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    • 60. 发明授权
    • Producing repetitive coatings on a flexible substrate
    • 在柔性基材上生产重复涂层
    • US07169232B2
    • 2007-01-30
    • US10858424
    • 2004-06-01
    • David R. StripYuan-Sheng TyanRonald S. Cok
    • David R. StripYuan-Sheng TyanRonald S. Cok
    • C23C14/12
    • C23C14/562C23C14/042C23C14/12H01L51/56
    • Apparatus for use in making a device by forming repetitive sequences of coatings on a flexible substrate including defining a path for the flexible substrate; the flexible substrate being disposed about at least a portion of the path; a first deposition source for depositing material located around the path periphery and in cooperative relationship with the surface of the disposed flexible substrate; an actuable structure effective when actuated for moving the flexible substrate around at least more than one revolution around the path; and actuating the actuable structure and the first deposition source so that at least two separate material coatings are provided on the substrate by the deposition source.
    • 用于通过在柔性基板上形成重复的涂层序列来制造装置的装置,包括限定柔性基板的路径; 柔性基底围绕路径的至少一部分设置; 第一沉积源,用于沉积围绕所述路径周边并与所述设置的柔性基板的表面协调关系的材料; 致动结构在致动时有效地使柔性基板围绕路径至少旋转一圈以上; 以及致动所述致动结构和所述第一沉积源,使得通过所述沉积源在所述衬底上提供至少两个分开的材料涂层。