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    • 56. 发明授权
    • Method for manufacturing SOI wafer and SOI wafer
    • 制造SOI晶圆和SOI晶圆的方法
    • US07892948B2
    • 2011-02-22
    • US12223026
    • 2007-01-15
    • Shinichiro Yagi
    • Shinichiro Yagi
    • H01L21/30H01L21/46H01L21/76
    • H01L21/76254
    • The present invention provides a method for manufacturing an SOI wafer in which a thickness of an SOI layer is increased by growing an epitaxial layer on the SOI layer of the SOI wafer having an oxide film and the SOI layer formed on a base wafer, wherein the epitaxial growth is performed in such a manner that a reflectivity of a surface of the SOI wafer on which the epitaxial layer is grown in a wavelength region of a heating light at the start of the epitaxial growth falls within the range of 30% to 80%. As a result, in the method for manufacturing the SOI wafer in which a thickness of the SOI layer is increased by growing the epitaxial layer on the SOI layer of the SOI wafer having the oxide film and the SOI layer formed on the base wafer, a method for manufacturing a high-quality SOI wafer with less slip dislocation and others is provided.
    • 本发明提供一种制造SOI晶片的方法,其中通过在具有氧化膜的SOI晶片和形成在基底晶片上的SOI层的SOI层上生长外延层来增加SOI层的厚度,其中, 以在外延生长开始时在加热光的波长区域内生长外延层的SOI晶片的表面的反射率落在30%〜80%的范围内的方式进行外延生长, 。 结果,在通过在具有形成在基底晶片上的具有氧化物膜和SOI层的SOI晶片的SOI层上生长外延层来增加SOI层的厚度的SOI晶片的制造方法中, 提供了制造具有较少滑动位错等的高品质SOI晶片的方法。
    • 60. 发明申请
    • IMAGE FORMING APPARATUS
    • 图像形成装置
    • US20090074450A1
    • 2009-03-19
    • US12209607
    • 2008-09-12
    • Masashi NAGAYAMATomio KondouShinichiro YagiHitoshi Iwatsuki
    • Masashi NAGAYAMATomio KondouShinichiro YagiHitoshi Iwatsuki
    • G03G21/18G03G15/08
    • G03G15/0893G03G15/0874G03G15/0877G03G15/0879G03G2215/0822G03G2215/0838
    • An image forming apparatus including an image bearing member; and a developing device including a developer bearing member, a developer containing portion, a developer supplying passage supplying the developer to the developer bearing member while feeding the developer in a direction, and a developer agitating passage feeding a mixture of the developer fed through the developer supplying passage without used for developing, and the developer used for developing, in the opposite direction. The developer supplying passage, and developer agitating passage are separated from each other except for at least both the end portions. The developer includes a toner and a carrier having a cover layer thereon, which includes a binder resin and a particulate material. The ratio of the volume average particle diameter of the particulate material to the average thickness of the resinous portion of the cover layer is greater than 1 and less than 10.
    • 一种图像形成装置,包括图像承载部件; 以及显影装置,其包括显影剂承载部件,显影剂容纳部分,在将显影剂沿方向供给显影剂的同时将显影剂供应到显影剂承载部件的显影剂供给通道,以及供给通过显影剂的显影剂的混合物的显影剂搅拌通道 不用于显影的供给通道和用于显影的显影剂在相反方向上。 显影剂供给通道和显影剂搅拌通道彼此分开,至少至少两个端部。 显影剂包括调色剂和其上具有覆盖层的载体,其包括粘合剂树脂和颗粒材料。 颗粒材料的体积平均粒径与覆盖层的树脂部分的平均厚度之比大于1且小于10。