprising a knife edge. The upper flow plate and the lower flow plate each comprising a plurality of pressure holes in fluid communication with the plurality of channels. Additionally, the method of forming a glass sheet or ribbon using the disclosed burner module and a glass sheet or ribbon formed using the method.
摘要翻译：一种燃烧器模块，包括燃烧器气体入口块，下部流动板，上部流动板，燃烧器气体流分散器和燃烧器气体排出块。燃烧器气体入口块，燃烧器气体分散器和燃烧器气体排出块，每个包括由分隔开的多个通道。燃烧器气流分散器和燃烧器气体排出块的分隔件包括刀刃。上流板和下流板各自包括与多个通道流体连通的多个压力孔。另外，使用所公开的燃烧器模块形成玻璃板或带的方法以及使用该方法形成的玻璃板或带。

56. 发明授权

US07039264B2 Multilayered optical structures 失效
公开(公告)号：US07039264B2
公开(公告)日：2006-05-02
申请号：US10420343
申请日：2003-04-22
申请人： Michael A. Bryan , Xiangxin Bi
发明人： Michael A. Bryan , Xiangxin Bi
IPC分类号： G02B6/12 , G02B6/02 , G02B6/00 , B32B9/00
CPC分类号： G02B6/12002 , B32B9/04 , C03B19/1415 , C03B19/1423 , C03B19/1484 , C03B37/01413 , C03B37/0142 , C03B37/01486 , C03B37/027 , C03B2203/34 , C03B2205/40 , C03B2207/02 , C03B2207/34 , C03B2207/66 , C03B2207/85 , C04B35/14 , C04B2235/3201 , C04B2235/3203 , C04B2235/3215 , C04B2235/3217 , C04B2235/3224 , C04B2235/3225 , C04B2235/3227 , C04B2235/3232 , C04B2235/3234 , C04B2235/3244 , C04B2235/3251 , C04B2235/3258 , C04B2235/3287 , C04B2235/3293 , C04B2235/3294 , C04B2235/3296 , C04B2235/3298 , C04B2235/3409 , C04B2235/3418 , C04B2235/3463 , C23C16/483 , C23C26/00 , G02B6/02042 , G02B6/13 , G02B6/132 , G02B2006/12147 , G02B2006/1215 , G02B2006/12176 , Y02P40/57
摘要： Monolithic optical structures include a plurality of layer with each layer having an isolated optical pathway confined within a portion of the layer. The monolithic optical structure can be used as an optical fiber preform. Alternatively or additionally, the monolithic optical structure can include integrated optical circuits within one or more layers of the structure. Monolithic optical structures can be formed by performing multiple passes of a substrate through a flowing particle stream. The deposited particles form an optical material following consolidation. Flexible optical fibers include a plurality of independent light channels extending along the length of the optical fiber. The fibers can be pulled from an appropriate preform.

57. 发明申请

US20040244426A1 Outside vapor deposition apparatus for making optical fiber preform and method for making optical preform using the same 失效
标题翻译：用于制造光纤预制件的外部蒸镀装置和使用其制造光学预成型件的方法
公开(公告)号：US20040244426A1
公开(公告)日：2004-12-09
申请号：US10489438
申请日：2004-03-09
发明人： Chan-Yong Park , Bong-Hoon Lee
IPC分类号： C03B037/018
CPC分类号： C03B37/0142 , C03B2207/02 , C03B2207/42
摘要： An Outside Vapor Deposition (OVD) apparatus for making an optical fiber perform with uniform deposition of silica particles through uniform heating to the overall length of the preform includes a mandrel having a predetermined length and driven to rotate and a burner for emitting a combustion gas toward the mandrel and burning the combustion gas to make silica particles to that the silica particles are deposited on a surface of the mandrel, wherein the burner has a length corresponding to the length of the mandrel and provides uniform temperature throughout the overall length of the mandrel at the same time.
摘要翻译：用于制造光纤的外部气相沉积（OVD）装置，其通过均匀加热二氧化硅颗粒均匀地沉积到预成型件的整个长度上而执行，包括具有预定长度并被驱动旋转的心轴和用于向燃烧气体发射燃烧气体的燃烧器心轴并燃烧燃烧气体以使二氧化硅颗粒与二氧化硅颗粒沉积在心轴的表面上，其中燃烧器的长度对应于心轴的长度，并且在心轴的整个长度上提供均匀的温度同一时间。

58. 发明授权

US06336347B1 Process for producing silica by decomposition of an organosilane 有权
标题翻译：通过有机硅烷分解生产二氧化硅的方法
公开(公告)号：US06336347B1
公开(公告)日：2002-01-08
申请号：US09472145
申请日：1999-12-27
申请人： Giacomo Stefano Roba , Marco Arimondi
发明人： Giacomo Stefano Roba , Marco Arimondi
IPC分类号： C03B37018
CPC分类号： C03C3/06 , C03B19/1415 , C03B19/1423 , C03B37/01413 , C03B37/0142 , C03B2207/02 , C03B2207/22 , C03B2207/32 , C03B2207/36 , C03B2207/81 , C03B2207/86 , C03B2207/87
摘要： A process for producing a high-purity optical silica preform, comprising (a) vaporization of an organosilicon compound; (b) thermal decomposition of the said organosilicon compound in the vapor state, to give amorphous fused silica particles; (c) deposition of the said amorphous fused silica particles on a support, in which the said organosilicon compound has the formula (I) in which R1, R2, R3 and R4 have the meanings given in the text.
摘要翻译：一种制备高纯度光学二氧化硅预制件的方法，包括（a）有机硅化合物的汽化; （b）在蒸气状态下热分解所述有机硅化合物，得到无定形熔融二氧化硅颗粒; （c）将所述无定形熔融二氧化硅颗粒沉积在载体上，其中所述有机硅化合物具有式（I），其中R 1，R 2，R 3和R 4具有本文给出的含义。

59. 发明申请

US20010027025A1 Projection lithography photomask blanks, preforms and method of making 失效
标题翻译：投影光刻光掩模坯料，预成型件和制造方法
公开(公告)号：US20010027025A1
公开(公告)日：2001-10-04
申请号：US09876194
申请日：2001-06-06
发明人： George Edward Berkey , Lisa Anne Moore , Charles Chunzhe Yu
IPC分类号： H01L021/302 , H01L021/461
CPC分类号： C03B23/07 , C03B19/1415 , C03B19/1423 , C03B19/1453 , C03B19/1469 , C03B19/1492 , C03B23/043 , C03B23/045 , C03B23/051 , C03B2201/07 , C03B2201/075 , C03B2201/12 , C03B2201/21 , C03B2207/02 , C03B2207/06 , C03B2207/20 , C03B2207/32 , C03B2207/52 , C03B2207/54 , C03B2207/66 , C03C3/06 , C03C4/0085 , C03C2201/12 , C03C2201/21 , C03C2203/50 , G03F1/60
摘要： The invention includes methods of making lithography photomask blanks. The invention also includes lithography photomask blanks and preforms for producing lithography photomask. The method of making a lithography photomask blank includes providing a soot deposition surface, producing SiO2 soot particles and projecting the SiO2 soot particles toward the soot deposition surface. The method includes successively depositing layers of the SiO2 soot particle on the deposition surface to form a coherent SiO2 porous glass preform body comprised of successive layers of the SiO2 soot particles and dehydrating the coherent SiO2 glass preform body to remove OH from the preform body. The SiO2 is exposed to and reacted with a fluorine containing compound and consolidated into a nonporous silicon oxyfluoride glass body with parallel layers of striae. The method further includes forming the consolidated silicon oxyfluoride glass body into a photomask blank having a planar surface with the orientation of the striae layer parallel to the photomask blank planar surface.
摘要翻译：本发明包括制造光刻光掩模坯料的方法。本发明还包括光刻光掩模坯料和用于生产光刻光掩模的预成型件。制造光刻光掩模坯料的方法包括提供烟灰沉积表面，产生SiO 2烟灰颗粒并将SiO 2烟灰颗粒投射到烟灰沉积表面。该方法包括在沉积表面上依次沉积SiO 2烟灰颗粒的层，以形成由SiO 2烟灰颗粒的连续层组成的粘结SiO 2多孔玻璃预制体，并使相干的SiO 2玻璃预制体脱水以从预成型体中去除OH。将SiO 2暴露于含氟化合物并与其反应，并固化成具有平行的条纹层的无孔氟氧化硅玻璃体。该方法还包括将固化的氟氧化硅玻璃体形成为具有平坦表面的光掩模坯料，其中条纹层的取向平行于光掩模坯料平面。

60. 发明授权

US06189813B1 Rayleigh-breakup atomizing devices and methods of making rayleigh-breakup atomizing devices 有权
标题翻译： Rayleigh-Breakup雾化装置和制造Rayleigh-Breakup雾化装置的方法
公开(公告)号：US06189813B1
公开(公告)日：2001-02-20
申请号：US09214780
申请日：1999-01-08
申请人： Perry R Skeath , John R Saylor , Amy L Rovelstad
发明人： Perry R Skeath , John R Saylor , Amy L Rovelstad
IPC分类号： B05B708
CPC分类号： F23D11/38 , B05B1/02 , B05B1/08 , B05B7/00 , B05B7/0433 , B05B7/0458 , B05B7/0884 , B05B15/40 , B05B17/0692 , C03B19/1423 , C03B2207/02 , C03B2207/06 , C03B2207/08 , C03B2207/34 , F23D11/107 , F23D11/108 , F23D2900/14482
摘要： Atomizing devices are provided that form droplets through the Rayleigh breakup mechanism. Various embodiments include one or more of the following features. Liquid orifices form jets of liquid that form droplets. Gas orifices provide gas coflow that inhibits coalescence of the droplets. The liquid orifices can have non-circular cross-sectional shapes to promote Rayleigh breakup. Fluidic oscillators can also be provided to promote Rayleigh breakup. Supply networks are provided to supply gas and liquid to the gas and liquid orifices, respectively.
摘要翻译：提供雾化装置，其通过瑞利分解机构形成液滴。各种实施例包括以下特征中的一个或多个。液体孔形成液滴的液滴。气体孔提供阻止液滴聚结的气体共流。液体孔可以具有非圆形横截面形状以促进瑞利分解。也可以提供流体振荡器来促进瑞利分解。供应网络分别提供气体和液体到气体和液体孔。

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