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51. 发明授权

US06769855B2 Substrate processing apparatus and substrate processing method 失效
标题翻译：基板加工装置及基板处理方法
公开(公告)号：US06769855B2
公开(公告)日：2004-08-03
申请号：US10032528
申请日：2001-12-27
申请人： Masayuki Yokomori , Osamu Kuroda
发明人： Masayuki Yokomori , Osamu Kuroda
IPC分类号： B65G6500
CPC分类号： H01L21/67781 , G06F9/4493 , Y10S414/138
摘要： A substrate processing apparatus (1) includes a wafer loading/unloading and arraying part (14) to remove substrates W from a container (C) where a plurality of unprocessed substrates W to be processed are accommodated at regular intervals, substrate arraying part (51a, 51b, 60) for arranging the substrates W having been removed from two containers (C) at the loading/unloading and arraying part (14) at pitches half the pitch to arrange the substrates in the container (C), a processing part (4) for applying a designated process on the substrates (W), a transfer mechanism (17) for transporting the substrates (W) arranged by the substrate array part (51a, 51b, 60) to the processing part (4) and a stand-by part (75) to allow the substrates arranged by the substrate array parts to stand in readiness temporarily.
摘要翻译：衬底处理装置（1）包括晶片装载/排出部分（14），用于从要容纳多个待处理的多个未处理衬底W的容器（C）移除衬底W，所述衬底W以规则的间隔被容纳，衬底排列部分（51a ，51b，60），用于将已经从加载/卸载和排列部分（14）两个容器（C）移除的基板W以间距的一半排列，以将基板布置在容器（C）中，处理部分 4），用于在基板（W）上施加指定的处理;传送机构（17），用于将由基板阵列部分（51a，51b，60）布置的基板（W）传送到处理部分（4） - 通过部分（75），以允许由衬底阵列部分布置的衬底临时立即准备就绪。

52. 发明授权

US06368040B1 Apparatus for and method of transporting substrates to be processed 失效
公开(公告)号：US06368040B1
公开(公告)日：2002-04-09
申请号：US09251100
申请日：1999-02-16
申请人： Katuki Yamasaki , Osamu Kuroda , Kazuyuki Honda , Hiroshi Yamahata
发明人： Katuki Yamasaki , Osamu Kuroda , Kazuyuki Honda , Hiroshi Yamahata
IPC分类号： B65H100
CPC分类号： H01L21/67781 , Y10S414/136 , Y10S414/137
摘要： A substrate transporting apparatus includes a wafer transfer arm 10 for carrying a plurality of semiconductor wafers W being processed horizontally, a pitch changer 20 for carrying the wafers W at predetermined intervals vertically and a posture changing device 30 positioned between the wafer transfer arm 10 and the pitch changer 20, for changing the posture of the wafers W to the horizontal and vertical arrangements. The pitch changer 20 includes a first holding part 21A and a second holding part 21B which are adapted so as to elevate relatively to each other. The wafers W are held by either one of the holding parts 21A, 21B at the predetermined intervals. The posture changing device 30 has a pair of holders 31 between which the semiconductor wafers W is interposed. The holders 31 are respectively provided, on their sides opposing each other, with a plurality of holding grooves 32A, 32B for retaining the wafers W independently. With the arrangement, the whole apparatus can be small-sized to improve throughput and yield of products.

53. 发明授权

US5774250A Optical condenser system for light scanning apparatus 失效
标题翻译：光学扫描仪用光电聚光系统
公开(公告)号：US5774250A
公开(公告)日：1998-06-30
申请号：US839156
申请日：1997-04-23
申请人： Katsumi Shimada , Osamu Kuroda
发明人： Katsumi Shimada , Osamu Kuroda
IPC分类号： G02B26/10 , G02B13/00 , G02B13/18 , G02B26/12 , G02B26/08
CPC分类号： G02B26/125
摘要： An optical condenser system for a light scanning apparatus includes a first lens which is a single lens formed of plastic and a second lens which is a plano-convex lens formed of glass and convex toward the scanning surface. The first lens is concave toward a deflector of the light scanning apparatus and each side of the first lens is an aspheric surface defined by the following formula (6). The first and second lens satisfying the following formulae (1) to (5) 0.1f.ltoreq.d.sub.0 .ltoreq.0.3f (1) 0.02f.ltoreq.d.sub.2 .ltoreq.0.2f (2) -1.0.times.10.sup.2 /f.sup.3 .ltoreq.a.sub.1 .ltoreq.-1.0/f.sup.3( 3) 5.0.times.10/f.sup.5 .ltoreq.a.sub.2 .ltoreq.5.0.times.10.sup.3 /f.sup.5( 4) -0.3/f.ltoreq.1/f.sub.1 .ltoreq.0.3f (5) z=ch.sup.2 /�1+{1-(1+K)c.sup.2 h.sup.2}.sup.1/2 !+a.sub.1 h.sup.4 +a.sub.2 h.sup.6 +a.sub.3 h.sup.8 +a.sub.4 h.sup.10 ( 6) wherein f represents the focal length (mm) of the whole system, d.sub.0 represents the axial surface separation (mm) between the deflecting point at the deflector and the first lens, d.sub.2 represents the axial surface separation (mm) between the first lens and the second lens and f.sub.1 represents the focal length (mm) of the first lens.
摘要翻译：一种用于光扫描装置的光学聚光器系统包括：第一透镜，其是由塑料形成的单个透镜，第二透镜是由玻璃形成并且朝向扫描表面凸出的平凸透镜。第一透镜对于光扫描装置的偏转器是凹形的，并且第一透镜的每一侧是由下式（6）限定的非球面。满足以下公式（1）至（5）的第一和第二透镜0.1f

54. 发明授权

US5737018A Exposure apparatus and method for vibration control system 失效
标题翻译：振动控制系统的曝光装置和方法
公开(公告)号：US5737018A
公开(公告)日：1998-04-07
申请号：US442204
申请日：1995-05-16
申请人： Shuji Shimizu , Osamu Kuroda , Yasutaka Ito , Yoshikazu Takahashi
发明人： Shuji Shimizu , Osamu Kuroda , Yasutaka Ito , Yoshikazu Takahashi
IPC分类号： H04N5/232 , H04N5/235 , H04N5/238
CPC分类号： H04N5/2327 , H04N5/23248 , H04N5/23258 , H04N5/23274 , H04N5/2352
摘要： An exposure device controls the exposure of an image in a video camera using a vibration control system. The gain of an iris, which receives the image, the gain of an AGC amplifier, which amplifies the sensed image and the gain of an electronic shutter, which controls the speed at which images are sensed; are controlled by driving the iris in a first range indicative of an object illuminance when a hand vibration correcting operation is performed, driving the AGC amplifier in a second range indicative of the object illuminance, and driving the shutter in a third range indicative of the object illuminance.
摘要翻译：曝光装置使用振动控制系统控制摄像机中的图像的曝光。接收图像的虹膜的增益AGC放大器的增益，其放大感测图像和电子快门的增益，其控制图像被感测的速度; 通过在执行手部振动校正操作的情况下在指示对象照度的第一范围内驱动虹膜来控制虹膜，在指示对象照度的第二范围内驱动AGC放大器，并且在指示对象的第三范围内驱动快门照度。

55. 发明授权

US5473374A Exposing apparatus for performing exposure control corresponding to the luminance level of an object 失效
标题翻译：用于执行与物体的亮度水平相对应的曝光控制的曝光装置
公开(公告)号：US5473374A
公开(公告)日：1995-12-05
申请号：US260381
申请日：1994-06-14
申请人： Shuji Shimizu , Osamu Kuroda , Yasutaka Ito , Yoshikazu Takahashi
发明人： Shuji Shimizu , Osamu Kuroda , Yasutaka Ito , Yoshikazu Takahashi
IPC分类号： H04N5/232 , H04N5/235 , H04N5/238
CPC分类号： H04N5/2327 , H04N5/23248 , H04N5/23258 , H04N5/23274 , H04N5/2352
摘要： An exposing apparatus comprises: a lens group to fetch a light from an object; an iris to adjust a light amount from the lens group; an image pickup device to convert the light which passed through the iris into the electric signal; a detecting circuit to detect a luminance signal level from an output signal from the image pickup device; a reference level signal setting circuit to set an exposure control reference value to control the iris; an exposure control reference value modulating circuit to modulate the exposure control reference value when the iris is controlled; and a control circuit to set the exposure control reference value in correspondence to the luminance signal level when an output level of the detecting circuit is larger than a set value.
摘要翻译：曝光装置包括：用于从物体取出光的透镜组; 调整透镜组的光量的虹膜; 将通过虹膜的光转换成电信号的图像拾取装置; 检测电路，用于根据来自图像拾取装置的输出信号检测亮度信号电平; 基准电平信号设定电路，设定曝光控制基准值以控制所述光圈; 曝光控制基准值调制电路，用于当所述光圈被控制时调制所述曝光控制基准值; 以及控制电路，用于当检测电路的输出电平大于设定值时，根据亮度信号电平设定曝光控制基准值。

56. 发明授权

US4351715A Apparatus for high temperature electrodialysis 失效
标题翻译：高温电渗透仪
公开(公告)号：US4351715A
公开(公告)日：1982-09-28
申请号：US239578
申请日：1981-03-02
申请人： Harumi Matsuzaki , Osamu Kuroda , Isao Okouchi , Kenkichi Izumi , Sankichi Takahashi
发明人： Harumi Matsuzaki , Osamu Kuroda , Isao Okouchi , Kenkichi Izumi , Sankichi Takahashi
IPC分类号： B01D61/48 , B01D57/02 , B01D61/44 , B01D61/50 , B01D61/52 , B01D61/54 , B01D65/02 , C02F1/46 , C02F1/469 , B01D13/02
CPC分类号： B01D61/44 , C02F1/469 , B01D2311/10 , B01D2311/2661 , C02F1/4604 , C02F1/4693 , C02F2201/46115 , Y02W10/37
摘要： In electrodialysis of desalting or concentrating an electrolyte solution in desalting chambers and concentrating chambers constituted by alternately juxtaposing a plurality of anion and cation exchange membranes between at least a pair of electrodes by supplying the electrolyte solution into the desalting and concentrating chambers while introducing a gas in a bubble state into the electrolyte solution between the ion exchange membranes, the electrolyte solution is made to contact the gas in the bubble state while providing a temperature difference between the gas and the electrolyte solution. The scale deposition onto the ion exchange membranes is prevented with an increase in electrodialysis efficiency.
摘要翻译：在通过将脱盐室中的电解质溶液进行脱盐或浓缩，或者在通过将电解质溶液引入脱盐浓缩室中而将至少一对电极交替地并置到多个阴离子和阳离子交换膜中而形成的脱盐室和浓缩室中的同时，气泡状态进入离子交换膜之间的电解质溶液中，使电解质溶液以气泡状态接触气体，同时提供气体和电解质溶液之间的温度差。随着电渗析效率的提高，防止了离子交换膜上的垢沉积。

57. 发明授权

US4085194A Waste flue gas desulfurizing method 失效
标题翻译：废烟气脱硫方法
公开(公告)号：US4085194A
公开(公告)日：1978-04-18
申请号：US355272
申请日：1973-04-27
申请人： Kouji Otani , Toshio Sawa , Osamu Kuroda , Fumito Nakajima , Tokuji Iijima, deceased
发明人： Kouji Otani , Toshio Sawa , Osamu Kuroda , Fumito Nakajima , Tokuji Iijima, deceased
IPC分类号： B01D53/50 , B01D53/77 , C01F11/46 , C02F5/00 , C02F5/08 , C23F14/02 , C01B17/00
CPC分类号： B01D53/507
摘要： A waste flue gas desulfurizing method in which a waste flue gas containing sulfurous acid gas is contacted directly with sea-water, whereby the sulfurous acid gas is absorbed in the sea-water and concurrently sulfites are formed in the sea-water by the reaction between the sulfurous acid ions and metal ions present in the sea-water, and then the carbonic acid component contained in the sea-water which is then in the acidic region is released therefrom by a decarbonation operation to restore the pH value of the sea-water in the neutral region, and thereafter oxygen contained in air or from other source is introduced into the sulfite-containing sea-water to convert said sulfites into sulfates.
摘要翻译：一种废气烟气脱硫方法，其中含有亚硫酸气体的废烟气直接与海水接触，由此亚硫酸气体在海水中被吸收，同时通过海水中的反应在海水中形成亚硫酸盐存在于海水中的亚硫酸离子和金属离子，然后通过脱碳操作将包含在随后在酸性区域中的海水中的碳酸组分从其中释放出来，以恢复海水的pH值然后将空气或其他来源中所含的氧气引入到含亚硫酸盐的海水中，以将所述亚硫酸盐转化为硫酸盐。

58. 发明申请

US20110311340A1 SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM STORING SUBSTRATE PROCESSING PROGRAM 有权
标题翻译：基板处理设备，基板处理方法和存储介质存储基板处理程序
公开(公告)号：US20110311340A1
公开(公告)日：2011-12-22
申请号：US13159519
申请日：2011-06-14
申请人： Akira Murata , Issei Ueda , Osamu Kuroda , Kouji Kimoto , Masahiro Yoshida
发明人： Akira Murata , Issei Ueda , Osamu Kuroda , Kouji Kimoto , Masahiro Yoshida
IPC分类号： H01L21/677
CPC分类号： H01L21/67742 , H01L21/67178 , H01L21/67754
摘要： A substrate processing apparatus includes a substrate transit table configured to mount thereon a plurality of substrates; a substrate processing chamber configured to process the substrate one by one; a substrate transfer device capable of loading the substrate into the substrate processing chamber from the substrate transit table and unloading the substrate from the substrate processing chamber to the substrate transit table; and N number of (N is an integer equal to or larger than 3) substrate holding devices provided at the substrate transfer device and configured to hold the substrates one by one. Here, a multiplicity of (2 to N−1 number of) substrates are concurrently held by 2 to N−1 number of substrate holding devices among the N number of substrate holding devices and one substrate is loaded into the substrate processing chamber.
摘要翻译：基板处理装置包括：基板转移台，其被配置为在其上安装多个基板; 衬底处理室，被配置为逐个处理衬底; 基板转印装置，其能够从基板运送台将基板加载到基板处理室中，并将基板从基板处理室卸载到基板运送台; 和N个（N是等于或大于3的整数）的基板保持装置，其设置在基板输送装置上并且被配置为逐个保持基板。这里，在N个基板保持装置中，通过2〜N-1个基板保持装置同时保持多个（2〜N-1个）基板，一个基板被装入基板处理室。

59. 发明申请

US20110034768A1 ENDOSCOPE HAVING OPTICAL FIBERS 审中-公开
标题翻译：内窥镜具有光纤
公开(公告)号：US20110034768A1
公开(公告)日：2011-02-10
申请号：US12876900
申请日：2010-09-07
申请人： Takao Ozaki , Osamu Kuroda , Takayuki Nakamura , Takayuki Iida
发明人： Takao Ozaki , Osamu Kuroda , Takayuki Nakamura , Takayuki Iida
IPC分类号： A61B1/04
CPC分类号： G02B23/26 , A61B1/00096 , A61B1/00165 , A61B1/00167 , G02B23/2469 , G02B26/103 , H04N5/2259 , H04N5/23232 , H04N5/349 , H04N2005/2255
摘要： An endoscope for imaging of an object in a body cavity by receiving image light on an image sensor is provided. In an elongated tube for entry in the body cavity, an objective lens system is incorporated for receiving the image light from the object. A fiber optic image guide includes plural bundled optical fibers and a distal tip, is inserted in the elongated tube, for transmitting the image light focused on the distal tip by the objective lens system. A piezoelectric actuator is positioned on the distal tip, for displacing the distal tip periodically. The image sensor detects the image light from the fiber optic image guide for plural times in synchronism with the displacement for forming a synthesized image. An anchoring device anchors the elongated tube partially on a wall of the body cavity, to stabilize the elongated tube relative to the image light.
摘要翻译：提供了一种用于通过在图像传感器上接收图像光来对体腔内的物体进行成像的内窥镜。在用于进入体腔的细长管中，并入物镜系统以接收来自物体的图像光。光纤图像引导件包括多个捆扎的光纤和远端，并插入细长管中，用于透过物镜系统传输聚焦在远端上的图像光。压电致动器定位在远侧末端上，用于周期性地移动远端。图像传感器与用于形成合成图像的位移同步地检测来自光纤图像引导件的图像光多次。锚固装置将细长管部分地锚定在体腔的壁上，以使细长管相对于图像光稳定。

60. 发明申请

US20100292538A1 ENDOSCOPE 审中-公开
公开(公告)号：US20100292538A1
公开(公告)日：2010-11-18
申请号：US12777571
申请日：2010-05-11
申请人： Hidetoshi HIRATA , Tsuyoshi Ashida , Takayuki Nakamura , Osamu Kuroda , Yasunori Ohta , Kazuyoshi Hara , Kazumi Koike , Takuji Tada , Shinichi Yamakawa
发明人： Hidetoshi HIRATA , Tsuyoshi Ashida , Takayuki Nakamura , Osamu Kuroda , Yasunori Ohta , Kazuyoshi Hara , Kazumi Koike , Takuji Tada , Shinichi Yamakawa
IPC分类号： A61B1/00
CPC分类号： A61B1/00071 , A61B1/0008 , A61B1/05 , A61B1/051 , A61B1/0669 , A61B1/128 , G02B23/2461 , G02B23/2476
摘要： A front end rigid portion constitutes a front end of an endoscope insertion unit in an endoscope. The front end rigid portion is provided with an illumination optical system irradiating an observation target area with illumination light and an imaging optical system having an imaging element imaging the observation target area. The endoscope includes a heat emission member which is connected to the front end rigid portion and extends in the longitudinal direction of the endoscope insertion unit. The heat emission member is formed by mixing fiber-piece-shaped fillers with a resin material.
摘要翻译：前端刚性部构成内窥镜中的内窥镜插入单元的前端。前端刚性部分设有照明光学系统，用照明光照射观察目标区域，以及成像光学系统，其具有对观察目标区域成像的成像元件。内窥镜包括与前端刚性部连接并沿内窥镜插入单元的长度方向延伸的散热构件。散热构件通过将纤维片状填料与树脂材料混合而形成。

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