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    • 51. 发明授权
    • Ferroelectric memory and manufacturing method thereof
    • 铁电存储器
    • US06586793B2
    • 2003-07-01
    • US09984518
    • 2001-10-30
    • Keitaro ImaiKoji Yamakawa
    • Keitaro ImaiKoji Yamakawa
    • H01L2976
    • H01L27/11502H01L27/11507H01L28/55H01L28/91
    • A ferroelectric memory includes first and second plugs respectively connected to one and the other of source/drain regions of the transistor formed on a semiconductor wafer. A first capacitor electrode is connected to the first plug and located at a position above the transistor. The first capacitor electrode includes first and second capacitor faces on the second plug side and a side reverse thereto, respectively. A ferroelectric film is disposed on the first capacitor face. A second capacitor electrode is connected to the second plug and located at a position above the transistor. The second capacitor electrode is disposed on the first capacitor face through the ferroelectric film.
    • 铁电存储器包括分别连接到形成在半导体晶片上的晶体管的源极/漏极区域中的一个和另一个的第一和第二插头。 第一电容器电极连接到第一插头并且位于晶体管上方的位置处。 第一电容器电极包括分别在第二插头侧的第一和第二电容器面和与其相反的一侧。 铁电体膜设置在第一电容器面上。 第二电容器电极连接到第二插头并且位于晶体管上方的位置。 第二电容器电极通过铁电体膜设置在第一电容器面上。
    • 52. 发明授权
    • Method and apparatus for heat treating
    • 热处理方法和装置
    • US5431561A
    • 1995-07-11
    • US166014
    • 1993-12-14
    • Kikuo YamabeKeitaro ImaiKatsuya OkumuraKen NakaoSeikou Ueno
    • Kikuo YamabeKeitaro ImaiKatsuya OkumuraKen NakaoSeikou Ueno
    • H01L21/324C30B31/12C30B31/14H01L21/22H01L21/31H01L21/673H01L21/683F27D5/00
    • C30B31/12C30B31/14
    • A method and an apparatus for heat treating in a heat treating apparatus having a heating chamber to be introduced with predetermined gas, a heater disposed around the heating chamber, and jigs disposed in the heating chamber for supporting wafers of a plurality of substrates to be treated in parallel with each other, wherein in order to make the temperature distribution of the wafers of the substrates to be treated in the radial direction uniform in the heat treatment, the jigs are formed to determine the sizes and the shape thereof in predetermined ranges having a gradient according to the heat treating method having a predetermined shape determining procedure so that the jigs are formed in ring-shaped trays (i.e. support-ring) for holding at the peripheries the substrates to be treated and the thickness of the tray is constant or such that the outer peripheral side thereof is thicker than the inner peripheral side thereof.
    • 一种热处理装置中的热处理方法和装置,其特征在于,具有要加入预定气体的加热室,设置在所述加热室周围的加热器和设置在所述加热室中的夹具,用于支撑待处理的多个基板的晶片 彼此并联,其中为了使热处理中要处理的基板的晶片的温度分布均匀,形成夹具以确定其尺寸和形状,其具有在 根据具有预定形状确定步骤的热处理方法的梯度,使得夹具形成为环状托盘(即,支撑环),用于在周边保持要处理的基板,并且托盘的厚度等于或等于 其外周侧比其内周侧厚。
    • 55. 发明授权
    • Display device comprising a self-luminous light emitter and a barrier body in direct contact with a sealing material
    • 显示装置包括自发光发光器和与密封材料直接接触的阻挡体
    • US08742661B2
    • 2014-06-03
    • US13274486
    • 2011-10-17
    • Keitaro ImaiAya AnzaiYasuko Watanabe
    • Keitaro ImaiAya AnzaiYasuko Watanabe
    • H01L51/50H01L51/52H01L27/32
    • H01L27/3276H01L23/564H01L27/1222H01L27/3258H01L51/0005H01L51/5246H01L2924/0002H01L2924/00
    • It is an object of the present invention to provide a display device preventing the external invasion of water and/or oxygen and preventing the deterioration of a luminous element due to these invading substances and to provide a production method including simple production steps for producing the display device. The invention provides a display device having a sealing material on the rim of an exposed interlayer insulator for preventing the invasion of water and/or oxygen from the interlayer insulator. Further, the invention provides a display device having a barrier body on an exposed interlayer insulator for preventing the invasion of water and/or oxygen from the interlayer insulator. Furthermore, the application of droplet discharge technique in production steps for producing the display device can eliminate a photolithography step such as exposing and developing. Thus, a method of producing a display device having an improved yield is provided.
    • 本发明的目的是提供一种防止水和/或氧的外部侵入并防止由于这些侵入物质引起的发光元件劣化的显示装置,并且提供一种制造方法,其包括用于制造显示器的简单制造步骤 设备。 本发明提供了一种在暴露的层间绝缘体的边缘上具有密封材料的显示装置,用于防止来自层间绝缘体的水和/或氧的侵入。 此外,本发明提供一种在暴露的层间绝缘体上具有阻挡体的显示装置,用于防止水和/或氧从层间绝缘体的侵入。 此外,在生产显示装置的制造步骤中应用液滴放电技术可以消除诸如曝光和显影的光刻步骤。 因此,提供了一种生产具有提高的产量的显示装置的方法。
    • 59. 发明申请
    • Display Device and Method for Manufacturing the Same
    • 显示装置及其制造方法
    • US20120032178A1
    • 2012-02-09
    • US13274486
    • 2011-10-17
    • Keitaro ImaiAya AnzaiYasuko Watanabe
    • Keitaro ImaiAya AnzaiYasuko Watanabe
    • H01L27/15
    • H01L27/3276H01L23/564H01L27/1222H01L27/3258H01L51/0005H01L51/5246H01L2924/0002H01L2924/00
    • It is an object of the present invention to provide a display device preventing the external invasion of water and/or oxygen and preventing the deterioration of a luminous element due to these invading substances and to provide a production method including simple production steps for producing the display device. The invention provides a display device having a sealing material on the rim of an exposed interlayer insulator for preventing the invasion of water and/or oxygen from the interlayer insulator. Further, the invention provides a display device having a barrier body on an exposed interlayer insulator for preventing the invasion of water and/or oxygen from the interlayer insulator. Furthermore, the application of droplet discharge technique in production steps for producing the display device can eliminate a photolithography step such as exposing and developing. Thus, a method of producing a display device having an improved yield is provided.
    • 本发明的目的是提供一种防止水和/或氧的外部侵入并防止由于这些侵入物质引起的发光元件劣化的显示装置,并且提供一种制造方法,其包括用于制造显示器的简单制造步骤 设备。 本发明提供了一种在暴露的层间绝缘体的边缘上具有密封材料的显示装置,用于防止来自层间绝缘体的水和/或氧的侵入。 此外,本发明提供一种在暴露的层间绝缘体上具有阻挡体的显示装置,用于防止水和/或氧从层间绝缘体的侵入。 此外,在生产显示装置的制造步骤中应用液滴放电技术可以消除诸如曝光和显影的光刻步骤。 因此,提供了一种生产具有提高的产量的显示装置的方法。