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    • 52. 发明授权
    • Wafer mapping system
    • 晶圆贴图系统
    • US06914233B2
    • 2005-07-05
    • US10316120
    • 2002-12-11
    • Yasuyoshi KitazawaShigeto SuzukiToshio MikiSusumu NakagawaKatsumi YasudaKazunari Kitaji
    • Yasuyoshi KitazawaShigeto SuzukiToshio MikiSusumu NakagawaKatsumi YasudaKazunari Kitaji
    • H01L21/68H01L21/00H01J40/14
    • H01L21/67265
    • The wafer mapping system has an access port for transferring a wafer in and out and detects an accommodated wafer for a cassette in which slots for accommodating and holding inserted wafers are disposed in tiers. The wafer mapping system includes (1) a receiver that is fixed to a member facing the access port for receiving elements arranged serially along a height direction of the cassette, and (2) a transmitter that is disposed movable in an up and down direction of the cassette and transmits a signal toward a wafer accommodated in each of the slots of the cassette. The receiver receives a signal from the transmitter, and thereby the presence or absence of a wafer and a state of a wafer accommodated in each of the slots of the cassette are detected. Thereby, with a simple system configuration, an accommodation state of the wafer can be accurately detected.
    • 晶片映射系统具有用于将晶片输入和输出的访问端口,并检测用于盒的容纳晶片,其中用于容纳和保持插入的晶片的槽被布置在层中。 晶片映射系统包括(1)固定到面向入口的构件的接收器,用于容纳沿着盒的高度方向串联布置的元件,以及(2)发射器,其可以在 盒子并将信号发送到容纳在盒的每个槽中的晶片。 接收器从发送器接收信号,从而检测到晶片的存在或不存在以及容纳在盒的每个槽中的晶片的状态。 由此,通过简单的系统配置,可以准确地检测晶片的调节状态。
    • 58. 发明授权
    • Sugar concentration gauge
    • 糖浓度计
    • US4650323A
    • 1987-03-17
    • US814721
    • 1985-12-30
    • Susumu Nakagawa
    • Susumu Nakagawa
    • G01N21/43G01N21/41
    • G01N21/4133
    • A sugar concentration gauge of a type for measuring the sugar concentration of test liquid applied to a light incidence surface of a prism through detection of a refraction angle, with which a light beam having passed through the test liquid is emitted from the prism and which corresponds to the sugar concentration of the test liquid. The gage has a movable plate capable of adjustment with respect to the light incidence surface of the prism, a light incidence plate on the movable plate so as to be superposed on the light incidence surface of the prism, and a weight on the movable plate for exerting a vertical load onto the light incidence surface of the prism, whereby the test liquid can be uniformly spread on the light incidence surface of the prism without being influenced by the kind and amount of the test liquid.
    • 一种用于测量通过检测折射角的测试液体的糖浓度的糖浓度计,其中已经通过测试液体的光束从棱镜发射并且对应于 到测试液体的糖浓度。 量具具有能够相对于棱镜的光入射面调节的可移动板,可动板上的光入射板,以叠置在棱镜的光入射表面上,并且可移动板上的重物用于 在棱镜的光入射面施加垂直载荷,由此可以将测试液体均匀地扩散到棱镜的入射表面上,而不受测试液体的种类和数量的影响。