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51. 发明授权

US07910011B2 Method of manufacturing magnetic head for perpendicular magnetic recording 有权
标题翻译：用于垂直磁记录的磁头制造方法
公开(公告)号：US07910011B2
公开(公告)日：2011-03-22
申请号：US12153987
申请日：2008-05-28
申请人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Kazuo Ishizaki
发明人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Kazuo Ishizaki
IPC分类号： B44C1/22
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163
摘要： A magnetic head includes: a pole layer including a track width defining portion and a wide portion; and an encasing layer disposed on a bottom forming layer and having a groove that accommodates the pole layer. The groove includes a first portion for accommodating at least part of the track width defining portion, and a second portion for accommodating at least part of the wide portion. A manufacturing method for the magnetic head includes: the step of etching a nonmagnetic layer that will become the encasing layer later, such that an initial groove including the first portion is formed in the nonmagnetic layer; the step of forming an initial groove mask covering the first portion; and a second etching step for etching the nonmagnetic layer so as to complete the groove. When the second etching step starts, a portion of the top surface of the bottom forming layer located in a region in which the second portion is to be formed is covered with the nonmagnetic layer or the initial groove mask.
摘要翻译：磁头包括：包括轨道宽度限定部分和宽部分的极层; 以及设置在底部形成层上并具有容纳极层的槽的封装层。凹槽包括用于容纳轨道宽度限定部分的至少一部分的第一部分和用于容纳至少部分宽部分的第二部分。磁头的制造方法包括以下步骤：在非磁性层中形成包含第一部分的初始槽，从而蚀刻将成为封装层的非磁性层; 形成覆盖所述第一部分的初始槽掩模的步骤; 以及用于蚀刻非磁性层以完成凹槽的第二蚀刻步骤。当第二蚀刻步骤开始时，位于要形成第二部分的区域中的底部形成层的顶表面的一部分被非磁性层或初始凹槽掩模覆盖。

52. 发明授权

US07870660B2 Method of manufacturing magnetic head for perpendicular magnetic recording 有权
标题翻译：用于垂直磁记录的磁头制造方法
公开(公告)号：US07870660B2
公开(公告)日：2011-01-18
申请号：US12379044
申请日：2009-02-11
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Takehiro Horinaka , Shigeki Tanemura
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Takehiro Horinaka , Shigeki Tanemura
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/1278 , G11B5/3116 , Y10T29/49032 , Y10T29/49034 , Y10T29/49041 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A magnetic head includes: an encasing layer made of a nonmagnetic material and having a groove that opens in the top surface; a nonmagnetic metal layer made of a nonmagnetic metal material, disposed on the top surface of the encasing layer, and having a penetrating opening that is contiguous to the groove; and a pole layer made of a magnetic metal material and encased in the groove of the encasing layer and in the opening of the nonmagnetic metal layer. The pole layer has an end face located in a medium facing surface, the end face having a first portion and a second portion that is located farther from a substrate than the first portion and connected to the first portion. The first portion has a width that decreases as the distance from the substrate decreases. The second portion has a uniform width that defines the track width. In the medium facing surface, the nonmagnetic metal layer exists on both sides of the second portion, the sides being opposed to each other in the direction of track width.
摘要翻译：磁头包括：由非磁性材料制成并具有在顶表面上开口的凹槽的封装层; 由非磁性金属材料制成的非磁性金属层，设置在所述封装层的顶表面上，并且具有与所述凹槽相邻的穿透开口; 以及由磁性金属材料制成并封装在封装层的凹槽中和非磁性金属层的开口中的极层。极层具有位于介质面对表面中的端面，端面具有第一部分和第二部分，其位于比第一部分更远离基板并且连接到第一部分。第一部分具有随着距离衬底的距离减小而减小的宽度。第二部分具有定义轨道宽度的均匀宽度。在面向介质的表面中，非磁性金属层存在于第二部分的两侧，侧面在轨道宽度方向上彼此相对。

53. 发明申请

US20090277870A1 Method of manufacturing magnetic head for perpendicular magnetic recording 有权
标题翻译：用于垂直磁记录的磁头制造方法
公开(公告)号：US20090277870A1
公开(公告)日：2009-11-12
申请号：US12149987
申请日：2008-05-12
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki , Takehiro Horinaka
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki , Takehiro Horinaka
IPC分类号： B44C1/22
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116
摘要： A magnetic head includes a pole layer, and an encasing layer having a groove that accommodates the pole layer. A manufacturing method for the magnetic head includes the steps of forming a nonmagnetic layer that will later undergo formation of the groove therein and will thereby become the encasing layer; forming the groove in the nonmagnetic layer so that the nonmagnetic layer becomes the encasing layer; and forming the pole layer such that the pole layer is accommodated in the groove of the encasing layer. The nonmagnetic layer is formed of Al2O3. The step of forming the groove in the nonmagnetic layer includes the step of taper-etching the nonmagnetic layer by reactive ion etching with an etching gas containing at least BCl3 and N2 among BCl3, Cl2 and N2.
摘要翻译：磁头包括极层和具有容纳极层的凹槽的封装层。磁头的制造方法包括以下步骤：形成将在其中形成凹槽的非磁性层，从而成为包层; 在非磁性层中形成凹槽，使得非磁性层成为包层; 以及形成所述极层，使得所述极层容纳在所述封装层的槽中。非磁性层由Al2O3形成。在非磁性层中形成槽的步骤包括通过在BCl 3，Cl 2和N 2中至少含有BCl 3和N 2的蚀刻气体的反应离子蚀刻来对非磁性层进行锥蚀刻的步骤。

54. 发明授权

US07518824B2 Magnetic head for perpendicular magnetic recording that has a pole layer having a shape for easy forming, reducing track width and improved writing characteristics 有权
标题翻译：用于垂直磁记录的磁头，其具有具有易于成形的形状的极层，减少轨道宽度和改善的书写特性
公开(公告)号：US07518824B2
公开(公告)日：2009-04-14
申请号：US11213863
申请日：2005-08-30
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Takehiro Horinaka , Shigeki Tanemura
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Takehiro Horinaka , Shigeki Tanemura
IPC分类号： G11B5/147 , G11B5/127
CPC分类号： G11B5/1278 , G11B5/3116 , Y10T29/49032 , Y10T29/49034 , Y10T29/49041 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A magnetic head includes an encasing layer made of a nonmagnetic material and having a groove that opens in the top surface; a nonmagnetic metal layer made of a nonmagnetic metal material, disposed on the top surface of the encasing layer, and having a penetrating opening that is contiguous to the groove; and a pole layer made of a magnetic metal material and encased in the groove of the encasing layer and in the opening of the nonmagnetic metal layer. The pole layer has an end face located in a medium facing surface, the end face having a first portion and a second portion that is located farther from a substrate than the first portion and connected to the first portion. The first portion has a width that decreases as the distance from the substrate decreases. The second portion has a uniform width that defines the track width. In the medium facing surface, the nonmagnetic metal layer exists on both sides of the second portion, the sides being opposed to each other in the direction of track width.
摘要翻译：磁头包括由非磁性材料制成并具有在顶表面上开口的凹槽的封装层; 由非磁性金属材料制成的非磁性金属层，设置在所述封装层的顶表面上，并且具有与所述凹槽相邻的穿透开口; 以及由磁性金属材料制成并封装在封装层的凹槽中和非磁性金属层的开口中的极层。极层具有位于介质面对表面中的端面，端面具有第一部分和第二部分，其位于比第一部分更远离基板并且连接到第一部分。第一部分具有随着距离衬底的距离减小而减小的宽度。第二部分具有定义轨道宽度的均匀宽度。在面向介质的表面中，非磁性金属层存在于第二部分的两侧，侧面在轨道宽度方向上彼此相对。

55. 发明授权

US08687320B2 Magnetic head for perpendicular magnetic recording having a pole layer including a plurality of stacked magnetic films 有权
标题翻译：用于垂直磁记录的磁头，其具有包括多个堆叠的磁性膜的极层
公开(公告)号：US08687320B2
公开(公告)日：2014-04-01
申请号：US13440554
申请日：2012-04-05
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Hironori Araki , Kazuo Ishizaki , Takehiro Horinaka
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Hironori Araki , Kazuo Ishizaki , Takehiro Horinaka
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3123 , G11B5/313 , G11B5/3163 , H01L21/67069 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/4906 , Y10T29/49066 , Y10T428/115
摘要： A magnetic head includes a pole layer accommodated in a groove. The pole layer has a track width defining portion and a wide portion. The pole layer includes a plurality of magnetic films stacked. At least one of the plurality of magnetic films includes a first portion included in the track width defining portion, a second portion included in the wide portion, and a third portion coupling the first and second portions to each other. In a cross section passing through the center of the pole layer taken in the track width direction, the second portion is smaller than the first portion in thickness and the top surface of the third portion is inclined with respect to a direction perpendicular to a medium facing surface.
摘要翻译：磁头包括容纳在凹槽中的极层。极层具有轨道宽度限定部分和宽部分。极层包括堆叠的多个磁性膜。多个磁性膜中的至少一个包括包括在轨道宽度限定部分中的第一部分，包括在宽部分中的第二部分和将第一部分和第二部分彼此联接的第三部分。在通过沿着磁道宽度方向取得的磁极层的中心的横截面中，第二部分的厚度小于第一部分，并且第三部分的顶表面相对于垂直于面向介质的介质的方向倾斜表面。

56. 发明授权

US08163186B2 Method of manufacturing magnetic head, and magnetic head sub-structure 有权
标题翻译：制造磁头和磁头子结构的方法
公开(公告)号：US08163186B2
公开(公告)日：2012-04-24
申请号：US12155734
申请日：2008-06-09
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Hironori Araki
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Hironori Araki
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3173 , Y10T29/49037 , Y10T29/49044
摘要： A method of manufacturing magnetic heads comprises the step of: fabricating a magnetic head substructure by forming a plurality of components of the magnetic heads on a single substrate, wherein a plurality of rows of pre-head portions that will be the respective magnetic heads later are aligned in the substructure; and fabricating the magnetic heads by separating the pre-head portions from one another through cutting the substructure. In the step of fabricating the substructure, a plurality of indicators are formed, each of the indicators serving as a reference for indicating the location of a region ABS in which the medium facing surfaces of the magnetic heads are to be formed.
摘要翻译：制造磁头的方法包括以下步骤：通过在单个基板上形成磁头的多个部件来制造磁头子结构，其中稍后将成为相应磁头的多行预磁头部分是在子结构中排列; 以及通过切割子结构将前头部彼此分开来制造磁头。在制造子结构的步骤中，形成多个指示器，每个指示器用作用于指示要形成磁头的介质相对表面的区域ABS的位置的基准。

57. 发明授权

US07957097B2 Magnetic head for perpendicular magnetic recording and method of manufacturing same 有权
标题翻译：用于垂直磁记录的磁头及其制造方法
公开(公告)号：US07957097B2
公开(公告)日：2011-06-07
申请号：US11819667
申请日：2007-06-28
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Moris Dovek
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Moris Dovek
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163
摘要： An encasing section includes an encasing layer having an encasing groove, and a nonmagnetic film disposed in the encasing groove at a position between the encasing layer and a pole layer. The pole layer includes a track width defining portion and a wide portion. The track width defining portion has a first side surface and a second side surface. The wide portion has a third side surface and a fourth side surface. The encasing layer has a first wall surface and a second wall surface. The distance between the third side surface and the first wall surface is smaller than the distance between the first side surface and the first wall surface. The distance between the fourth side surface and the second wall surface is smaller than the distance between the second side surface and the second wall surface.
摘要翻译：封装部分包括具有封装槽的封装层和在封装槽和极层之间的位置处设置在封装槽中的非磁性膜。极层包括轨道宽度限定部分和宽部分。轨道宽度限定部分具有第一侧表面和第二侧表面。宽部具有第三侧面和第四侧面。包围层具有第一壁表面和第二壁表面。第三侧表面与第一壁表面之间的距离小于第一侧表面和第一壁表面之间的距离。第四侧表面和第二壁表面之间的距离小于第二侧表面和第二壁表面之间的距离。

58. 发明授权

US07796361B2 Magnetic head for perpendicular magnetic recording and method of manufacturing same 有权
标题翻译：用于垂直磁记录的磁头及其制造方法
公开(公告)号：US07796361B2
公开(公告)日：2010-09-14
申请号：US11727371
申请日：2007-03-26
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura
IPC分类号： G11B5/31
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163
摘要： A pole layer has a track width defining portion and a wide portion. The pole layer has: first and second side surfaces located opposite to each other in a first region extending from a medium facing surface to a position at a distance of 10 to 300 nm from the medium facing surface; third and fourth side surfaces located in a second region other than the first region; a fifth side surface located at the boundary between the first and second regions and connecting the first and third side surfaces to each other; and a sixth side surface located at the boundary between the first and second regions and connecting the second and fourth side surfaces to each other. The distance between the first and second side surfaces taken in the track width direction decreases with decreasing distance from the top surface of the substrate. The angle formed by the third and fourth side surfaces with respect to the direction orthogonal to the top surface of the substrate is smaller than that formed by the first and second side surfaces with respect to the direction orthogonal to the top surface of the substrate.
摘要翻译：极层具有轨道宽度限定部分和宽部分。所述极层具有：第一和第二侧表面在从介质相对表面延伸到距介质面向表面10至300nm距离的位置的第一区域中彼此相对; 位于除了第一区域之外的第二区域中的第三和第四侧表面; 第五侧表面，位于第一和第二区域之间的边界处，并且将第一和第三侧表面彼此连接; 以及位于第一和第二区域之间的边界处并将第二和第四侧表面彼此连接的第六侧表面。在轨道宽度方向上取得的第一和第二侧表面之间的距离随着距衬底顶表面的距离减小而减小。由第三和第四侧面相对于与基板顶面垂直的方向形成的角度小于由第一和第二侧面相对于与基板顶面正交的方向形成的角度。

59. 发明申请

US20090294402A1 Method of manufacturing magnetic head for perpendicular magnetic recording 有权
标题翻译：用于垂直磁记录的磁头制造方法
公开(公告)号：US20090294402A1
公开(公告)日：2009-12-03
申请号：US12153987
申请日：2008-05-28
申请人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Kazuo Ishizaki
发明人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Kazuo Ishizaki
IPC分类号： B44C1/22
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163
摘要： A magnetic head includes: a pole layer including a track width defining portion and a wide portion; and an encasing layer disposed on a bottom forming layer and having a groove that accommodates the pole layer. The groove includes a first portion for accommodating at least part of the track width defining portion, and a second portion for accommodating at least part of the wide portion. A manufacturing method for the magnetic head includes: the step of etching a nonmagnetic layer that will become the encasing layer later, such that an initial groove including the first portion is formed in the nonmagnetic layer; the step of forming an initial groove mask covering the first portion; and a second etching step for etching the nonmagnetic layer so as to complete the groove. When the second etching step starts, a portion of the top surface of the bottom forming layer located in a region in which the second portion is to be formed is covered with the nonmagnetic layer or the initial groove mask.
摘要翻译：磁头包括：包括轨道宽度限定部分和宽部分的极层; 以及设置在底部形成层上并具有容纳极层的槽的封装层。凹槽包括用于容纳轨道宽度限定部分的至少一部分的第一部分和用于容纳至少部分宽部分的第二部分。磁头的制造方法包括以下步骤：在非磁性层中形成包含第一部分的初始槽，从而蚀刻将成为封装层的非磁性层; 形成覆盖所述第一部分的初始槽掩模的步骤; 以及用于蚀刻非磁性层以完成凹槽的第二蚀刻步骤。当第二蚀刻步骤开始时，位于要形成第二部分的区域中的底部形成层的顶表面的一部分被非磁性层或初始凹槽掩模覆盖。

60. 发明申请

US20090158582A1 Method of manufacturing a magnetic head for perpendicular magnetic recording 有权
公开(公告)号：US20090158582A1
公开(公告)日：2009-06-25
申请号：US12379423
申请日：2009-02-20
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Hironori Araki
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Hironori Araki
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/1278 , Y10T29/49021 , Y10T29/49032 , Y10T29/49039 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052 , Y10T29/4906 , Y10T29/49067
摘要： A method of manufacturing a magnetic head is disclosed. The steps of manufacture include the formation of an underlying layer made of a material whose etching rate of ion beam etching is higher than that of a magnetic alloy used to make a pole layer, and the formation of a magnetic layer, which includes a portion of the magnetic layer to be etched that will be formed into a track width defining portion by making its side surfaces sloped through etching. The magnetic layer is formed such that the portion to be etched is disposed on the underlying layer. The side surfaces of the portion to be etched by the ion beam etching are etched so that the magnetic layer is formed into the pole layer and so that the end face of the track width defining portion located in the medium facing surface has a width that decreases with decreasing distance from the substrate.

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