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    • 54. 发明授权
    • Touch panel device
    • 触摸屏设备
    • US07324096B2
    • 2008-01-29
    • US10277963
    • 2002-10-23
    • Fumihiko NakazawaSatoshi SanoYoshio SatohTakashi Matsuda
    • Fumihiko NakazawaSatoshi SanoYoshio SatohTakashi Matsuda
    • G06F3/041G06F3/043H01L27/20H01L41/00H02N2/00
    • G06F3/0436
    • A plurality of excitation elements, each including an IDT and a piezoelectric film, for exciting, respectively, surface acoustic waves, each having a unique center frequency, are formed on one end of a non-piezoelectric substrate, a plurality of receiving elements, each including an IDT and a piezoelectric film, for receiving, respectively, surface acoustic waves, each having a unique center frequency, are formed on the other end of the non-piezoelectric substrate to face the excitation elements, respectively, the center frequencies of the IDTs of the facing excitation element and receiving element are equal, the center frequencies of the IDTs of the excitation elements next to each other are different, and surface acoustic waves are propagated across the non-piezoelectric substrate, between the facing excitation elements and receiving elements so as to detect the position of an object in contact with the non-piezoelectric substrate, based on received results in the receiving elements.
    • 在非压电基板的一端形成有多个分别包括IDT和压电膜的激励元件,分别用于激励分别具有唯一中心频率的表面声波,多个接收元件 分别在非压电基片的另一端分别形成分别具有独特中心频率的声表面波的IDT和压电薄膜,以分别面对激励元件,IDT的中心频率 面对的激励元件和接收元件相等时,彼此相邻的激励元件的IDT的中心频率不同,并且表面声波在非压电基板之间,在相对的激励元件和接收元件之间传播,所以 以便基于接收元件中的接收结果检测与非压电基片接触的物体的位置。
    • 57. 发明授权
    • Acoustic wave filter
    • 声波滤波器
    • US09231553B2
    • 2016-01-05
    • US13344274
    • 2012-01-05
    • Kazunori InoueTakashi MatsudaMichio Miura
    • Kazunori InoueTakashi MatsudaMichio Miura
    • H03H9/02H03H9/72H03H9/64
    • H03H9/02992H03H9/02952H03H9/6483H03H9/725
    • A configuration that reduces a parasitic capacitance between wires is achieved at a low cost. Disclosed is an acoustic wave filter provided with a piezoelectric substrate, resonators that include a comb-shaped electrode formed on the piezoelectric substrate, a wiring portion that is connected to the comb-shaped electrode, and a dielectric layer formed to cover the comb-shaped electrode. The wiring portion is provided with a lower layer wiring portion that is disposed in the same layer as the comb-shaped electrode and an upper layer wiring portion that is disposed on the lower layer wiring portion. The upper layer wiring portion includes a region that has a wider electrode width than the electrode width of the lower layer wiring portion.
    • 以低成本实现降低电线之间的寄生电容的结构。 公开了一种设置有压电基板的声波滤波器,包括形成在压电基板上的梳状电极的谐振器,连接到梳状电极的布线部分和形成为覆盖梳状电极的电介质层 电极。 布线部分设置有与梳状电极相同的层中的下层布线部分和布置在下层布线部分上的上层布线部分。 上层布线部分包括具有比下层布线部分的电极宽度更宽的电极宽度的区域。
    • 59. 发明授权
    • Solid-state image sensor and image sensing apparatus
    • 固态图像传感器和图像传感装置
    • US08582009B2
    • 2013-11-12
    • US12882276
    • 2010-09-15
    • Shoji KonoNobuhiro TakedaYuichiro YamashitaTakashi Matsuda
    • Shoji KonoNobuhiro TakedaYuichiro YamashitaTakashi Matsuda
    • H04N3/14
    • H04N5/347H01L27/14609H01L27/14621H01L27/14641H01L27/14643H04N5/343H04N5/37457
    • In a solid-state image sensor, first and second column readout lines are provided to each pixel column, pixel rows are divided into pixel rows of first and second groups, the first group is divided into subgroups each formed from pixels of an identical color, the second group is divided into subgroups each formed from pixels of an identical color, signals from pixels of the pixel rows of the first group are output to the first column readout lines, and signals from pixels of the pixel rows of the second group are output to the second column readout lines. Pixels of an identical subgroup in an identical pixel column share a conversion region and an amplification element, a given conversion region and another conversion region included in a pixel column identical to a pixel column of the given conversion region do not intersect with each other.
    • 在固态图像传感器中,向每个像素列提供第一列读出线和第二列读出线,将像素行分成第一组和第二组的像素行,将第一组划分为各自由相同颜色的像素形成的子组, 第二组被分成各自由相同颜色的像素形成的子组,将来自第一组的像素行的像素的信号输出到第一列读出线,并且输出来自第二组的像素行的像素的信号 到第二列读数线。 相同像素列中的相同子组的像素共享转换区域和放大元件,给定转换区域和包括在与给定转换区域的像素列相同的像素列中的另一转换区域彼此不相交。
    • 60. 发明授权
    • Pattern formation method
    • 图案形成方法
    • US08445184B2
    • 2013-05-21
    • US13010355
    • 2011-01-20
    • Takashi Matsuda
    • Takashi Matsuda
    • G03F7/26
    • H01L21/76816G03F7/0035G03F7/40H01L21/0273H01L21/31144
    • A first resist film is irradiated with first exposure light and performing first development, thereby forming a first pattern in a first region including an interconnect trench pattern and forming a dummy pattern in a second region connected to the first region and having a pattern density lower than that of the interconnect trench pattern. Then, the first resist film is hardened, and a second resist film is formed on the hardened first resist film. After that, the second resist film is irradiated with second exposure light and performing second development, thereby forming a second pattern in the first region. When forming the second pattern, an opening made of the first pattern and the second pattern and including the interconnect trench pattern is formed in the first region, whereas in the second region, an opening in the first dummy pattern is filled with the second resist film.
    • 用第一曝光光照射第一抗蚀剂膜并进行第一显影,从而在包括互连沟槽图案的第一区域中形成第一图案,并在连接到第一区域的第二区域中形成虚设图案,并且图案密度低于 互连沟槽图案。 然后,第一抗蚀剂膜硬化,并且在硬化的第一抗蚀剂膜上形成第二抗蚀剂膜。 之后,用第二曝光光照射第二抗蚀剂膜,进行第二显影,从而在第一区域形成第二图案。 当形成第二图案时,在第一区域中形成由第一图案和第二图案形成并且包括互连沟槽图案的开口,而在第二区域中,第一伪图案中的开口填充有第二抗蚀剂膜 。