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    • 51. 发明授权
    • X-y Infrared CCD sensor and method for making same
    • X-y红外CCD传感器及其制作方法
    • US4390888A
    • 1983-06-28
    • US182472
    • 1980-08-28
    • Lothar RischHermann Mader
    • Lothar RischHermann Mader
    • H04N5/33H01L27/146H01L27/148H01L27/14
    • H01L27/14875H01L27/14649
    • An x-y infrared CCD sensor employing the photoelectric effect as in a p-doped semiconductor substrate of silicon with an n.sup.+ pn diode as the infrared sensor element with a three layer structure in the vertical direction in the semiconductor substrate and a n-channel charge coupled device shift register. The device has a metal-oxide-semiconductor storage electrode directly adjacent to the n-region of the three layer structure. The device is manufactured by masked ion implantation with the doping density for the three layer sequence such that the doping density for the layer operating as the emitter is greater than the doping density for the layer operating as a base, which in turn is greater than the doping density for the layer operating as the collector.
    • 使用光电效应的xy红外CCD传感器,其中n + pn二极管的p掺杂半导体衬底中的红外传感器元件在半导体衬底中具有垂直方向的三层结构,并且n沟道电荷耦合 器件移位寄存器。 该器件具有与三层结构的n区直接相邻的金属氧化物半导体存储电极。 该器件通过掩模离子注入制造,具有三层序列的掺杂密度,使得作为发射极工作的层的掺杂密度大于作为基极操作的层的掺杂密度,其又大于 作为收集器操作的层的掺杂密度。