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    • 59. 发明申请
    • Mirror device comprising drive electrode equipped with stopper function
    • 镜装置包括装有止动器功能的驱动电极
    • US20090257110A1
    • 2009-10-15
    • US12231685
    • 2008-09-04
    • Hirotoshi IchikawaYoshihiro MaedaFusao Ishii
    • Hirotoshi IchikawaYoshihiro MaedaFusao Ishii
    • G02B26/00
    • G02B26/0841G02B27/1026G02B27/1033G02B27/146G02B27/149
    • The present invention provides a mirror device, comprising: a plurality of deflectable mirrors; an elastic member for deflectably supporting the mirror; a drive electrode for driving the mirror; a control circuit for giving electric charge to the drive electrode and controlling the deflecting direction of the mirror; and a substrate on which the drive electrode and the elastic member, wherein the drive electrode is placed within an area on the substrate the mirror is projected on, has an outer form constituted by sides approximately in parallel to the outer peripheral lines of the present mirror and by sides approximately parallel to the deflection axis of the present mirror, or a form obtained by dividing the aforementioned outer form into a plurality thereof, and also fills the role of a stopper for regulating the deflection angle of the mirror.
    • 本发明提供了一种镜装置,包括:多个可偏转镜; 用于偏转地支撑所述反射镜的弹性构件; 用于驱动反射镜的驱动电极; 用于向驱动电极提供电荷并控制反射镜的偏转方向的控制电路; 以及驱动电极和弹性部件的基板,其中驱动电极被放置在反射镜投影的基板上的区域内,具有由大致平行于本反射镜的外周线的侧面构成的外部形状 以及大致平行于本反射镜的偏转轴的侧面,也可以是通过将前述的外部形状分割为多个而形成的形状,并且还填充了用于调整反射镜的偏转角度的挡块的作用。