专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

51. 发明专利

JPH0927278A MAGNETIC FIELD GENERATOR FOR MAGNETRON PLASMA 失效
公开(公告)号：JPH0927278A
公开(公告)日：1997-01-28
申请号：JP17589895
申请日：1995-07-12
申请人： SHINETSU CHEMICAL CO
发明人： MIYATA KOJI
IPC分类号： H05H1/46 , C23F4/00 , H01J23/02
摘要： PROBLEM TO BE SOLVED: To provide a magnetic field generator for a magnetron plasma having a uniform plasma density distribution by arranging a plurality of anisotropic segment columnar magnet in an asymmetrical configuration with respect to the direction of a magnetic field produced within a dipole ring magnet. SOLUTION: Anisotropic segment columnar magnets 50 are arranged, as the dipole ring magnet of a magnetic field generator, in the direction shown by the arrow in the Fig., so that a magnetic field shown by the arrow 53 is produced within the ring. The dipole ring magnet has the columnar magnets 50 arranged in an asymmetric configuration with respect to the X-axis and in a symmetric configuration with respect to the Y-axis so that the strength of the magnetic field is given a gradient in the direction of the Y-axis. In the Fig., the columnar magnets 50 (10, 11, 13, 15, 16) are omitted to show an asymmetrical configuration with respect to the X-axis. Therefore, a plasma that is uniform over a wide range can be produced by use of the magnetic field generator in a magnetron. In use for sputtering, the efficiency of utilizing a target is enhanced; in use for etching, high quality can be achieved.

52. 发明专利

JPH07197252A MAGNETIC FIELD GENERATOR FOR MAGNETRON PLASMA 失效
公开(公告)号：JPH07197252A
公开(公告)日：1995-08-01
申请号：JP35113993
申请日：1993-12-28
申请人： SHINETSU CHEMICAL CO
发明人： MIYATA KOJI
IPC分类号： C23C14/35 , C23F4/00 , H01L21/203 , H01L21/302 , H01L21/3065 , H01L21/31 , H05H1/46
摘要： PURPOSE:To maintain magnetic fields having good uniformity in individual magnetic field generators even if the plural magnetic field generators are brought near to each other by coating the side faces of dipole ring magnets arranged with plural anisotropic segment-shape columnar magnet in a ring form with a magnetic material. CONSTITUTION:The side face of the dipole ring magnet constituted by housing >=8 to

53. 发明专利

JPH06224028A MAGNETIC FIELD GENERATOR 失效
公开(公告)号：JPH06224028A
公开(公告)日：1994-08-12
申请号：JP2981593
申请日：1993-01-26
申请人： SHINETSU CHEMICAL CO
发明人： SUMINO KAZUYOSHI , OHASHI TAKESHI , MIYATA KOJI
IPC分类号： H01F3/10 , H01F7/02 , H01J37/143
摘要： PURPOSE:To provide a magnetic field generator capable of generating high magnetic field using permanent magnets. CONSTITUTION:Within the magnetic field generator, a magnetic circuit 32a composed of a ball piece 20a having a hole in the central part thereof comprising pure iron or FeCo alloy and the permanent magnet 22a, 22c, 22d exceeding four each provided around the ball piece 20a with the magnetizing direction thereof following said ball piece 20a side as well as another magnetic circuit 32b provided with the permanent magnets following the opposite direction to that of the permanent magnets of said magnetic circuit 32a are oppositely arranged.

54. 发明专利

JPH0590021A MAGNETIC-FIELD GENERATION APPARATUS FOR MAGNETIC-LEVITATION 失效
公开(公告)号：JPH0590021A
公开(公告)日：1993-04-09
申请号：JP27673591
申请日：1991-09-27
申请人： SHINETSU CHEMICAL CO
发明人： MIYATA KOJI
IPC分类号： H01F3/10 , H01F7/02 , H01F7/20
摘要： PURPOSE:To make the title apparatus small and lightweight by a method wherein a plurality of permanent magnet pairs are arranged at the inside of one pair of sheets, magnets, which are faced with each other, of the plurality of permanent magnet pairs are arranged so as to be of the same pole and adjacent magnetic poles of the adjacent permanent pairs are arranged so as to be of respectively different poles. CONSTITUTION:A permanent magnet pair 21a-21b and a permanent magnet pair 22a-22b are arranged at the inside of one pair of back sheets 23a, 23b. Magnets of the respective magnet pairs are arranged in such a way that the same poles are faced with each other; adjacent magnetic poles of both adjacent permanent magnet pairs are set to be of respectively different poles. Regarding a flux line between the permanent magnets by this constitution, when the interval between the adjacent permanent magnet pairs is not so large, one part of the flux line coming from the N-pole of the magnet pair 21a-21b enters the S-pole of the adjacent magnet pair 22a-22b and a flux between opposite faces of the magnets is increased. Thereby, since it is possible to generate a large repulsive force by means of small permanent magnets, a small-sized and lightweight magnetic-field generation apparatus for magnetic levitation use can be obtained.

55. 发明专利

JPH0572091A VIBRATION TYPE ACTUATOR 失效
公开(公告)号：JPH0572091A
公开(公告)日：1993-03-23
申请号：JP26287191
申请日：1991-09-13
申请人： SHINETSU CHEMICAL CO , YAZAKI CORP
发明人： MIYATA KOJI
IPC分类号： G01N3/38 , H02K19/10 , H02K37/02
摘要： PURPOSE:To increase the driving torque of a movable element for the same current value by providing a stator with a projection part. CONSTITUTION:Owing to the magnetic fluxes flowing in the side ends 26a and 26b, counter clockwise torques 25a and 25b are generated in a movable element 26, which rotates from an unstable balance position to a stable position. That is, upon the counter clockwise rotation of the movable element 26, the magnetic fluxes passing the side ends 26a and 26b of the movable element 26 (in other wards, torques 25a and 25b) increase acceleratively and reach a stable state eventually. Following the counter clockwise rotation of the movable element 26, the side end 26a of the movable element 26 approaches the projection part 50. Also at the same time, the side end 26b approaches the projection part 50. By this, the driving torques 25a and 25b increase remarkablly. This means that a large driving torque is obtained even with a small current flowing in a coil.

56. 发明专利

JPH04144541A MAGNETIC FIELD GENERATING DEVICE 失效
公开(公告)号：JPH04144541A
公开(公告)日：1992-05-19
申请号：JP26744790
申请日：1990-10-04
申请人： SHINETSU CHEMICAL CO
发明人： MIYATA KOJI
IPC分类号： A61B5/055 , H01F7/02
摘要： PURPOSE:To realize the magnetic field generating device being economical and light in weight by utilizing the advantages of both by using a ferrite magnet which is inexpensive and increases weight of the device for a dipole ring magnet except both ends of the device, and also, using a rare earth magnet which is expensive and can make the device light in weight for the dipole ring magnets of both ends of the device. CONSTITUTION:A rare earth magnet 32 is used for 16 pieces of anisotropic trapezoidal segment magnets for constituting a dipole ring magnet 28 positioned in one end part of a device 36, and a dipole ring magnet 46 placed in the other end part of the device 36 also uses the anisotropic trapezoidal segment magnet consisting of 16 pieces of rare earth magnets. However, the anisotropic trapezoidal segment magnet for constituting dipole ring magnets 40, 42 and 44 of the inside of the device uses a ferrite magnet. In such a way, by utilizing the advantages of both of the ferrite magnet which is inexpensive but low in its magnetic characteristic and increases weight of the device and the rare earth magnet which is expensive but high in its magnetic characteristic and can make the device light in weight, the magnetic field generating device being economical and light in weight is obtained.

57. 发明专利

JP2002173175A PACKAGING OF DIPOLE RING MAGNET AND METHOD FOR REDUCING LEAKAGE MAGNETIC FLUX FROM THE PACKAGING 失效
公开(公告)号：JP2002173175A
公开(公告)日：2002-06-18
申请号：JP2000368859
申请日：2000-12-04
申请人： SHINETSU CHEMICAL CO
发明人： MIYATA KOJI
IPC分类号： B65D77/00 , B65D77/24
摘要： PROBLEM TO BE SOLVED: To reduce a leakage magnetic flux from a dipole ring magnet packaging. SOLUTION: A dipole ring magnet having a plurality of anisotropic segment magnets arranged in a ring-form is packaged and a plate-like magnetic member is arranged at each of the opposing side surfaces of the packaged member and at the same time a permanent magnet is arranged at each of the other opposing side surfaces of the packaged member so as to reduce the leaked magnetic flux from the dipole ring magnet packaging member.

58. 发明专利

JP2000175387A MULTISTAGE, LONG AND MULTIPOLE POLARIZING CYLINDRICAL MAGNET ROTOR AND PERMANENT MAGNET MOTOR 失效
公开(公告)号：JP2000175387A
公开(公告)日：2000-06-23
申请号：JP27884599
申请日：1999-09-30
申请人： SHINETSU CHEMICAL CO
发明人： SATO KOJI , MINOWA TAKEHISA , MIYATA KOJI
IPC分类号： H02K21/14 , H02K1/27 , H02K15/03
摘要： PROBLEM TO BE SOLVED: To prevent the occurrence of torque irregularity by stacking cylindrical magnets manufactured by a vertical magnetic field forming method and oriented in one direction perpendicular to a cylindrical shaft in a multi-stage in an axial direction for formation of a long cylindrical magnet in multipole-polarizing its outer peripheral surface so as to serve as a rotor of a permanent magnet motor. SOLUTION: A cylindrical magnet whose orientation is turned 90 deg. so as to have one-way anisotropy is 6-pole polarized to obtain large magnetic flux density at oriented A and D poles, and the magnetic flux density becomes small at a part in the perpendicular direction to the orientation of B, C, E, and F poles. On the other hand, when the one-way anisotropy cylindrical magnet is sliced, divided into two in a cylindrical- axial direction, turned, stacked in two stages, and polarized, the total amount of magnetic flux increase at the A, D poles and decreases at the B, C, E, and F poles. The cylindrical magnet manufactured by a vertical magnetic field forming method and oriented in one direction perpendicular to the axial direction is axially stacked in two stages and multipole-polarized. It is thus possible to reduce variations in the amount of magnetic field for suppression of torque irregularity.

59. 发明专利

JPH0956692A MAGNET OPPOSITION TYPE PERMANENT MAGNET MAGNETIC CIRCUIT AND METHOD OF REGULATING ITS MAGNETIC FIELD 失效
公开(公告)号：JPH0956692A
公开(公告)日：1997-03-04
申请号：JP21854995
申请日：1995-08-28
申请人： SHINETSU CHEMICAL CO , GE YOKOGAWA MED SYST LTD
发明人： OHASHI TAKESHI , MIYATA KOJI , YONEDA SUKEHITO , INOUE YUJI
IPC分类号： G01R33/3873 , A61B5/055 , H01F7/02
摘要： PROBLEM TO BE SOLVED: To easily realize an uniform magnetic field, and the regulation of magnetic field by fixing a magnetic field regulating magnet or magnetic material to a magnetic shunt plate surface, arranging a shim plate closer to the cavity side from a gradient coil, and fixing a magnetic field regulating magnet or magnetic material onto the shim plate. SOLUTION: A magnetic shunt plate 16 has an annular projection 161 (first shim), and a circumferential stepped part (higher shim), which is not shown, can be particularly formed on a bottom part 162 as occasion demands. A gradient coil 18 and a shim plate 19 are housed in the recessed part of the magnetic shunt plate, and fixed to the magnetic shunt plate 16, respectively. A magnetic field regulating shim materials 20 and 21 are fixed onto the magnetic shunt plate bottom part 162 and the shim plate 19, and shimming regulation is performed on both the magnetic shunt plate and the shim plate. The nonmagnetic shim plate 19 is formed on the gradient coil 18, the shim material 21 is further fixed on (or under) the shim plate, the shim material 20 is fixed to the magnetic shunt plate bottom part 162 on the magnetic shunt plate 16, and the magnetic fine control is performed by shimming regulation.

60. 发明专利

JPH07197255A MAGNETIC FIELD GENERATOR FOR MAGNETRON PLASMA 失效
公开(公告)号：JPH07197255A
公开(公告)日：1995-08-01
申请号：JP35113893
申请日：1993-12-28
申请人： SHINETSU CHEMICAL CO
发明人： MIYATA KOJI
IPC分类号： C23C14/35 , C23F4/00 , H01L21/203 , H01L21/302 , H01L21/3065 , H01L21/31 , H05H1/46
摘要： PURPOSE:To improve the uniformity of a horizontal magnetic field intensity distribution by forming spacings in the central parts in the longitudinal directions of respective anisotropic segment columnar magnets constituting a dipole ring magnet of a magnetic field generator and adjusting these spacings. CONSTITUTION:The dipole magnet is constituted by housing the plural anisotropic segment columnar magnet magnets 50 into a stand 51 consisting of a nonmagnetic material. The magnetization directions of the respective columnar magnets 50 (1 to 16) are arranged like respective arrows to generate magnetic fields in the direction shown by an arrow 53 in the central part in the dipole ring magnet. At this time, the spacings 54 (1 to 16) are formed in the central parts of the respective columnar magnets 50 (1 to 16) and the sizes of these spacings are set at 55 (1, 9)>55 (2, 8, 10, 16)>55(3, 7, 11, 15)>55(4, 6, 12, 14)>55(5, 13) in correspondence to the places where the respective columnar magnets 50 (1 to 16) are arranged. Namely, the spacings of the columnar magnets 50 (1, 9) which exert the most significant effect on the horizontal magnetic field arrow 53 are maximized and are converged in order of the degrees of the influence.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式