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    • 54. 发明授权
    • Position detection apparatus and aligner comprising same
    • 位置检测装置和包括其的对准器
    • US5859707A
    • 1999-01-12
    • US796320
    • 1997-02-06
    • Masahiro NakagawaAyako SugayaMasashi TanakaKoichiro Komatsu
    • Masahiro NakagawaAyako SugayaMasashi TanakaKoichiro Komatsu
    • G03F9/00G01B11/00
    • G03F9/7065G03F9/7049
    • Position-detection apparatus (alignment sensors) are disclosed for determining the position of an object (e.g., wafer, bearing a position-detection mark) as required in microlithography processes for manufacturing semiconductor devices and displays. The apparatus comprises an irradiation optical system, a condenser optical system, a first photoelectric detector, a fiducial body bearing a fiducial mark, a combining optical system, a second photoelectric detector, and a processor. The position-detection and fiducial marks are illuminated with coherent illumination light from the irradiation optical system. Light diffracted from the marks is condensed by the condenser optical system. The first photoelectric detector receives the condensed diffracted light and produces first electrical signals. The combining optical system receives the diffracted light from the fiducial mark. The second photoelectric detector receives multiple diffracted light beams from the fiducial mark and produces second electrical signals. From the electrical signals, the processor determines the position of the position-detection mark relative to the fiducial mark.
    • 公开了用于在用于制造半导体器件和显示器的微光刻工艺中根据需要确定物体(例如,晶片,承载位置检测标记)的位置的位置检测装置(对准传感器)。 该装置包括照射光学系统,聚光镜系统,第一光电检测器,具有基准标记的基准体,组合光学系统,第二光电检测器和处理器。 位置检测和基准标记被来自照射光学系统的相干照明光照射。 从标记衍射的光被冷凝光学系统冷凝。 第一光电检测器接收冷凝的衍射光并产生第一电信号。 组合光学系统接收来自基准标记的衍射光。 第二光电检测器从基准标记接收多个衍射光束并产生第二电信号。 从电信号,处理器确定位置检测标记相对于基准标记的位置。
    • 58. 发明授权
    • Image forming apparatus
    • 图像形成装置
    • US5408298A
    • 1995-04-18
    • US202362
    • 1994-02-25
    • Toshiyuki FukamiMasashi Tanaka
    • Toshiyuki FukamiMasashi Tanaka
    • G03G5/05G03G5/06G03G13/02G03G15/02G03G21/00
    • G03G5/0517G03G13/02G03G15/0291G03G5/0609
    • The image forming apparatus in this invention uses a positive corona discharger as a main charger. A photosensitive material having a charge accepting ability per run-off current of at least 40 V/.mu.A from a corona discharger (measured by using a discharge length of 230 mm and by taking the peripheral speed of the photosensitive material as 48 mm/sec) is used, and a DC voltage is impressed on the positive corona discharger so that the average ozone concentration of an atmosphere of the photosensitive material 2 ppm or less and the ozone concentration immediately below the corona discharger becomes 5 ppm or less to perform main charging. According to this apparatus, the amount generated of ozone can be decreased, and charging unevenness can be prevented to form a good image.
    • 本发明的图像形成装置使用正电晕放电器作为主充电器。 具有从电晕放电器(通过使用230mm的放电长度测量并通过以感光材料的圆周速度测量为48mm / sec)的每个流过电流为至少40V /μA的电荷接受能力的感光材料 ),并且在正电晕放电器上施加DC电压,使得感光材料的气氛的平均臭氧浓度为2ppm以下,电晕放电器正下方的臭氧浓度为5ppm以下,进行主充电 。 根据该装置,可以减少臭氧产生的量,并且可以防止充电不均匀以形成良好的图像。
    • 59. 发明授权
    • Magnet turn-over mechanism for recording and/or erasing an information
on and from a magneto-optical disk by selectively applying a first and
a second predetermined magnetic fields
    • 用于通过选择性地施加第一和第二预定磁场来记录和/或擦除来自磁光盘的信息的磁铁翻转机构
    • US5072432A
    • 1991-12-10
    • US436413
    • 1989-11-14
    • Masashi Tanaka
    • Masashi Tanaka
    • G11B11/10G11B5/02G11B11/105
    • G11B11/1056
    • A magnet turn-over mechanism for turning a permanent magnet used for applying first and second predetermined magnetic fields selectively to a magneto-optical disk for recording and/or erasing an information on and from the magneto-optical disk comprises support mechanism for supporting the permanent magnet rotatably in a vicinity of the magneto-optical disk such that a first magnetic pole and a second magnetic pole are selectively directed to the magneto-optical disk, driving device for turning the permanent magnet supported by the support mechanism, optical modulation device moved together with the turning of the permanent magnet for producing a modulated optical output indicative of an angular position of the permanent magnet caused by the turning of the permanent magnet by modulating an optical radiation supplied thereto, and optical angular position detection device supplied with the modulated optical output from the optical modulation device for detecting the angular position of the permanent magnet.
    • 用于将用于将第一和第二预定磁场施加到用于在磁 - 光盘上记录和/或擦除信息的磁光盘的永磁体的磁体翻转机构包括用于支撑永磁体的支撑机构 磁体可旋转地旋转,使得第一磁极和第二磁极被选择性地引导到磁光盘,用于转动由支撑机构支撑的永磁体的驱动装置,光调制装置一起移动 随着永久磁铁的转动,用于产生调制的光学输出,该调制的光学输出表示通过调制供给的光辐射而使永磁体的转动引起的永久磁铁的角位置,以及提供有调制的光输出的光学角度位置检测装置 frm用于检测该角度位置的光调制装置 永久磁铁
    • 60. 发明授权
    • Objective lens for microscope of low magnification
    • 物镜用于低倍率显微镜
    • US4592624A
    • 1986-06-03
    • US670928
    • 1984-11-13
    • Kazuo UshidaMasashi TanakaYoshiyuki Shimizu
    • Kazuo UshidaMasashi TanakaYoshiyuki Shimizu
    • G02B21/02G02B9/12
    • G02B21/02
    • An objective lens for microscope of low magnification is of a two-group structure and is composed, in the order from the object side, of a converging front lens group having a meniscus lens component convex toward the object and a converging rear lens group including a positive lens component having a stronger curvature at the image side and a biconvex lens component. The meniscus lens component in the front lens group is composed of a biconvex positive lens and a biconcave negative lens adhered together at an adhered interface convex toward the image side. The lens surface at the object side of the meniscus lens component of the front lens group is convex toward the object side and has a positive refractive power, while the lens surface at the image side of said meniscus lens component is concave toward the image side and has a negative refractive power.
    • 低倍率显微镜用的物镜为两组结构,从物体侧开始,将具有朝向物体凸出的弯月形透镜部件的会聚前透镜组和会聚后透镜组包括 在像侧具有较强曲率的正透镜部件和双凸透镜部件。 前透镜组中的弯月透镜部件由在朝向图像侧凸出的粘接界面处粘合在一起的双凸正透镜和双凹面负透镜构成。 前透镜组的弯月透镜部件的物体侧的透镜表面朝向物体侧是凸的,具有正折光力,而所述弯月透镜部件的像侧的透镜表面朝向像侧凹入, 具有负屈光力。