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51. 发明授权

US07366218B2 Vertical cavity surface emitting laser diode and process for producing the same 有权
标题翻译：垂直腔表面发射激光二极管及其制造方法
公开(公告)号：US07366218B2
公开(公告)日：2008-04-29
申请号：US11159192
申请日：2005-06-23
申请人： Naotaka Mukoyama , Nobuaki Ueki
发明人： Naotaka Mukoyama , Nobuaki Ueki
IPC分类号： H01S5/00
CPC分类号： H01S5/02288 , H01S5/005 , H01S5/02284 , H01S5/0421 , H01S5/18311 , H01S5/18388 , H01S5/423 , H01S2301/18
摘要： A vertical cavity surface emitting laser diode includes a lower semiconductor reflector, an active region, an upper semiconductor reflector constituting a resonator with the lower semiconductor reflector, a metallic part being formed on the upper semiconductor reflector, which has a first aperture defining an output region of laser light generated in the active region, and a light confining region being provided between the metallic part and the lower semiconductor reflector, and having a second aperture defining an emission region of the laser light. The upper semiconductor reflector includes a lenticular medium having a convex surface toward the lower semiconductor reflector.
摘要翻译：垂直腔表面发射激光二极管包括下半导体反射器，有源区，构成具有下半导体反射器的谐振器的上半导体反射器，金属部分形成在上半导体反射器上，金属部分具有限定输出区域的第一孔在激活区域中产生的激光，以及设置在金属部件和下半导体反射器之间的限光区域，并具有限定激光发射区域的第二孔。上半导体反射器包括具有朝向下半导体反射器的凸表面的透镜介质。

52. 发明申请

US20080080583A1 Surface-emitting semiconductor array device, module, light source device, data processing apparatus, light transmitting device, light spatial transmitting apparatus, and light spatial transmitting system 失效
标题翻译：表面发射半导体阵列器件，模块，光源器件，数据处理设备，光发射器件，光空间传输器件和光空间传输系统
公开(公告)号：US20080080583A1
公开(公告)日：2008-04-03
申请号：US11728482
申请日：2007-03-26
申请人： Nobuaki Ueki , Yasuaki Miyamoto , Jun Sakurai , Terutaka Inoue
发明人： Nobuaki Ueki , Yasuaki Miyamoto , Jun Sakurai , Terutaka Inoue
IPC分类号： H01S5/026
CPC分类号： H01S5/423 , H01L2224/45144 , H01L2224/48463 , H01S5/02276 , H01S5/02284 , H01S5/02288 , H01S5/0425 , H01S5/18311 , H01S5/18344 , H01S5/4075 , H01L2924/00
摘要： A surface-emitting semiconductor array device includes a substrate, a plurality of light-emitting portions, an electrode pad portion formed on the substrate and disposed through the plurality of light-emitting portions and a dividing groove, and having a plurality of electrode pads formed on an insulating film, and a plurality of metal wirings for connecting each of the plurality of light-emitting portions to a corresponding electrode pad through the dividing groove, the dividing groove has a wave-shaped side wall formed on the substrate.
摘要翻译：表面发射半导体阵列器件包括衬底，多个发光部分，形成在衬底上并设置在多个发光部分上的电极焊盘部分和分隔槽，并且形成有多个电极焊盘在绝缘膜上形成多个金属布线，并且通过分隔槽将多个发光部分中的每一个连接到相应的电极焊盘的多个金属布线，分隔槽具有形成在基板上的波形侧壁。

53. 发明授权

US07352787B2 Vertical cavity surface emitting laser diode and process for producing the same 有权
公开(公告)号：US07352787B2
公开(公告)日：2008-04-01
申请号：US11009057
申请日：2004-12-13
申请人： Naotaka Mukoyama , Nobuaki Ueki
发明人： Naotaka Mukoyama , Nobuaki Ueki
IPC分类号： H01S5/00
CPC分类号： H01S5/0421 , H01S5/0425 , H01S5/18311 , H01S5/18388 , H01S2301/176 , H01S2301/18
摘要： A vertical cavity surface emitting laser diode includes a lower semiconductor reflector, an active region, an upper semiconductor reflector constituting a resonator with the lower semiconductor reflector, a metallic part being formed on the upper semiconductor reflector, which has a first aperture defining an output region of laser light generated in the active region, and a light confining region being provided between the metallic part and the lower semiconductor reflector, and having a second aperture defining an emission region of the laser light. The upper semiconductor reflector includes a lenticular medium having a convex surface toward the lower semiconductor reflector.

54. 发明授权

US07346089B2 Surface-emitting laser diode with tunnel junction and fabrication method thereof 有权
标题翻译：具有隧道结的表面发射激光二极管及其制造方法
公开(公告)号：US07346089B2
公开(公告)日：2008-03-18
申请号：US11259096
申请日：2005-10-27
申请人： Nobuaki Ueki , Jun Sakurai , Hiromi Otoma , Masateru Yamamoto
发明人： Nobuaki Ueki , Jun Sakurai , Hiromi Otoma , Masateru Yamamoto
IPC分类号： H01S5/00
CPC分类号： H01S5/18341 , H01S5/0215 , H01S5/02284 , H01S5/02288 , H01S5/18308 , H01S5/18311 , H01S5/18369 , H01S5/18397 , H01S5/3095
摘要： A surface emitting semiconductor laser diode of a tunnel junction type includes a semiconductor substrate, a first reflector, a second reflector, an active region disposed in series between the first and second reflectors, and a tunnel junction region disposed in series between the first and second reflectors. The tunnel junction region includes a first semiconductor layer of a first conductive type and a second semiconductor layer of a second conductive type that forms a junction with the first semiconductor layer, the first semiconductor layer being composed of a supper-lattice layer that at least partially includes aluminum and is partially oxidized.
摘要翻译：隧道结型的表面发射半导体激光二极管包括半导体衬底，第一反射器，第二反射器，串联布置在第一和第二反射器之间的有源区，以及串联设置在第一和第二反射器之间的隧道结区域反射器。隧道结区域包括第一导电类型的第一半导体层和与第一半导体层形成结的第二导电类型的第二半导体层，第一半导体层由超晶格层组成，所述超晶格层至少部分地包括铝并被部分氧化。

55. 发明授权

US07342666B2 Method and apparatus for measuring holding distortion 有权
标题翻译：测量保持失真的方法和装置
公开(公告)号：US07342666B2
公开(公告)日：2008-03-11
申请号：US11258955
申请日：2005-10-27
申请人： Nobuaki Ueki , Koji Otsuka
发明人： Nobuaki Ueki , Koji Otsuka
IPC分类号： G01B11/02 , G01L1/24
CPC分类号： G03F1/84 , G01B11/2441
摘要： There are carried out a first measurement operation for measuring the shape of a front surface of a sample held in a held state, a second measurement operation for measuring the shape of a back surface of the sample held in the same state, and a third measurement operation for measuring the shape of the back surface of the sample held so as to cause inverse distortion. First data are acquired on the basis of the front surface shape data obtained through the first measurement operation and the back surface shape data obtained through the second measurement operation. Second data are obtained on the basis of the front surface shape data obtained through the first measurement operation and the back surface shape data obtained through the third measurement operation. Holding distortion is determined on the basis of the first and second data.
摘要翻译：进行用于测量保持在保持状态的样品的正面的形状的第一测量操作，用于测量保持在相同状态的样品的背面的形状的第二测量操作和第三测量用于测量保持的样品的背面的形状以产生反变形的操作。基于通过第一测量操作获得的前表面形状数据和通过第二测量操作获得的背面形状数据获取第一数据。基于通过第一测量操作获得的前表面形状数据和通过第三测量操作获得的背面形状数据获得第二数据。基于第一和第二数据确定保持失真。

56. 发明授权

US07340962B2 Method and device for holding subject and measuring instrument equipped with the device 有权
标题翻译：用于安装装置的物体和测量仪器的方法和装置
公开(公告)号：US07340962B2
公开(公告)日：2008-03-11
申请号：US11256956
申请日：2005-10-25
申请人： Nobuaki Ueki
发明人： Nobuaki Ueki
IPC分类号： G01N3/02
CPC分类号： G03F7/70825 , G03F7/70591 , G03F7/70783
摘要： A subject having a test surface is held by a holder so that an axis line of the test surface intersects the direction of gravity and applied with a load, from above and beneath, that is optimized for accurate measurement of surface profile of the test surface. For optimization of the load, the test surface is applied with variable exploratory load strong enough to cause bending deformation in the test surface and a linear-functional relationship existing between more than two different exploratory loads and sizes of surface deformation caused with the different exploratory loads is derived. With the aid of linear-functional relationship, a load that induces the subject to cause surface deformation less than a predetermined size of surface deformation admissible, for example, as a manufacturing en-or is used as an optimized load.
摘要翻译：具有测试表面的受试者由保持器保持，使得测试表面的轴线与重力方向相交，并且从上下方向施加用于精确测量测试表面的表面轮廓的优化的负载。为了优化负载，试验表面采用足够强的可变探测载荷，在试验表面引起弯曲变形，并存在两个不同探测载荷之间的线性函数关系和不同探测载荷引起的表面变形尺寸被派生。借助于线性函数关系，引起受试者引起表面变形小于预定尺寸的表面变形的负载可允许，例如作为制造工具或被用作优化的负载。

57. 发明授权

US07141441B2 Surface emitting semiconductor laser and manufacturing method thereof 失效
公开(公告)号：US07141441B2
公开(公告)日：2006-11-28
申请号：US10801821
申请日：2004-06-22
申请人： Fumio Koyama , Nobuaki Ueki
发明人： Fumio Koyama , Nobuaki Ueki
IPC分类号： H01L21/00
CPC分类号： H01S5/18391 , H01S5/0425 , H01S5/18311 , H01S5/18338 , H01S5/1835 , H01S5/18394 , H01S2301/166 , H01S2301/18
摘要： There is provided a surface emitting semiconductor laser satisfying a requirement of making a transverse mode stable and having characteristics of high output power, low resistance, high efficiency, and high speed response and a method for manufacturing the surface emitting semiconductor laser.Five holes are formed on the top surface of an upper multilayer reflection film formed in the shape of a post by the use of a focused ion beam (FIB) processing unit. One hole is formed on the surface of an upper multilayer reflection film corresponding to the center position of a square current injection region which is about 8 μm square and the remaining four holes are formed at the corners of the square current injection region, for example, at the positions about 2 μm square away from the one hole to produce four light emitting spots.

58. 发明申请

US20060066874A1 Light intensity ratio adjustment filter for an interferometer, interferometer, and light interference measurement method 有权
标题翻译：用于干涉仪，干涉仪和光干涉测量方法的光强比调整滤波器
公开(公告)号：US20060066874A1
公开(公告)日：2006-03-30
申请号：US11204152
申请日：2005-08-16
申请人： Nobuaki Ueki
发明人： Nobuaki Ueki
IPC分类号： G01B11/02
CPC分类号： G01B9/02058 , G01B9/02057 , G01J3/0213 , G01J2009/0292
摘要： The light intensity ratio adjustment filter is placed between the reference surface and the sample surface of the interferometer. This light intensity ratio adjustment filter has a light intensity ratio adjustment film including an optical reflection-absorption layer and a dielectric anti-reflection layer on the surface of a transparent substrate made of glass on the sample side, and an optical anti-reflection film on the reference surface side, and acts so as to reflect part of the incident light from the surface opposite the reference surface, and after absorbing part of the remaining light, transmit the remainder towards the sample, and furthermore, absorb part of the light returned from the sample while controlling reflection, and transmit the remainder in the direction of the reference surface as the sample light.
摘要翻译：光强比调节滤光器被放置在干涉仪的参考表面和样品表面之间。该光强度比调节滤光器具有在样品侧的由玻璃制成的透明基板的表面上具有光反射吸收层和介电抗反射层的光强度比调节膜，以及光学抗反射膜参考表面侧，并且用于反射来自与参考表面相对的表面的入射光的一部分，并且在吸收剩余光的一部分之后，将剩余部分透射到样品，此外，吸收部分从基准表面返回的光样本，同时控制反射，并将剩余部分沿参考表面的方向作为样本光传输。

59. 发明授权

US06912055B2 Spherical form measuring and analyzing method 失效
标题翻译：球形测量分析方法
公开(公告)号：US06912055B2
公开(公告)日：2005-06-28
申请号：US10387562
申请日：2003-03-14
申请人： Nobuaki Ueki , Hideo Kanda
发明人： Nobuaki Ueki , Hideo Kanda
IPC分类号： G01B11/24 , G01B9/02
CPC分类号： G01M11/005 , G01B9/02039 , G01B9/02057 , G01B9/02085 , G01M11/025 , G01M11/0271
摘要： Respective regional form information items obtained from regional interference fringe images corresponding to partial regions of a spherical surface to be inspected are transformed into regional synthesis form information items corresponding to a common coordinate system set for aperture synthesis by using a relationship among a polar coordinate system of the spherical surface, a plane coordinate system of an imaging plane, and the common coordinate system. Thus obtained regional synthesis form information items are subjected to aperture synthesis processing, so as to determine the overall form information of the spherical surface.
摘要翻译：从对应于要检查的球面的部分区域的区域干涉条纹图像获得的各个区域形式信息项目被转换成与用于孔隙合成设置的公共坐标系对应的区域合成形式信息项，球面，成像平面坐标系和公共坐标系。对这样获得的区域综合形式信息项进行孔径合成处理，以确定球面的整体形式信息。

60. 发明授权

US06867871B2 Moiré grating noise eliminating method 有权
标题翻译：莫尔光栅噪声消除法
公开(公告)号：US06867871B2
公开(公告)日：2005-03-15
申请号：US10388092
申请日：2003-03-14
申请人： Nobuaki Ueki
发明人： Nobuaki Ueki
IPC分类号： G01B11/24 , G01B11/25 , G01B11/30
CPC分类号： G01B11/254
摘要： A moving distance of a moiré grating in y direction is set with respect to a grating pitch of a moiré grating, whereas an imaging magnification of imaging means is set according to the relationship between the pixel pitch of an image pickup device in the imaging means and the size of grating pitch when forming an image on the image pickup device. An image of moiré fringes is captured each time when the moiré grating is moved by a predetermined distance in the y direction, so as to yield a predetermined number of y-direction positional moiré fringe images, which are then averaged. According to thus obtained average moiré fringe image, shape information of a surface to be inspected is determined.
摘要翻译：相对于莫尔光栅的光栅间距设置莫尔光栅在y方向上的移动距离，而成像装置的成像倍率根据成像装置中的图像拾取装置的像素间距与成像装置的像素间距之间的关系而设定，在图像拾取装置上形成图像时的光栅间距的大小。当莫尔光栅在y方向上移动预定距离时每次捕获莫尔条纹的图像，以产生预定数量的y方向位置的莫尔条纹图像，然后将其平均。根据这样获得的平均莫尔条纹图像，确定待检查表面的形状信息。

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