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51. 发明授权

US4560907A Ion source 失效
标题翻译：离子源
公开(公告)号：US4560907A
公开(公告)日：1985-12-24
申请号：US505721
申请日：1983-06-20
申请人： Hifumi Tamura , Hiroshi Okano , Tohru Ishitani , Akira Shimase
发明人： Hifumi Tamura , Hiroshi Okano , Tohru Ishitani , Akira Shimase
IPC分类号： H01J37/08 , B01J19/08 , H01J3/04 , H01J27/26 , H01J49/16 , H01J7/24 , H05B31/26
CPC分类号： H01J27/26
摘要： An ion source apparatus of surface ionization type comprises an emitter tip in the form of a round rod having a sharp-pointed end, an ion source material holder for holding the emitter tip coaxially within a crucible made of a material of a high melting point, the crucible having an opening formed in a bottom wall thereof through which the sharp-pointed end of the emitter tip extends outwardly, the ion source material is being filled in the crucible so as to enclose the outer periphery of the sharp-pointed end of the emitter tip, a filament for emitting electrons with which the emitter tip is bombarded from below, a heating power supply for the filament, an ion beam extracting electrode disposed between the emitter tip and the filament and maintained at a potential of a substantially the level as that of the filament, and an accelerating voltage power supply for applying a high voltage between the ion beam extracting electrode and the emitter tip to accelerate the electrons and ion beam.
摘要翻译：表面电离型的离子源装置包括具有尖锐端的圆棒形式的发射极尖端，用于将发射极尖端同轴地保持在由高熔点材料制成的坩埚内的离子源材料保持器，所述坩埚具有形成在其底壁中的开口，所述发射极尖端的尖锐尖端通过所述开口向外延伸，所述离子源材料被填充在所述坩埚中，以便包围所述坩埚的所述尖端的外周发射极尖端，用于发射发射极尖端从下方被轰击的电子的灯丝，用于灯丝的加热电源，设置在发射极尖端和灯丝之间的离子束提取电极，并保持在基本上等级的电位以及用于在离子束提取电极和发射极尖端之间施加高电压的加速电压电源，以加速电子和离子束 m。

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