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51. 发明专利

JP2004045424A Mounting structure of pressure detector 审中-公开
公开(公告)号：JP2004045424A
公开(公告)日：2004-02-12
申请号：JP2003330204
申请日：2003-09-22
申请人： Fujikin Inc , Tadahiro Omi , Tokyo Electron Ltd , 大見忠弘 , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： OMI TADAHIRO , HIROSE TAKASHI , IDETA EIJI , IKEDA SHINICHI , DOI RYOSUKE , NISHINO KOJI , YOSHIKAWA KAZUHIRO , KAGATSUME SATORU , HIROSE JUN , FUKAZAWA KAZUO , KOIZUMI HIROSHI , NAGAOKA HIDEKI
IPC分类号： G01L19/00
摘要： PROBLEM TO BE SOLVED: To prevent fluctuation of an output characteristic or a temperature characteristic caused by distortion of a diaphragm by stress when a diaphragm type pressure detector is integrated into a conduit.
SOLUTION: In this mounting structure of the pressure detector, the pressure detector formed by fixing integrally a diaphragm base equipped with a diaphragm and a sensor base having a built-in sensor element operated by displacement of the diaphragm is inserted through a gasket into an insertion hole of a fixture body fixed on a pipe conduit or a mechanical device, and the pressure detector is pressed and fixed gastightly by a presser member inserted into the insertion hole from the upper side. In the structure, the presser member abuts on the body part upper face of the diaphragm base and the gasket abuts on the body part lower face thereof respectively, and a shallow groove is formed in a ring shape on the inside position of the abutting part with the presser member on the body part upper face and a shallow groove is formed in a ring shape on the inside position of the abutting part with the gasket on the body part lower face, and distortion generated by pressing by the presser member is absorbed by both shallow grooves.
COPYRIGHT: (C)2004,JPO

52. 发明专利

JP2015049569A ガス分流供給装置及びガス分流供給方法有权
标题翻译：气体供应装置和气体分配供应方法
公开(公告)号：JP2015049569A
公开(公告)日：2015-03-16
申请号：JP2013179237
申请日：2013-08-30
申请人：株式会社フジキン , Fujikin Inc , 東京エレクトロン株式会社 , Tokyo Electron Ltd
发明人： SAWADA YOHEI , IKEDA NOBUKAZU , DOI RYOSUKE , NISHINO KOJI , TAKAHASHI EIJI , SASAKI NORIKAZU , SAWACHI JUN
IPC分类号： G05D7/06
CPC分类号： G05D7/0664 , G05D11/132 , Y10T137/0363 , Y10T137/2529 , Y10T137/2562 , Y10T137/7759 , Y10T137/7761
摘要：【課題】ガス供給源から、複数の並列状に連結した熱式流量センサを設けたガス分流路へ、所定の流量比でガスを分流供給するガス分流供給システムの改良に関する。【解決手段】ガス供給源からのガスの流量制御装置と、流量制御装置からのガスを分流する並列接続の分流路と、各分流路Lに介設した熱式流量センサと、熱式流量センサの下流側に設けた電動弁と、各電動弁の制御コントローラ16a〜16dと、外部流量比指令値入力と共に流量センサから総流量を演算し、該総流量と流量比指令値とから各分流路Lの流量値を演算し各コントローラへ演算流量値を設定流量入力する流量比設定演算器RSCとを備え、流量比設定演算器から入力された設定流量値が最大となる何れか一の分流路Lを非制御状態としてその開度を一定値に保持すると共に、他の分流路の開度を設定開度に制御し、その後、各分流路の分流量をフィードバック制御する。【選択図】図4
摘要翻译：要解决的问题：为了改进一种气体分配供给系统，该气体分配供给系统以与预定流量比的气体相同的气体导流路径，设置有从气体供给源并联连接的多个热流量传感器。气体分配供给装置包括：来自气体供给源的气体的流量控制装置; 来自流量控制装置的气体通过其分流的并联连接的转向路径; 设置在各引导路径L中的热式流量传感器; 设置在热式流量传感器的下游侧的电动阀; 每个电动阀的控制控制器16a至16d; 以及用于输入外部流量比率指令值并从流量传感器计算总流量的流量比设定计算器RSC，并根据总流量和流量比率指令值计算每个转向路径的流量值并将计算出的流量值按设定的流量输入到每个控制器。利用从流量比设定计算部输入的设定流量值作为非控制状态的任何导流路径L变为最大值，将其开度维持在一定值，将其他分流路径的开度控制为一个设置开放，之后，每个转移路径的转移率被反馈控制。

53. 发明专利

JP2013232101A Gas distributary supply device for semiconductor manufacturing device 有权
标题翻译：用于半导体制造设备的气体分配供应装置
公开(公告)号：JP2013232101A
公开(公告)日：2013-11-14
申请号：JP2012103857
申请日：2012-04-27
申请人： Fujikin Inc , 株式会社フジキン
发明人： NISHINO KOJI , DOI RYOSUKE , HIRATA KAORU , SUGITA KATSUYUKI , IKEDA SHINICHI
IPC分类号： G05D7/06
CPC分类号： G05D7/0641 , G05D7/0664 , Y10T137/87772
摘要： PROBLEM TO BE SOLVED: To achieve the sharp downsizing, cost reduction, and accuracy enhancement of a gas distributary supply device of a semiconductor manufacturing device.SOLUTION: The gas distributary supply device of a semiconductor manufacturing device includes: a control valve 3 constituting a pressure type flow rate control part connected to a process gas inlet 11; a plurality of branch pipe lines 9a and 9n connected in parallel with the downstream side of a gas supply main pipe 8; branch pipe line opening/closing valves 10a and 10n interposed in the respective branch pipe lines; orifices 6a and 6n disposed at the downstream side of the branch pipe line opening/closing valves; a temperature sensor 4 disposed in the neighborhood of a process gas passage between the control valve and the orifices; a pressure sensor 5 disposed in the process gas passage between the control valve and the orifices; and an arithmetic control part 7 constituted of a pressure type flow rate arithmetic control part to which a pressure signal from the pressure sensor and a temperature signal from the temperature sensor are input, which calculates a total flow rate Q of process gas circulating through the orifices, and which outputs a control signal for controlling the control valve to perform an opening/closing operation in a direction in which a difference between the calculated flow rate value and a set flow rate value is decreased to a valve driving part 3a.
摘要翻译：要解决的问题：为了实现半导体制造装置的气体分配供给装置的急剧的小型化，降低成本和精度提高。解决方案：半导体制造装置的气体分配供给装置包括：控制阀3，其构成压力连接到处理气体入口11的流量控制部分; 与气体供给主管8的下游侧并联连接的多根分支管路9a，9n; 分支管路开/关阀10a和10n插入各支管中; 设置在分支管路开/关阀的下游侧的孔口6a和6n; 设置在控制阀和孔之间的处理气体通道附近的温度传感器4; 设置在控制阀和喷嘴之间的处理气体通道中的压力传感器5; 以及运算控制部7，其由输入来自压力传感器的压力信号和来自温度传感器的温度信号的压力型流量运算控制部构成，计算出通过该孔流动的处理气体的总流量Q 并且输出用于控制控制阀的控制信号，以在计算出的流量值和设定流量值之间的差减小到阀驱动部3a的方向上执行打开/关闭操作。

54. 发明专利

JP2013178709A Gas diversion supply device and gas diversion supply method using the same 有权
标题翻译：气体供应装置和气体分配供应方法
公开(公告)号：JP2013178709A
公开(公告)日：2013-09-09
申请号：JP2012043090
申请日：2012-02-29
申请人： Fujikin Inc , 株式会社フジキン
发明人： SAWADA YOHEI , IKEDA SHINICHI , DOI RYOSUKE , NISHINO KOJI
IPC分类号： G05D7/06
CPC分类号： G05D7/0641 , G05D7/0664 , Y10T137/0368 , Y10T137/776
摘要： PROBLEM TO BE SOLVED: To prevent an occurrence of gas overshoot in a diversion path when introducing gases in a gas diversion supply device for performing diversion supply of gas flow from a pressure flow rate controller through a plurality of diversion paths.SOLUTION: A gas diversion supply device is provided with: a pressure flow rate controller 4; a plurality of diversion paths Lto Lwhich are connected in parallel and perform diversion supply of gases from the pressure flow rate controller 4 to a process chamber 15; thermal type flow rate sensors 6a to 6n mediated in the respective diversion paths Lto L; motor-operated valves 7a to 7n provided on the downstream side of the thermal flow rate sensors 6a to 6n; and switching controllers 16a to 16n for controlling opening/closing of the respective motor-operated valves 7a to 7n. The switching controllers 16a to 16n are switchable between valve opening degree control for holding the motor-operated valves 7a to 7n by a valve opening degree control command signal Sp to a prescribed fixed valve opening degree and diversion flow rate control for adjusting opening degree of the motor-operated valves 7a to 7n by feedback control based on a flow rate detection signal Sm of the thermal type flow rate sensor 6 by a diversion flow rate control command signal Ss.
摘要翻译：要解决的问题：为了防止在通过多个引导路径从压力流量控制器进行气体流动的导流供气装置中引入气体时在引流路径中发生气体过冲。解决方案：气体导流供给装置设置有：压力流量控制器4; 多个并联连接的引导路径LtoL，并且执行从压力流量控制器4向处理室15分配气体供给; 在各导流路径Lto L中介导的热式流量传感器6a〜6n; 设置在热流量传感器6a〜6n的下游侧的电动阀7a〜7n; 以及用于控制各个电动阀7a至7n的打开/关闭的开关控制器16a至16n。开关控制器16a〜16n可以通过阀开度控制指令信号Sp保持电动阀7a〜7n的阀开度控制到规定的固定阀开度，以及用于调节开度控制指令通过基于热式流量传感器6的流量检测信号Sm的转向流量控制指令信号Ss进行的反馈控制，来实现电动阀7a〜7n的动作。

55. 发明专利

JP2011117499A Piezoelectrically driven valve and piezoelectrically driven flow volume control apparatus 有权
标题翻译：压电驱动阀和压电驱动流量控制装置
公开(公告)号：JP2011117499A
公开(公告)日：2011-06-16
申请号：JP2009274005
申请日：2009-12-01
申请人： Fujikin Inc , 株式会社フジキン
发明人： HIDAKA ATSUSHI , HIRATA KAORU , NAGASE MASAAKI , IKEDA SHINICHI , DOI RYOSUKE , NISHINO KOJI
IPC分类号： F16K49/00 , F16K7/14 , F16K31/02 , F16K37/00 , G05D7/06
CPC分类号： F16K31/007 , F16K7/14 , F16K25/005 , G05D7/0629 , Y10T137/6416 , Y10T137/7759 , Y10T137/776 , Y10T137/7761
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectrically driving valve and a piezoelectrically driven flow volume control apparatus capable of controlling even a fluid with a temperature exceeding a use range temperature of a piezoelectric actuator. SOLUTION: The piezoelectrically driven valve includes a valve element 2 for opening/closing a fluid flow passage 1b, the piezoelectric actuator 10 for driving opening/closing of the valve element 2 by using extension of a piezoelectric element, and a heat radiation spacer 40 for holding up and supporting the piezoelectric actuator 10 so as to locate it away from the fluid flow passage 1b and radiating heat transmitted to the piezoelectric actuator 10 from a fluid flowing in the fluid flow passage 1b. More favorably, the piezoelectric driving type valve includes a supporting cylinder 23A housing and supporting both of the piezoelectric actuator 10 and the heat radiation spacer 40. In the supporting cylinder 23A, at least a part for housing the heat radiation spacer 40 is formed of a material with the same thermal expansion coefficient as that of the heat radiation spacer 40. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种压电驱动阀和压电驱动流量控制装置，其能够即使在超过压电致动器的使用范围温度的温度下控制流体。解决方案：压电驱动阀包括用于打开/关闭流体流动通道1b的阀元件2，用于通过使用压电元件的延伸来驱动阀元件2的打开/关闭的压电致动器10和热辐射用于保持和支撑压电致动器10的间隔件40，以使其远离流体流动通道1b并且从流体流动通道1b中流动的流体辐射传递到压电致动器10的热量。更优选地，压电驱动型阀包括容纳并支撑压电致动器10和散热隔离件40的支撑筒23A。在支撑筒23A中，用于容纳散热隔离物40的至少一部分由材料具有与散热垫片40相同的热膨胀系数。版权所有（C）2011，JPO＆INPIT

56. 发明专利

JP2008163959A Small flow control valve 有权
标题翻译：小流量控制阀
公开(公告)号：JP2008163959A
公开(公告)日：2008-07-17
申请号：JP2006350767
申请日：2006-12-27
申请人： Fujikin Inc , 株式会社フジキン
发明人： DOI RYOSUKE , NISHINO KOJI , HIRATA KAORU , IKEDA SHINICHI
IPC分类号： F16K1/32 , F16K31/04 , F16K31/44
摘要： PROBLEM TO BE SOLVED: To provide a small flow control valve to be applied in a pressure type flow control device in semiconductor manufacturing facilities or chemical product manufacturing facilities, having inexpensive, simple and compact construction for highly accurate operation.
SOLUTION: The small flow control valve comprises: a valve box 2 having a flow-in path 7 and a flow-out path 8 isolated right and left from each other and a valve seat 9 provided on the side of the flow-in path 7 or the flow-out path 8; a movable body 3 provided in the valve box 2 movably right and left; a valve element 4 provided on the movable body 3 for contact/leaving the valve seat 9; an elastic cylinder body 5 provided between the valve box 2 and the movable body 3 for permitting the right and left movement of the movable body 3 and communicating the flow-in path 7 with the flow-out path 8; and an actuator 6 provided in the valve box 2 for moving the movable body 3.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种应用于半导体制造设备或化学制品设备中的压力式流量控制装置的小流量控制阀，其具有廉价，简单且紧凑的结构，用于高精度操作。小流量控制阀包括：阀体2，其具有彼此左右彼此隔离的流入路径7和流出路径8;以及设置在流动通道7的侧面上的阀座9，在路径7或流出路径8中; 设置在阀箱2中左右移动的移动体3; 设置在可移动体3上用于接触/离开阀座9的阀元件4; 设置在阀体2和可动体3之间的弹性筒体5，用于允许可动体3的左右移动，并且使流入路径7与流出路径8连通; 以及设置在阀箱2中用于移动可移动体3的致动器6.版权所有（C）2008，JPO＆INPIT

57. 发明专利

JP2007192269A Piezoelectric element driven metal diaphragm control valve 有权
标题翻译：压电元件驱动金属膜片控制阀
公开(公告)号：JP2007192269A
公开(公告)日：2007-08-02
申请号：JP2006009625
申请日：2006-01-18
申请人： Fujikin Inc , 株式会社フジキン
发明人： MATSUMOTO ATSUSHI , HIRATA KAORU , DOI RYOSUKE , IKEDA SHINICHI , NISHINO KOJI
IPC分类号： F16K31/02 , F16K7/16
CPC分类号： F16K24/04 , F16K7/14 , F16K31/004 , F16K31/007 , F16K51/02
摘要： PROBLEM TO BE SOLVED: To provide a metal diaphragm control valve capable of accurately and stably controlling a flow even under high temperature environment and adjusting the compressive force applied to a piezoelectric element without disassembling the control valve itself.
SOLUTION: This metal diaphragm control valve comprises a body 7 in which a valve chamber 7a' and a valve seat are formed, a metal diaphragm 8 disposed in the valve chamber 7a' and brought into contact with and separated from the valve seat 7c, an actuator box 10 fixed to the body 7, the piezoelectric element 13 disposed in the actuator box 10 and extending downward when a voltage is applied thereto and pressing the metal diaphragm 8 through a metal diaphragm retainer 12, a disk spring mechanism 14 absorbing the extension of the piezoelectric element 13 and applying a predetermined pressing force to the valve seat 7c when the metal diaphragm 8 is brought into contact with the valve seat 7c, and a preloading mechanism 21 capable of always applying an upward compressive force to the piezoelectric element 13 and adjusting the compressive force applied to the piezoelectric element 13 from the outside.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种即使在高温环境下也能精确稳定地控制流量并调节施加到压电元件的压缩力而不拆卸控制阀本身的金属隔膜控制阀。解决方案：该金属隔膜控制阀包括主体7，其中形成有阀室7a'和阀座，金属隔膜8设置在阀室7a'中并与阀座接触并与阀座分离 7c，固定到主体7的致动器盒10，设置在致动器箱10中的压电元件13，并且当施加电压时向下延伸并且通过金属隔膜保持器12按压金属隔膜8，盘簧机构14吸收当金属隔膜8与阀座7c接触时，压电元件13的延伸部分和向阀座7c施加预定的按压力，以及能够始终向压电元件施加向上的压缩力的预加载机构21 并且从外部调整施加到压电元件13的压缩力。版权所有（C）2007，JPO＆INPIT

58. 发明专利

JP2006330851A Improved pressure type flow rate controller 有权
标题翻译：改进型压力流量控制器
公开(公告)号：JP2006330851A
公开(公告)日：2006-12-07
申请号：JP2005150057
申请日：2005-05-23
申请人： Fujikin Inc , 株式会社フジキン
发明人： HIROSE TAKASHI , DOI RYOSUKE , NISHINO KOJI , SHINOHARA TSUTOMU , IKEDA SHINICHI
IPC分类号： G05D7/06
CPC分类号： G05D7/0623 , H01L21/67017
摘要： PROBLEM TO BE SOLVED: To easily and accurately measure any real gas other than nitrogen by using a pressure type flow rate controller calibrated based on nitrogen gas, and be easily replaced with a thermal type flow rate controller(mass flow controller).
SOLUTION: This pressure flow rate controller for calculating the flow rate of fluid flowing through an orifice 8 using Qc=KP
1 (K is proportional constant) or Q
c =KP
2
m (P
1 -P
2 )
n (K is proportional constant, m and n are constant) by using an orifice upstream side pressure P
1 and an orifice downstream pressure P
2 is configured to adjust a conversion rate(Qe'/Qer) as the rate of a set flow rate signal Qer and a set input signal Qe' of an input/output converter 25 and a conversion rate(Qo'/Qor') as the rate of the flow rate output signal Qor and the control flow rate output Qo'.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：通过使用基于氮气校准的压力式流量控制器，容易且准确地测量除氮气之外的任何实际气体，并且可以容易地用热式流量控制器（质量流量控制器）替换。解决方案：该压力流量控制器用于计算使用Qc = KP 1 （K为比例常数）或Q c 的孔8流动的流体的流量。 = KP 2 m （P 1 -P 2 比例常数，m和n是常数），并且孔口下游压力P 2 被配置为调节转化率（Qe'/ Qer）作为输入/输出转换器25的设定流量信号Qer和设定输入信号Qe'的速率和作为流量输出信号Qor和控制的速率的转换速率（Qo'/ Qor'）的速率流量输出Qo'。版权所有（C）2007，JPO＆INPIT

59. 发明专利

JP2005305648A Pipe coupling fastening method 审中-公开
标题翻译：管接头紧固方法
公开(公告)号：JP2005305648A
公开(公告)日：2005-11-04
申请号：JP2005130897
申请日：2005-04-28
申请人： Fujikin Inc , Tadahiro Omi , 忠弘大見 , 株式会社フジキン
发明人： OMI TADAHIRO , IKEDA SHINICHI , DOI RYOSUKE , NAGAI KUNIO , IDETA EIJI , NISHINO KOJI , YAMAJI MICHIO , SHINOHARA TSUTOMU , YASUMOTO TADASHI
IPC分类号： G01L5/24 , B25B23/14
摘要： PROBLEM TO BE SOLVED: To provide a pipe coupling fastening method capable of surely preventing fastening failure, by facilitating fastening work of a pipe coupling.
SOLUTION: This pipe coupling fastening method presets an allowable reference range of a fastening torque value in respective fastening quantities over the whole process up to the finish of fastening from the initial state of fastening, by determining a curve for indicating the relationship between the fastening quantity and the fastening torque value of a nut when normally performing fastening, by performing the fastening by using a fastener after fastening the nut in advance; and detects forgetfulness of inserting a gasket and/or a thrust bearing, by performing the detection of the fastening quantity and the fastening torque value and determination of whether or not these fall within the reference range over the whole process up to the finish of fastening from the initial stage of fastening.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够可靠地防止紧固故障的管接头固定方法，通过促进管接头的紧固工作。
解决方案：该管接头紧固方法通过确定用于指示紧固扭矩值之间的关系的曲线来预定在整个过程中的相应紧固量中的紧固扭矩值的允许参考范围，直到从紧固的初始状态到固定完成在正常执行紧固时螺母的紧固量和紧固扭矩值，通过在预先紧固螺母之后通过使用紧固件执行紧固; 并且通过执行紧固量和紧固扭矩值的检测来检测插入垫圈和/或止推轴承的健忘性，并且确定这些是否在整个过程中落在参考范围内直到紧固结束紧固的初始阶段。版权所有（C）2006，JPO＆NCIPI

60. 发明专利

JP2005149075A Fluid controller 有权
标题翻译：流体控制器
公开(公告)号：JP2005149075A
公开(公告)日：2005-06-09
申请号：JP2003384945
申请日：2003-11-14
申请人： Fujikin Inc , 株式会社フジキン
发明人： YAMAJI MICHIO , SHINOHARA TSUTOMU , TSUBOTA KENJI , HIROSE TAKASHI , IKEDA SHINICHI , DOI RYOSUKE , NISHINO KOJI
IPC分类号： F16K27/00 , F16K37/00 , F17D1/02 , G05D7/06
摘要： PROBLEM TO BE SOLVED: To realize the reduction of the number of components in a fluid controller forming a gas control line, the further miniaturization of the controller itself, and precise flow control thereby. SOLUTION: In the fluid controller composed of a plurality block connectors 1 to 5 which are disposed on a lower stage and form fluid passages 1a, 2a, 3a, 4a, 5a, respectively, and a plurality of fluid control devices 6 to 9 which are disposed on an upper stage and are connected to the block connectors 1 to 5, respectively so as to permit communication therebetween, one fluid control device 9, among fluid control devices 9, is provided with an orifice 11 for rate of flow control, a control valve 12 provided on the upstream side of the orifice 11, and an upstream side pressure sensor 13 which is provided between the orifice and the control valve 12, and detects the pressure of the upstream side of the orifice 11, and controls the rate of flow passing through the orifice by the opening/closing of the control valve 12 while computing the rate of flow passing through the orifice due to the upstream pressure. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了实现形成气体控制线的流体控制器中的部件的数量的减少，控制器本身的进一步的小型化以及精确的流量控制。解决方案：在由设置在下层上并分别形成流体通道1a，2a，3a，4a，5a的多个块连接器1至5的流体控制器中，以及多个流体控制装置6至 9分别设置在上级并且分别连接到块连接器1至5以允许它们之间的连通，一个流体控制装置9在流体控制装置9之间设置有用于流量控制的孔口11 设置在孔口11的上游侧的控制阀12和设置在孔口与控制阀12之间的上游侧压力传感器13，并检测孔口11的上游侧的压力，并控制通过控制阀12的打开/关闭同时通过孔口的流速，同时计算由于上游压力而通过孔口的流速。版权所有（C）2005，JPO＆NCIPI

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