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    • 51. 发明申请
    • Sensor assembly including a sensing channel having a void and an associated method
    • 传感器组件包括具有空隙的感测通道和相关联的方法
    • US20060180380A1
    • 2006-08-17
    • US11056583
    • 2005-02-11
    • Carl MunchMichael McCarthy
    • Carl MunchMichael McCarthy
    • B60K28/10G06M7/00B60R21/01
    • B60R21/0136B60R2021/01095
    • A sensor assembly (14) for sensing an impact to a vehicle (10) includes a light source (34) for emitting light and a sensing channel (40) for receiving the emitted light. The sensing channel (40) is configured to deform in response to an impact to the vehicle (10) and includes at least one void (70) with dimensions that vary in response to deformation of the sensing channel (40). A detector (36) senses an intensity of the light propagating through the sensing channel (40) and provides a signal indicative of the sensed intensity. The sensed intensity varies as a function of the dimensions of the at least one void (70). The sensor assembly (14) also includes a controller (94) for analyzing the signal from the detector (36) to determine whether the sensing channel (40) has been deformed and thereby, whether an impact to the vehicle (10) has occurred.
    • 用于感测对车辆(10)的冲击的传感器组件(14)包括用于发射光的光源(34)和用于接收发射光的感测通道(40)。 感测通道(40)被配置为响应于对车辆(10)的冲击而变形,并且包括至少一个尺寸随着感测通道(40)的变形而变化的空隙(70)。 检测器(36)感测通过感测通道(40)传播的光的强度,并且提供指示感测强度的信号。 所感测的强度作为至少一个空隙(70)的尺寸的函数而变化。 传感器组件(14)还包括用于分析来自检测器(36)的信号的控制器(94),以确定感测通道(40)是否已经变形,从而是否已经发生对车辆(10)的冲击。
    • 55. 发明授权
    • Fabrication of standard defects in contacts
    • 触点中标准缺陷的制作
    • US06452285B1
    • 2002-09-17
    • US09690157
    • 2000-10-17
    • Michael McCarthyDavid Cooper
    • Michael McCarthyDavid Cooper
    • H01L2978
    • H01L22/34G01N21/93
    • Various circuit devices for contact defect inspection and methods of fabrication and use thereof are provided. In one aspect, a circuit device is provided that includes a substrate and an insulating film positioned on the substrate that has a plurality of openings therein. A plurality of members is provided. Each of the plurality of members is positioned in one of the plurality of openings and has known dimensions. The plurality of members provide a known set of defects in the plurality of openings to facilitate inspection of the plurality of openings. The circuit device may be used to accurately calibrate inspection tools to detect contact defects.
    • 提供了用于接触缺陷检查的各种电路装置及其制造和使用方法。 一方面,提供了一种电路装置,其包括基板和位于基板上的绝缘膜,其中具有多个开口。 提供多个构件。 多个构件中的每一个定位在多个开口中的一个中并且具有已知的尺寸。 多个构件在多个开口中提供已知的一组缺陷以便于检查多个开口。 电路设备可用于精确校准检测工具以检测接触缺陷。
    • 56. 发明授权
    • Test structures for identifying open contacts and methods of making the same
    • 用于识别开放式联系人的测试结构及其制作方法
    • US06392251B1
    • 2002-05-21
    • US09690780
    • 2000-10-17
    • Michael McCarthyDavid Cooper
    • Michael McCarthyDavid Cooper
    • H01L2358
    • H01L22/34
    • Various methods of inspecting a workpiece for residue are provided. In one aspect, a test structure is provided that includes a substrate, a first conductor on the substrate and a second conductor on the substrate. A resistor network is coupled in parallel between the first conductor and the second conductor. The resistor network has n resistors and n contacts and a measurable resistance RM. Each of the n resistors has a known resistance Rk and a known position on the substrate. Each of the n contacts is connected between one of the n resistors and the first conductor or the second conductor, whereby the location of any of the n contacts in an open state is determined from the equation: R M = 1 1 R k + … ⁢   ⁢ 1 R n The test structure provides for not only the identity but also the location of open contacts.
    • 提供了检查残留物的各种方法。 在一个方面,提供了一种测试结构,其包括衬底,衬底上的第一导体和衬底上的第二导体。 电阻网络并联在第一导体和第二导体之间。 电阻网络具有n个电阻和n个触点以及可测量的电阻RM。 n个电阻器中的每一个具有已知的电阻R k和衬底上的已知位置。 n个触点中的每一个连接在n个电阻器中的一个和第一导体或第二导体之间,由此根据等式确定n个触点中的任一个处于断开状态的位置:测试结构不仅提供了身份 而且还要打开联系人的位置。