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    • 51. 发明授权
    • Micromachine switch, filter circuit, duplexer circuit, and communication device
    • 微机械开关,滤波电路,双工器电路和通讯装置
    • US08022794B2
    • 2011-09-20
    • US12297334
    • 2007-04-25
    • Hiroshi NakatsukaTakehiko YamakawaKeiji Onishi
    • Hiroshi NakatsukaTakehiko YamakawaKeiji Onishi
    • H01P1/10H01H57/00
    • B81B5/00B81B2201/018B81B2201/034H01H1/0036H01P1/127
    • A micromachine switch switches an electrical connection between signal electrodes in accordance with control signals. The micromachine switch includes a substrate, a rotating body provided on the substrate, and a movable electrode provided on the rotating body. The micromachine switch also includes a first signal electrode, one end of which is electrically connected to one end of the movable electrode, and a second signal electrode provided near the rotating body to be positioned such that a rotation of the rotating body causes the second signal electrode to be electrically connected to another end of the movable electrode. Further, a drive section causes, based on a first control signal, the rotating body to rotate until the movable electrode and the second signal electrode are electrically connected, and causes, based on a second control signal, the rotating body to rotate until the movable electrode and the second signal electrode are disconnected.
    • 微机械开关根据控制信号切换信号电极之间的电气连接。 微机械开关包括基板,设置在基板上的旋转体和设置在旋转体上的可动电极。 微机械开关还包括第一信号电极,其一端电连接到可动电极的一端,以及第二信号电极,设置在旋转体附近,以定位成使得旋转体的旋转引起第二信号 电极电连接到可动电极的另一端。 此外,驱动部基于第一控制信号使旋转体旋转直到可动电极和第二信号电极电连接,并且基于第二控制信号使旋转体旋转直到可动 电极和第二信号电极断开。
    • 52. 发明授权
    • Film bulk acoustic wave resonator and method for manufacturing the same
    • 薄膜体声波谐振器及其制造方法
    • US07893793B2
    • 2011-02-22
    • US11844809
    • 2007-08-24
    • Tomohiro IwasakiKeiji OnishiHiroshi NakatsukaTakehiko YamakawaTomohide Kamiyama
    • Tomohiro IwasakiKeiji OnishiHiroshi NakatsukaTakehiko YamakawaTomohide Kamiyama
    • H03H9/15H03H9/54H03H9/70
    • H03H9/177H03H9/173H03H9/174H03H9/175H03H9/564H03H9/605
    • A film bulk acoustic wave resonator including a piezoelectric body 1, and a first electrode 2 and a second electrode 3 that are provided respectively on the main surfaces of the piezoelectric body, the piezoelectric body being applied an electric field through the first and the second electrodes so as to generate a resonant vibration. A first mass load material portion 4 having an annular shape is provided outside the planar region of the first electrode on the main surface of the piezoelectric body, a mass load effect thereof being larger than that of the first electrode. The outer periphery of the first electrode and the inner periphery of the first mass load material portion are spaced apart from each other, whereby the first electrode and the first mass load material portion are electrically insulated from each other. The first mass load material portion has a laminated structure including a first auxiliary electrode layer 2a and a load material layer 4a formed on the auxiliary electrode layer. The first auxiliary electrode is formed with the same material to have the same thickness as the first electrode. Energy loss can be reduced, while the first mass load material portion can be formed easily with high precision.
    • 一种包括分别设置在压电体的主表面上的压电体1和第一电极2和第二电极3的薄膜体声波谐振器,压电体通过第一和第二电极施加电场 以产生共振振动。 具有环状的第一质量负荷材料部分4设置在压电体的主表面上的第一电极的平面区域的外侧,其质量负载效应大于第一电极的质量负载效应。 第一电极的外周和第一质量负载材料部的内周彼此间隔开,由此第一电极和第一质量负载材料部彼此电绝缘。 第一质量负载材料部分具有包括形成在辅助电极层上的第一辅助电极层2a和负载材料层4a的叠层结构。 第一辅助电极由相同的材料形成,以具有与第一电极相同的厚度。 能够容易地以高精度形成第一质量负荷材料部,能够减少能量损失。
    • 56. 发明申请
    • PIEZOELECTRIC FILTER AND METHOD FOR MANUFACTURING THE SAME
    • 压电过滤器及其制造方法
    • US20100052476A1
    • 2010-03-04
    • US12523798
    • 2008-11-19
    • Tomohiro IwasakiHiroshi NakatsukaKeiji Onishi
    • Tomohiro IwasakiHiroshi NakatsukaKeiji Onishi
    • H01L41/04H01L41/22H01Q1/50
    • H03H3/04H03H9/02086H03H9/0519H03H9/13H03H9/131H03H9/56H03H9/564H03H2003/0428Y10T29/42
    • A piezoelectric filter of the present invention is provided with first and second piezoelectric vibrators, each having a substrate, a lower load film formed on the substrate, a lower electrode formed on the lower load film, a piezoelectric element formed on the lower electrode, an upper electrode formed on the piezoelectric element and an upper load film formed on the upper electrode, and the piezoelectric filter is configured by electrically connecting the first and second piezoelectric vibrators to each other, and the piezoelectric element of the first piezoelectric vibrator and the piezoelectric element of the second piezoelectric vibrator correspond to respectively different areas of the same piezoelectric element; thus, the resonance frequencies of the first and second piezoelectric vibrators are adjusted by the respective lower load films and upper load films of the first piezoelectric vibrator and the second piezoelectric vibrator so that the resonance frequencies of the first and second piezoelectric vibrators are made different from each other.
    • 本发明的压电滤波器设置有第一和第二压电振动器,每个具有基板,形成在基板上的下载荷膜,形成在下载荷膜上的下电极,形成在下电极上的压电元件, 形成在压电元件上的上电极和形成在上电极上的上载荷膜,并且压电滤波器通过将第一和第二压电振动器彼此电连接而构成,并且第一压电振动器的压电元件和压电元件 的第二压电振子分别对应于同一压电元件的不同区域; 因此,第一和第二压电振动器的谐振频率由第一压电振动器和第二压电振动器的相应的下负载薄膜和上载荷薄膜调节,使得第一和第二压电振动器的谐振频率不同于 彼此。
    • 58. 发明授权
    • Coupled FBAR filter
    • 耦合FBAR滤波器
    • US07408429B2
    • 2008-08-05
    • US11453064
    • 2006-06-15
    • Tomohiro IwasakiHiroshi NakatsukaKeiji OnishiHiroyuki Nakamura
    • Tomohiro IwasakiHiroshi NakatsukaKeiji OnishiHiroyuki Nakamura
    • H03H9/00
    • H03H9/564H03H9/0207
    • A coupled FBAR filter 100 includes first and second input/output vibration portions 110 and 111 respectively including first and second lower electrodes 104 and 106, first and second upper electrodes 105 and 107, and a piezoelectric thin film 103 interposed therebetween; and a cavity 102 for commonly guaranteeing vibrations of the first and second input/output vibration portions 110 and 111 so as to couple the vibrations. The first and second input/output vibration portions 110 and 111 are located adjacently in contact with each other with a step therebetween, such that the first and second lower electrodes 104 and 106 are not electrically connected to each other and such that the first and second upper electrodes 105 and 107 are not electrically connected to each other. Insulators 108 and 109 are provided in the vicinity of the step.
    • 耦合的FBAR滤波器100包括分别包括第一和第二下部电极104和106的第一和第二输入/输出振动部分110和111,第一和第二上部电极105和107以及介于其间的压电薄膜103; 以及用于共同地保证第一和第二输入/输出振动部分110和111的振动以便耦合振动的空腔102。 第一和第二输入/输出振动部分110和111彼此相邻地彼此接触地定位,使得第一和第二下部电极104和106彼此不电连接,并且使得第一和第二输入/输出振动部分110和111 上电极105和107彼此不电连接。 绝缘体108和109设置在台阶附近。